High-precision linear motor primary alignment platform

Abstract

The invention discloses a high-precision linear motor one-time alignment platform, which comprises a platform, a platform base, a plurality of linear motor driving assemblies, a plurality of electromagnets, a plurality of limiting switches and a plurality of feedback measurement systems, wherein various linear motor driving assemblies, various electromagnets, various limiting switches and variousfeedback measurement systems are arranged on the platform base in the X-axis direction and the Y-axis direction respectively, the platform is arranged on each linear motor driving assembly, the linearmotor driving assembly is provided with a long sliding rail, two long sliding rail sliding blocks, a driving bearing seat, a linear motor rotor, a linear motor stator, a short sliding rail, a short sliding rail sliding block, a loading disc base and a loading disc, and the long sliding rail, the long sliding rail sliding blocks, the short sliding rail and the short sliding rail sliding block arearranged in a vertical angle overlapping mode through the driving bearing sea.

Description

technical field [0001] The invention provides a high-precision linear motor one-time alignment platform, especially a precision alignment platform, which has the advantages of convenient assembly, low cost and high precision, and can complete the one-time alignment function of workpieces, which can save the man-hours of alignment operations. Background technique [0002] With the orientation of today's industry, in recent years, with the high precision of machine tools, various industrial machinery and measuring instruments, no matter in precision machinery, semiconductor industry, micro-nano technology, it is developing towards miniaturization and precision. In addition, ultra-precision processing machines, semiconductor manufacturing equipment, electronic information equipment, and atomic force microscopes all require high-precision alignment technology and instruments to assist, making semiconductor technology enter the nanoscale field and become the current mainstream. o...

AI Technical Summary

Problems solved by technology

[0003] According to the above, it can be known that at present, most of the short-stroke alignment platforms are driven by servo motors and ball screws, and most of them use rigid structures to construct the platform, so that the platform alignment produces small errors, and then cooperates with feedback. Measuring the structure to carry out the platform alignment operation, but the displacement stroke alignment cannot reach the micron (μm) level, and the X-axis and Y-axis of the platform need to be aligned multiple times to complete the precise alignment of the work object and elongate The time for alignment operation is shortened, which increases the production cost. Therefore, how to achieve short-stroke actuation and nanometer-level precision alignment at the same time, so as to complete the alignment of the workpiece at one time and save the man-hour of alignment operation, is actually a major bottleneck problem. and needs to be improved

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