Floating workbench and semiconductor device processing equipment

Abstract

The invention relates to the field of production equipment, in particular to a floating workbench and semiconductor device processing equipment. The floating workbench comprises a leveling device and a lifting shaft; the leveling device comprises a cylinder body, a floating part and a locking mechanism; the cylinder body is provided with a connecting hole, and the lifting shaft is installed in the connecting hole to drive the leveling device to ascend and descend. The floating part is installed on the cylinder body in a floating mode, and the locking mechanism is used for locking the floating part; the locking mechanism comprises a plurality of locking pistons; the cylinder body is correspondingly provided with a plurality of air cylinders, and the locking pistons are correspondingly installed on the air cylinders. A communicating air channel is formed between the lifting shaft and the hole wall of the connecting hole, used for being connected with an air source and communicated with the multiple air cylinders so that the multiple locking pistons can be close to or away from the floating part. A sealing ring is further arranged between the lifting shaft and the hole wall of the connecting hole, and the sealing ring and the communicating air channel are arranged at intervals in the axial direction of the lifting shaft. According to the floating workbench, the floating part can be locked, the floating part is prevented from deviating after leveling, and the leveling error is reduced.

Description

Technical Field

[0001] The present application relates to the field of production equipment, and in particular to a floating workbench and semiconductor device processing equipment. Background Art

[0002] In the exposure process of semiconductor devices, the workbench needs to be leveled before alignment and then exposure. During the exposure process, it is necessary to complete the leveling and differentiation between the plate holder and the wafer stage, the mask and the substrate. When the leveling state needs to be locked, compressed air is introduced into the cylinder to achieve the locking cylinder linkage and lock the three top pillars at the same time, thereby locking the workbench. Therefore, it is necessary to improve the sealing of the airway as much as possible while ensuring efficiency, and in order to be more efficient, it should also be satisfied that the leveled suction cup and the mask will not shift when repeated micro-motion separation.

[0003] The lifting shaft that drives the workbench to lift is connected to the cylinder body, and the air duct connected to the locking cylinder passes between the lifting shaft and the cylinder body. When the air duct is ventilated, air leakage is easy to occur between the lifting shaft and the cylinder body, causing the locking function of the locking cylinder on the top column to fail, causing the workbench to shift, thereby affecting the leveling accuracy. Summary of the invention

[0004] The purpose of the present application is to provide a floating workbench and semiconductor device processing equipment, which can avoid air leakage in the air passage connected to the locking cylinder, so that the locking cylinder can reliably lock the top column and avoid the workbench from deflecting.

[0005] The present application provides a floating workbench, including a leveling device and a lifting shaft;

[0006] The leveling device comprises a cylinder body, a floating part and a locking mechanism; the cylinder body is provided with a connecting hole, and the lifting shaft is installed in the connecting hole to drive the leveling device to rise and fall;

[0007] The floating part is installed in a floating manner on the cylinder body, and the locking mechanism is used to lock the floating part;

[0008] The locking mechanism includes a plurality of locking pistons; the cylinder body is provided with a plurality of cylinders, and the locking pistons are installed on the cylinders; a communicating air passage is formed between the lifting shaft and the hole wall of the connecting hole, and the communicating air passage is used to connect to an air source, and the communicating air passage is connected with the plurality of cylinders so that the plurality of locking pistons are close to or away from the floating part;

[0009] A sealing ring is further arranged between the lifting shaft and the hole wall of the connecting hole, and the sealing ring and the communicating air passage are arranged at intervals along the axial direction of the lifting shaft.

[0010] In the above technical solution, further, in the axial direction of the lifting shaft, the sealing rings are provided on both sides of the communicating air passage;

[0011] The sealing ring is an O-shaped sealing ring.

[0012] In the above technical solution, further, in the length direction of the cylinder, one end of the cylinder extends to the hole wall of the connecting hole, and the other end of the cylinder extends to the outer periphery of the cylinder body;

[0013] The lifting shaft is provided with a plurality of sealing grooves, and the sealing rings are installed in the sealing grooves accordingly; and the sealing grooves are located outside the projection area of ​​the cylinder on the lifting shaft.

