Integrated vacuum generator and method of use
By using a vacuum pressure gauge to control the vacuum pilot valve and destroy the pilot valve in the vacuum generator, the problem of air leakage during object adsorption is solved, and the gas source saving and precise adjustment of pressure in the vacuum cavity are achieved.
Patent Information
- Application Number
- CN201910201139.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-03-15
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2039-03-15
AI Technical Summary
Existing integrated vacuum generators cannot avoid air leakage when objects are adsorbed, resulting in continuous supply of air to prevent objects from falling, resulting in waste of air flow.
Use a vacuum pressure gauge with energy-saving function to control the on-off of the vacuum pilot valve and destroy the pilot valve. Compare the pressure in the vacuum chamber with the preset pressure range according to the pressure in the vacuum chamber to ensure that the pressure in the vacuum chamber is within the set range and prevent objects from falling. and reduce gas source consumption.
It effectively prevents the adsorbed objects from falling, greatly reduces the consumption of positive pressure air, realizes the multi-functional integration of the vacuum generator, and accurately adjusts the pressure in the vacuum cavity through a closed-loop feedback system.
Smart Images

Figure CN111692138B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a vacuum component, and in particular to an integrated vacuum generator and a use method thereof. Background Art
[0002] A vacuum generator is a new, efficient, clean, economical, and small vacuum component that uses a positive pressure gas source to generate negative pressure. This makes it very easy and convenient to obtain negative pressure in places where compressed air is available, or in places where positive and negative pressures are required at the same time in a pneumatic system. Vacuum generators are widely used in the fields of machinery, electronics, packaging, printing, plastics, and robots in industrial automation. The traditional use of vacuum generators is to cooperate with suction cups to adsorb and transport various materials, especially for adsorbing fragile, soft, thin non-ferrous, non-metallic materials or spherical objects. In this type of application, a common feature is that the vacuum flow rate is not high and multiple functions are complete, with a sensitive, efficient, and accurate working method.
[0003] The invention patent with publication number CN103016424B discloses an integrated vacuum generator, including an air supply device, a control device and a vacuum generating device, wherein the control device is arranged in a main airway between the vacuum generating device and the air supply device, and the control device is used to control the on / off of the main airway. The vacuum generator also includes a vacuum breaking device and an exhaust chamber, wherein the vacuum breaking device is connected to the main airway through a vacuum breaking airway, and the exhaust chamber is connected to the vacuum generating device; the vacuum generating device includes an air supply chamber, a nozzle, and at least two vacuum generating chambers, wherein the air supply chamber is connected to the main airway, and at least two vacuum generating chambers are arranged side by side and are connected to each other; the vacuum generating chamber close to one side of the air supply chamber is connected to the air supply chamber through a nozzle, and the vacuum generating chamber close to one side of the exhaust chamber is connected to the exhaust chamber through a nozzle. The exhaust chambers are connected; the vacuum generating chambers are connected to one end of a vacuum chamber through a one-way valve, and a vacuum port is provided at the other end of the vacuum chamber; wherein the air supply port of the main airway, the vacuum port, and the exhaust port of the exhaust chamber are sequentially arranged on one side of the vacuum generator; the control device comprises a control panel, a control valve, an air supply switch and a destruction switch, the control valve comprises a destruction solenoid valve and an air supply solenoid valve, the air supply switch and the destruction switch are respectively connected to the main airway through the first branch airway and the second branch airway, the air supply solenoid valve and the destruction solenoid valve are respectively correspondingly arranged on the first branch airway and the second branch airway, and respectively control the on / off of the first branch airway and the second branch airway, and the air supply solenoid valve and the destruction solenoid valve respectively control the on / off of the air supply switch and the destruction switch by controlling the on / off of the first branch airway and the second branch airway. This patent arranges an air supply switch and a destruction switch on the main airway to control the disconnection / connection of the main airway and the disconnection / connection of the vacuum destruction airway, and the air supply switch and the destruction switch are connected to the main airway through the first sub-airway and the second sub-airway respectively, and the first sub-airway and the second sub-airway are controlled to be disconnected / connected by the air supply solenoid valve and the destruction solenoid valve respectively. A throttling device is also provided on the vacuum destruction airway, and the air flow in the vacuum destruction airway is controlled by adjusting the throttling device, so as to adjust the speed of vacuum destruction.
