A device and method for detecting drift of industrial CT tested samples

Abstract

The present invention discloses a method and device for detecting drift of a sample under test of industrial CT, including an industrial CT system, a spectral confocal sensor, and a wedge-shaped marker. The wedge-shaped marker is fixed to the sample under test in the vertical and horizontal directions, and two spectral confocal sensors are respectively arranged on both sides of the sample under test, and ensure that the light spot falls in the middle of the wedge-shaped marker. According to the trigonometric function relationship of the marker, the drift of the sample under test along the x-axis and the z-axis is converted into the drift of the y-axis. If the ratio of the sample drift generated by the rapid detection to the rapid detection time is less than the standard value of the drift rate, it is determined that the drift of the sample under test does not affect the quality of the CT image. Otherwise, the fixed sample needs to be reinstalled until the ratio of the drift generated by the rapid detection to the rapid detection time is less than the standard value of the drift rate. The use of the detection device can effectively prevent the sample under test from having a large drift, resulting in the non-overlapping of the X-ray image, and the inability to three-dimensionally reconstruct a CT image with sharp edges, thereby improving the film formation rate of industrial CT.

Description

Technical Field

[0001] The present invention relates to the technical field of engineering detection, and in particular to a device and method for detecting drift of a sample under test in an industrial CT. Background Art

[0002] Industrial CT is a commonly used non-destructive testing technology. It relies on the attenuation of X-rays passing through the object to detect the internal three-dimensional structure of the object. In order to obtain the three-dimensional structure of the sample under test, the sample needs to be rotated with the mechanical turntable for one circle, and a digital radiographic image is taken during its rotation. Then, a set of hundreds or thousands of digital radiographic images is used to reconstruct a three-dimensional image of the linear attenuation coefficient distribution of the sample under test. In the process of taking digital radiographic images, the spatial stability of the sample under test is required to be high. The sample under test needs to be in the same position of the digital radiographic image before and after rotation. Otherwise, the industrial CT image reconstruction effect will be poor and the edges of the sample image will be blurred.

[0003] It usually takes one hour for an industrial CT to scan a sample in detail. If the sample is not firmly fixed or the bottom settles, the image on the flat-panel detector will drift. Especially for samples with larger mass, at the end of rotation, they will drift along the original rotation direction due to their own inertia. If the sample drifts during the rotation, it will be discovered after the scan that the starting and ending X-ray images of the sample do not overlap, which will result in a large waste of time and resources. Therefore, a method and device for detecting the drift of industrial CT samples is needed to perform high-precision quantitative detection of the drift of the sample in a short time before the industrial CT scan. Summary of the invention

[0004] The purpose of the present invention is to overcome the above-mentioned deficiencies of the prior art and to provide a device and method for detecting the drift of a sample under test in an industrial CT, which aims to solve the technical problem that the existing industrial CT cannot measure the drift amount of the sample under test.

[0005] To achieve the above-mentioned purpose, the present invention proposes a device for detecting the drift of an industrial CT sample under test, comprising a limit clamp for clamping the sample under test, wherein the limit clamp is fixed on a rotating platform; the sample under test is detected by the drift detection system, a wedge mark is provided on the drift detection system, and the light spot of the spectral confocal displacement sensor falls on the wedge mark; the cross-section of the wedge mark is a triangle.

[0006] Preferably, the wedge-shaped marks include vertically placed wedge-shaped marks and horizontally placed wedge-shaped marks arranged on both sides of the sample to be tested.

[0007] Preferably, the spectral confocal displacement sensor includes spectral confocal displacement sensor No. 1 and spectral confocal displacement sensor No. 2; the spectral confocal displacement sensor No. 1 is fixed on fixed platform No. 1, and the fixed platform No. 1 is installed on the z-direction guide rail of fixed platform No. 1; the spectral confocal displacement sensor No. 2 is fixed on fixed platform No. 2, and the fixed platform No. 2 is installed on the z-direction guide rail of fixed platform No. 2.

