Quartz ring surface sand blasting treatment device

Abstract

The invention provides a quartz ring surface sand blasting treatment device. The quartz ring surface sand blasting treatment device comprises a mounting plate; a placing table assembly is mounted on the top surface of the mounting plate, a quartz ring is placed in the middle of the placing table assembly, an inner clamping assembly is mounted on the top surface of the mounting plate and located on the bottom surface of the placing table assembly, and outer clamping assemblies are mounted on the top surface of the mounting plate and located on the two sides of the placing table assembly respectively; the placing table assembly comprises a working table, the working table is fixedly connected to the top surface of the mounting plate, and a disc is fixedly connected to the middle of the top surface of the working table; and the sand blasting mechanism comprises a sand blasting assembly, a switching assembly and a sand storage assembly, the sand blasting assembly is mounted on the top surface of the mounting plate and located on one side of the workbench, and the sand storage assembly is mounted on the top surface of the mounting plate and located on one side of the sand blasting assembly. Through mutual cooperation of the placing table assembly, the inner clamping assembly, the outer clamping assembly, the sand blasting assembly and the feeding and discharging mechanical claw, sand blasting grinding of the surface of the quartz ring can be achieved.

Description

Technical Field

[0001] The invention relates to the technical field of quartz ring surface sandblasting treatment, in particular to a quartz ring surface sandblasting treatment device. Background Art

[0002] In the production process of semiconductor chips, quartz rings are important process components. For example, in chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment, quartz rings are used to isolate the reaction area to prevent the entry of impurities and can withstand high temperatures and chemical corrosion;

[0003] At present, when quartz rings are produced and processed, first, a plurality of columnar quartz columns are drilled out of a quartz block, and then the quartz column is drilled a second time. When drilling, the middle part of the quartz column is drilled to obtain the required quartz ring. However, the surface of the quartz ring is relatively rough. At this time, the surface needs to be polished for subsequent processing.

[0004] When the quartz ring is being polished, the staff first places the quartz ring on the polishing table and clamps it for positioning. After clamping and positioning, the staff holds the spray gun and can use the sand particles sprayed out by high pressure to polish its surface. After polishing one side, the staff needs to turn it over and clamp it, and then sandblast and polish the other side. This kind of polishing method requires the staff to perform the whole process, which not only increases the labor of the staff, but also reduces the overall work efficiency. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a quartz ring surface sandblasting treatment device, which solves the problems mentioned in the background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] A quartz ring surface sandblasting treatment device comprises a mounting plate; a placing table assembly is mounted on the top surface of the mounting plate, a quartz ring is placed in the middle of the placing table assembly, an inner clamping assembly is mounted on the top surface of the mounting plate and on the bottom surface of the placing table assembly, outer clamping assemblies are mounted on the top surface of the mounting plate and on both sides of the placing table assembly, a sandblasting mechanism is mounted on the top surface of the mounting plate and on the upper part of the placing table assembly, and a loading and unloading mechanical claw is mounted on the top surface of the mounting plate and in front of the placing table assembly; the placing table assembly comprises a workbench, the top surface of the mounting plate is fixedly connected to the workbench, a disc is fixedly connected to the middle part of the top surface of the workbench, a half supporting ring is symmetrically fixedly connected to the top surface of the disc, a quartz ring is placed on the top surface of the supporting ring, a first half retaining ring and a second half retaining ring are symmetrically fixedly connected to the top surface of the workbench, an outer clamping assembly is mounted between the first half retaining ring and the second half retaining ring, the first half retaining ring and the second half retaining ring are connected by an outer The clamping components cooperate with each other to form a closed baffle ring, the inner cavity wall of the closed baffle ring is provided with a recovery cavity between the circumferential surfaces of the disc, the top surface of the workbench is provided with a first recovery hole in a circumferential array in the recovery cavity, the top surface of the disc is symmetrically provided with a second recovery hole, the bottom surface of the workbench is fixedly connected with a recovery ring below the second recovery hole, the inner cavity of the recovery ring is connected with the inner cavity of the second recovery hole, the bottom surface of the disc is fixedly connected with an L-shaped absorption pipe below the second recovery hole, and the L-shaped absorption pipe is respectively connected with the second recovery hole and the inner cavity of the recovery ring; the sandblasting mechanism includes a sandblasting component, a switching component and a sand storage component, the top surface of the mounting plate is provided with a sandblasting component and is located on one side of the workbench, the top surface of the mounting plate is provided with a sand storage component and is located on one side of the sandblasting component, the output end of the sand storage component is connected with the inner cavity of the sandblasting component, the input end of the sand storage component is connected with the L-shaped absorption pipe, and the top surface of the workbench is provided with a switching component.

