Automatic circular wafer rewinding machine

Abstract

The invention provides an automatic circular wafer rewinding machine. The automatic circular wafer rewinding machine comprises a rack, a first processing chamber and a second processing chamber. The first processing chamber and the second processing chamber are oppositely isolated, and a rewinding portion is arranged in the middle of the rack. The rewinding portion includes a first rewinding mechanism and a second rewinding mechanism, the first rewinding mechanism is disposed in the first processing chamber, and the second rewinding mechanism is disposed in the second processing chamber. The automatic circular wafer rewinding machine solves the defects of manual operation of basket rewinding with the same pitch and the same specification and avoids the problem of the metal pollution generated by the wafer basket of a cleaning area and the wafer basket of a metal area, allows the wafer baskets of the cleaning area and the metal area to be completely isolated, avoids metal pollution of the wafer baskets of the cleaning area and achieves stable and efficient production.

Description

technical field [0001] The invention belongs to the technical field of silicon wafer production machinery, in particular to an automatic circular silicon wafer rewinding machine. Background technique [0002] With the rapid development of the semiconductor industry, the production capacity of semiconductor silicon wafers is expanding day by day, and an automatic equipment is needed to realize the rewinding of circular silicon wafers between the same kind of wafer baskets. During the production of silicon wafers, a variety of work areas are involved, which are roughly divided into clean areas (such as clean areas such as class 10,000, class 1,000, etc.), gray areas, and metal areas. Due to the different degrees of cleanliness, tooling and film baskets cannot be used across regions during use. For example, a basket in a clean area can only be used in a clean area, and a basket in a metal area can only be used in a metal area. Therefore, in actual production engineering, the ...

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