[0008] Preferably, an industrial CT system is also included, and the industrial CT system and the sample to be tested are both adjusted in testing position by an x-direction guide rail and a y-direction guide rail.

[0009] Preferably, the vertically placed wedge-shaped mark and the horizontally placed wedge-shaped mark are respectively arranged on opposite sides of the same horizontal height of the surface of the sample to be measured.

[0010] Preferably, the No. 1 fixed platform is installed on the No. 3 guide column; the No. 2 fixed platform is installed on the No. 4 guide column; and the rotating platform is driven to rotate by a stepper motor.

[0011] Preferably, the industrial CT system comprises guide column No. 1 and guide column No. 2; a flat-panel detector z-direction guide rail is arranged on guide column No. 1, and a flat-panel detector is arranged on the z-direction guide rail of the flat-panel detector; a ray source z-direction guide rail is arranged on guide column No. 2, and a ray source is arranged on the z-direction guide rail of the ray source; the center of the flat-panel detector, the position to be detected of the sample to be detected and the ray source are in the same straight line and the image of the sample detection area occupies about 2 / 3 of the entire CT image.

[0012] Preferably, spectral confocal displacement sensor No. 1 and spectral confocal displacement sensor No. 2 are communicatively connected to the host via a system bus box.

[0013] Preferably, and / or the drift detection system includes a crossbeam and a digital camera No. 1, a digital camera No. 2 and a fill light device mounted thereon; the fill light device is fixed on the crossbeam and vertically illuminates the surface of the sample to be tested, and the digital camera No. 1 and the digital camera No. 2 are symmetrically mounted on the crossbeam and placed on both sides of the fill light device.

[0014] To achieve the above object, the present invention proposes a method for detecting drift of a sample under test, using the above device, comprising the following steps:

[0015] 1) Set the vertical wedge mark and the horizontal wedge mark on both sides of the sample to be tested respectively; and / or fix the fill light device on the crossbeam and illuminate the surface of the sample to be tested vertically, and install the No. 1 digital camera and the No. 2 digital camera symmetrically on the crossbeam and placed on both sides of the fill light device; fix the sample to be tested in the middle position of the rotating platform by the limit clamp, and ensure that the sample to be tested is stable and does not shake;

[0016] 2) Adjust the flat panel detector z-direction guide, the ray source z-direction guide, the x-direction guide, and the y-direction guide so that the detection area of ​​the sample to be tested is on the straight line connecting the geometric center of the flat panel detector and the ray source, and ensure that the image of the detection area of ​​the sample to be tested occupies about 2 / 3 of the entire CT image;

[0017] 3) Control the No. 1 fixed platform and the No. 2 fixed platform respectively, so that the light spots of the No. 1 spectral confocal displacement sensor and the No. 2 spectral confocal displacement sensor fall on the middle position of the vertically placed wedge mark and the horizontally placed wedge mark respectively, to ensure that the light spots will not exceed the range of the wedge mark during the detection process;

[0018] 4) The position of the sample to be tested is set as the initial position, and the measurement data of spectral confocal displacement sensor No. 1 and spectral confocal displacement sensor No. 2 are collected;

[0019] 5) Setting the scanning process of industrial CT, driving the stepper motor to control the rotating platform to drive the sample to rotate once in the set time, using two spectral confocal displacement sensors to respectively detect the displacement of the final positions of the two wedge-shaped marks, and converting the drift of the sample along the z-axis and along the x-axis into the displacement along the y-axis according to the trigonometric function relationship of the marks, so as to realize the detection of sample drift; and / or using digital camera No. 1 and digital camera No. 2 to take images of the initial position and the end position of the rotation of the sample to be tested, and transmitting the captured images to the three-dimensional DIC system of the host through the system bus box to calculate the drift of the sample to be tested;

[0020] 6) The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination, wherein the pixel size can be replaced by the displacement measurement data of the spectral confocal displacement sensor and / or the displacement measurement data of the three-dimensional DIC system known before the test when obtaining a high-quality industrial CT fine scanning image; during rapid detection, when the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value, it is determined to have no effect; otherwise, it is necessary to disassemble the sample to be tested and reinstall it between the limit clamps, and then repeat the above steps for detection and determination until the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value.

