Capacitive differential pressure sensor shape stabilizing structure

Abstract

The invention discloses a capacitance type differential pressure sensor shape stabilizing structure, which comprises two first membrane seats, a membrane is clamped between the two first membrane seats, the edges of the two first membrane seats are in butt welding connection to fix the membrane, a sealed induction cavity is formed between each first membrane seat and the membrane, each induction cavity is connected with a pressure guide pipe, and the pressure guide pipe is connected with a pressure sensor. Each pressure guiding pipe penetrates out of the corresponding first membrane base in a sealed mode, a pressure stabilizing block is arranged outside each first membrane base and fixedly connected with the outer side edge of the corresponding first membrane base in a sealed mode so that a pressure stabilizing cavity can be defined, and the pressure stabilizing cavity and the sensing cavity located on the same side of the membrane are located on the two sides of the corresponding first membrane base respectively. And the pressure stabilizing cavity is communicated with the sensing cavity or the pressure guiding pipe on the same side. The beneficial effects of the invention are that: for each first film seat, because the pressure of the liquid in the pressure stabilizing cavities and the pressure of the liquid in the induction cavity at the two sides of the first film seat are consistent all the time, outward deformation of the first film seat in a high-pressure state can be inhibited, thereby improving the measurement precision.

Description

technical field [0001] The invention relates to a pressure measuring device, in particular to a shape-stabilizing structure of a capacitive differential pressure sensor. Background technique [0002] Pressure transmitters are widely used in fluid pressure and flow measurement devices. The core detection element of a type of pressure transmitter is a diaphragm differential pressure sensor. The diaphragm differential pressure sensor converts two pressure signals at different positions of the fluid into changes in the capacitance signal, and then the detection circuit at the back end processes the change in the capacitance signal to obtain the differential pressure value of the applied pressure. [0003] The diaphragm differential pressure sensor includes two disc-shaped diaphragm seats, a measuring diaphragm is arranged between the two diaphragm seats, and the two diaphragm seats are connected by butt welding to clamp the measuring diaphragm. Between the measuring diaphragm ...

AI Technical Summary

Problems solved by technology

[0004] When measuring high-pressure fluid, the pressure in the sensing chamber increases significantly. Although the diaphragm seat is made of rigid material, the two diaphragm seats will expand and deform outward under high pressure. This small amount of deformation will also affect the deformation of the measuring diaphragm. Interference, resulting in reduced measurement accuracy

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