Container storage device

Abstract

Provided is a container storage device capable of suctioning gas leaking from a lid of a container using a simpler configuration than in the prior art. A container storage device (100) is provided with: a mounting table (20) on which a container (1) having a lid (1c) on a side surface is mounted; a purge device (10) for supplying a purge gas to the container (1); and a suction device (30) that sucks gas leaked from the container (1), the mounting table (20) being provided with: a bottom surface section (21) on which the container (1) is mounted; and a side wall part (23) extending upward from the bottom surface part and facing the lid of the container placed on the bottom surface part, the suction device (30) sucks gas leaking from the side surface where the lid (1c) of the container (1) is located through a first opening (50) provided in the bottom surface part (21) or the side wall part (23), and the upper end (23a) of the side wall part (23) is lower than the upper end (1h) of the lid (1c) of the container (1) placed on the bottom surface part (21).

Description

Technical Field

[0001] The present invention relates to a container storage device. Background Art

[0002] In semiconductor manufacturing plants, etc., there are cases where a container storage device is provided, which is used to temporarily store containers that contain items such as semiconductor wafers (for example, refer to Patent Document 1). For example, the container storage device is equipped with a purge device that supplies a purge gas such as nitrogen into the container. The above-mentioned container is provided with a cover on its side for opening and closing an opening for entering and exiting items, and there is a case where the purge gas leaks from the periphery of the cover. Therefore, in the container storage device described in Patent Document 1, a suction device is provided, which sucks the gas leaking from the cover when the purge gas is supplied to the container by the purge device.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent No. 6607314 Summary of the invention

[0006] The suction device described in Patent Document 1 is provided opposite to the lid of each container and has an opening larger than the lid in order to suck the gas leaking from the lid. Therefore, there is a case where not only the suction device becomes larger, but also the structure of the container storage device becomes complicated. Therefore, it is desired to suck the gas leaking from the lid with a simpler structure than before.

[0007] An object of the present invention is to provide a container storage device capable of sucking gas leaking from a lid of a container with a simple structure.

[0008] The container storage device of the solution of the present invention comprises: a loading platform for loading a container having a cover on a side; a purging device for supplying a purging gas to the container; and a suction device for sucking gas leaked from the container. In the container storage device, the loading platform comprises: a bottom portion for loading the container; and a side wall portion extending upward from the bottom portion and opposite to the cover of the container loaded on the bottom portion, the suction device sucks gas leaked from the side of the container where the cover is located through a first opening provided in the bottom portion or the side wall portion, and the upper end of the side wall portion is lower than the upper end of the cover of the container loaded on the bottom portion.

[0009] Effects of the Invention

[0010] According to the container storage device of the above scheme, the suction device can be miniaturized compared with the conventional suction device having an opening larger than the container cover. In addition, the gas leaked from the periphery of the container cover can be sucked with a simpler structure than the conventional one.

[0011] In addition, it is also possible that the platform can carry multiple containers, the bottom surface and the side wall are continuously formed within the range of multiple containers, and the number of the first opening is less than the number of containers that can be placed on the platform. According to this structure, the first opening can be less than the number of containers that can be placed on the platform. Therefore, the number of components such as the cover covering the first opening and the piping connected to the first opening is reduced, and the structure can be further simplified. In addition, it is also possible that the side wall portion is set to surround the four sides of the multiple containers placed on the bottom surface together. According to this structure, the side wall portion surrounds the multiple containers together, so the number of components is reduced, and the structure can be further simplified. In addition, it is also possible that the height of the upper end of the side wall portion is set within a range of 80 mm or more and 120 mm or less relative to the bottom surface of the bottom surface or the container. According to this structure, it is possible to absorb the gas leaked from the container while suppressing the height of the side wall portion. In addition, it is also possible that the height of the upper end of the side wall portion is set within a range of more than one quarter and less than one third of the height of the container placed on the bottom surface. According to this structure, even when the container is tilted, the container collides with the side wall portion, thereby preventing the container from falling.

[0012] In addition, the first opening may be provided on the bottom surface portion between the side wall portion and the container placed on the bottom surface portion. According to this structure, the first opening is arranged below the lid side of the container, so that the gas leaking from the periphery of the lid of the container can be efficiently sucked from the first opening. In addition, the side wall portion may be provided to surround the container placed on the bottom surface portion. According to this structure, the gas leaking from the container is retained inside the side wall portion, so that the gas can be suppressed from diffusing to the bottom of the container storage device.

[0013] In addition, the suction device may include a second opening provided on the bottom surface, and a nozzle that discharges the gas flowing out of the exhaust port formed on the bottom surface of the container to the top of the bottom surface through the second opening, and the gas discharged from the nozzle is sucked through the first opening. According to this structure, the suction device 30 does not suck the inside of the container, so it is possible to suppress the negative pressure in the container. In addition, the nozzle may be arranged near the first opening. According to this structure, the gas leaking from the periphery of the lid of the container and the gas in the container discharged from the nozzle can be sucked together from the first opening. In addition, the mounting table may include a cover that covers the nozzle and the first opening and guides the gas discharged from the nozzle toward the first opening, and the cover has a third opening formed on the upper surface of the cover and guides the gas flowing in from the third opening toward the first opening. According to this structure, it is possible to suppress the diffusion of the gas discharged from the nozzle due to the cover, and to suck the gas leaking from the container from the first opening through the third opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a diagram showing an example of a schematic configuration of a container storage device according to an embodiment.

[0015] Figure 2 This is a diagram showing a part of a container stored in a container storage device as seen from the side.

[0016] Figure 3 This is a diagram showing how a container is conveyed to a container storage device.