[0021] Compared with the prior art, the device and method for detecting drift of a sample provided by the present invention have the following beneficial effects:

[0022] The device for detecting drift of industrial CT samples provided by the present invention can detect the drift of samples on a rotating platform and quickly determine whether the drift of the samples will affect the imaging quality of industrial CT. The present invention can effectively prevent the samples from drifting too much, resulting in misalignment of the radiographic images and failure to reconstruct CT images with sharp edges in three dimensions, and can greatly improve the film formation rate of industrial CT.

[0023] The features and advantages of the present invention will be described in detail through embodiments in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a front view structural schematic diagram of an embodiment of the present invention.

[0025] Figure 2 Schematic diagram of the top view of the structure of an embodiment of the present invention.

[0026] Figure 3 The left side structural schematic diagram of the sample to be tested equipped with a wedge-shaped mark according to the present invention.

[0027] Figure 4 A schematic diagram of the top view of the sample to be tested equipped with a wedge-shaped mark according to the present invention.

[0028] Figure 5 It is a schematic diagram of the three-dimensional structure of the wedge-shaped mark of the present invention.

[0029] Figure 6 Schematic diagram of the use principle of the wedge-shaped mark of the present invention.

[0030] Figure 7 It is a schematic diagram of the front view structure of the DIC-based sample drift system of the present invention.

[0031] Figure 8 It is a schematic diagram of the top view structure of the DIC-based sample drift system of the present invention.

[0032] In the figure: 1. Guide column No. 1; 2. Guide column No. 2; 3. Guide column No. 3; 4. Guide column No. 4; 5. Flat-panel detector; 6. Radiation source; 7. Z-direction guide rail of flat-panel detector; 8. Z-direction guide rail of radiation source; 9. X-direction guide rail; 10. Y-direction guide rail; 11. Limit fixture; 12. Rotating platform; 13. Stepper motor; 14. Test sample; 15. Vertically placed wedge-shaped mark; 16. Horizontally placed wedge-shaped mark; 17. Spectral confocal displacement sensor No. 1; 18. Spectral confocal displacement sensor No. 2; 19. Fixed platform No. 1; 20. Fixed platform No. 2; 21. Z-direction guide rail of fixed platform No. 1; 22. Z-direction guide rail of fixed platform No. 2; 23. System bus box; 24. Host; 25. Digital camera No. 1; 26. Digital camera No. 2; 27. Crossbeam; 28. Fill-in light equipment. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below through the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the scope of the present invention. In addition, in the following description, the description of known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0034] In the description of the present invention, it should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element.

[0035] In the description of the present invention, it should be noted that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the invention product is usually placed when in use, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0036] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. Example 1

[0037] See also Figure 1 and Figure 2A device for detecting drift of a sample under test in industrial CT consists of two parts: an industrial CT system and a sample drift detection system. The industrial CT system includes a No. 1 guide column 1 and a No. 2 guide column 2 on the left and right sides, a flat panel detector 5, a radiation source 6, a flat panel detector z-direction guide rail 7, a radiation source z-direction guide rail 8, an x-direction guide rail 9, a y-direction guide rail 10, a rotating platform 12, a stepping motor 13, and a limit fixture 11 for fixing a sample under test 14 at the center position of the rotating platform 12. Figure 2 The No. 1 guide column 1 and the No. 2 guide column 2 are adjusted in plane position through the x-direction guide rail 9 and the y-direction guide rail 10.

[0038] The sample drift detection system includes a No. 1 spectral confocal displacement sensor 17 and a No. 2 spectral confocal displacement sensor 18, which are respectively mounted on the No. 3 guide column 3 and the No. 4 guide column 4 through the No. 1 fixed platform 19 and the No. 2 fixed platform 20, as well as a vertically placed wedge mark 15 and a horizontally placed wedge mark 16. The two-part system leads out a data line through the system bus box 23 and transmits it to the host 24 for unified control.