[0004] However, the above-mentioned invention patent still has the following problem in the integrated vacuum generator: when the object is adsorbed, although a one-way valve is provided, air leakage cannot be avoided, and air needs to be supplied continuously to prevent the object from falling, thus wasting a large amount of airflow. Summary of the invention
[0005] In view of the defects in the prior art, an object of the present invention is to provide an integrated vacuum generator.
[0006] The integrated vacuum generator provided by the present invention comprises an air supply device, a vacuum generating device and a control device; the control device comprises a vacuum pressure gauge, a vacuum pilot valve, a destroying pilot valve, a valve core and a valve body; the vacuum generating device comprises a built-in vacuum generating tube and a vacuum chamber;
[0007] The valve body is provided with a valve core cavity and a valve inner passage; the valve core is arranged in the valve core cavity; the air supply device is connected with the valve core cavity; the valve core cavity is connected with the vacuum pilot valve and the destruction pilot valve through the valve inner passage;
[0008] When the vacuum pressure gauge measures the pressure in the vacuum chamber to be lower than the lower limit of the preset pressure range, the vacuum pilot valve is in an on state, and the channel in the valve is connected to the built-in vacuum generating tube through the vacuum pilot valve; when the vacuum pressure gauge measures the pressure in the vacuum chamber to be higher than the upper limit of the preset pressure range, the vacuum pilot valve is in an off state, and the channel in the valve is connected to the vacuum chamber of the vacuum generating device through the destruction pilot valve.
[0009] Preferably, the control device comprises a first main valve core, a second main valve core and a spring;
[0010] The valve core cavity is provided with a first valve core cavity, a second valve core cavity and a spring cavity which are connected in sequence; the first main valve core is located in the first valve core cavity, the second main valve core is located in the second valve core cavity, the spring is located in the spring cavity, and the spring is arranged between the first main valve core and the second main valve core; the first main valve core divides the first valve core cavity into a first valve core cavity A, a first valve core cavity B and a first valve core cavity C; the second main valve core divides the second valve core cavity into a second valve core cavity A, a second valve core cavity B and a second valve core cavity C, and the first valve core cavity C and the second valve core cavity C are connected through the spring cavity;
[0011] The air supply device is connected to the first valve core chamber C and the second valve core chamber C; the first valve core chamber C and the first valve core chamber A141 are connected to the valve internal channel.
[0012] Preferably, the valve inner passage comprises a first control air passage, a second control air passage, a first air inlet passage and a second air inlet passage;
[0013] The first valve core chamber A is connected to the vacuum pilot valve through the first control air channel, and the second valve core chamber A is connected to the destruction pilot valve through the second control air channel; the vacuum pilot valve is connected to the first valve core chamber C and / or the second valve core chamber C through the first air inlet channel, and the destruction pilot valve is connected to the first valve core chamber C and / or the second valve core chamber C through the second air inlet channel.
[0014] Preferably, the air supply device comprises an air inlet, an air supply channel, a first air supply channel and a second air supply channel;
[0015] The air supply channel is connected to the first valve core chamber C through the first air supply channel; the air supply channel is connected to the second valve core chamber C through the second air supply channel.
[0016] Preferably, the vacuum generating device further comprises a vacuum air supply channel and a one-way valve;
[0017] The built-in vacuum generating tube has at least one positive pressure air inlet and at least one vacuum interface; the positive pressure air inlet is connected to the first valve core cavity B through a vacuum air supply channel, and the vacuum interface is connected to the vacuum cavity through a one-way valve.
[0018] Preferably, the vacuum chamber is provided with a vacuum port; a filter is provided at the opening of the vacuum port.
[0019] Preferably, the control device further comprises a destruction regulating valve, and the destruction regulating valve is used to adjust the airflow size in the second air intake passage.
[0020] Preferably, the vacuum chamber is connected to the second valve core chamber B through a vacuum breaking airway.
[0021] Preferably, the exhaust port of the built-in vacuum generating tube is provided with a muffler.