[0014] In the above technical solution, further, the lifting shaft includes a connecting shaft and a connecting sleeve;

[0015] The connecting sleeve comprises a cylindrical portion and an annular portion, wherein the annular portion is arranged around the top end of the cylindrical portion; the cylindrical portion is sleeved on the top end of the connecting shaft; a first sinking platform is arranged at the top end of the connecting hole, and the annular portion is mounted on the first sinking platform;

[0016] The sealing groove is provided on one side of the annular portion facing the first sinking platform;

[0017] The sealing groove and the connecting groove are formed on the outer circumference of the cylindrical portion. The sealing groove is located on a side of the connecting groove away from the annular portion. The connecting groove and the hole wall of the connecting hole are surrounded to form the connecting air passage.

[0018] In the above technical solution, further, the connecting shaft is provided with a supporting platform, and the bottom end of the connecting sleeve extends to the upper surface of the supporting platform;

[0019] A second sinking platform is arranged at the bottom end of the connecting hole, and the supporting platform is installed on the second sinking platform.

[0020] In the above technical solution, further, the connecting shaft is a hollow structure.

[0021] In the above technical solution, further, the floating part includes a mounting platform, an elastic airbag and a plurality of floating columns;

[0022] A plurality of the floating columns are installed on the cylinder body, and the locking piston is arranged corresponding to the floating columns; the mounting platform is arranged at intervals from the cylinder body, and a plurality of the floating columns are arranged at intervals to support the mounting platform;

[0023] The elastic airbag is installed on the cylinder body, and the elastic airbag supports a plurality of the floating columns so that the mounting platform can swing relative to the cylinder body.

[0024] In the above technical solution, further, the leveling device also includes a plurality of connecting members;

[0025] The plurality of connecting members are all installed on the cylinder body; the mounting platform is correspondingly provided with a plurality of limiting holes, and the plurality of connecting members respectively penetrate the plurality of limiting holes to connect the mounting platform and the cylinder body, and enable the mounting platform to swing in the length direction of the connecting members.

[0026] In the above technical solution, further, it also includes a base and a guide mechanism;

[0027] The guide mechanism is installed between the bottom and the leveling device to guide the lifting movement of the leveling device.

[0028] The present application also provides a semiconductor device processing equipment, including the floating workbench described in the above solution.

[0029] Compared with the prior art, the beneficial effects of this application are:

[0030] The floating workbench provided by the present application is provided with a sealing ring between the lifting shaft and the hole wall of the connecting hole, the sealing ring is arranged around the circumference of the lifting shaft, and the sealing ring and the connecting airway are arranged at intervals along the axial direction of the lifting shaft. When the connecting airway is ventilated, the sealing ring is deformed to improve the sealing between the lifting shaft and the cylinder body, so that the airflow enters the cylinder to control the locking piston to lock the floating column, which can avoid the displacement of the floating part of the leveling and reduce the leveling error.

[0031] The present application also provides a semiconductor device processing equipment, including the floating workbench described in the above solution. Based on the above analysis, it can be seen that the semiconductor device processing equipment also has the above beneficial effects, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0033] Figure 1 A first structural schematic diagram of the floating workbench provided in this application;

[0034] Figure 2 A second structural schematic diagram of the floating workbench provided in this application;

[0035] Figure 3 A third structural schematic diagram of the floating workbench provided in this application;

[0036] Figure 4 A first partial cross-sectional structural schematic diagram of the floating workbench provided in the present application;

[0037] Figure 5 This is a second partial cross-sectional structural schematic diagram of the floating workbench provided in this application.

[0038] In the figure: 101-leveling device; 102-lifting shaft; 103-cylinder body; 104-mounting platform; 105-elastic airbag; 106-floating column; 107-mounting channel; 108-connecting piece; 109-limiting hole; 110-locking piston; 111-cylinder; 112-connecting airway; 113-gas delivery channel; 114-sealing ring; 115-connecting shaft; 116-connecting sleeve; 117-cylindrical part; 118-annular part; 119-first sinking platform; 120-sealing groove; 121-connecting groove; 122-supporting platform; 123-second sinking platform; 124-base; 125-guide assembly. DETAILED DESCRIPTION

[0039] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0040] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] Embodiment 1

[0043] See also Figures 1 to 5As shown, the floating workbench provided in the present application includes a leveling device 101 and a lifting shaft 102. The leveling device 101 is provided with a suction cup to carry and fix the substrate, and the lifting shaft 102 is used to drive the leveling device 101 to rise and fall so that the substrate is close to the mask. When the mask is in contact with the substrate of the leveling device 101, the leveling function can be achieved.

