A fully automatic sample multi-process production system and method for ultra-high vacuum

Abstract

The invention relates to the technical field of multi-procedure processing and detection under an ultrahigh vacuum condition, in particular to a full-automatic multi-procedure production system or samples under the ultrahigh vacuum condition. The full-automatic multi-procedure production system comprises a sample vehicle traveling channel, a magnetic coupling transmission system, a transportation trolley assembly, a support, a vacuum pumping system and a control system, wherein the sample vehicle travelling channel is arranged on the support; the vacuum pumping system is connected with the sample vehicle travelling channel and used for vacuumizing the sample vehicle travelling channel; the transportation trolley assembly driving on a track is arranged in the sample vehicle travelling channel; the magnetic coupling transmission system is arranged outside the sample vehicle travelling channel, and is in point connection with the control system; under the control of the control system, magnetic coupling of the magnetic coupling system and the transportation trolley assembly is realized, and the magnetic coupling system drives the transportation trolley assembly to move forward. According to the full-automatic multi-procedure production system disclosed by the invention, by adopting a magnetic coupling transmission technology, the influence from a special ultrahigh vacuum working condition environment, space limit and the other factors is considered, and stable and reliable transportation of the samples is realized.

Description

technical field [0001] The invention relates to the technical field of multi-process processing and detection of samples under ultra-high vacuum, in particular to a fully automatic multi-process production system for samples under ultra-high vacuum. Background technique [0002] "Vacuum" refers to the state of gas in a designated space that is lower than the ambient atmospheric pressure, that is, the number density of gas molecules in this space is lower than that of the atmospheric pressure in this area. Different vacuum states mean that the space has different molecular density. The advantage brought by this is that the influence of the gas in the air will be eliminated when the processes or detection processes such as coating, heat treatment, cleaning and fine detection are carried out in such a space, and even the participation of only the gas required by the experimenter can be added according to the wishes of the experimenter. reaction process. [0003] However, most...

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Problems solved by technology

However, in this process, the sample has been in contact with the air, and the impact caused by it cannot be estimated. In severe cases, it may even cause sample contamination.

Moreover, the process of vacuuming is extremely time-consuming, and repeated pumping will seriously affect work efficiency.

[0004] At present, no domestic manufacturer has developed fully automatic vacuum interconnection equipment, and there are many companies developing vacuum interconnection systems abroad, such as SPECS and CREATEC in Germany.

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