Information recording/reproducing device
a recording/recording device and information technology, applied in data recording, track finding/aligning, instruments, etc., can solve the problems of increasing processing costs by a reduction of the minimum width, inability to sufficiently reserve tracking accuracy, and nand-type flash memory and small-size hdds reaching the limit of recording density
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(1) MEMS Memory
[0048]There will be described about the MEMS memory to which an example of the present invention can be applied.
[0049]FIG. 1 shows an outline of the MEMS memory.
[0050]A recording medium 12 is arranged on an XY scanner 11. A probe array is arranged while facing the recording medium.
[0051]The probe array has a semiconductor substrate 13 and a plurality of probes (head) 14 arranged in an array shape at one surface side of the semiconductor substrate 13. Each of the plurality of probes 14, for instance, is comprised a cantilever, and driven by multiplex drivers 15, 16.
[0052]Although the plurality of probes 14 are operable individually by using a micro actuator in the semiconductor substrate 13, there will be described an example in which all of the probes in a batch perform an access to data area of the recording medium with the same operation.
[0053]Firstly, all of the probes 14 are caused to perform reciprocating operation with a fixed period in X direction ...
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(3) Experiment Example
[0092]FIG. 6 shows an information recording / reproducing device according to an example of the present invention.
[0093]The pitch of the probe array, when supposing that all the probes 14 are aligned with a fixed pitch in the X direction, is set to about 10 μm. At this time, the recording medium 12 performs reciprocating motion in the X direction with a frequency of about 1 kHz, and an amplitude of about 10 μm.
[0094]In the data area, the resistance (data) of the recording bits 26 is read by the probe 14, and at the same time, in the servo burst area, the servo burst signal is read by the probe 14, and position correction of the probe 14 in the Y direction is executed.
[0095]The recording medium 12 is formed by the following manufacturing method.
[0096]As the substrate 21, for instance, a silicon substrate with a vertical size of about 100 mm, a lateral size of about 100 mm, and a thickness of about 1 mm is used.
[0097]The electrode layer 22 made of platinum (Pt) wit...
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