[0017] Figure 4 This is a diagram showing an example of a suction device.

[0018] Figure 5 This is a diagram showing an example of a cover.

[0019] Figure 6 It is a diagram showing the flow of the purge gas.

[0020] Figure 7 This is a flowchart showing an example of a container storage method according to an embodiment.

[0021] Figure 8 It is a diagram showing a first modified example of the suction device.

[0022] Fig. 9 It is a diagram showing a second modified example of the suction device.

[0023] Fig.10 This is a diagram schematically showing the state of gas around the lid of a container in a container storage device of a comparative example.

[0024] Fig.11 This is a diagram schematically showing the state of gas around the lid of a container in the container storage device according to the present embodiment. DETAILED DESCRIPTION

[0025] Hereinafter, the present invention will be described by an embodiment, but the following embodiment does not limit the invention involved in the claims. In addition, the combination of features described in the embodiment is not necessarily all necessary for the solution of the invention. It should be noted that in the drawings, the same or similar parts are sometimes marked with the same figure mark and repeated descriptions are omitted. In addition, the shape and size of the elements in the drawings are sometimes exaggerated for a clearer description, and sometimes the size and shape are different from the actual product. In the following figures, the XYZ coordinate system is used to illustrate the directions in the figures. In the XYZ coordinate system, the plane parallel to the horizontal plane is set to the XY plane. In addition, the direction perpendicular to the XY plane is expressed as the Z direction. For each of the X direction, the Y direction and the Z direction, it is assumed that the direction indicated by the arrow in the figure is the + direction, and the opposite direction of the direction indicated by the arrow is the - direction for description.

[0026] The container storage device 100 can transfer the container 1 from, for example, an overhead transport vehicle 2 that transports the container 1, and is disposed near the ceiling C. The container storage device 100 is fixed in a state of being suspended from the ceiling C by, for example, a suspension metal fitting, and is disposed near the ceiling C. The container storage device 100 is disposed, for example, on a travel track (overhead track) R (see FIG. 1 ) of the overhead transport vehicle 2. Figure 3 ) is offset to the side directly below the travel track R. The container storage device 100 is, for example, a buffer for temporarily storing the container 1 transported by the overhead transport vehicle 2. It should be noted that the container storage device 100 may also be arranged directly below the travel track R.

[0027] Figure 1 This is a diagram showing an example of a schematic configuration of a container storage device 100 according to the embodiment. Figure 2 This is a diagram showing a part of the container 1 stored in the container storage device 100 as seen from the side. Figure 3 1 is a diagram showing a state where a container 1 is conveyed to a container storage device 100. Figure 1 As shown, the container storage device 100 can store a plurality of containers 1. The container 1 contains items such as wafers or reticles used in the manufacture of semiconductor devices. The container 1 is, for example, a FOUP (Front Opening Unified Pod), a SMIF Pod (wafer boat automation transfer box), or a reticule box, which can be purged inside with a purge gas. It should be noted that the container 1 can also be in other forms that can be transported by the overhead transport vehicle 2.

[0028] like Figure 2 and Figure 3 As shown, the container 1 includes a main body 1a, an opening 1b, a cover 1c and a flange 1g. The main body 1a includes a recessed portion 1d for positioning on the bottom side. The main body 1a includes a gas inlet 1e and a gas exhaust port 1f on the bottom side. As an example, the inlet 1e and the exhaust port 1f are respectively arranged on the bottom side of the main body 1a near the end in the X direction. The inlet 1e and the exhaust port 1f are connected to the inside and the outside of the main body 1a, respectively. The inlet 1e is used to introduce the purge gas into the main body 1a. The exhaust port 1f is used to discharge the gas including the purge gas in the main body 1a from the main body 1a. The inlet 1e and the exhaust port 1f can also be provided with a check valve (not shown) to prevent backflow.

[0029] The opening 1b is provided so as to face the horizontal direction (+Y direction). Articles such as wafers are accommodated in the container 1 through the opening 1b. For example, the cover 1c is provided to open and close the opening 1b, and is provided on the container 1 in a detachable manner. Even if the cover 1c is closely attached to the main body 1a, there is a possibility that a gap is generated between the main body 1a and the cover 1c, and the purge gas or the like may leak from the gap.

[0030] The top of the container 1 is provided with, for example, a flange 1g. When the container 1 is transported by the overhead transport vehicle 2, the flange 1g is gripped by the overhead transport vehicle 2 to transport it. The container 1 is transported from the container storage device 100 to a processing device (not shown) and from the processing device to the container storage device 100 by the overhead transport vehicle 2. The processing device is, for example, a film forming device, a coating and developing device, an exposure device, an etching device, etc., and performs various processes in the process of manufacturing a device (for example, a semiconductor device). The container storage device 100 is, for example, arranged in a transport path for transporting the container 1, and is used to temporarily store the container 1.

[0031] like Figure 3 As shown, the overhead transport vehicle 2 travels along the travel track R by the driving force of the travel section 4. The travel track R is provided near the ceiling C of, for example, a clean room, etc., in a state of being suspended by a suspension metal member Ra, and extends along the X direction. The overhead transport vehicle 2 includes a main body 3 and a travel section 4. The travel section 4 has wheels 4a, a driving source such as an electric rotary motor or a linear motor that drives the wheels 4a (not shown), and an encoder (not shown). The wheels 4a are arranged so as to rotate on a track surface provided on the inner side of the travel track R. The encoder detects the number of rotations of the wheel 4a, etc., and outputs its detection result to a control unit (not shown), for example, provided in the main body 3. The control unit controls the driving source based on the detection result of the encoder, and controls the speed of the overhead transport vehicle 2, etc.