[0039] Furthermore, the sample 14 mounted on the rotating platform 12 is adjusted in planar position by the x-direction guide rail 9 and the y-direction guide rail 10, and the flat panel detector 5 and the radiation source 6 are adjusted in z-direction position by the flat panel detector z-direction guide rail 7 and the radiation source z-direction guide rail 8 respectively.

[0040] In an alternative embodiment, see Figure 3 and Figure 4 , a vertically placed wedge mark 15 and a horizontally placed wedge mark 16 are respectively pasted on opposite sides of the sample 14 to be tested. The three-dimensional shape of the wedge mark can be found in Figure 5 Before industrial CT imaging, it is necessary to adjust the center of the flat panel detector 5, the position of the sample 14 to be detected, and the radiation source 6 to be in the same straight line, and ensure that the image of the sample detection area occupies about 2 / 3 of the entire CT image.

[0041] Furthermore, fixed platform No. 1 19 and fixed platform No. 2 20 mounted on the z-direction guide rail 21 of fixed platform No. 1 and the z-direction guide rail 22 of fixed platform No. 2 are adjusted respectively to ensure that the light spots of spectral confocal displacement sensor No. 1 17 and spectral confocal displacement sensor No. 2 18 fall on the middle position of the vertically placed wedge mark 15 and the horizontally placed wedge mark 16 respectively.

[0042] See also Figure 6According to the trigonometric function relationship, the vertically placed wedge-shaped marker 15 will convert the drift amount into the drift amount along the y-axis direction when the measured sample 14 drifts along the z-axis, as shown in the figure, the quantitative relationship ratio between the two is tanθ. The horizontally placed wedge-shaped marker 16 will convert the drift amount into the drift amount along the y-axis direction when the measured sample 14 drifts along the x-axis.

[0043] In this embodiment, the angles θ of the vertically placed wedge mark 15 and the horizontally placed wedge mark 16 are both selected to be within the range of 10°, ensuring that the light returned by the mark can be received by the spectral confocal displacement sensor. When the measured sample 14 drifts along the z-axis or x-axis, it will be converted into a drift amount along the y-axis direction. The data of spectral confocal displacement sensor No. 1 17 and spectral confocal displacement sensor No. 2 18 are led out from the system bus box 23 through the data line, and the data are transmitted to the host 24 for monitoring.

[0044] The stepping motor 13 drives the rotating platform 12 to make the sample 14 to be tested rotate around the axis for one circle in one minute;

[0045] The drift of the sample 14 along the z and y axes is measured using spectral confocal displacement sensor No. 1 17, and the displacement of the sample 14 along the x and y axes is measured using spectral confocal displacement sensor No. 2 18. The total drift of the sample 14 is calculated by combining the data from the two spectral confocal displacement sensors.

[0046] The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination. The pixel size can be replaced by the displacement measurement data of the spectral confocal displacement sensor when obtaining a high-quality industrial CT fine scanning image known before the test.

[0047] When the ratio of the total drift amount of the sample rapid detection to the rapid detection time is less than the drift rate standard value, it is determined that the drift of the sample 14 does not affect the CT image quality. Otherwise, the sample 14 needs to be reloaded into the limit fixture 11 and fixed.

