Operating temperature self-adjusting system of high repetition frequency industrial excimer laser

An excimer laser, working temperature technology, used in lasers, phonon exciters, laser parts and other directions, can solve the problem of output characteristics changing with working temperature, and achieve the effect of reducing equipment damage and improving laser output power

CN103078240AInactive Publication Date: 2013-05-01ANHUI INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2013-05-01
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an operating temperature self-adjusting system of a high repetition frequency industrial excimer laser. A temperature self-adjusting system which consists of a circulating water pump, a condenser, a temperature sensor, a temperature self-adjusting circuit, control software, a database which includes laser working states and parameters and the like is additionally arranged in an excimer laser system. The temperature self-adjusting system is used to control the operating temperature of the laser according to the laser operating parameters and states when the laser works, and accordingly, the inner temperature of a laser cavity body is controlled within the optimum energy scope so as to obtain the optimum output energy.
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Description

technical field

[0001] The invention relates to the technical field of excimer laser operating temperature control, in particular to a high repetition frequency industrial excimer laser operating temperature self-regulating system. Background technique

[0002] Excimer lasers have the characteristics of short wavelength, high energy, and good beam uniformity, and are widely used in industry, scientific research, and medicine.

[0003] The excimer laser achieves laser output by transferring the energy stored in the high-voltage discharge capacitor to the main discharge electrode in the laser cavity to generate instantaneous discharge excitation to the laser medium gas in the laser cavity. This process is bound to be accompanied by energy conversion. Part of the energy transferred by the capacitor to the laser cavity is converted into heat energy and remains in the laser cavity during the gas discharge process, resulting in an increase in the temperature in the cavity. Espec...

Examples

Embodiment Construction

[0020] Such as figure 1 shown. A high repetition frequency industrial excimer laser working temperature self-regulation system, including a laser discharge cavity 1, a pair of discharge electrodes 14, a cooling water pipe 4, and a temperature sensor 7 are arranged in the laser discharge cavity 1, and a capacitor is connected between the two discharge electrodes 14 2, and the capacitor 2 is connected to the external charging power supply 3 through wires, the cooling water pipe 4 is connected to a circulating water pump 5 and a condenser 6 through the pipeline to form a circulating cooling water circuit, and also includes a temperature self-regulating circuit 8, a temperature sensor 7, a circulating The water pump 5 and the condenser 6 are respectively connected to a temperature self-regulating circuit 8 .

[0021] Such as figure 2 shown. The temperature self-regulating circuit 8 is composed of an analysis and comparison circuit 12 , a signal sampling circuit 11 connected to...