[0032] The upper part of the main body 3 is mounted on the connecting part 3a extending downward from the traveling part 4. The main body 3 is in a state of being suspended from the traveling part 4 via the connecting part 3a. The main body 3 can accommodate the container 1 inside. The main body 3 includes a lateral delivery mechanism 5, a lifting part 6 and a holding part 7. The lateral delivery mechanism 5 is arranged at the upper part of the main body 3. The lateral delivery mechanism 5 can be changed into a state in which the container 1 is accommodated in the main body 3 and a state in which the container 1 is delivered laterally. The lateral delivery mechanism 5 includes a base 5a and a lateral delivery part 5b. In addition, a rotating part can also be provided on the base 5a. The rotating part has an electric motor and the like, and can rotate with the Z direction (vertical direction) as the rotation axis. The lateral delivery mechanism 5 can be rotated by rotating the rotating part, and the lateral delivery direction based on the lateral delivery mechanism 5 can be changed.

[0033] The lateral delivery part 5b is installed on the lower surface side of the base 5a. The lateral delivery part 5b is, for example, a plurality of movable plates arranged overlapping in the Z direction. The plurality of lateral delivery parts 5b can be moved along a guide (not shown) in the +Y direction or -Y direction (a direction orthogonal to the travel direction of the travel part 4) by the driving force of a power device (not shown) such as an electric motor. A lifting part 6 is installed on the lateral delivery part 5b of the lowest layer. The lateral delivery mechanism 5 can move the lateral delivery part 5b as a movable plate by using a driving device, so that the lifting part 6 and the holding part 7 installed on the lateral delivery part 5b of the lowest layer slide and move in a direction orthogonal to the travel direction.

[0034] The lifting unit 6 is controlled by the control unit to lift and lower the gripping unit 7 at a predetermined speed. In addition, the lifting unit 6 is controlled by the control unit to keep the gripping unit 7 at a target height. The gripping unit 7 suspends and holds the container 1 by gripping the flange 1g of the container 1. The gripping unit 7 is, for example, a chuck having a claw that can move in the horizontal direction. In this way, the overhead transport vehicle 2 slides the lateral delivery unit 5b to deliver the lifting unit 6 horizontally, and lowers the gripping unit 7 by using the lifting unit 6, thereby enabling the lateral delivery and transfer of the container 1 to and from the target position of the container storage device 100. In addition, the overhead transport vehicle 2 can lower the gripping unit 7 by using the lifting unit 6 without sliding the lateral delivery unit 5b to deliver the container 1.

[0035] The container storage device 100 includes a purge device 10, a mounting table 20, and a suction device 30. The purge device 10 supplies purge gas to the container 1 stored in the container storage device 100. The purge device 10 is provided on the mounting table 20. Figure 1 In the embodiment, the purge device 10 is provided for each container 1 stored in the container storage device 100 , but the present invention is not limited to this embodiment. The purge device 10 may be provided for a part of the containers 1 stored in the container storage device 100 .

[0036] The purge device 10 includes, for example, a purge nozzle 10a and a flow control device (not shown) such as a mass flow controller for controlling the flow rate of the purge gas. The purge nozzle 10a is provided in a state of protruding upward from the mounting table 20. The purge nozzle 10a is arranged in a manner connected to the inlet 1e of the container 1 when the container 1 is mounted on the mounting table 20. The purge nozzle 10a is connected to the inlet 1e of the container 1 via a pipe 12 (see FIG. 1 ) described later. Figure 6 ) and the purge gas supply unit 11 (refer to Figure 6 ) is connected. The purge gas is a gas such as nitrogen that is inactive to the items contained in the container 1. The purge device 10 supplies the purge gas from the supply unit 11 to the inside from the inlet 1e of the container 1 via the pipe 12, and uses the purge gas to purge the inside of the container 1.

[0037] The loading platform 20 is arranged at a position offset to the side from directly below the track of the overhead transport vehicle 2. The loading platform 20 is loaded with the container 1 from the front side of the container storage device 100 by the lateral delivery and transfer by the overhead transport vehicle 2. The front side of the container storage device 100 refers to the side facing the overhead transport vehicle 2. The number of loading platforms 20 arranged in the container storage device 100 is Figure 1 In the figure, there are two mounting tables 20 arranged side by side in the X direction, but the present invention is not limited to this form, and the number of mounting tables 20 may be one or more.

[0038] In this embodiment, one mounting table 20 can mount a plurality of containers 1, but this may be replaced with a configuration in which one mounting table 20 can mount one container 1. Figure 1 , a state where four containers 1 are placed on one mounting table 20 is shown, and a state where no container 1 is placed on the other mounting table 20 is shown. It should be noted that the mounting tables 20 may be arranged in parallel instead of being arranged in a row in the X direction.

[0039] The mounting table 20 includes a bottom portion 21, a side wall portion 22, a support column 26, and a frame member 27. The container 1 is mounted on the bottom portion 21. A plurality of pins (movement pins) 17 for positioning the container 1 are provided on the bottom portion 21. The pins 17 are arranged corresponding to the positions of the recessed portions 1d provided at the bottom of the container 1, and can be inserted into the recessed portions 1d. When the container 1 is mounted on the bottom portion 21, the pins 17 are inserted into the recessed portions 1d of the container 1, thereby positioning the container 1. It should be noted that the shapes and numbers of the recessed portions 1d and the pins 17 are arbitrary.