[0048] A method for detecting drift of a sample under test in industrial CT uses the above device, and the specific steps are as follows:

[0049] 1) Set the vertically placed wedge mark 15 and the horizontally placed wedge mark 16 on both sides of the sample to be tested respectively; fix the sample to be tested in the middle position of the rotating platform by a limit clamp, and ensure that the sample to be tested is stable and does not shake;

[0050] 2) Adjust the flat panel detector z-direction guide, the ray source z-direction guide, the x-direction guide, and the y-direction guide so that the detection area of ​​the sample to be tested is on the straight line connecting the geometric center of the flat panel detector and the ray source, and ensure that the image of the detection area of ​​the sample to be tested occupies about 2 / 3 of the entire CT image;

[0051] 3) Control the No. 1 fixed platform and the No. 2 fixed platform respectively, so that the light spots of the No. 1 spectral confocal displacement sensor and the No. 2 spectral confocal displacement sensor fall on the middle position of the vertically placed wedge mark and the horizontally placed wedge mark respectively, to ensure that the light spots will not exceed the range of the wedge mark during the detection process; Specifically, the spectral confocal displacement sensor is fixed at a position 10mm away from the object to be measured by a bracket, and its incident light is horizontally irradiated to the surface of the sample to be measured. Among them, the wedge mark is ultra-precision machined, with a bottom size of 3mm×20mm, a thickness of 3mm at the highest point, a surface roughness of less than 0.1μm, and a low material density and a small ray attenuation coefficient.

[0052] 4) The position of the sample to be tested is set as the initial position, and the measurement data of spectral confocal displacement sensor No. 1 and spectral confocal displacement sensor No. 2 are collected;

[0053] 5) Set the scanning process of industrial CT, drive the stepper motor to control the rotating platform to drive the sample to rotate one circle in the set time. The set time cannot be too long. Too slow will reduce the generation of inertia. Use two spectral confocal displacement sensors to detect the displacement of the final positions of the two wedge marks respectively.

[0054] Specifically, industrial CT fine scanning usually takes 1 hour. For example, if the sample width is 300mm and the number of pixels of the flat panel detector is 3000, the pixel size of the CT image obtained by the industrial CT fine scanning of the sample is 100μm. Therefore, in order to obtain high-quality industrial CT images, after the sample rotates for 1 hour, the sample under test is not allowed to drift by more than 100μm. In order to determine whether the sample under test will affect the quality of the industrial CT image due to drift by observing the drift of the sample in a short period of time, the drift detection and judgment is carried out using the standard that the sample rotates for 1 minute and the sample under test does not drift by more than 1.6μm.

[0055] 6) The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination, wherein the pixel size can be replaced by the displacement measurement data of the spectral confocal displacement sensor when obtaining a high-quality industrial CT fine scanning image known before the test; during rapid detection, when the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value, it is determined to have no effect; otherwise, it is necessary to disassemble the sample to be tested and reinstall it between the limit clamps, and then repeat the above steps for detection and determination until the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value. Example 2

[0056] Based on Example 1, a detection device for detecting drift of industrial CT samples is designed based on digital image correlation (DIC) technology. Example 2 replaces the spectral confocal displacement sensor in Example 1.

[0057] See also Figure 7 and Figure 8 , the DIC-based drift detection system includes a crossbeam 27 and a No. 1 digital camera 25, a No. 2 digital camera 26 and a fill light device 28 mounted thereon, and the data captured by the digital camera is led out through a system bus box 23 and transmitted to a host 24 for processing;

[0058] The fill light device 28 is fixed on the cross beam 27 to vertically illuminate the surface of the sample 14 to be tested. The No. 1 digital camera 25 and the No. 2 digital camera 26 are symmetrically mounted on the cross beam 27 and placed on both sides of the fill light device 28 .

[0059] Furthermore, in this embodiment, the spacing and height of the No. 1 digital camera 25 and the No. 2 digital camera 26, the angle and distance between the digital camera and the calibration plate are adjusted, and the calibration plate images are taken from different directions for calibration to obtain the internal and external parameters of the camera;

[0060] Furthermore, in this embodiment, laser drilling is used to process the spray film, and the speckle is sprayed on the surface of the sample 14 to be tested. Then, the object 14 to be tested is fixed on the rotating platform 12 by the limit fixture 11, and the rotating platform 12 equipped with the stepping motor 13 drives the sample 14 to rotate one circle at a set fast speed, and the images of the initial position and the rotation end position of the sample 14 to be tested are respectively taken by the No. 1 digital camera 25 and the No. 2 digital camera 26. The captured images are transmitted to the host 24 via the system bus box 23 to calculate the drift amount of the sample 14 to be tested.

