Raw material and waste material management system for silicon carbide production

Abstract

The invention relates to the technical field of silicon carbide production, and discloses a raw material and waste material management system for silicon carbide production. Comprising an ultrahigh vacuum silicon carbide raw material synthesis furnace system, a raw material fine screening system, silicon carbide industry ERP software, a perfect waste recovery system, an automatic silicon carbide carrier grouting system, a silicon carbide smelting production process detection management system and a waste gas recycling system. The ultrahigh vacuum silicon carbide raw material synthesis furnace system is in communication connection with the raw material fine screening system, the raw material fine screening system is in communication connection with the silicon carbide industry ERP software, and the silicon carbide industry ERP software is in communication connection with the perfect waste recovery system. The improvement of the waste recovery system is of great significance for promoting circular economy development, promoting efficient utilization of resources, protecting the environment and promoting economic and social development, the more efficient waste recovery system is researched and developed, the waste recovery rate and the resource utilization rate are increased, and environmental pollution is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon carbide production, and in particular to a raw material and waste management system for silicon carbide production. Background Art

[0002] The raw material and waste management system for silicon carbide production achieves effective utilization of resources and generates greater economic benefits while reducing environmental harm by optimizing the use of raw materials and the recycling of waste. The raw material and waste management system for silicon carbide production has brought significant economic and social benefits to silicon carbide production companies by improving resource utilization efficiency, reducing production costs, reducing environmental pollution and achieving green and environmentally friendly production methods.

[0003] At present, the waste generated in the silicon carbide production process is often not effectively classified and treated, resulting in some waste that still has utilization value being ignored, unable to maximize the utilization of resources, and low recycling rates, leading to waste of resources and increased energy consumption. It is impossible to comprehensively track and manage the generation, collection, treatment and reuse of waste. Summary of the invention

[0004] The purpose of the present invention is to provide a raw material and waste management system for silicon carbide production in order to solve the above problems, thereby solving the problems mentioned in the background technology.

[0005] In order to solve the above problems, the present invention provides a technical solution:

[0006] A raw material and waste management system for silicon carbide production, comprising an ultra-high vacuum silicon carbide raw material synthesis furnace system, a raw material fine screening system, silicon carbide industry ERP software, a complete waste recovery system, an automated silicon carbide carrier grouting system, a silicon carbide smelting production process detection management system and a waste gas recovery and recycling system, wherein the ultra-high vacuum silicon carbide raw material synthesis furnace system is communicatively connected to the raw material fine screening system, the raw material fine screening system is communicatively connected to the silicon carbide industry ERP software, the silicon carbide industry ERP software is communicatively connected to the complete waste recovery system, the automated silicon carbide carrier grouting system is communicatively connected to the silicon carbide smelting production process detection management system, and the silicon carbide smelting production process detection management system is communicatively connected to the waste gas recovery and recycling system.

[0007] As a preferred solution of the present invention, the ultra-high vacuum silicon carbide raw material synthesis furnace system includes a vapor deposition module, a solid phase method module and a detection and control system module;

[0008] The vapor deposition module is responsible for depositing silicon carbide raw materials onto a substrate by vapor deposition technology in an ultra-high vacuum environment to form silicon carbide crystals;

[0009] The solid phase method module utilizes solid phase method technology to treat silicon carbide raw materials at high temperature to promote their crystallization and growth, thereby forming high-quality silicon carbide crystals;

[0010] The detection and control system module is responsible for monitoring and controlling the system operation status, ensuring that the growth process of the silicon carbide crystal is carried out under optimal conditions, and at the same time performing quality detection on the grown crystal.

[0011] As a preferred solution of the present invention, the raw material fine screening system includes an algorithm-controlled supply module, a screening module and a foreign matter removal module;

[0012] The algorithm-controlled supply module is used to accurately control the supply amount and supply speed of the raw material;

[0013] The screening module uses the vibration of the vibrator to form a thin layer of material on the screen, and classifies and screens the material according to the aperture size of the screen;

[0014] The foreign matter removal module removes foreign matter from the raw material fragments through a set algorithm and the operation of a control unit.