[0044] The leveling device 101 includes a cylinder 103, a floating part, and a locking mechanism. A connecting hole is provided in the middle of the cylinder 103, and the lifting shaft 102 is installed in the connecting hole so that the lifting shaft 102 is connected to the cylinder 103. The lifting shaft 102 can drive the leveling device 101 to rise and fall by reciprocating along the height direction, so that the substrate carried by the floating part can contact and level the mask.

[0045] Specifically, Figure 2 and Figure 5 As shown, the floating part is installed in a floating manner on the cylinder body 103, and the floating part includes a mounting platform 104, an elastic airbag 105 and a plurality of floating columns 106; the plurality of floating columns 106 are installed on the cylinder body 103, and the locking piston 110 is arranged corresponding to the floating columns 106; the mounting platform 104 and the cylinder body 103 are arranged at intervals, and the plurality of floating columns 106 are arranged at intervals to support the mounting platform 104; the cylinder body 103 is provided with a mounting channel 107, the elastic airbag 105 is installed in the mounting channel 107, and the elastic airbag 105 supports the plurality of floating columns 106, so that the mounting platform 104 can swing relative to the cylinder body 103. Preferably, the number of the floating columns 106 is three, and the three floating columns 106 support the mounting platform 104 in accordance with the principle that three points determine a plane.

[0046] In this embodiment, there is a wedge angle between the glue-coated surface of the substrate and the pattern surface of the mask, the angle of the wedge angle is small, and the direction and angle of the wedge angle are random. When leveling the substrate, the lifting shaft 102 drives the leveling device 101 to rise. When the high point on the substrate contacts the mask, the mounting platform 104 corresponding to the high point on the substrate is locally stressed, so that one or two adjacent floating columns 106 are forced to move downward, and then the pressure is transmitted to the elastic airbag 105. The elastic airbag 105 absorbs the pressure and deforms elastically, so that the substrate and the mask are in soft contact, and the substrate will not be damaged by pressure.

[0047] As the contact leveling process continues, when the glue-coated surface of the substrate is in full contact with the pattern surface of the mask, the three floating columns 106 all drop to varying degrees in the vertical direction. Since the bottoms of the floating columns 106 all act on the same elastic airbag 105, according to Pascal's theorem and Newton's theorem, the pressure in the elastic airbag 105 is rebalanced, and the reaction force applied to the three floating columns 106 makes the glue-coated surface of the substrate and the pattern surface of the mask closely contact, and the lifting shaft 102 stops moving upward, and the leveling process is completed. At this time, the wedge angle is eliminated, and the three floating columns 106 are subjected to equal forces, so that the mask is subjected to uniform force.

[0048] Furthermore, if Figure 3 As shown, the leveling device 101 also includes a plurality of connecting members 108; the plurality of connecting members 108 are all installed on the cylinder body 103; the mounting platform 104 is correspondingly provided with a plurality of limiting holes 109, and the plurality of connecting members 108 respectively penetrate the plurality of limiting holes 109 to connect the mounting platform 104 and the cylinder body 103, and enable the mounting platform 104 to swing in the length direction of the connecting members 108.

[0049] The connecting member 108 is specifically a screw, and a threaded hole is correspondingly opened on the cylinder body 103. The screw passes through the limiting hole 109 and is threadedly connected with the cylinder body 103 to connect the mounting platform 104 with the cylinder body 103. The screw and the mounting platform 104 are in contact only on the upper and lower end surfaces, and there is no contact point on the circumference to avoid affecting the floating leveling of the mounting platform 104. The mounting platform 104 can be roughly leveled by rotating the screw, and the floating range of the mounting platform 104 is limited.