[0061] The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination. The pixel size can be replaced by the displacement measurement data of the three-dimensional DIC system when obtaining a high-quality industrial CT fine scanning image known before the test.

[0062] During rapid testing, when the ratio of the sample drift amount to the rapid testing time is less than the drift rate standard value, it is determined that the drift of the tested sample 14 does not affect the CT image quality. Otherwise, the tested sample 14 needs to be reloaded and fixed. Example 3

[0063] For the accuracy of the sample, the spectral confocal displacement sensor method of Example 1 and the digital camera method of Example 2 need to be used simultaneously, so as to conveniently filter out the data of machine failure and prevent the wrong data from affecting the accuracy of the test.

[0064] During the setup, the spectral confocal displacement sensor and the digital camera are at different heights in the z-axis direction. The digital camera will not capture the pattern of the wedge mark, thus affecting the capture of the pattern of the sample being tested.

[0065] The stepper motor is driven to control the rotating platform to drive the sample to be tested to rotate one circle in a set time. After 5-10 times, the drift of the sample 14 to be tested is recorded by the methods of Example 1 and Example 2 respectively. The data of these 5-10 groups are compared, and the data with large difference in drift are screened out. These data are samples with data failure, and the remaining data are retained.

[0066] The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination. The pixel size can be replaced by the displacement measurement data of the spectral confocal displacement sensor when obtaining a high-quality industrial CT fine scanning image known before the test.

[0067] During rapid testing, when the ratio of the sample drift amount to the rapid testing time is less than the drift rate standard value, it is determined that the drift of the tested sample 14 does not affect the CT image quality. Otherwise, the tested sample 14 needs to be reloaded and fixed.