[0008] Furthermore, the sandblasting assembly includes a column, the top surface of the mounting plate is fixedly connected to the column, the top surface of the column is fixedly connected to a sliding sleeve, an extension rod is slidably connected inside the sliding sleeve, the top surface of the sliding sleeve is fixedly connected to a forward pneumatic rod, the output end of the forward pneumatic rod is fixedly connected to the extension rod, the bottom surface of the extension rod is fixedly connected to a lifting pneumatic rod, and the output end of the lifting pneumatic rod is installed with a sandblasting component.

[0009] Furthermore, the sandblasting component includes a base plate, the output end of the lifting pneumatic rod is fixedly connected to the base plate, the bottom surface of the base plate is fixedly connected to a rotating motor, the bottom surface of the base plate is rotatably connected to a cylindrical sleeve, the output shaft end of the rotating motor is rotatably connected to the cylindrical sleeve through a gear set, a sandblasting part is installed on the outer surface of the cylindrical sleeve, a cylindrical rod is slidably connected inside the cylindrical sleeve, a storage pneumatic rod is fixedly connected to the top surface of the cylindrical rod and located between the top surface of the inner cavity of the cylindrical sleeve, an arc-shaped scraper is fixedly connected to the bottom surface of the cylindrical rod, and a downward pressure structure is installed on the top surface of the base plate.

[0010] Furthermore, the sandblasting part includes a rotating bracket, the surface of the cylindrical sleeve is fixedly connected to the rotating bracket, a T-shaped switching disk is rotatably connected inside the rotating bracket, a first nozzle is fixedly connected to the bottom surface of the T-shaped switching disk, a height rod is slidably connected inside the T-shaped switching disk, a second nozzle is fixedly connected to the bottom surface of the height rod, a locking gear is fixedly connected to the outer surface of the T-shaped switching disk, a locking rod is fixedly connected to the top surface of the rotating bracket, a locking damping rod is fixedly connected to one side of the locking rod, a latch tooth is fixedly connected to one end of the locking damping rod, and the latch tooth is meshingly connected to the locking gear.

[0011] Furthermore, the downward pressing structure includes a support rod, the top surface of the base plate is fixedly connected to the support rod, the bottom surface of the support rod is fixedly connected to an electric telescopic rod, the output end of the electric telescopic rod is fixedly connected to a lifting plate, the bottom surface of the lifting plate is provided with a T-shaped rotating groove, and the top surface of the height rod is located in the T-shaped rotating groove and slides.

[0012] Furthermore, the switching assembly includes a vertical rod, the top surface of the workbench is fixedly connected to the vertical rod, one side of the vertical rod is fixedly connected to a switching pneumatic rod, the output end of the switching pneumatic rod is fixedly connected to a switching rack, and the top surface of the switching rack is fixedly connected to an unlocking rod.

[0013] Furthermore, the sand storage assembly includes a fan storage box and a sand pump, and the fan storage box and the sand pump are respectively installed on the top surface of the mounting plate, the input end of the fan storage box is connected with the inner cavity of the L-shaped absorption tube through an input pipe, the input end of the sand pump is connected with the inner cavity of the fan storage box through a sand pipe, and the output end of the sand pump is respectively connected with the first nozzle and the second nozzle through a sand discharge pipe.

[0014] Furthermore, the internal clamping assembly includes a clamping pneumatic rod, an auxiliary clamping plate and a clamping hole. The top surface of the disc is symmetrically provided with the clamping hole, the bottom surface of the disc is fixedly connected with the auxiliary clamping plate, and the two ends of one side of the auxiliary clamping plate are respectively provided with curved grooves, the top surface of the mounting plate is fixedly connected with the clamping pneumatic rod, the output end of the clamping pneumatic rod is fixedly connected with a long plate, the top surface of the long plate is provided with a dovetail groove, an L-shaped clamp is slidably connected in the dovetail groove, one end of the L-shaped clamp is located in the clamping hole and slides, and one side of the L-shaped clamp is fixedly connected with a sliding column, and the sliding column is located in the curved groove and slides.

