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In-tool ESD events monitoring method and apparatus

An event, device technology for ESD event monitoring in tools and devices to address issues such as limited performance, difficulty in ESD detector calibration, etc.

Pending Publication Date: 2021-02-05
ILLINOIS TOOL WORKS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] A current problem with conventional technology is the difficulty in calibrating ESD detectors
This difficulty is due to, for example, the challenge of providing reproducibility of the discharge event itself
There are additional difficulties due to the conditions imposed on the radiated electric field waveform by the material and construction of the processing point itself
Therefore, current technology is limited in its performance and suffers from at least the constraints and drawbacks described above

Method used

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  • In-tool ESD events monitoring method and apparatus
  • In-tool ESD events monitoring method and apparatus
  • In-tool ESD events monitoring method and apparatus

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Embodiment Construction

[0030] In the description herein, numerous details are provided, such as examples of components, materials, portions, structures and / or methods, to provide a thorough understanding of embodiments of the invention. One skilled in the relevant art will recognize, however, that embodiments of the invention may be practiced without one or more of the details described, or may be practiced with other devices, systems, methods, components, materials, portions, structures, and the like. In other instances, well-known components, materials, parts, structures, methods, or operations have not been shown or described in detail to avoid obscuring aspects of the embodiments of the invention. In addition, the drawings are representative in nature and their shapes are not intended to show the precise shape or precise dimensions of any components and are not intended to limit the scope of the invention.

[0031] Those skilled in the art will understand that when a member or part in the drawin...

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Abstract

The invention discloses an in-tool ESD events monitoring method and apparatus. In one embodiment of the invention, an apparatus for electrostatic discharges (ESD) events monitoring incorporating a charged device model event simulator (CDMES) unit comprises: at least one antenna positioned in a process area; an ESD detector coupled to said at least one antenna; said ESD detector wirelessly coupledto said CDMES unit; and said ESD detector calibrated for different discharge energies generated by said CDMES unit.

Description

[0001] This application is a divisional application of an invention patent application with an application date of December 27, 2013, an international application number of PCT / US2013 / 078038, a national application number of 201380073763.2, and an invention title of "ESD event monitoring method and equipment in tools". . [0002] Cross References to Related Applications [0003] This application claims the benefit of and priority to U.S. Provisional Application No. 61 / 747,199. technical field [0004] Embodiments of the present invention generally relate to a method and apparatus for monitoring and characterizing electrostatic discharge (ESD) events in tools, and / or to a CDMES / MiniPulse apparatus and method, and / or other Types of charged device model events simulators (CDMES), detectors and methods. At least one method and apparatus disclosed herein provides real-time ESD event monitoring in, for example, integrated circuits (ICs) production tools and / or different processes,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/00
CPCG01R31/001G01R31/002G01R35/005
Inventor 莱尔·D.·尼尔森史蒂文·B.·海曼马克·E.·霍塞特
Owner ILLINOIS TOOL WORKS INC
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