[0050] After the leveling process is completed, the floating part needs to be locked by a locking mechanism to keep the mounting table 104 in a leveled state to prevent the substrate from shifting and affecting the exposure effect. Figure 2 and Figure 5 As shown, the locking mechanism includes three locking pistons 110. The cylinder body 103 is provided with three cylinders 111, and the locking pistons 110 are installed in the cylinders 111 one by one. An annular communicating air passage 112 is provided between the lifting shaft 102 and the cylinder body 103, and the communicating air passage 112 can be connected to the gas source through the gas transmission channel 113, and the communicating air passage 112 can be connected to multiple cylinders 111. By controlling the air pressure of the three cylinders 111 by the air source, the three locking pistons 110 can be driven to reciprocate along the length direction of the cylinder 111 at the same time, so that the locking pistons 110 are close to or away from the floating column 106, thereby realizing the synchronous locking or unlocking of multiple floating columns 106. When the locking piston 110 abuts against the floating column 106, the floating column 106 is locked; when the locking piston 110 is away from the floating column 106, the floating column 106 is unlocked.

[0051] In order to prevent the air passage 112 from leaking from the gap between the lifting shaft 102 and the cylinder body 103, Figure 2 As shown, the present application further provides a sealing ring 114 between the lifting shaft 102 and the hole wall of the connecting hole, the sealing ring 114 is arranged around the lifting shaft 102 in the circumferential direction, and the sealing ring 114 and the communicating air passage 112 are arranged at intervals along the axial direction of the lifting shaft 102. When the communicating air passage 112 is ventilated, the sealing ring 114 can be deformed to improve the sealing between the lifting shaft 102 and the cylinder body 103, so that the air flow enters the cylinder 111 to control the locking piston 110 to lock the floating column 106, which can avoid the displacement of the floating part of the leveling and reduce the leveling error.

[0052] In the optional solution of this embodiment, the sealing ring 114 is specifically an O-shaped sealing ring. In the axial direction of the lifting shaft 102, sealing rings 114 are arranged on both sides of the communicating air passage 112. The sealing ring 114 can seal the gap between the lifting shaft 102 and the cylinder body 103 from the upper and lower sides of the communicating air passage 112 to prevent the communicating air passage 112 from leaking from the upper and lower sides, and the sealing effect is better.

[0053] In an optional solution of this embodiment, in the length direction of the cylinder 111, one end of the cylinder 111 extends to the hole wall of the connecting hole, and the other end of the cylinder 111 extends to the outer periphery of the cylinder body 103, so that the locking piston 110 can move under the action of the gas pressure of the cylinder 111. The lifting shaft 102 is provided with a plurality of sealing grooves 120, and the sealing rings 114 are correspondingly installed in the sealing grooves 120; and the sealing grooves 120 are located outside the projection area of ​​the cylinder 111 on the lifting shaft 102.

[0054] In this embodiment, one end of the gas delivery channel 113 is located at the outer periphery of the cylinder body 103, and the other end of the gas delivery channel 113 extends to the hole wall of the connecting hole, so that the gas delivery channel 113 is connected with the connecting gas channel 112, so that the gas of the gas source enters through the gas delivery channel 113 and converges in the connecting gas channel 112. A plurality of cylinders 111 are radially arranged on the circumference of the lifting shaft 102, and a floating column 106 is arranged in each cylinder 111. One end of the cylinder 111 extends to the hole wall of the connecting hole, so that the plurality of cylinders 111 are connected with the connecting gas channel 112. The gas converged in the connecting gas channel 112 can enter the plurality of cylinders 111 to achieve synchronous control of the gas pressure of the plurality of cylinders 111, thereby achieving synchronous locking of the plurality of floating columns 106 by the plurality of locking pistons 110, and the plurality of locking pistons 110 exert the same force on the corresponding floating columns 106, so as to avoid the displacement of the mounting platform 104 caused by different forces on the floating columns 106.

[0055] In addition, since a locking piston 110 is installed in the cylinder 111 , the projection area of ​​the cylinder 111 on the lifting shaft 102 is relatively large, and the sealing groove 120 needs to be opened outside the projection area of ​​the cylinder 111 on the lifting shaft 102 to avoid air leakage at the end of the cylinder 111 .

