Multi-chip multi-matching tiled sandwiched core package structure with partial framework exposed and process method of structure
A technology of flat sandwich and packaging structure, which is applied in semiconductor/solid-state device parts, electrical components, electric solid-state devices, etc. It can solve the problems of high equipment purchase cost, inability to form one piece, low manufacturing efficiency, etc., and achieve equipment saving The effect of purchase, reduction of interconnection process, and improvement of production efficiency
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Publication Date
- 2016-06-01
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to a partially frame-exposed multi-chip multi-lapping sandwich packaging structure and a process method thereof, belonging to the technical field of semiconductor packaging. Background technique
[0002] In recent years, with the continuous pursuit of power density in electronic products, whether it is Diode (secondary tube) or Transistor (transistor) packaging, especially the MOS products in Transistor are moving towards higher power, smaller size, faster , The trend of better heat dissipation is developing. The one-time manufacturing method of packaging is also gradually sprinting and challenging from single-chip packaging technology to high-density, high-difficulty and low-cost one-time packaging technology in small areas or even larger areas.
[0003] Therefore, the packaging of MOS products has been improved in terms of various electrical properties such as parasitic resistance, capacitance, and inductance, packaging structu...
Examples
Embodiment Construction
[0060] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.
[0061] As shown in Fig. 6(a) to Fig. 6(h), in this embodiment, a process method in which part of the frame is exposed, multi-chips and multi-layer tiled sandwich packaging structure, the specific process steps are as follows:
[0062] Step 1, see Figure 6(a), provide the first lead frame, the material of the first lead frame is alloy copper material, pure copper material, aluminum copper plated material, zinc plated copper material, nickel-iron alloy material, or other CTE The range is 8*10^-6 / ℃~25*10^-6 / ℃ conductive material;
[0063] Step 2. Referring to Figure 6(b), apply solder paste on the base island area of the first lead frame by screen printing. The purpose is to realize the bonding with the base island after the first chip is implanted. Thickness and opening area can precisely control the thickness, area and position of solder pas...