[0015] As a preferred solution of the present invention, the improved waste recycling system includes a waste separation and recycling module and a waste classification and purification module;

[0016] The waste separation and recovery module mixes silicon carbide micropowder and mineral oil and uses a leaching precipitation method to effectively separate the silicon carbide micropowder and mineral oil, thereby achieving the recycling of the leaching solvent and zero pollution emission in the production process;

[0017] The waste classification and purification module utilizes a hydrocyclone and an airflow classifier to classify the waste, and optimizes the separation effect by adjusting process conditions such as temperature and feed pressure.

[0018] As a preferred solution of the present invention, the automated silicon carbide carrier grouting system includes a connection positioning platform module, an image acquisition module, a feature comparison module, an abnormal area scanning module, an abnormal feature recognition model building module and an abnormal detection result output module;

[0019] The connection and positioning stage module is responsible for connecting and positioning the silicon carbide wafer, and providing basic data for subsequent detection and management;

[0020] The image acquisition module is used to acquire images after positioning is completed to obtain detailed image information of the silicon carbide wafer;

[0021] The feature comparison module is used to construct a basic comparison feature set, perform feature comparison on the image acquisition results, determine the abnormal area, and provide a basis for subsequent detection;

[0022] The abnormal area scanning module is used to scan the detected abnormal area to obtain more detailed abnormal area image acquisition results;

[0023] The abnormal feature recognition model building module collects abnormal features of wafers of the same type, classifies and identifies them, and builds an abnormal feature recognition model for initial recognition and abnormal feature matching;

[0024] The abnormality detection result output module inputs the abnormal area image acquisition result into the abnormality feature recognition model, performs abnormality feature matching, and finally outputs the abnormality detection result to complete the entire detection process.

[0025] As a preferred solution of the present invention, the waste gas recovery and recycling system includes a pretreatment system, a main treatment system and a waste gas emission system;

[0026] The pretreatment system is used to perform preliminary treatment on the exhaust gas, including cooling, dust removal, desulfurization, denitrification and other processes;

[0027] The main treatment system is used to perform deep treatment on the waste gas, including adsorption, oxidation and other processes, to meet the emission standards;

[0028] The exhaust gas discharge system is used to discharge the treated exhaust gas into the atmosphere, and includes exhaust gas pipes, chimneys, fans and other equipment.

[0029] The beneficial effects of the present invention are: by setting up a perfect waste recycling system, the perfect waste recycling system is of great significance to promoting the development of circular economy, promoting efficient utilization of resources, protecting the environment and promoting economic and social development. A more efficient waste recycling system is developed to improve the waste recovery rate and resource utilization rate and reduce environmental pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] For ease of explanation, the present invention is described in detail with reference to the following specific implementations and the accompanying drawings.

[0031] Figure 1 It is a diagram of the raw material and waste management system of the present invention. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0033] Embodiment 1:

[0034] The present invention provides a technical solution: a raw material and waste management system for silicon carbide production, comprising an ultra-high vacuum silicon carbide raw material synthesis furnace system, a raw material fine screening system, silicon carbide industry ERP software, a complete waste recovery system, an automated silicon carbide carrier grouting system, a silicon carbide smelting production process detection management system and a waste gas recovery and recycling system, wherein the ultra-high vacuum silicon carbide raw material synthesis furnace system is communicatively connected to the raw material fine screening system, the raw material fine screening system is communicatively connected to the silicon carbide industry ERP software, the silicon carbide industry ERP software is communicatively connected to the complete waste recovery system, the automated silicon carbide carrier grouting system is communicatively connected to the silicon carbide smelting production process detection management system, and the silicon carbide smelting production process detection management system is communicatively connected to the waste gas recovery and recycling system.