[0068] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modification, equivalent substitution or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for detecting drift of a sample under test in industrial CT, characterized in that: A device for detecting drift of an industrial CT sample under test is used, comprising a limit clamp (11) for clamping a sample under test (14), wherein the limit clamp (11) can be fixed on a rotating platform (12); the sample under test (14) is detected by a drift detection system, wherein a wedge mark is provided on the drift detection system, and a spectral confocal displacement sensor falls on the wedge mark; the cross section of the wedge mark is triangular; the wedge mark comprises a vertically placed wedge mark (15) and a horizontally placed wedge mark (16) provided on both sides of the sample under test (14); the spectral confocal displacement sensor comprises a No. 1 spectral confocal displacement sensor (17) and a No. 2 spectral confocal displacement sensor (18); the No. 1 The spectral confocal displacement sensor (17) is fixed on a No. 1 fixed platform (19), and the No. 1 fixed platform (19) is mounted on a z-direction guide rail (21) of the No. 1 fixed platform; the No. 2 spectral confocal displacement sensor (18) is fixed on a No. 2 fixed platform (20), and the No. 2 fixed platform (20) is mounted on a z-direction guide rail (22) of the No. 2 fixed platform; and the industrial CT system is also included, wherein the planar positions of the industrial CT system and the sample to be measured (14) are both adjusted by an x-direction guide rail (9) and a y-direction guide rail (10); the vertically placed wedge-shaped mark (15) and the horizontally placed wedge-shaped mark (16) are respectively arranged on opposite sides of the same horizontal height of the surface of the sample to be measured (14); A No. 1 fixed platform (19) is mounted on a No. 3 guide column (3); the No. 2 fixed platform (20) is mounted on a No. 4 guide column (4); the rotating platform (12) is driven to rotate by a stepping motor (13); the industrial CT system comprises a No. 1 guide column (1) and a No. 2 guide column (2); a flat panel detector z-direction guide rail (7) is arranged on the No. 1 guide column (1), and a flat panel detector (5) is arranged on the flat panel detector z-direction guide rail (7); a ray source z-direction guide rail (8) is arranged on the No. 2 guide column (2), and a ray source (6) is arranged on the ray source z-direction guide rail (8); the center of the flat panel detector (5) and the position to be detected of the sample (14) to be detected are arranged on the center of the flat panel detector (5) and the position to be detected of the sample (14) to be detected are arranged on the center of the flat panel detector (5) and the position to be detected of the sample (14) to be detected are arranged on the center of the flat panel detector (5) and the position to be detected of the sample (14) to be detected are arranged on the guide column (1) The image of the sample detection area is in the same straight line as the ray source (6) and occupies 1 / 2 to 2 / 3 of the entire CT image; the No. 1 spectral confocal displacement sensor (17) and the No. 2 spectral confocal displacement sensor (18) are communicatively connected to the host (24) via a system bus box (23); and / or the drift detection system comprises a crossbeam (27) and a No. 1 digital camera (25), a No. 2 digital camera (26) and a fill light device (28) mounted thereon; the fill light device (28) is fixed on the crossbeam (27) and vertically illuminates the surface of the sample (14) to be tested, and the No. 1 digital camera (25) and the No. 2 digital camera (26) are symmetrically mounted on the crossbeam (27) and placed on both sides of the fill light device (28); and the following steps are included: 1) A vertically placed wedge-shaped mark (15) and a horizontally placed wedge-shaped mark (16) are respectively arranged on both sides of the sample (14) to be tested; and / or a fill light device (28) is fixed on a crossbeam (27) and vertically illuminates the surface of the sample (14) to be tested, and a No. 1 digital camera (25) and a No. 2 digital camera (26) are symmetrically installed on the crossbeam (27) and placed on both sides of the fill light device (28); the sample (14) to be tested is fixed at the middle position of the rotating platform (12) by a limit clamp (11), and it is ensured that the sample (14) to be tested is stable and does not shake; 2) adjusting the flat panel detector z-direction guide rail (7), the radiation source z-direction guide rail (8), the x-direction guide rail (9), and the y-direction guide rail (10) so that the detection area of ​​the sample to be tested (14) is located on a straight line connecting the geometric center of the flat panel detector (5) and the radiation source (6), and ensuring that the image of the detection area of ​​the sample to be tested (14) occupies 2 / 3 of the entire CT image; 3) respectively controlling the No. 1 fixed platform (19) and the No. 2 fixed platform (20) so that the light spots of the No. 1 spectral confocal displacement sensor (17) and the No. 2 spectral confocal displacement sensor (18) fall on the middle position of the vertically placed wedge mark (15) and the horizontally placed wedge mark (16), respectively, to ensure that the light spots do not exceed the range of the wedge marks during the detection process; 4) setting the position of the sample to be measured (14) as the initial position, and collecting measurement data of the spectral confocal displacement sensor No. 1 (17) and the spectral confocal displacement sensor No. 2 (18); 5) Setting the scanning process of the industrial CT, driving the stepper motor (13) to control the rotating platform (12) to drive the sample (14) to rotate once in a set time, using two spectral confocal displacement sensors to respectively detect the displacement of the final positions of the two wedge-shaped marks; and / or using a No. 1 digital camera (25) and a No. 2 digital camera (26) to take images of the initial position and the rotation end position of the sample (14) to be tested, and transmitting the captured images to the three-dimensional DIC system of the host (24) via the system bus box (23) to calculate the drift of the sample (14) to be tested; 6) The ratio of the pixel size of the industrial CT fine scanning image to be obtained to the fine scanning time is set as the drift rate standard value for determination, wherein the pixel size can be replaced by the displacement measurement data of the spectral confocal displacement sensor and / or the displacement measurement data of the three-dimensional DIC system known before the test when obtaining a high-quality industrial CT fine scanning image; during rapid detection, when the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value, it is determined that there is no impact; otherwise, it is necessary to disassemble the sample to be tested (14) and reinstall it between the limit clamps (11), and then repeat the above steps for detection and determination until the ratio of the drift amount of the sample to the rapid detection time is less than the drift rate standard value.

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