[0022] The method for using the integrated vacuum generator provided by the present invention comprises the following steps:
[0023] Step S1: measuring the pressure of the vacuum chamber by the vacuum pressure gauge;
[0024] Step S2: when the pressure in the vacuum chamber is measured to be lower than the lower limit of the preset pressure range, controlling the vacuum pilot valve to be turned on;
[0025] Step S3: When the pressure in the vacuum chamber is measured to be higher than the lower limit of the preset pressure range, the vacuum pilot valve is controlled to be disconnected.
[0026] Compared with the prior art, the present invention has the following beneficial effects:
[0027] 1. In the present invention, the pressure of the vacuum pilot valve is measured by a vacuum pressure gauge with an energy-saving function, and the vacuum pilot valve is switched between the on and off states after comparing the pressure value with the preset pressure range, so that the pressure in the vacuum chamber is maintained within the set range, preventing the adsorbed object from falling, and greatly reducing the consumption of positive pressure air;
[0028] 2. The present invention integrates the vacuum pilot valve, the destruction pilot valve, the destruction regulating valve, the filter and the muffler into one, and can realize multiple functions of the vacuum generator;
[0029] 3. In the present invention, a closed-loop feedback system is formed between the vacuum pressure gauge, the vacuum pilot valve and the destruction pilot valve to accurately adjust the pressure in the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS
[0030] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:
[0031] Figure 1 It is a schematic diagram of the structure of the integrated vacuum generator in the present invention.
[0032] In the figure:
[0033] 1 is a vacuum pressure gauge; 2 is a vacuum pilot valve; 3 is a destruction pilot valve; 4 is a first main valve core; 5 is a second main valve core; 6 is a spring; 7 is a first control air channel; 8 is a second control air channel; 9 is a first air inlet channel; 10 is a second air inlet channel; 11 is an air inlet port; 12 is an air supply channel; 121 is a first air supply channel; 122 is a second air supply channel; 13 is a built-in vacuum generating tube; 14 is a first valve core chamber; 141 is a first valve core chamber A; 142 is a first valve core chamber B; 143 is a first valve core chamber C; 15 is a second valve core chamber; 151 is a second valve core chamber A; 152 is a second valve core chamber B; 153 is a second valve core chamber C; 21 is a vacuum air supply channel; 22 is a silencer; 23 is a one-way valve; 24 is a vacuum chamber; 25 is a destruction regulating valve; 26 is a vacuum port; 27 is a filter. DETAILED DESCRIPTION
[0034] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several variations and improvements may be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0035] like Figure 1 As shown, the integrated vacuum generator provided by the present invention includes an air supply device, a vacuum generating device and a control device; the control device includes a vacuum pressure gauge 1, a vacuum pilot valve 2, a destroying pilot valve 3, a valve core and a valve body; the vacuum generating device includes a built-in vacuum generating tube 13 and a vacuum chamber 24;
[0036] The valve body is provided with a valve core cavity and a valve inner passage; the valve core is provided in the valve core cavity; the air supply device is connected to the valve core cavity; the valve core cavity is connected to the vacuum pilot valve 2 and the destruction pilot valve 3 through the valve inner passage;
[0037] When the vacuum pressure gauge 1 measures that the pressure in the vacuum chamber 24 is lower than the lower limit of the preset pressure range, the vacuum pilot valve 2 is turned on, and the channel in the valve is connected to the built-in vacuum generating tube 13 through the vacuum pilot valve 2; when the vacuum pressure gauge 1 measures that the pressure in the vacuum chamber 24 is higher than the upper limit of the preset pressure range, the vacuum pilot valve 2 is turned off, and the channel in the valve is connected to the vacuum chamber 24 of the vacuum generating device through the destruction pilot valve 3.
[0038] In this embodiment, the present invention measures the pressure in the vacuum chamber 24 by means of a vacuum pressure gauge with an energy-saving function, and then controls the on / off of the vacuum pilot valve and the destruction pilot valve 3 according to the comparison between the pressure in the vacuum chamber 24 and the upper and lower limits of the preset pressure range, so that the pressure in the vacuum chamber 24 can be maintained within the set range to prevent the adsorbed objects from falling. Since the pressure in the vacuum chamber 24 is controlled within the upper limit of the preset pressure range, the consumption of positive pressure air can be greatly reduced.
