Piezoelectric actuation linear moving platform and working method thereof
A linear motion, piezoelectric actuation technology, applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problem of poor real-time platform, linear motion positioning accuracy or speed Low problems, to achieve the effect of simple mechanism, high precision and good controllability
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[0034] Below in conjunction with accompanying drawing, technical scheme of the present invention is described in further detail:
[0035] This invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, components are exaggerated for clarity.
[0036] Such as figure 1 As shown, the present invention discloses a piezoelectric actuated linear moving platform, which includes a piezoelectric vibrator, a working substrate, first to second baffles, first to second springs, and first to fourth positioning bolts.
[0037] Such as figure 2 As shown, the piezoelectric vibrator includes a metal base and first to fourth piezoelectric ceramic sheets.
[0038] Such as image 3 As shown, the metal base is in the shape of a rhombus, inc...
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