[0015] Furthermore, the external clamping assembly includes a lifting telescopic rod, the top surface of the mounting plate is fixedly connected to the lifting telescopic rod, the output end of the lifting telescopic rod is fixedly connected to a lifting block, the lifting block is rotatably connected to a flip shaft, the outer surface of the flip shaft is fixedly connected to a flip gear, the top surface of the lifting block is fixedly connected to the flip telescopic rod, the output end of the flip telescopic rod is fixedly connected to a flip rack, the flip rack is meshed with the flip gear, and a clamping component is installed at one end of the flip shaft.

[0016] Furthermore, the clamping component includes a rectangular sleeve and a first oblique block, one end of the flip shaft is fixedly connected to the rectangular sleeve, a rectangular rod is slidably connected in the rectangular sleeve, the top surface of the rectangular sleeve is fixedly connected to the clamping telescopic rod, the output end of the clamping telescopic rod is fixedly connected to the rectangular rod, one end of the rectangular rod is fixedly connected to an arc-shaped clamping block, the outer surface of the rectangular rod is slidably connected to a mouth frame, the two ends of one side of the mouth frame are respectively fixedly connected to a limiting rod, one end of the limiting rod passes through the arc-shaped clamping block and slides in the arc-shaped clamping block, a reset damping rod is fixedly connected to one side of the mouth frame and between the arc-shaped clamping blocks, the two sides of the mouth frame are respectively fixedly connected to the second oblique blocks, and the top surface of the workbench is respectively fixedly connected to the first oblique blocks.

[0017] The present invention provides a quartz ring surface sandblasting treatment device. Compared with the prior art, it has the following beneficial effects:

[0018] 1. Through the cooperation of the first half baffle ring, the second half baffle ring and the two groups of arc-shaped clamping blocks, a closed baffle ring is formed, which can block the sandblasting during spraying by the first nozzle to avoid sandblasting splashing, which is not conducive to recovery. Then, through the cooperation of the first recovery hole, the second recovery hole and the sand storage assembly, the recovery and reuse of the sandblasting can be realized;

[0019] 2. When grinding the inner wall of the quartz ring, the arc scraper will contact the top surface of the disc. At this time, the rotation of the cylindrical sleeve will drive the arc scraper to rotate, so that the spray generated by grinding can be recovered from the recovery hole. When grinding the outside, the arc scraper will be raised by the pneumatic rod to prevent the arc scraper from colliding with the inner clamping component.

[0020] 3. The rotating bracket is driven to rotate by the cylindrical sleeve. When the rotating bracket rotates, the first nozzle and the second nozzle are driven to rotate and move along the inner surface or outer surface of the quartz ring, thereby achieving comprehensive polishing of the inner surface or outer surface of the quartz ring;

[0021] 4. Unlock the latching gear by firstly using the unlocking lever in the switching assembly, so that the latching gear no longer locks the locking gear. At this time, the locking gear is driven to rotate by switching the rack, so that the position of the second nozzle changes, which is convenient for later internal or external spraying and polishing;

[0022] 5. The electric telescopic rod drives the lifting plate to move up and down, thereby driving the height rod and the second nozzle to move up and down, so as to facilitate the sandblasting and polishing of the inner and outer surfaces of the quartz rings of different heights in the later stage;

[0023] 6. The inner wall of the quartz ring can be clamped and fixed by the inner clamping assembly, which is convenient for sandblasting and polishing the outer surface and top surface of the quartz ring in the later stage. When the inner clamping is not needed, it can also be stored, which is convenient for the sandblasting mechanism to clean and recycle the sandblasting in the middle of the disc in the later stage;

[0024] 7. The arc-shaped clamping blocks are driven to move toward each other by clamping the telescopic rod. When the two sets of arc-shaped clamping blocks move toward each other, the surface of the quartz ring can be clamped, which is convenient for grinding the inner surface and the top surface of the quartz ring or turning it over later. At this time, the telescopic rod is lifted to drive the clamping component to move upward. When the first inclined block and the second inclined block in the clamping component are separated from each other, the limit rod will be moved out of the arc-shaped clamping block. At this time, under the action of the limit rod, the upper and lower sides of the quartz ring are limited. When the quartz ring is lifted to a certain height, it is convenient for loading and unloading and turning over later. When the flipping telescopic rod drives the flipping rack to move, it will drive the clamping component and the quartz ring to flip 180 degrees, which is convenient for grinding the other side of the quartz ring later. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 The overall structural diagram of the present invention is shown;