[0039] The control device includes a first main valve core 4, a second main valve core 5 and a spring 6; the valve core chamber is provided with a first valve core chamber 14, a second valve core chamber 15 and a spring chamber which are connected in sequence; the first main valve core 4 is located in the first valve core chamber 14, the second main valve core 5 is located in the second valve core chamber 15, the spring 6 is located in the spring chamber, and the spring 6 is arranged between the first main valve core 4 and the second main valve core 5.
[0040] In one embodiment, the positive pressure gas of the present invention can drive the first main valve core 4 or the second main valve core 5 to move to compress the spring 6, so that the valve channel is connected to the vacuum chamber 24 or the built-in vacuum generating tube 13, thereby realizing convenient control of the on and off of the valve body.
[0041] In one embodiment, the first main valve core 4 divides the first valve core chamber 14 into a first valve core chamber A141, a first valve core chamber B142 and a first valve core chamber C143; the second main valve core 5 divides the second valve core chamber 15 into a second valve core chamber A151, a second valve core chamber R152 and a second valve core chamber C153, and the first valve core chamber C143 and the second valve core chamber C153 are connected through a spring chamber.
[0042] In this embodiment, in the initial state, the first valve core chamber A141, the first valve core chamber B142 and the first valve core chamber C143 are not connected to each other due to the isolation of the first main valve core 4, but as the positive pressure gas drives the first main valve core 4 to perform compression spring movement, the first valve core chamber A141, the first valve core chamber B142 and the first valve core chamber C143 are connected; in the initial state, the second valve core chamber A151, the second valve core chamber B152 and the second valve core chamber C153 are not connected to each other due to the isolation of the second main valve core 5, but as the positive pressure gas drives the second main valve core 5 to perform compression spring movement, the second valve core chamber A151, the second valve core chamber B152 and the second valve core chamber C153 are connected.
[0043] In one embodiment, one end of the first main valve core 4 is connected to one end of the spring 6 , one end of the second main valve core 5 is connected to the other end of the spring 6 , and the spring 6 , the first main valve core 4 and the second main valve core 5 are located on the same axis.
[0044] In one embodiment, the valve internal passage includes a first control air passage 7, a second control air passage 8, a first air intake passage 9 and a second air intake passage 10;
[0045] The first valve core chamber A141 is connected with the vacuum pilot valve 2 through the first control air channel 7, and the second valve core chamber A151 is connected with the destruction pilot valve 3 through the second control air channel 8; the vacuum pilot valve 2 is connected with the first valve core chamber C143 and / or the second valve core chamber C153 through the first air inlet channel 9, and the destruction pilot valve 3 is connected with the first valve core chamber C143 and / or the second valve core chamber C153 through the second air inlet channel 10.
[0046] In one embodiment, the air supply device includes an air inlet 11, an air supply channel 12, a first air supply channel 121 and a second air supply channel 122;
[0047] The air supply channel 12 is connected to the first valve core chamber C143 through the first air supply channel 121 , and the air supply channel 12 is connected to the second valve core chamber C153 through the second air supply channel 122 .
[0048] In one embodiment, the vacuum generating device also includes a vacuum air supply channel 21 and a one-way valve 23; the built-in vacuum generating tube 13 has at least one positive pressure air inlet and at least one vacuum interface; the positive pressure air inlet is connected to the first valve core chamber B142 through the vacuum air supply channel 21, and the vacuum interface is connected to the vacuum chamber 24 through the one-way valve 23.
[0049] In one embodiment, the vacuum chamber 24 is connected to the second valve core chamber B152 through a vacuum breaking airway, and the vacuum pressure gauge 1 is used to monitor the pressure in the vacuum chamber 24 . The vacuum pressure gauge 1 is electrically connected to the vacuum pilot valve 2 .
[0050] In one embodiment, the vacuum pressure gauge 1 controls the conduction or disconnection of the vacuum pilot valve 2 according to the pressure in the vacuum chamber 24; when the pressure in the vacuum chamber 24 is lower than the lower limit of the preset pressure range, the vacuum pressure gauge 1 sends an opening instruction to the vacuum pilot valve 2 to control the conduction of the vacuum pilot valve 2; when the pressure in the vacuum chamber 24 is higher than the lower limit of the preset pressure range, the vacuum pressure gauge 1 sends a closing instruction to the vacuum pilot valve 2 to control the disconnection of the vacuum pilot valve 2.
