Transfer tool and transfer method
A transfer method and tool technology, applied in the direction of semiconductor devices, electrical components, conveyor objects, etc., can solve the problems of increasing process cost and time, lack of selectivity, etc.
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[0078] refer to Figure 1A and Figure 1B , Figure 1A shows a top view of a transfer tool according to an embodiment of the invention, Figure 1B show Figure 1A The transfer tool shown is a cross-section along the line AA'. exist Figure 1A and Figure 1B In the example, the transfer tool 100 includes a substrate 101 , an array of active heating elements 102 and a pickup 103 . The active heating element array 102 includes a plurality of heating units 102H, and these heating units 102H are arranged in an array on the substrate 101, and each heating unit 102H includes a driving circuit and a heating element (not shown in the figure) connected to the driving circuit. Figure 1A and Figure 1B ). The pickup 103 is disposed on the active heating element array 102 and includes a pickup surface 103S. Such as Figure 1B As shown, different regions of the pick-up surface 103S correspond to different heating units 102H, so that different regions of the pick-up surface 103S can ha...
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