[0027] Figure 2 Another structural diagram of the present invention is shown;

[0028] Figure 3 The overall cross-sectional structure schematic diagram of the present invention is shown;

[0029] Figure 4 A schematic diagram of the structure of the placement table assembly of the present invention is shown;

[0030] Figure 5 A bottom view of the structure of the placing table assembly of the present invention is shown;

[0031] Figure 6 A schematic diagram of a partial cross-sectional structure of a placement table assembly of the present invention is shown;

[0032] Figure 7 A schematic diagram of the structure of the inner clamping assembly of the present invention is shown;

[0033] Figure 8 A schematic diagram of the structure of the outer clamping assembly of the present invention is shown;

[0034] Fig. 9 A schematic diagram of the structure of the clamping component of the present invention is shown;

[0035] Fig.10 A schematic diagram of the structure of the switching component of the present invention is shown;

[0036] Fig.11 The schematic diagram of the structure of the sand storage assembly of the present invention is shown;

[0037] Fig.12 The schematic diagram of the structure of the sandblasting assembly of the present invention is shown;

[0038] Fig.13 Another structural schematic diagram of the sandblasting assembly of the present invention is shown;

[0039] Fig.14 The schematic diagram of the structure of the sandblasting part of the present invention is shown;

[0040] As shown in the figure: 1. Mounting plate; 2. Placement table assembly; 21. Workbench; 22. Disc; 23. Support ring; 24. First half retaining ring; 25. Second half retaining ring; 26. Recovery chamber; 27. First recovery hole; 28. Second recovery hole; 29. ​​Recovery ring; 210. L-shaped absorption tube; 3. Quartz ring; 4. Internal clamping assembly; 41. Clamping pneumatic rod; 42. Auxiliary clamping plate; 43. Clamping hole; 44. Bend groove; 45. Long plate; 46. Dovetail groove; 47. L-shaped clamping claw; 48 , sliding column; 5, external clamping assembly; 51, lifting telescopic rod; 52, lifting block; 53, flip shaft; 54, flip gear; 55, flip telescopic rod; 56, flip rack; 57, clamping component; 571, rectangular sleeve; 572, first inclined block; 573, rectangular rod; 574, clamping telescopic rod; 575, arc clamping block; 576, mouth frame; 577, limit rod; 578, reset damping rod; 579, second inclined block; 6, sandblasting mechanism; 7, loading and unloading mechanical claws; 8, Sandblasting assembly; 81, column; 82, sliding sleeve; 83, extension rod; 84, forward extension pneumatic rod; 85, lifting pneumatic rod; 86, sandblasting parts; 861, bottom plate; 862, rotating motor; 863, cylinder sleeve; 864, sandblasting parts; 8641, rotating bracket; 8642, T-type switching plate; 8643, first nozzle; 8644, height rod; 8645, second nozzle; 8646, locking gear; 8647, locking rod; 8648, locking damping rod; 864 9. Clamping teeth; 865. Cylindrical rod; 866. Storage pneumatic rod; 867. Arc scraper; 868. Downward pressure structure; 8681. Support rod; 8682. Electric telescopic rod; 8683. Lifting plate; 8684. T-shaped rotating groove; 9. Switching assembly; 91. Vertical rod; 92. Switching pneumatic rod; 93. Switching rack; 94. Unlocking rod; 10. Sand storage assembly; 101. Fan storage box; 102. Sand pump; 103. Input pipe; 104. Sand pipe; 105. Sand discharge pipe. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] Embodiment 1

[0043] In order to solve the technical problems in the background technology, a quartz ring surface sandblasting device is provided as follows:

[0044] Combination Figure 1-Figure 14As shown, a quartz ring surface sandblasting treatment device provided by the present invention comprises a mounting plate 1; a placing table assembly 2 is mounted on the top surface of the mounting plate 1, a quartz ring 3 is placed in the middle of the placing table assembly 2, an inner clamping assembly 4 is mounted on the top surface of the mounting plate 1 and located on the bottom surface of the placing table assembly 2, outer clamping assemblies 5 are mounted on the top surface of the mounting plate 1 and located on both sides of the placing table assembly 2, a sandblasting mechanism 6 is mounted on the top surface of the mounting plate 1 and located on the upper part of the placing table assembly 2, and a Loading and unloading mechanical claw 7; the placement table assembly 2 includes a workbench 21, the top surface of the mounting plate 1 is fixedly connected to the workbench 21, the middle of the top surface of the workbench 21 is fixedly connected to a disc 22, the top surface of the disc 22 is symmetrically fixedly connected to a half support ring 23, the top surface of the support ring 23 is placed with a quartz ring 3, the top surface of the workbench 21 is symmetrically fixedly connected to a first half retaining ring 24 and a second half retaining ring 25, an external clamping assembly 5 is installed between the first half retaining ring 24 and the second half retaining ring 25, and the first half retaining ring 24 and the second half retaining ring 25 are clamped by the external clamping assembly 5 cooperate with each other to form a closed retaining ring, the inner cavity wall of the closed retaining ring is provided with a recovery cavity 26 between the circumferential surfaces of the disk 22, the top surface of the workbench 21 is provided with a first recovery hole 27 in a circumferential array in the recovery cavity 26, the top surface of the disk 22 is symmetrically provided with a second recovery hole 28, the bottom surface of the workbench 21 is fixedly connected with a recovery ring 29 located below the second recovery hole 27, the inner cavity of the recovery ring 29 is communicated with the inner cavity of the second recovery hole 27, the bottom surface of the disk 22 is fixedly connected with an L-shaped absorption Tube 210, the L-shaped absorption tube 210 is connected with the second recovery hole 28 and the inner cavity of the recovery ring 29 respectively; the sandblasting mechanism 6 includes a sandblasting component 8, a switching component 9 and a sand storage component 10, the sandblasting component 8 is installed on the top surface of the mounting plate 1 and is located on one side of the workbench 21, the sand storage component 10 is installed on the top surface of the mounting plate 1 and is located on one side of the sandblasting component 8, the output end of the sand storage component 10 is connected with the inner cavity of the sandblasting component 8, the input end of the sand storage component 10 is connected with the L-shaped absorption tube 210, and the switching component 9 is installed on the top surface of the workbench 21.

[0045] Through the mutual cooperation of the first half baffle ring 24, the second half baffle ring 25 and the two groups of arc-shaped clamping blocks 575, a closed baffle ring is formed, which can block the sandblasting during spraying by the first nozzle 8643 to avoid sandblasting splashing and being unfavorable for recovery. Then, through the mutual cooperation of the first recovery hole 27, the second recovery hole 28 and the sand storage assembly 10, the recovery and reuse of the sandblasting can be achieved.

[0046] In order to enable the sandblasting assembly 8 to spray the other side of the quartz ring 3 after processing the one side, the present embodiment provides the following technical solution:

[0047] In this embodiment, the sandblasting assembly 8 includes a column 81, the top surface of the mounting plate 1 is fixedly connected to the column 81, the top surface of the column 611 is fixedly connected to a sliding sleeve 82, an extension rod 83 is slidably connected inside the sliding sleeve 82, the top surface of the sliding sleeve 82 is fixedly connected to a forward extending pneumatic rod 84, the output end of the forward extending pneumatic rod 84 is fixedly connected to the extension rod 83, the bottom surface of the extension rod 83 is fixedly connected to a lifting pneumatic rod 85, and the output end of the lifting pneumatic rod 85 is installed with a sandblasting component 86.

[0048] The extension rod 83 and the lifting pneumatic rod 85 are driven to move forward and backward by the forward extending pneumatic rod 84. When moving forward, the quartz ring can be sandblasted and polished. When retreating, it is convenient to turn over the quartz ring 3 later, or load and unload materials. When retreating, the position of the second nozzle is also switched so that the inner surface can be polished first when the inner surface is polished just now.