[0035] Embodiment 2:

[0036] The ultra-high vacuum silicon carbide raw material synthesis furnace system includes a vapor deposition module, a solid phase method module and a detection and control system module; the vapor deposition module is responsible for depositing silicon carbide raw materials onto a substrate through vapor deposition technology in an ultra-high vacuum environment to form silicon carbide crystals; by providing technologies such as CVD and PVD, the required coating can be formed on the surface of various materials, thereby improving the performance of the materials or providing specific functions; the solid phase method module utilizes solid phase method technology to treat silicon carbide raw materials at high temperatures to promote their crystallization and growth to form high-quality silicon carbide crystals; the detection and control system module is responsible for monitoring and controlling the system operation status to ensure that the growth process of silicon carbide crystals is carried out under optimal conditions, and at the same time perform quality inspection on the grown crystals.

[0037] Under ultra-high vacuum conditions, the raw materials are heated to high temperatures (up to 2400°C) through induction heating, prompting the raw materials to undergo chemical reactions to generate silicon carbide. This high-temperature environment is achieved through a precise temperature control system, ensuring the quality and purity of silicon carbide synthesis. At the same time, the system uses high-precision pressure control technology to ensure stable pressure during the synthesis process, which is beneficial to improving the purity and yield of the product.

[0038] Embodiment 3:

[0039] The raw material fine screening system includes an algorithm-controlled supply module, a screening module and a foreign matter removal module; the algorithm-controlled supply module is used to accurately control the supply amount and supply speed of the raw material; the screening module uses the vibration of the vibrator to form a thin layer of material on the screen, and grades and screens the material according to the aperture size of the screen; the foreign matter removal module removes foreign matter from the raw material fragments through the set algorithm and the operation of the control unit.

[0040] Under the action of horizontal airflow, the raw materials in the through pipe are diverted by gravity to form a raw material flow, and the raw material flow falls on the corresponding screen on the falling side of the sorting pipe. The raw material flow flows in the same direction during the whole process, thereby reducing the possibility of collision between the raw materials. After being diverted by the gravity of the raw materials themselves, they are screened through the screen, which not only improves the fineness of the screening, but also helps to improve the screening efficiency.

[0041] Embodiment 4:

[0042] The improved waste recycling system includes a waste separation and recovery module and a waste grading and purification module; the waste separation and recovery module mixes silicon carbide micropowder and mineral oil and uses a leaching precipitation method to effectively separate the silicon carbide micropowder and mineral oil, thereby realizing the recycling of the leaching solvent and zero pollution emission in the production process; the waste grading and purification module uses a hydrocyclone and an airflow classifier to grade the waste, and optimizes the separation effect by adjusting process conditions such as temperature, feed pressure, etc.

[0043] The waste generated during the production of silicon carbide is pretreated to remove large suspended solids and balance water quality and quantity, providing stable conditions for subsequent treatment. In the physical and chemical treatment stage, flocculation precipitation is used to add high molecular flocculants, and flocculation reactions are carried out through grid cyclone reaction tanks to remove suspended solids. The biochemical treatment stage includes anaerobic biochemical treatment and aerobic biochemical treatment. The deep treatment stage includes neutralization precipitation, adding alkaline substances to adjust the pH value of the wastewater to 7-8, so that iron ions form Fe(OH)2 precipitation and are removed. Fenton reagent, ozone oxidation or photocatalytic oxidation are used to remove refractory organic matter. Finally, reverse osmosis or nanofiltration technology is used to further purify the water quality.

[0044] Embodiment 5:

[0045] The automated silicon carbide carrier grouting system comprises a connection and positioning platform module, an image acquisition module, a feature comparison module, an abnormal area scanning module, an abnormal feature recognition model construction module and an abnormal detection result output module; the connection and positioning platform module is responsible for connecting and positioning the silicon carbide wafer, and providing basic data for subsequent detection and management; the image acquisition module is used to perform image acquisition after positioning is completed, and obtain detailed image information of the silicon carbide wafer; the feature comparison module is used to construct a basic comparison feature set, perform feature comparison on the image acquisition results, determine the abnormal area, and provide a basis for subsequent detection; the abnormal area scanning module is used to scan the detected abnormal area and obtain more detailed abnormal area image acquisition results; the abnormal feature recognition model construction module collects abnormal features of the same type of wafers, classifies and identifies them, and constructs an abnormal feature recognition model for initial recognition and abnormal feature matching; the abnormal detection result output module inputs the abnormal area image acquisition results into the abnormal feature recognition model, performs abnormal feature matching, and finally outputs the abnormal detection result to complete the entire detection process.