[0056] In an optional solution of this embodiment, the lifting shaft 102 includes a connecting shaft 115 and a connecting sleeve 116. The connecting sleeve 116 includes a cylindrical portion 117 and an annular portion 118, and the annular portion 118 is arranged around the top of the cylindrical portion 117; the cylindrical portion 117 is sleeved on the top of the connecting shaft 115; a first sinking platform 119 is arranged at the top of the connecting hole, and the annular portion 118 is installed on the first sinking platform 119; a sealing groove 120 is arranged on the side of the annular portion 118 facing the first sinking platform 119; the outer periphery of the cylindrical portion 117 is provided with a sealing groove 120 and a connecting groove 121, and the sealing groove 120 is located on the side of the connecting groove 121 away from the annular portion 118, and the connecting groove 121 and the hole wall of the connecting hole are arranged to form a connecting airway 112.

[0057] Optionally, the connecting shaft 115 is provided with a supporting platform 122 , and the bottom end of the connecting sleeve 116 extends to the upper surface of the supporting platform 122 ; the bottom end of the connecting hole is provided with a second sinking platform 123 , and the supporting platform 122 is installed on the second sinking platform 123 .

[0058] In this embodiment, if Figures 2 to 5 As shown, the cylindrical portion 117 is sleeved on the top of the connecting shaft 115, and the cylindrical portion 117 and the connecting shaft 115 are interference fit, so that the connecting shaft 115 and the connecting sleeve 116 are reliably connected. The annular portion 118 is embedded and installed in the first sinking platform 119, which can improve the connection strength between the lifting shaft 102 and the cylinder body 103. Optionally, bolts are also provided between the annular portion 118 and the cylinder body 103 to ensure that the lifting shaft 102 and the cylinder body 103 are firmly connected. The connecting shaft 115 is provided with a supporting platform 122, and the supporting platform 122 is embedded and installed in the second sinking platform 123, so that the supporting platform 122 can realize the lifting effect on the cylinder body 103, thereby driving the cylinder body 103 to rise and fall.

[0059] Since the first sinking platform 119 is provided at the upper part of the cylinder body 103, the material thickness between the communicating air passage 112 and the first sinking platform 119 is reduced, so that the sealing groove 120 cannot be provided here. The sealing groove 120 is provided on the annular portion 118 to facilitate the installation of the sealing ring 114 without affecting the strength of the device. Although the second sinking platform 123 is provided at the lower part of the cylinder body 103, since the elastic airbag 105 is also located at the lower part of the cylinder body 103, the material thickness between the communicating air passage 112 and the second sinking platform 123 is relatively thick, so the sealing groove 120 is provided on the outer periphery of the cylindrical portion 117 to facilitate the installation of the sealing ring 114 without affecting the strength of the device.

[0060] In an optional solution of this embodiment, the connecting shaft 115 has a hollow structure, which can reduce the weight of the lifting shaft 102, thereby making the driving device drive the lifting shaft 102 to move more stably.

[0061] Embodiment 2

[0062] The floating workbench in the second embodiment is an improvement on the above embodiment, and the technical contents disclosed in the above embodiment will not be described repeatedly, and the contents disclosed in the above embodiment also belong to the contents disclosed in the second embodiment.

[0063] In an optional solution of this embodiment, the floating workbench further includes a base 124 and a guide mechanism; the guide mechanism is installed between the bottom and the leveling device 101 to guide the lifting and lowering movement of the leveling device 101.

[0064] In this embodiment, the guide mechanism includes a plurality of guide components 125, each of which is connected to the base 124, and the plurality of guide components 125 are arranged around the circumference of the leveling device 101. When the lifting shaft 102 drives the leveling device 101 to rise and fall, the plurality of guide components 125 can guide the lifting and falling motion of the leveling device 101 to avoid the leveling device 101 from deflecting, turning, and other problems.

[0065] Specifically, the guide assembly 125 includes a support column, a rolling member and a guide member. The bottom of the support column is connected to the base 124, and the rolling member is rotatably mounted on the top of the support column. The guide member is connected to the mounting platform 104 of the leveling device 101, and the guide member is provided with a guide groove. When the lifting shaft 102 drives the leveling device 101 to rise and fall, the rolling member rolls along the length direction of the guide groove to achieve a guiding effect on the leveling device 101.