[0049] In order to enable the sandblasting component 86 to recover the sandblasted in the disc 22, the present embodiment provides the following technical solution:

[0050] In this embodiment, the sandblasting component 86 includes a base plate 861, the output end of the lifting pneumatic rod 85 is fixedly connected to the base plate 861, the bottom surface of the base plate 861 is fixedly connected to a rotating motor 862, the bottom surface of the base plate 861 is rotatably connected to a cylindrical sleeve 863, the output shaft end of the rotating motor 862 is rotatably connected to the cylindrical sleeve 863 through a gear set, a sandblasting component 864 is installed on the outer surface of the cylindrical sleeve 863, a cylindrical rod 865 is slidably connected inside the cylindrical sleeve 863, a storage pneumatic rod 866 is fixedly connected to the top surface of the cylindrical rod 865 and located between the top surface of the inner cavity of the cylindrical sleeve 863, an arc-shaped scraper 867 is fixedly connected to the bottom surface of the cylindrical rod 865, and a downward pressure structure 868 is installed on the top surface of the base plate 861.

[0051] When the inner wall of the quartz ring 3 is being polished, the arc scraper 867 will contact the top surface of the disc 22. At this time, the rotation of the cylindrical sleeve 863 will drive the arc scraper 867 to rotate, so that the spray generated by the polishing will be recovered from the recovery hole 27. When external polishing is performed, the arc scraper 867 will be retracted by the pneumatic rod 866 to prevent the arc scraper 867 from colliding with the inner clamping component 4.

[0052] Embodiment 2

[0053] like Figure 1-Figure 14 As shown, based on the above embodiment, this embodiment further provides the following contents:

[0054] In order to cooperate with the sandblasting part 864 and the switching assembly 9, it is convenient to spray and polish the inner and outer surfaces of the quartz ring 3 in the later stage, the following technical solution will be provided in this embodiment:

[0055] The sandblasting part 864 includes a rotating bracket 8641, the surface of the cylindrical sleeve 863 is fixedly connected to the rotating bracket 8641, a T-shaped switching disk 8642 is rotatably connected inside the rotating bracket 8641, the bottom surface of the T-shaped switching disk 8642 is fixedly connected to the first nozzle 8643, a height rod 8644 is slidably connected inside the T-shaped switching disk 8642, the bottom surface of the height rod 8644 is fixedly connected to the second nozzle 8645, the outer surface of the T-shaped switching disk 8642 is fixedly connected to the locking gear 8646, the top surface of the rotating bracket 8641 is fixedly connected to the locking rod 8647, one side of the locking rod 8647 is fixedly connected to the locking damping rod 8648, one end of the locking damping rod 8648 is fixedly connected to a latch tooth 8649, and the latch tooth 8649 is meshingly connected to the locking gear 8646. The switching assembly 9 includes a vertical rod 91, the top surface of the workbench 21 is fixedly connected with the vertical rod 91, one side of the vertical rod 91 is fixedly connected with a switching pneumatic rod 92, the output end of the switching pneumatic rod 622 is fixedly connected with a switching rack 93, and the top surface of the switching rack 93 is fixedly connected with an unlocking rod 94. The sand storage assembly 10 includes a fan storage box 101 and a sand pump 102, the fan storage box 101 and the sand pump 102 are respectively installed on the top surface of the mounting plate 1, the input end of the fan storage box 101 is connected to the inner cavity of the L-shaped absorption tube 210 through the input pipe 103, the input end of the sand pump 102 is connected to the inner cavity of the fan storage box 101 through the sand pipe 104, and the output end of the sand pump 102 is respectively connected to the first nozzle 8643 and the second nozzle 8645 through the sand discharge pipe 105.

[0056] The rotating bracket 8641 is driven to rotate by the cylindrical sleeve 863. When the rotating bracket 8641 rotates, the first nozzle 8643 and the second nozzle 8645 are driven to rotate and move along the inner surface or the outer surface of the quartz ring 3, so that the inner surface or the outer surface of the quartz ring 3 can be fully polished;

[0057] The unlocking rod 94 in the switching component 9 is used to first unlock the latching tooth 8649 so that the latching tooth 8649 no longer locks the locking gear 8646. At this time, the locking gear 8646 is driven to rotate by the switching rack 93, thereby changing the position of the second nozzle 8645, which is convenient for later internal or external spraying and polishing.

[0058] In order to enable the downward pressure structure 868 to drive the second nozzle 8645 to rise and fall, and facilitate the internal and external polishing of the quartz ring 3 with different high pressures, the present embodiment provides the following technical solutions:

[0059] In this embodiment, the downward pressure structure 868 includes a support rod 8681, the top surface of the base plate 861 is fixedly connected to the support rod 8681, the bottom surface of the support rod 8681 is fixedly connected to the electric telescopic rod 8682, the output end of the electric telescopic rod 8682 is fixedly connected to the lifting plate 8683, the bottom surface of the lifting plate 8683 is provided with a T-shaped rotating groove 8684, and the top surface of the height rod 8644 is located in the T-shaped rotating groove 8615 and slides.

