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Optical apparatus using reflection geometry

A technology of reflective optics and optical devices, applied in optics, optical components, measuring devices, etc., can solve the problems of increased manufacturing cost, increased size, and extended optical path, and achieve the effects of weight reduction, simple structure, and reduced optical path

Pending Publication Date: 2020-08-04
SAMSUNG ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, with regard to the use of dichroic mirrors, the size of the system is increased, the optical path is extended, and the manufacturing cost is increased

Method used

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  • Optical apparatus using reflection geometry
  • Optical apparatus using reflection geometry
  • Optical apparatus using reflection geometry

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Embodiment Construction

[0055] Referring now in detail to the example embodiments, examples of which are illustrated in the drawings, wherein like reference numerals refer to like elements throughout. In this regard, example embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the example embodiments are merely described below, by referring to the figures, to explain aspects of the present disclosure. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one of," when preceding a list of elements modify the entire list of elements and do not modify the individual elements of the list.

[0056] Hereinafter, an optical device using reflective geometry (reflective optical device) according to example embodiments is described in detail with reference to the accompanying drawings. In the drawings, the widths and thicknesses of layers a...

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Abstract

Provided is an optical apparatus using reflection geometry. The optical apparatus includes a lens element disposed to face an object to be measured, a light source generating an incident beam that passes through the lens element to be incident on the object, and a photodetector receiving light that is scattered by the object. The incident beam is obliquely incident on the object off an optical center axis of the lens element, without passing through the optical center axis. The scattered light is transmitted to the photodetector by passing through the optical center axis of the focusing lens element and a region there around.

Description

[0001] Cross References to Related Applications [0002] This application is based on and claims priority from Korean Patent Application No. 10-2019-0011306 filed in the Korean Intellectual Property Office on January 29, 2019, the disclosure of which is incorporated herein by reference in its entirety. technical field [0003] Devices according to the present disclosure relate to optical devices using reflective geometry. Background technique [0004] Most reflection collection optics according to the prior art use dichroic mirrors. The incident light is irradiated perpendicularly to the sample by being reflected at 45° from the dichroic mirror, and the light reflected from the sample is transmitted through the dichroic mirror. However, since the dichroic mirrors are generally arranged in an inclined manner of 45°, a space for arrangement is required and an optical path is lengthened. In addition, when incident light irradiated perpendicularly to the sample is reflected, m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/47
CPCG01N21/474G02B21/084G02B19/0085G02B3/10G02B21/362G02B21/10G02B21/16G01N21/47G02B7/027G02B27/14G01N2021/4711G01J3/0208G01J3/0218G01J3/0229G01J3/10G02B3/06G01J2003/102G01J2003/1213
Inventor 金震恩安浩荣金彦庭
Owner SAMSUNG ELECTRONICS CO LTD