[0066] Embodiment 3

[0067] Embodiment 3 of the present application provides a semiconductor device processing equipment, including a floating workbench of any of the above embodiments, and thus has all the beneficial technical effects of the floating workbench of any of the above embodiments, which will not be elaborated here.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application is described in detail with reference to the above embodiments, a person skilled in the art should understand that the technical solutions described in the above embodiments can still be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application. In addition, a person skilled in the art can understand that although some embodiments herein include certain features included in other embodiments but not other features, the combination of features of different embodiments means being within the scope of the present application and forming different embodiments.

Claims

1. A floating workbench, characterized in that: Includes leveling device and lifting shaft; The leveling device comprises a cylinder body, a floating part and a locking mechanism; the cylinder body is provided with a connecting hole, and the lifting shaft is installed in the connecting hole to drive the leveling device to rise and fall; The floating part is installed in a floating manner on the cylinder body, and the locking mechanism is used to lock the floating part; The locking mechanism includes a plurality of locking pistons; the cylinder body is provided with a plurality of cylinders, and the locking pistons are installed on the cylinders; a communicating air passage is formed between the lifting shaft and the hole wall of the connecting hole, and the communicating air passage is used to connect to an air source, and the communicating air passage is connected with the plurality of cylinders so that the plurality of locking pistons are close to or away from the floating part; A sealing ring is further arranged between the lifting shaft and the hole wall of the connecting hole, and the sealing ring and the communicating air passage are arranged at intervals along the axial direction of the lifting shaft.

2. The floating workbench according to claim 1, characterized in that: In the axial direction of the lifting shaft, the sealing rings are arranged on both sides of the communicating air passage; The sealing ring is an O-shaped sealing ring.

3. The floating workbench according to claim 2, characterized in that: In the length direction of the cylinder, one end of the cylinder extends to the hole wall of the connecting hole, and the other end of the cylinder extends to the outer periphery of the cylinder body; The lifting shaft is provided with a plurality of sealing grooves, and the sealing rings are installed in the sealing grooves accordingly; and the sealing grooves are located outside the projection area of ​​the cylinder on the lifting shaft.

4. The floating workbench according to claim 3, characterized in that: The lifting shaft comprises a connecting shaft and a connecting sleeve; The connecting sleeve comprises a cylindrical portion and an annular portion, wherein the annular portion is arranged around the top end of the cylindrical portion; the cylindrical portion is sleeved on the top end of the connecting shaft; a first sinking platform is arranged at the top end of the connecting hole, and the annular portion is mounted on the first sinking platform; The sealing groove is provided on one side of the annular portion facing the first sinking platform; The sealing groove and the connecting groove are formed on the outer circumference of the cylindrical portion. The sealing groove is located on a side of the connecting groove away from the annular portion. The connecting groove and the hole wall of the connecting hole are surrounded to form the connecting air passage.

5. The floating workbench according to claim 4, characterized in that: The connecting shaft is provided with a supporting platform, and the bottom end of the connecting sleeve extends to the upper surface of the supporting platform; A second sinking platform is arranged at the bottom end of the connecting hole, and the supporting platform is installed on the second sinking platform.

6. The floating workbench according to claim 4, characterized in that: The connecting shaft has a hollow structure.

7. The floating workbench according to claim 1, characterized in that: The floating part includes a mounting platform, an elastic airbag and a plurality of floating columns; A plurality of the floating columns are installed on the cylinder body, and the locking piston is arranged corresponding to the floating columns; the mounting platform is arranged at intervals from the cylinder body, and a plurality of the floating columns are arranged at intervals to support the mounting platform; The elastic airbag is installed on the cylinder body, and the elastic airbag supports a plurality of the floating columns so that the mounting platform can swing relative to the cylinder body.

8. The floating workbench according to claim 7, characterized in that: The leveling device also includes a plurality of connecting members; The plurality of connecting members are all installed on the cylinder body; the mounting platform is correspondingly provided with a plurality of limiting holes, and the plurality of connecting members respectively penetrate the plurality of limiting holes to connect the mounting platform and the cylinder body, and enable the mounting platform to swing in the length direction of the connecting members.

9. The floating workbench according to claim 1, characterized in that: Also includes a base and a guide mechanism; The guide mechanism is installed between the bottom and the leveling device to guide the lifting and lowering movement of the leveling device.

10. A semiconductor device processing equipment, characterized in that: Comprising the floating workbench as claimed in any one of claims 1 to 9.

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