[0060] The lifting plate 8683 is driven to move up and down by the electric telescopic rod 8682, thereby driving the height rod 8644 and the second nozzle 8645 to move up and down, so as to facilitate the sandblasting and polishing of the inner and outer surfaces of the quartz ring 3 at different heights in the later stage.

[0061] Embodiment 3

[0062] like Figure 1-Figure 14 As shown, based on the above embodiment, this embodiment further provides the following contents:

[0063] In order to enable the inner clamping assembly 4 to clamp and fix the inner surface of the quartz ring 3, and facilitate the later sandblasting mechanism 6 to sandblast the outer surface of the quartz ring 3, this embodiment will provide the following technical solutions:

[0064] The inner clamping assembly 4 includes a clamping pneumatic rod 41, an auxiliary clamping plate 42 and a clamping hole 43. The top surface of the disk 22 is symmetrically provided with the clamping hole 43, the bottom surface of the disk 22 is fixedly connected with the auxiliary clamping plate 42, and the two ends of one side of the auxiliary clamping plate 42 are respectively provided with curved grooves 44, the top surface of the mounting plate 1 is fixedly connected with the clamping pneumatic rod 41, the output end of the clamping pneumatic rod 41 is fixedly connected with a long plate 45, the top surface of the long plate 45 is provided with a dovetail groove 46, an L-shaped clamping jaw 47 is slidably connected in the dovetail groove 46, one end of the L-shaped clamping jaw 47 is located in the clamping hole 43 and slides, and one side of the L-shaped clamping jaw 47 is fixedly connected with a sliding column 48, and the sliding column 48 is located in the curved groove 44 and slides.

[0065] The long plate 45 is driven to move upward by clamping the pneumatic rod 41. When the long plate 45 moves upward, the L-shaped clamping jaw 47 is driven to move upward. When the L-shaped clamping jaw 47 moves upward, the curved groove 44 and the sliding column 48 cooperate with each other, so that the L-shaped clamping jaw 47 moves toward the inner wall of the quartz ring 3 when moving upward, thereby clamping and fixing the inner wall of the quartz ring 3, which is convenient for the later sandblasting and polishing of the outer surface and the top surface of the quartz ring 3. When the internal clamping is not needed, it can also be stored, which is convenient for the later sandblasting mechanism 6 to clean and recover the sandblasted part of the middle part of the disc 22.

[0066] In order to enable the outer clamping assembly 5 to grind the quartz ring 3 so as to clamp and fix it, and to turn the quartz ring 3 over after grinding, so as to facilitate the sandblasting and grinding of the other side of the quartz ring in the later stage, and at the same time, to facilitate the loading and unloading of the polished and unpolished quartz rings 3 in the later stage, the present embodiment will provide the following technical solutions:

[0067] In this embodiment, the external clamping assembly 5 includes a lifting telescopic rod 51, the top surface of the mounting plate 1 is fixedly connected to the lifting telescopic rod 51, the output end of the lifting telescopic rod 51 is fixedly connected to the lifting block 52, the lifting block 52 is rotatably connected to a flip shaft 53, the outer surface of the flip shaft 53 is fixedly connected to a flip gear 54, the top surface of the lifting block 52 is fixedly connected to a flip telescopic rod 55, the output end of the flip telescopic rod 55 is fixedly connected to a flip rack 56, the flip rack 56 is meshed with the flip gear 54, and a clamping component 57 is installed at one end of the flip shaft 53. The clamping component 57 includes a rectangular sleeve 571 and a first inclined block 572. One end of the flip shaft 53 is fixedly connected to the rectangular sleeve 571, and a rectangular rod 573 is slidably connected in the rectangular sleeve 571. The top surface of the rectangular sleeve 571 is fixedly connected to a clamping telescopic rod 574, and the output end of the clamping telescopic rod 574 is fixedly connected to the rectangular rod 573. One end of the rectangular rod 573 is fixedly connected to an arc-shaped clamping block 575, and the outer surface of the rectangular rod 573 is slidably connected to a mouth frame 576. The two ends of one side of the mouth frame 576 are respectively fixedly connected to a limiting rod 577, one end of the limiting rod 577 passes through the arc-shaped clamping block 575 and slides in the arc-shaped clamping block 575, and a reset damping rod 578 is fixedly connected to one side of the mouth frame 576 and between the arc-shaped clamping blocks 575. The two sides of the mouth frame 576 are respectively fixedly connected to the second inclined blocks 579, and the top surface of the workbench 21 is respectively fixedly connected to the first inclined blocks 572.