[0040] The side wall portion 22 is provided so as to surround the four sides of one or more containers 1 placed on the bottom portion 21. The side wall portion 22 is provided so as to extend vertically upward from the bottom portion 21. The side wall portion 22 is, for example, a plate-shaped member surrounding the periphery of the container 1. The side wall portion 22 includes a first side wall portion 23, a second side wall portion 24, and a pair of third side wall portions 25. The first side wall portion 23 extends upward from the bottom portion 21 and faces the lid 1c of the container 1 placed on the bottom portion 21. The first side wall portion 23 is provided on the front side of the container storage device 100. In addition, in the case where the placing table 20 can store a plurality of containers 1, the first side wall portion 23 may be formed continuously over the entire range corresponding to the plurality of containers 1. However, the present invention is not limited to this form, and the first side wall portion 23 may be provided for each container 1.

[0041] The upper end 23a of the first side wall portion 23 is lower than the upper end 1h of the cover 1c of the container 1 placed on the bottom portion 21. The height H2 of the upper end 23a of the first side wall portion 23 is lower than the height H1 of the upper end 1h of the cover 1c. Figure 2The height shown is the height from the bottom of the container 1, but it may be the height from the bottom portion 21. The upper end 23a of the first side wall portion 23 is set within a range of 80 mm to 120 mm relative to the bottom of the container 1 or the bottom portion 21.

[0042] In addition, the upper end 23a of the first side wall portion 23 may be set within a range of not less than one quarter and not more than one third of the height of the container 1 placed on the bottom portion 21. By setting the height of the first side wall portion 23 in this way, it is possible to suppress the gas leaking from the container 1 from falling downward from the bottom portion 21, and the container 1 will collide with the upper end 23a of the first side wall portion 23, the upper end 24a of the second side wall portion 24, or the upper end 25a of the third side wall portion 25 and be locked even when the container 1 is tilted, so that the container 1 placed on the bottom portion 21 can be prevented from falling from the bottom portion 21. In addition, even if the cover 1c accidentally falls off the stored container 1, the cover 1c will collide with the upper end 23a of the first side wall portion 23 and be locked, so that the cover 1c can be prevented from falling.

[0043] The second side wall portion 24 is provided on the surface opposite to the front side of the container storage device 100, that is, on the back side. In other words, the second side wall portion 24 is provided on the surface opposite to the surface facing the overhead crane 2 as the front side. The height of the upper end 24a of the second side wall portion 24 may be the same as the height of the container 1 placed on the bottom portion 21, or may be different. The height of the upper end 24a of the second side wall portion 24 may be the same as the height of the upper end 23a of the first side wall portion 23. The second side wall portion 24 has the function of suppressing the gas leaking from the container 1 from going around to the back side and falling downward from the bottom portion 21, and preventing the container 1 placed on the bottom portion 21 from falling from the bottom portion 21.

[0044] The third side wall portion 25 is provided on the left and right sides of the container storage device 100, that is, at both ends of the container storage device 100 in the X direction. The third side wall portion 25 is provided on the +X side and the -X side of the container 1 together with the support pillar 26 described later. The third side wall portion 25 is provided so as to connect the end of the first side wall portion 23 and the end of the second side wall portion 24. As a result, the plurality of containers 1 are surrounded by the end of the first side wall portion 23, the second side wall portion 24, and the pair of third side wall portions 25. By surrounding the container 1 with the side wall portion 22, the gas leaked from the periphery of the lid 1c of the container 1 can be retained inside the side wall portion 22 and suppressed from diffusing downward.

[0045] In addition, the end of the first side wall portion 23, the second side wall portion 24, and the pair of third side wall portions 25 are arranged so as to coincide with the outer edge of the mounting table 20 in a plan view. The height of the upper end 25a of the third side wall portion 25 may be the same as the height of the container 1 mounted on the bottom portion 21, or may be different in height. The height of the upper end 25a of the third side wall portion 25 may also be the same as the height of the upper end 23a of the first side wall portion 23.

[0046] The support column 26 is provided on the +X side and the -X side of the mounting table 20 to support the mounting table 20. The support column 26 is connected to the bottom surface portion 21, and as described above, a part of the support column 26 is used as a part of the third side wall portion 25. A frame member 27 is provided at the upper end of the support column 26 so as to connect the two support columns 26. The frame member 27 is arranged above the bottom surface portion 21 and extends in the X direction. The frame member 27 is suspended from the ceiling C via a suspension metal fitting not shown. By adjusting the suspension metal fitting, the height position of the frame member 27 (container storage device 100) can be adjusted.

[0047] The suction device 30 sucks the purge gas leaking from the periphery of the cover 1c of the container 1. Here, the purge gas after purging the container 1 may leak from the mounting portion of the cover 1c of the container 1, etc. The purge gas may affect the human body depending on the type of gas or the concentration of the gas. When the container 1 is stored in an open environment, the purge gas leaking from the container 1 may cause the surrounding environment to deteriorate. In particular, when the operator works near the container 1, the concentration of the purge gas leaking from the container 1 may become higher than the ambient gas near the container 1. In addition, in the clean room, there is a case where an airflow in which clean air flows downward from a fan filter unit arranged at the upper part of the building, that is, a so-called downflow, is formed. When the container 1 is stored in an open environment, due to the downflow, the purge gas may flow toward the ground, and the concentration of the purge gas near the ground may become higher. The suction device 30 of this embodiment sucks and recovers the purge gas leaking from the container 1, and suppresses the purge gas from spreading around the container storage device 100 and near the ground.

