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MEMS (Micro Electro Mechanical System) MIC (Microphone) with air blowing protection

A technology of blowing protection and blowing protection, which is applied in the field of MEMSMIC, can solve the problems of damaged diaphragm and large impact on products, and achieve the effect of improving service life and sound-to-electricity conversion efficiency

Inactive Publication Date: 2021-03-05
山东新港电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Existing conventional MEMS MIC sound holes are on the PCB and the shell. Excessive air flow from the outside can easily enter the interior through the sound hole and damage the diaphragm, which has a great impact on the product. At this stage, it is a common problem and problem in the same industry, and it has been difficult to overcome.

Method used

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  • MEMS (Micro Electro Mechanical System) MIC (Microphone) with air blowing protection
  • MEMS (Micro Electro Mechanical System) MIC (Microphone) with air blowing protection
  • MEMS (Micro Electro Mechanical System) MIC (Microphone) with air blowing protection

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Embodiment 1: A kind of MEMS MIC with air blowing protection, comprises MEMS housing 1, is characterized in that: described MEMS housing 1 lower end is connected with PCB board 2, forms sound cavity between described PCB board 2 and MEMS housing 1, A MEMS sound pressure sensor 6 is installed in the sound cavity, and the MEMS sound pressure sensor 6 is fixedly connected to the PCB board 2, and the PCB board 2 is a multilayer structure PCB board, and the PCB board 2 is provided with a sound inlet hole Assembly 3, the sound inlet assembly 3 includes a first sound inlet 31 and a second sound inlet 33, the PCB board 2 is etched with a branch sound channel 32, the first sound inlet 31 and the second sound inlet 33 are communicated with each other through a branch sound channel 32, the PCB board 2 is provided with an elastic sound-damping sheet 4, the elastic sound-damping sheet 4 is set opposite to the second sound inlet hole 33, and a section of the elastic sound-damping shee...

Embodiment 2

[0032] Embodiment 2: The first sound inlet hole 31 does not penetrate the PCB board 2 , and the first sound inlet hole 31 communicates with the sound cavity and the branch sound channel 32 . The first sound inlet hole 31 is arranged opposite to the MEMS sound pressure sensor 6 , and the supporting sleeve 63 of the MEMS sound pressure sensor 6 is arranged at the same position as the first sound inlet hole 31 .

[0033] The second sound inlet hole 33 runs through the PCB board 2, the second sound inlet hole 33 communicates with the sound cavity and the outside, the side end of the second sound inlet hole 33 communicates with the branch sound channel 32, and the branch sound channel 32 communicates After the first sound inlet hole 31 continues to extend forward for a certain distance, when blowing air inward during use, most of the gas will pass through the second sound inlet hole 33 .

[0034] When in use, the sound will be transmitted to the first sound inlet hole 31 through th...

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PUM

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Abstract

The invention provides an MEMS MIC with blowing protection, which comprises an MEMS shell, and is characterized in that the lower end of the MEMS shell is connected with a PCB, the PCB is provided with a sound inlet hole assembly, a sound cavity is formed between the PCB and the MEMS shell, an MEMS sound pressure sensor is connected with the PCB in the sound cavity, the sound inlet hole assembly comprises a first sound inlet hole, wherein a branch sound channel is formed in one side of the first sound inlet hole, a second sound inlet hole is formed in the branch sound channel, an elastic soundblocking piece is connected to the PCB, and any side edge of the elastic sound blocking piece is connected with the PCB in an attached mode. By adding the elastic sound blocking sheet, irregular windis shunted, foreign matters are blocked, and damage of wind power and the foreign matters to a chip is reduced, so that a protection effect is achieved, the service life of a product is greatly prolonged, the cashier performance is not limited by an external environment any more, the cashier performance is completely released, and the acoustoelectric conversion efficiency is improved.

Description

technical field [0001] The invention relates to the field of sound-to-electric conversion, in particular to a MEMS MIC with gas blowing protection. Background technique [0002] MEMS MIC is a MIC manufactured based on MEMS technology. It is composed of MEMS sound pressure sensor chip, ASIC chip, front and rear sound chambers and RF suppression circuit. The MEMS sound pressure sensor is a micro capacitor composed of silicon diaphragm and silicon back plate. , and then the ASIC chip converts the capacitance change into an electrical signal to realize "acoustic-electrical" conversion. Simply put, the capacitor is integrated on the micro-silicon crystal and manufactured using a surface-mount process, which can withstand high reflow soldering temperature and is easy Integrated with CMOS technology and other audio circuits. [0003] Existing conventional MEMS MIC sound holes are on the PCB and the casing. Excessive air flow from the outside can easily enter the interior through t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/04H04R19/00
CPCH04R19/005H04R19/04H04R2201/003
Inventor 陶继方刘志永朱法超
Owner 山东新港电子科技有限公司