Electrode suspension type capacitive pressure sensor adopting assembled fixed electrode

Abstract

The invention relates to an electrode suspension type capacitive pressure sensor adopting an assembled fixed electrode. The electrode suspension type capacitive pressure sensor adopting the assembledfixed electrode comprises a fixed electrode single-end suspension structure and a movable electrode single-end suspension structure which are oppositely welded by using a thin-wall cutting edge, wherein the fixed electrode single-end suspension structure adopts an assembled fixed electrode structure and comprises a fixed electrode assembled suspension shell, a fixed electrode insulator supported in the fixed electrode assembled suspension shell, an elastic locator, and end cover welded on the top of the fixed electrode assembled suspension shell, a three-wave compression spring arranged between the end cover and the fixed electrode insulator and a glass insulator welded on the end cover, the fixed electrode assembled suspension shell, the end cover and the three-wave compression spring aremade of a constant elasticity alloy with the thermal expansion coefficient being the same as or matched with that of the fixed electrode insulator, and the surfaces of the fixed electrode assembled suspension shell, the end cover and the three-wave compression spring are gold-plated. The electrode suspension type capacitive pressure sensor adopting the assembled fixed electrode fundamentally solve the problems of low production efficiency and high production cost of the existing electrode single-end suspension type capacitive pressure sensors, the measurement result is hardly influenced by the temperature, the measurement accuracy of the sensor is ensured, and the stability is good.

Description

technical field [0001] The invention relates to a capacitive pressure sensor adopting an assembled fixed electrode, in particular to an electrode-suspended capacitive pressure sensor adopting an assembled fixed electrode, which is suitable for measuring the micro pressure and micro absolute pressure of a gas medium, especially suitable for a certain corrosive gas. Background technique [0002] For the current technology representative of the capacitive absolute pressure sensor (vacuum gauge), the vacuum gauge of the American MKS company in the world monopoly position, because the fixed electrode insulator is selected to contain Al 2 o 3 95% of the 95 ceramics are made, the structure of the movable electrode and the clamping welding solid support movable electrode, and the structural parts such as the outer casing with the fixed electrode insulator are all made of corrosion-resistant constants with a thermal expansion coefficient that is more than twice that of the 95 cerami...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a simple-structured and reliable electrode-suspended capacitive pressure sensor using an assembled fixed electrode, fundamentally solving the problems of low production efficiency and production cost in the existing capacitive pressure sensor with single-end suspended electrodes. At the same time, the measurement results are minimally affected by temperature, which ensures the measurement accuracy of the sensor and good stability

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