[0048] The suction device 30 sucks gas (including purge gas) leaking from the periphery of the cover 1c of the container 1. The suction device 30 also sucks gas released from the interior of the container 1 through the exhaust nozzle 40. The exhaust nozzle 40 will be described later. The suction device 30 exhausts the sucked gas from the container storage device 100. Figure 4 is a diagram showing an example of the suction device 30. Figure 4 As shown in FIG. 1 , the suction device 30 includes a suction unit 31, a pipe 32, and a pipe 33. The suction unit 31 includes an exhaust nozzle 40, a pipe 41, a flow rate measuring device 42, a first nozzle 50, a second nozzle 60, and a cover 70. Figure 1 In the example shown, the suction unit 31 is provided for each container 1. However, the present invention is not limited to this structure, and the suction unit 31 may be provided for each of a plurality of containers 1.

[0049] Regarding the exhaust nozzle 40, when the purge gas is supplied from the purge nozzle 10a into the container 1 via the inlet 1e of the container 1 by the purge device 10, the gas in the container 1 is discharged via the exhaust port 1f of the container 1 (see Figure 6 ) flows out. The exhaust nozzle 40 is provided on the bottom portion 21 in such a manner as to be connected to the exhaust port 1f of the container 1 when the container 1 is placed on the placing table 20. The gas inside the container 1 flows out to the outside of the container 1 through the exhaust nozzle 40 and is sucked by the suction device 30. In addition, the exhaust nozzle 40 is an example of the second opening.

[0050] The pipe 41 is provided, for example, on the back side of the bottom portion 21. One end of the pipe 41 is connected to the exhaust nozzle 40, and the other end is connected to the second nozzle 60. The flow rate measuring device 42 is provided, for example, on the back side of the bottom portion 21. The flow rate measuring device 42 is provided in the middle of the pipe 41, and measures the flow rate of the gas discharged from the exhaust nozzle 40 and flowing in the pipe 41. For example, a mass flow controller can be used as the flow rate measuring device 42.

[0051] The first nozzle 50 is, for example, provided at the bottom portion 21 or inside the bottom portion 21. The first nozzle 50 is provided at the bottom portion 21 between the first side wall portion 23 and the container 1 placed on the bottom portion 21. The first nozzle 50 is arranged on the inner side of the cover 70 mounted on the bottom portion 21. The first nozzle 50 delivers the gas in the cover 70 into the pipe 32 via a connecting portion 51 such as a joint component. The connecting portion 51 connects the first nozzle 50 with the pipe 32. The first nozzle 50 protrudes upward from the upper surface of the bottom portion 21 in the cover 70. A check valve for preventing backflow of gas may also be provided at the first nozzle 50. In addition, the first nozzle 50 is an example of the first opening.

[0052] The second nozzle 60 is provided at the bottom portion 21. The second nozzle 60 is provided at the bottom portion 21 between the first side wall portion 23 and the container 1 placed on the bottom portion 21. The second nozzle 60 protrudes upward from the upper surface of the bottom portion 21 in the cover 70. The second nozzle 60 is arranged near the first nozzle 50. For example, the first nozzle 50 and the second nozzle 60 are arranged side by side in the X direction. In addition, a check valve for preventing the backflow of the gas may also be provided at the second nozzle 60. The second nozzle 60 discharges the gas flowing out of the exhaust port 1f at the bottom surface of the container 1 to the top of the bottom portion 21 via the exhaust nozzle 40.

[0053] The second nozzle 60 is connected to the pipe 41, and discharges the gas flowing in the pipe 41 into the cover 70. The cover 70 is provided on the bottom portion 21 between the first side wall portion 23 and the container 1 placed on the bottom portion 21. The cover 70 is provided so as to cover the first nozzle 50 and the second nozzle 60. The cover 70 guides the gas discharged from the second nozzle 60 so as to flow toward the pipe 32 via the first nozzle 50. In other words, the cover 70 guides the gas discharged from the second nozzle 60 toward the first nozzle 50.

[0054] Figure 5 is a diagram showing an example of the cover 70. Figure 5 As shown, for example, the cover 70 includes a third opening 71, a first space portion 72, a second space portion 73, and a third space portion 74. The third opening 71 is formed on the upper surface of the cover 70. The third opening 71 is a circular hole, but its shape is not particularly limited. The third opening 71 is a hole for introducing the gas G3 leaking from the periphery of the cover 1c of the container 1 into the cover 70. In addition, the upper surface of the cover 70 is lower than the upper end 23a of the first side wall portion 23. In other words, the third opening 71 is provided at a position lower than the upper end 23a of the first side wall portion 23. The gas G3 leaking from the periphery of the cover 1c of the container 1 is introduced into the cover 70 via the third opening 71 and is sucked by the first nozzle 50.

[0055] The first space portion 72 is a space in the cover 70, and the gas G2 from the second nozzle 60 is discharged to the first space portion 72. The first space portion 72 is connected to the pipe 41 via the second nozzle 60. The first space portion 72 is, for example, a cylindrical space. The second space portion 73 connects the first space portion 72 and the third space portion 74. The second space portion 73 guides the gas G2 in the first space portion 72 to the third space portion 74. The third space portion 74 connects the third opening 71 and the first nozzle 50 (first opening). The third space portion 74 is, for example, a cylindrical space. The third space portion 74 guides the gas G3 flowing in from the third opening 71 to the first nozzle 50. In addition, the third space portion 74 is connected to the first space portion 72 via the second space portion 73. Therefore, the third space portion 74 guides the gas G2 flowing from the first space portion 72 to the second space portion 73 to the first nozzle 50.

[0056] As described above, the cover 70 has a function of guiding the gas G2 discharged from the second nozzle 60 toward the first nozzle 50 , and a function of guiding the gas G3 leaking from the periphery of the cover 1 c of the container 1 toward the first nozzle 50 from the third opening 71 .