[0046] The system is equipped with a loading mechanism, which is used to automatically place the silicon carbide material pile in the correct position in preparation for grouting operations. A grouting station is set in the middle of the operating table, which is the core area of ​​the grouting process. It includes multiple groups of grouting units, each unit is equipped with a hydraulic mud feeder, a grouting module and an injection head. The paper feeder is used to cover the silicon carbide material pile during the grouting process, while the vertical clamping mechanism ensures the stability of the material pile during the grouting process. The cleaning mechanism is used to clean the silicon carbide carrier after grouting to ensure its clean surface. The system can greatly improve the grouting efficiency and grouting quality, thereby improving the performance and quality of the final product.

[0047] Embodiment 6:

[0048] The waste gas recovery and recycling system includes a pretreatment system, a main treatment system and a waste gas emission system; the pretreatment system is used for preliminary treatment of the waste gas, including cooling, dust removal, desulfurization, denitrification and other processes; the main treatment system is used for deep treatment of the waste gas, including adsorption, oxidation and other processes to meet the emission standards; the waste gas emission system is used to discharge the treated waste gas into the atmosphere, including waste gas pipes, chimneys, fans and other equipment.

[0049] The exhaust gas recirculation system (EGR) is a key technology that aims to reduce NOx emissions by controlling the reuse of exhaust gas, thereby achieving dual optimization of environmental protection and performance. The working principle of this system involves returning part of the exhaust gas discharged by the engine to the intake manifold and re-entering the cylinder together with the fresh mixture. This process is controlled by the EGR valve, which adjusts the amount of exhaust gas flowing back from the exhaust manifold to the intake manifold through three metering holes of different sizes, producing seven different flow combinations. Each metering hole consists of a solenoid valve and a needle valve. When the solenoid valve is energized, the magnet sucks the armature upward to open the metering hole.

[0050] Embodiment 7:

[0051] Raw material management for silicon carbide production:

[0052] Take materials in sequence according to the types of materials notified by the technician to ensure that the crushed particle size of the raw materials meets the particle size required by the process and the humidity of the raw materials is kept within an appropriate range (4% to 6%). Before batching, the work site needs to be cleaned and the mechanical equipment for raw material processing and mixing is started in accordance with the "Equipment Operating Procedures". When batching, strictly follow the "Batching Notice" issued by the technician. After confirmation and signature by the team leader, the weighing number and data will be notified to the weigher and recorded on the blackboard. During the mixing process, the mixer operator starts timing from the loading of raw materials. Each mixing time is about 2 minutes. After mixing, magnetic separation is carried out and the magnetic materials are sent to the designated location for processing. After receiving the batching weighing data, the weigher calibrates the scale to zero and weighs after confirming that it is correct. The processed and crushed materials should be classified and stored to prevent cross contamination and confusion.

[0053] Embodiment 8:

[0054] Waste management for silicon carbide production:

[0055] For the waste generated during the growth of silicon carbide single crystals, a specific recycling and treatment method can be used, including three steps: roasting to remove carbon, mixed acid treatment to remove trace elements, and alkali oxidation treatment to remove silicon. First, the silicon carbide waste is ground into powder with a particle size of less than 200 microns, loaded into a quartz boat and placed in a tubular furnace, heated to 400-600°C, roasted for 2-5 hours, and the ventilation rate of the oxygen cylinder is set to inject at a pressure value of 100-200kPa. After cooling, the quartz boat is taken out to obtain silicon carbide waste with carbon removed. This method can remove impurities with a large content in the silicon carbide waste, obtain high-purity silicon carbide powder after purification, and reuse it in the production of silicon carbide single crystals, thereby realizing comprehensive recycling and reuse of waste materials and reducing pollution to the environment.