[0051] In a variation of this embodiment, the opening and closing of the vacuum pilot valve 2 can also be controlled manually according to the value of the vacuum pressure gauge 1 .
[0052] In one embodiment, the control device further includes a destructive regulating valve 25, which is used to adjust the airflow in the second air inlet channel 10, thereby facilitating the vacuum degree control of the vacuum chamber 24 and preventing the vacuum degree of the vacuum chamber 24 from decreasing too quickly.
[0053] In one embodiment, the vacuum chamber 24 is provided with a filter 27 at the front of the vacuum port 26 to filter the gas entering the vacuum chamber to prevent external impurities from entering the vacuum chamber and clogging the internal pipeline; the exhaust port of the built-in vacuum generating tube 13 is provided with a muffler 22 to reduce the noise of the discharged compressed air and reduce sound pollution.
[0054] When the integrated vacuum generator provided by the present invention is used, the vacuum pilot valve 2 is first opened after power is turned on, and the positive pressure airflow in the air supply channel 12 not only enters the first air inlet channel 9 through the first air supply channel 121 and the first valve core chamber C143, but also enters the first air inlet channel 9 through the second air supply channel 122, the second valve core chamber C153, the spring chamber, and the first valve core chamber C143, and then enters the first valve core chamber A141 after passing through the vacuum pilot valve 2 and the first control air channel 7; at this time, the positive pressure airflow flowing into the first valve core chamber A141 pushes the first main valve core 4, so that the spring 6 contracts. At this time, the first main valve core 4 makes the first valve core chamber B142 and the first valve core chamber A141 connected, so that the positive pressure gas can enter the first valve core chamber B142 from the first valve core chamber A141, and then enter the built-in vacuum generating tube 13 through the vacuum air supply channel 21, and finally be discharged after being silenced by the muffler 22, so that the vacuum chamber 24 generates a vacuum, and the vacuum port 26 is used to absorb the workpiece;
[0055] When the workpiece reaches the target position, the vacuum pilot valve 2 is powered off and closed, and the air-breaking pilot valve 3 is opened. At this time, the first main valve core 4 returns to its initial position under the action of the spring 6, and the positive-pressure airflow in the first valve core chamber C143 and the second valve core chamber C153 passes through the second air inlet channel 10, the air-breaking pilot valve 3, and the second control air channel 8 in sequence and enters the second valve core chamber A151. At this time, the positive-pressure airflow pushes the second main valve core 5, causing the spring 6 to contract. At this time, the second main valve core 5 connects the second valve core chamber R152 with the second valve core chamber C153, and the positive-pressure gas can enter the second valve core chamber R152 from the second valve core chamber C153, and then pass through the vacuum breaking air channel (the vacuum breaking air channel is connected to the second valve core chamber C153). Figure 1 The cross-section shown is not on the same vertical plane and is therefore not marked) enters the vacuum chamber 24, so that the workpiece is lowered, and at the same time, the air flow size in the second air inlet channel 10 is adjusted by destroying the regulating valve 25.
[0056] When the integrated vacuum generator provided by the invention is used to adsorb the workpiece, it can effectively save the gas source. In the present invention, the vacuum pressure gauge 1, the vacuum pilot valve 2 and the one-way valve 23 form a closed-loop feedback system. The vacuum pressure gauge 1 directly controls the vacuum pilot valve 2. Since the vacuum pressure gauge 1 has a preset upper and lower limit of the vacuum pressure, when the pressure in the vacuum chamber 24 is lower than the lower limit of the preset pressure range, the vacuum pressure gauge 1 sends an opening command to the vacuum pilot valve 2 to control the vacuum pilot valve 2 to be turned on. When the pressure in the vacuum chamber 24 is higher than the lower limit of the set pressure, the vacuum pressure gauge 1 sends a closing command to the vacuum pilot valve 2 to control the vacuum pilot valve 2 to be turned off, thereby closing the vacuum generating device and avoiding gas source loss. The establishment of the one-way valve 23 ensures that the vacuum chamber 24 is in a sealed state after the vacuum generating device is closed, so the vacuum value in the vacuum chamber 24 will not drop.
[0057] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art may make various modifications or variations within the scope of the claims, which do not affect the essence of the present invention.
