Laser large working distance auto-collimation device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a combination zeroing laser large working distance auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be expanded while working distance remains the same or working distance is increased while the auto-collimation working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the laser large working distance auto-collimation device is enabled to be simple in structure and low in manufacture cost; measurement operation can be conducted even in unstable measurement environments, and a technical advantage of rapid measurement can be gained.

Description

technical field

[0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and in particular relates to a laser large working distance self-collimation device and method. Background technique

[0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

[0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution f...

Examples

specific Embodiment 1

[0077] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0078] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0079] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beamsplitter 61 and an image sensor 65 arranged at the focal p...

specific Embodiment 2

[0083] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0084] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 7 shown. On the basis of the specific embodiment 1, the laser large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0085] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

[0086] The wavefront compensation system ...

specific Embodiment 3

[0088] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0089] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, the laser large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0090] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

[0091] The wavefront compensat...

technical field

[0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and in particular relates to a laser large working distance self-collimation device and method. Background technique

[0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

[0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution f...

Examples

specific Embodiment 1

[0077] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0078] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0079] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beamsplitter 61 and an image sensor 65 arranged at the focal p...

specific Embodiment 2

[0083] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0084] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 7 shown. On the basis of the specific embodiment 1, the laser large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0085] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

[0086] The wavefront compensation system ...

specific Embodiment 3

[0088] This embodiment is an embodiment of a laser autocollimation device with a large working distance.

[0089] The laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, the laser large working distance autocollimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0090] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

[0091] The wavefront compensat...

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