[0056] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A raw material and waste management system for silicon carbide production, characterized in that: It includes an ultra-high vacuum silicon carbide raw material synthesis furnace system, a raw material fine screening system, silicon carbide industry ERP software, a complete waste recovery system, an automated silicon carbide carrier grouting system, a silicon carbide smelting production process detection and management system, and a waste gas recovery and recycling system. The ultra-high vacuum silicon carbide raw material synthesis furnace system is communicated with the raw material fine screening system, the raw material fine screening system is communicated with the silicon carbide industry ERP software, the silicon carbide industry ERP software is communicated with the complete waste recovery system, the automated silicon carbide carrier grouting system is communicated with the silicon carbide smelting production process detection and management system, and the silicon carbide smelting production process detection and management system is communicated with the waste gas recovery and recycling system.

2. A raw material and waste management system for silicon carbide production according to claim 1, characterized in that: The ultra-high vacuum silicon carbide raw material synthesis furnace system includes a vapor deposition module, a solid phase method module and a detection and control system module; The vapor deposition module is responsible for depositing silicon carbide raw materials onto a substrate by vapor deposition technology in an ultra-high vacuum environment to form silicon carbide crystals; The solid phase method module utilizes solid phase method technology to treat silicon carbide raw materials at high temperature to promote their crystallization and growth, thereby forming high-quality silicon carbide crystals; The detection and control system module is responsible for monitoring and controlling the system operation status, ensuring that the growth process of the silicon carbide crystal is carried out under optimal conditions, and at the same time performing quality detection on the grown crystal.

3. A raw material and waste management system for silicon carbide production according to claim 1, characterized in that: The raw material fine screening system includes an algorithm-controlled supply module, a screening module and a foreign matter removal module; The algorithm-controlled supply module is used to accurately control the supply amount and supply speed of the raw material; The screening module uses the vibration of the vibrator to form a thin layer of material on the screen, and classifies and screens the material according to the aperture size of the screen; The foreign matter removal module removes foreign matter from the raw material fragments through a set algorithm and the operation of a control unit.

4. A raw material and waste management system for silicon carbide production according to claim 1, characterized in that: The improved waste recycling system includes a waste separation and recycling module and a waste classification and purification module; The waste separation and recovery module mixes silicon carbide micropowder and mineral oil and uses a leaching precipitation method to effectively separate the silicon carbide micropowder and mineral oil, thereby achieving the recycling of the leaching solvent and zero pollution emission in the production process; The waste classification and purification module utilizes a hydrocyclone and an airflow classifier to classify the waste, and optimizes the separation effect by adjusting process conditions such as temperature and feed pressure.

5. A raw material and waste management system for silicon carbide production according to claim 1, characterized in that: The automated silicon carbide carrier grouting system comprises a connection positioning platform module, an image acquisition module, a feature comparison module, an abnormal area scanning module, an abnormal feature recognition model building module and an abnormal detection result output module; The connection and positioning stage module is responsible for connecting and positioning the silicon carbide wafer, and providing basic data for subsequent detection and management; The image acquisition module is used to acquire images after positioning is completed to obtain detailed image information of the silicon carbide wafer; The feature comparison module is used to construct a basic comparison feature set, perform feature comparison on the image acquisition results, determine the abnormal area, and provide a basis for subsequent detection; The abnormal area scanning module is used to scan the detected abnormal area to obtain more detailed abnormal area image acquisition results; The abnormal feature recognition model building module collects abnormal features of wafers of the same type, classifies and identifies them, and builds an abnormal feature recognition model for initial recognition and abnormal feature matching; The abnormality detection result output module inputs the abnormal area image acquisition result into the abnormality feature recognition model, performs abnormality feature matching, and finally outputs the abnormality detection result to complete the entire detection process.

6. A raw material and waste management system for silicon carbide production according to claim 1, characterized in that: The waste gas recovery and recycling system includes a pre-treatment system, a main treatment system and a waste gas emission system; The pretreatment system is used to perform preliminary treatment on the exhaust gas, including cooling, dust removal, desulfurization, denitrification and other processes; The main treatment system is used to perform deep treatment on the waste gas, including adsorption, oxidation and other processes, to meet the emission standards; The exhaust gas discharge system is used to discharge the treated exhaust gas into the atmosphere, and includes exhaust gas pipes, chimneys, fans and other equipment.

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