Claims
1. An integrated vacuum generator, characterized in that: It includes an air supply device, a vacuum generating device and a control device; the control device includes a vacuum pressure gauge, a vacuum pilot valve, a destroying pilot valve, a valve core and a valve body; the vacuum generating device includes a built-in vacuum generating tube and a vacuum chamber; The valve body is provided with a valve core cavity and a valve inner passage; the valve core is arranged in the valve core cavity; the air supply device is connected with the valve core cavity; the valve core cavity is connected with the vacuum pilot valve and the destruction pilot valve through the valve inner passage; When the vacuum pressure gauge measures that the pressure in the vacuum chamber is lower than the lower limit of the preset pressure range, the vacuum pilot valve is in a conducting state, and the valve channel is connected to the built-in vacuum generating tube through the vacuum pilot valve; when the vacuum pressure gauge measures that the pressure in the vacuum chamber is higher than the upper limit of the preset pressure range, the vacuum pilot valve is in a disconnected state, and the valve channel is connected to the vacuum chamber of the vacuum generating device through the destroying pilot valve; the control device includes a first main valve core, a second main valve core and a spring; The valve core cavity is provided with a first valve core cavity, a second valve core cavity and a spring cavity which are connected in sequence; the first main valve core is located in the first valve core cavity, the second main valve core is located in the second valve core cavity, the spring is located in the spring cavity, and the spring is arranged between the first main valve core and the second main valve core; the first main valve core divides the first valve core cavity into a first valve core cavity A, a first valve core cavity B and a first valve core cavity C; the second main valve core divides the second valve core cavity into a second valve core cavity A, a second valve core cavity B and a second valve core cavity C, and the first valve core cavity C and the second valve core cavity C are connected through the spring cavity; The air supply device is connected to the first valve core cavity C and the second valve core cavity C; the first valve core cavity C and the first valve core cavity A141 are connected to the valve inner channel; the air supply device includes an air inlet, an air supply channel, a first air supply channel and a second air supply channel; The air supply channel is connected to the first valve core chamber C through the first air supply channel; the air supply channel is connected to the second valve core chamber C through the second air supply channel; The vacuum generating device also includes a vacuum air supply channel and a one-way valve; The built-in vacuum generating tube has at least one positive pressure air inlet and at least one vacuum interface; the positive pressure air inlet is connected to the first valve core cavity B through a vacuum air supply channel, and the vacuum interface is connected to the vacuum cavity through a one-way valve.
2. The integrated vacuum generator according to claim 1, characterized in that: The valve inner passage comprises a first control air passage, a second control air passage, a first air intake passage and a second air intake passage; The first valve core chamber A is connected to the vacuum pilot valve through the first control air channel, and the second valve core chamber A is connected to the destruction pilot valve through the second control air channel; the vacuum pilot valve is connected to the first valve core chamber C and / or the second valve core chamber C through the first air inlet channel, and the destruction pilot valve is connected to the first valve core chamber C and / or the second valve core chamber C through the second air inlet channel.
3. The integrated vacuum generator according to claim 1, characterized in that: The vacuum chamber is provided with a vacuum port; a filter is provided at the opening of the vacuum port.
4. The integrated vacuum generator according to claim 2, characterized in that: The control device further comprises a destruction regulating valve, and the destruction regulating valve is used for adjusting the airflow size in the second air intake passage.
5. The integrated vacuum generator according to claim 1, characterized in that: The vacuum chamber is connected to the second valve core chamber B through a vacuum breaking airway.
6. The integrated vacuum generator according to claim 1, characterized in that: The exhaust port of the built-in vacuum generating tube is provided with a muffler.
7. A method for using the integrated vacuum generator according to any one of claims 1 to 6, characterized in that: The steps include: Step S1: measuring the pressure of the vacuum chamber by the vacuum pressure gauge; Step S2: when the pressure in the vacuum chamber is measured to be lower than the lower limit of the preset pressure range, controlling the vacuum pilot valve to be turned on; Step S3: When the pressure in the vacuum chamber is measured to be higher than the lower limit of the preset pressure range, the vacuum pilot valve is controlled to be disconnected.
Citation Information
Patent Citations
An integrated vacuum generator
CN103016424B
Integrated vacuum generator
CN209621740U