[0057] The pipe 32 is connected to the first nozzle 50 via the connection portion 51. Figure 1 As shown, the pipe 32 is connected to the pipe 33. Figure 13 shows a state where one first nozzle 50 is connected to the pipe 32, and the other first nozzles 50 are not shown connected to the pipe 32. The gases G2 and G3 sucked from the first nozzle 50 are sent to the pipe 33 via the pipe 32. The pipe 32 includes a portion extending in the X direction along the bottom surface of the bottom portion 21 and a portion extending in the Z direction along the support 26. The pipe 32 is connected to the pipe 33. The pipe 33 is attached to the frame member 27. The pipe 33 extends in the X direction along the frame member 27. The gases G2 and G3 are sent from the pipe 32 to the pipe 33, and are discharged to the outside from the pipe 33.

[0058] In addition, the suction device 30 is provided with a suction force generating device connected to the piping 33 and generating suction force for sucking the gases G2 and G3. However, the suction device 30 is not limited to this form, and the suction device 30 may be, for example, a form in which the piping 33 is connected to a suction force generating device (pipeline) already installed in a factory or the like. In the container storage device 100, the timing of sucking the gases G2 and G3 is not particularly limited, and, for example, it may be operated in conjunction with the operation of the purge device 10. For example, the suction by the suction device 30 may be started at the timing when the container 1 is placed on the bottom portion 21 and the purge device 10 starts to supply the purge gas to the container 1. In addition, the suction by the suction device 30 may be performed continuously without being linked to the purge device 10, and may be performed at the timing when the operator or the like performs an operation.

[0059] Next, use Figure 6 and Figure 7 A method of sucking the gases G2 and G3 by the suction device 30 will be described. Figure 6 1 is a diagram schematically showing the flow of the purge gases G2 and G3 sucked by the suction device 30 . Figure 7 FIG. 1 is a flowchart showing an example of a container storage method according to an embodiment of the present invention. Figure 7 As shown, the overhead transport vehicle 2 places the container 1 at the target position on the bottom surface 21 by lateral delivery transfer (step S101). In step S101, first, the overhead transport vehicle 2 moves to the container storage device 100 and stops at the side of the target position for placing the container 1. Next, the overhead transport vehicle 2 uses the lateral delivery mechanism 5 to laterally deliver the container 1 to just above the loading platform 20. Next, the overhead transport vehicle 2 lowers the gripping portion 7 by using the lifting portion 6, thereby placing the container 1 at the target position on the bottom surface 21. Next, by releasing the gripping portion 7 on the container 1, the container 1 is placed on the bottom surface 21.

[0060] The movement of the overhead transport vehicle 2 is controlled by a control unit (not shown) provided in the overhead transport vehicle 2. The control unit obtains information about the storage location (target position) of the container 1 from a superior control device or the like, and controls the overhead transport vehicle 2 in such a manner that the container 1 is placed in the storage location. When the container 1 is placed on the bottom surface 21, as described above, the pin 17 provided on the bottom surface 21 is engaged with the recess 1d provided on the bottom surface of the container 1, thereby positioning the container 1 on the placement table 20.

[0061] Next, the purge gas G1 is supplied to the container 1 placed on the bottom portion 21 (step S102). In step S102, when the container 1 is placed on the bottom portion 21, the inlet 1e provided on the bottom surface of the container 1 is connected to the purge nozzle 10a provided on the bottom portion 21. In this state, Figure 6 As shown, the purge device 10 supplies the purge gas G1 delivered from the supply unit 11 into the container 1 via the pipe 12 and the purge nozzle 10a. The supply amount of the purge gas G1 is controlled by a control unit (not shown) provided in the purge device 10 based on the flow rate of the purge gas G1 flowing in the pipe 12, for example.

[0062] If the supply of the purge gas G1 by the purge device 10 starts, the suction device 30 starts suction of the gas (step S103). In addition, if the container 1 is placed on the bottom portion 21, the exhaust port 1f provided on the bottom surface of the container 1 is connected to the exhaust nozzle 40 provided on the bottom portion 21. If the purge gas G1 is supplied to the container 1 in the above-mentioned step S102, the internal pressure in the container 1 increases. Due to the increase in the internal pressure of the container 1, the gas G2 in the container 1 is discharged from the exhaust port 1f, and is released from the second nozzle 60 into the hood 70 via the exhaust nozzle 40 and the pipe 41. In step S103, the gas G2 released into the hood 70 is sucked from the first nozzle 50.

[0063] In addition, if the internal pressure of the container 1 increases due to the supply of the purge gas to the container 1, there is a case where the gas G3 leaks out from around the lid 1c of the container 1. The gas G3 is retained inside the side wall portion 22 surrounding the container 1, and is sucked from the first nozzle 50 through the third opening 71 of the cover 70. The gases G2 and G3 sucked by the first nozzle 50 are discharged to the outside of the container storage device 100 (or the outside of the factory building) through the pipes 32 and 33. It should be noted that the suction device 30 can suck the gases G2 and G3 when the purge gas is supplied to the container 1, or can continue to suck the gases G2 and G3 during the storage of the container 1. In addition, it is also possible to operate the suction device 30 at a predetermined time based on the output of a timer (not shown) or the like while the container storage device 100 is storing the container 1. Through the above series of actions, the process ends.

[0064] As described above, according to the present embodiment, since the suction device 30 does not have an opening larger than the cover 1c of the container 1, the suction device 30 can be miniaturized, and the gases G2 and G3 leaking from the container 1 can be sucked with a simple structure. In addition, the upper end 23a of the first side wall portion 23 is lower than the upper end of the cover 1c of the container 1 placed on the bottom portion 21, so the lifting amount of the gripping portion 7 when the container 1 is laterally transferred by the overhead transport vehicle 2 can be reduced. As described above, the container 1 is transferred between the overhead transport vehicle 2 and the container storage device 100 by the lateral transfer of the overhead transport vehicle 2. Therefore, if a suction device whose upper end is higher than the cover 1c of the container 1 is arranged, when the container 1 is laterally transferred by the overhead transport vehicle 2, it is necessary to transfer the gripping portion 7 and the container 1 laterally and to lift the lifting portion 6 with a longer stroke to avoid the suction device. In this embodiment, the upper end 23a of the first side wall portion 23 is lower than the upper end 1h of the lid 1c of the container 1 placed on the bottom portion 21. Therefore, the lifting amount of the gripping portion 7 during lateral delivery transfer can be reduced, and the container 1 can be efficiently transferred.

[0065] In addition, since the side wall portion 22 is provided to surround the container 1, the gas G3 leaking from the periphery of the cover 1c of the container 1 is retained inside the side wall portion 22 and sucked from the first nozzle 50, so that the gases G2 and G3 can be suppressed from spreading to the activity area of ​​the worker below the mounting table 20. In addition, since the first nozzle 50 (the third opening 71 of the cover 70) is provided at the bottom portion 21 between the side surface on the cover 1c side of the container 1 and the first side wall portion 23, the first nozzle 50 is close to the cover 1c of the container 1, and the gas G3 leaking from the periphery of the cover 1c of the container 1 can be efficiently sucked from the first nozzle 50. In addition, since the gas G2 exhausted from the exhaust port 1f when the purge gas G1 is supplied to the container 1 is sucked together with the gas G3 leaking from the periphery of the cover 1c of the container 1 by the first nozzle 50, a gas recovery device for recovering the gas G2 exhausted from the exhaust port 1f is not required, and the manufacturing cost of the container storage device 100 can be reduced.

[0066] The container storage device 100 is usually installed in a clean room with a downflow. Therefore, the gas G3 leaking from around the lid 1 c of the container 1 is more efficiently retained inside the side wall portion 22 by the downflow and is sucked from the first nozzle 50 .

[0067] (First Modification)

[0068] In the above-described embodiment, the embodiment in which the first nozzle 50 (first opening) is provided for each container 1 placed on the bottom surface portion 21 is described as an example, but the present invention is not limited to this embodiment. Figure 8 FIG. 1 is a diagram showing a first modified example of the suction device 30. Figure 8In the embodiment, the same structures as those in the above-mentioned embodiment are marked with the same reference numerals and their descriptions are omitted or simplified. Figure 8 As shown in FIG. 1 , the number of the first nozzles 50 may be less than the number of the containers 1 placed on the bottom surface portion 21. For example, one first nozzle 50 may be provided on the bottom surface portion 21 for a plurality of containers 1. In this case, the side wall portion 22 is provided so as to surround the plurality of containers 1, and one first nozzle 50 is provided inside the side wall portion 22. Therefore, the gas G3 leaked from the periphery of the lids 1c of the plurality of containers 1 is retained together on the side wall portion 22. In addition, one cover 70 is provided inside the side wall portion 22 corresponding to one first nozzle 50.

[0069] Furthermore, when one first nozzle 50 is provided for a plurality of containers 1, for example, a pipe 41 is connected from the exhaust nozzles 40 of each of the plurality of containers 1 to one second nozzle 60, and the gas G2 from the plurality of containers 1 is sent to the one second nozzle 60 and then discharged into the cover 70. The one first nozzle 50 sucks the gas G3 retained in the side wall portion 22 and the gas G2 discharged into the cover 70 and discharges them to the outside.

[0070] As described above, according to the first variant, the same effects as those of the above-described embodiment are achieved, and since the gas G2 and the gas G3 from the plurality of containers 1 are attracted by using the first nozzles 50 which are smaller in number than the number of containers 1, the number of the first nozzles 50 and the piping 32 etc. can be reduced compared to the above-described embodiment, and the manufacturing cost of the container storage device 100 can be reduced.

[0071] (Second Modification)

[0072] In the above-described embodiment, the embodiment in which the first nozzle 50 as the first opening is provided on the bottom surface portion 21 is described as an example, but the present invention is not limited to this embodiment. Fig. 9 FIG. 2 is a diagram showing a second modified example of the suction device 30. Fig. 9 In the embodiment, the same structures as those in the above-mentioned embodiment are marked with the same reference numerals and their descriptions are omitted or simplified. Fig. 9 As shown, the first nozzle 50 (first opening) is not provided on the bottom portion 21 but on the first side wall portion 23. The first nozzle 50 is preferably provided in the first side wall portion 23 at a lower portion near the bottom portion 21. It should be noted that the first nozzle 50 of the second modified example may be less than the number of containers 1 placed on the mounting table 20 as in the above-mentioned first modified example.

[0073] In addition, the second nozzle 60 is provided in the bottom portion 21 in a manner such that the gas G2 is discharged upward. In addition, a cover member or the like for shielding the gas flow of the gas G2 may be provided above the second nozzle 60. The gas G2 delivered from the exhaust nozzle 40 is discharged from the second nozzle 60 onto the bottom portion 21 and retained inside the side wall portion 22. In addition, the gas G3 leaked from the periphery of the lid 1c of the container 1 is also retained inside the side wall portion 22. The first nozzle 50 sucks the gases G2 and G3 retained inside the side wall portion 22 and discharges them to the outside.

[0074] In this way, according to the second modification, the same effect as the above-mentioned embodiment is achieved. In addition, since the first nozzle 50 is provided on the side wall portion 22, even if there is no space for configuring the first nozzle 50 on the bottom portion 21, the gases G2 and G3 retained inside the side wall portion 22 can be reliably sucked.

[0075] Next, use Fig.10 and Fig.11 The suction of the gas G3 by the suction device 30 will be described. Fig.10 This is a diagram schematically showing the state of gas G3 around the cap 1c of the container 1 stored in the container storage device 100A of the comparative example. Fig.11 1 is a diagram schematically showing the state of gas G3 around the cap 1c of the container 1 stored in the container storage device 100 according to the embodiment. Fig.10 and Fig.11 , the case of the gas G3 is shown in an environment where a downflow is formed.

[0076] like Fig.10 As shown in FIG. 1 , the container storage device 100A of the comparative example does not have a structure corresponding to the suction device 30. Fig.10 As shown, the gas G3 leaked from the periphery of the cover 1c of the container 1 is diffused so as to spread along the lower side of the mounting table 20A on which the container 1 is mounted. On the other hand, in the container storage device 100 of the present embodiment, since the side wall portion 22 is provided, the gas G3 leaked from the periphery of the cover 1c of the container 1 is guided between the cover 1c and the first side wall portion 23 and is retained inside the side wall portion 22.

[0077] The gas G3 accumulated inside the side wall portion 22 is sucked from the first nozzle 50. Fig.11 , the description of the first nozzle 50 is omitted. Therefore, the gas G3 diffused outward and downward from the side wall portion 22 is introduced into the inner side of the side wall portion 22, thereby preventing the gas G3 from diffusing to a position below the bottom portion 21. As a result, according to this embodiment, it is confirmed that the gas G3 can be suppressed from diffusing downwardly of the container storage device 100.

[0078] The above describes the embodiments, but the technical scope of the present invention is not limited to the above embodiments. In addition, those skilled in the art know that various changes or improvements can be applied to the above embodiments. It can be clearly stated according to the claims that the form to which such changes or improvements are applied is also included in the technical scope of the present invention. In addition, one or more elements described in the above embodiments are sometimes omitted. In addition, the elements described in the above embodiments can be appropriately combined. In addition, regarding the execution order of each step shown in the embodiment, as long as the result of the previous step is not used in the subsequent step, it can be implemented in any order. In addition, regarding the actions in the above embodiments, even if they are described for convenience using "first", "next", "next", etc., it is not necessary to implement them in this order. In addition, within the scope permitted by law, the disclosure of Japanese Patent Application No. 2022-083746 and all the documents cited in the above embodiments, etc. are cited as part of the description herein.

[0079] Description of Reference Numerals

[0080] C: Ceiling

[0081] R: Track

[0082] 1: Container

[0083] 2: Elevated transport vehicle

[0084] 10: Purge device

[0085] 20: Loading table

[0086] 30: Attraction device

[0087] 21: Bottom

[0088] 22: Side wall

[0089] 40: Exhaust nozzle (second opening)

[0090] 50: No. 1 nozzle (No. 1 opening)

[0091] 60: No. 2 nozzle (nozzle)

[0092] 70: Hood

[0093] 71: Opening 3

[0094] 100: Container storage device.

Claims

1. A container storage device, comprising: a mounting table for mounting a container having a cover on a side thereof; a purge device for supplying a purge gas to the container; and a suction device for sucking gas leaked from the container, wherein: The mounting table comprises: a bottom portion on which the container is mounted; and a side wall portion extending upward from the bottom portion and facing the lid of the container mounted on the bottom portion, The suction device sucks the gas leaking from the side surface of the container where the cover is located through the first opening provided in the bottom surface portion or the side wall portion. The upper end of the side wall portion is lower than the upper end of the lid of the container placed on the bottom surface portion.

2. The container storage device according to claim 1, wherein: The mounting table is capable of mounting a plurality of the containers. The bottom surface portion and the side wall portion are continuously formed within the range of the plurality of containers. The number of the first openings is smaller than the number of the containers that can be placed on the mounting table.

3. The container storage device according to claim 2, wherein: The side wall portion is provided to surround all four sides of the plurality of containers placed on the bottom surface portion.

4. The container storage device according to claim 1, wherein: The height of the upper end of the side wall portion is set within a range of 80 mm or more and 120 mm or less relative to the bottom surface portion or the bottom surface of the container.

5. The container storage device according to claim 1, wherein: The height of the upper end of the side wall portion is set in a range of not less than one quarter and not more than one third of the height of the container placed on the bottom surface portion.

6. The container storage device according to claim 1, wherein: The first opening is provided in the bottom surface portion between the side wall portion and the container placed on the bottom surface portion.

7. The container storage device according to claim 1, wherein: The side wall portion is provided to surround the four sides of the container placed on the bottom surface portion.

8. The container storage device according to claim 1, wherein: The suction device has a second opening provided on the bottom surface portion, and a nozzle for discharging gas flowing out from an exhaust port formed on the bottom surface of the container toward the top of the bottom surface portion through the second opening, and sucking the gas discharged from the nozzle through the first opening.

9. The container storage device according to claim 8, wherein: The nozzle is arranged near the first opening.

10. The container storage device according to claim 9, wherein: The mounting table includes a cover that covers the nozzle and the first opening and guides the gas discharged from the nozzle toward the first opening. The cover has a third opening formed on an upper surface of the cover, and guides gas flowing in from the third opening toward the first opening.

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