[0068] When the two groups of arc clamping blocks 575 move toward each other, the surface of the quartz ring 3 can be clamped, which is convenient for grinding the inner surface and the top surface of the quartz ring 3 or turning it over. At this time, the telescopic rod 51 is lifted, and the lifting telescopic rod 51 drives the clamping component 57 to move upward. When the first inclined block 572 and the second inclined block 579 in the clamping component 57 are separated from each other, the limiting rod 577 will be moved out of the arc clamping block 575. At this time, under the action of the limiting rod 577, the upper and lower sides of the quartz ring 3 are limited. When the quartz ring 3 is lifted to a certain height, it is convenient for loading and unloading and turning over in the later stage. When the turning telescopic rod 55 drives the turning rack 56 to move, it will drive the clamping component 57 and the quartz ring 3 to turn 180 degrees, which is convenient for grinding the other side of the quartz ring 3 in the later stage.

[0069] The working principle and use process of the present invention:

[0070] In use:

[0071] In the first step, the quartz ring 3 to be polished is moved to the top of the workbench 21 by the loading and unloading mechanical claw 7;

[0072] In the second step, the quartz ring 3 to be polished is removed from the loading and unloading mechanical claw 7 by the outer clamping assembly 5, and then placed on the support ring 23. At this time, the outer clamping assembly 5 still clamps and fixes the surface of the quartz ring 3, but the limiter 577 is contracted in the arc clamping block 575 under the action of the first inclined block 572 and the second inclined block 579;

[0073] The third step is to move the sandblasting component 86 to the center of the quartz ring 3 by extending the pneumatic rod 84 and lifting the pneumatic rod 85. At this time, the arc scraper 867 contacts the top surface of the disc 22, the first nozzle 8643 is located on the top surface of the quartz ring 3, and the second nozzle is located on the inner surface of the quartz ring 3. At this time, the rotating motor 862 drives the first nozzle 8643 and the second nozzle 8645 to rotate along the circumferential surface of the quartz ring 3, so that the quartz ring can be sandblasted and polished. During the polishing, the sandblasting on the disc 22 and the recovery chamber 26 is collected by the arc scraper 867 for convenient later use.

[0074] Step 4: After sandblasting, the sand spraying assembly 8 is removed from the quartz ring 3. At the same time, the switching rack 93 drives the T-shaped switching disk 8642 to rotate, so that the position of the second nozzle 8645 changes. At this time, the outer clamping assembly 5 drives the quartz ring 3 to rise and flip it. After flipping, it is placed on the supporting ring 23. At this time, the outer clamping assembly 5 begins to loosen. When loosening, the arc-shaped clamping block 575 in the outer clamping assembly 5 cooperates with the first half retaining ring 24 and the second half retaining ring 25 to form a closed retaining ring. When the outer clamping assembly 5 is disengaged, the inner clamping assembly 4 starts to work, so that the inner clamping assembly 4 clamps and fixes the inner wall of the quartz ring 3.

[0075] Step 5: Move the sandblasting component 86 to the top of the turned over quartz ring by extending the pneumatic rod 84 and lifting the pneumatic rod 85. Note that the arc scraper 867 is no longer in contact with the top surface of the disc 22, and the second nozzle 8645 is located on the outer surface of the quartz ring 3, and the first nozzle 8643 is located directly above the quartz ring 3. At this time, the first nozzle 8643 and the second nozzle 8645 are moved along the circumferential surface of the quartz ring 3, so that the other two surfaces of the quartz ring 3 can be polished.

[0076] In the sixth step, after polishing, the sandblasting component 86 is reset, and the inner clamping component 4 releases the internal clamping of the quartz ring 3, while the outer clamping component begins to clamp the surface of the quartz ring 3. After clamping, the quartz ring 3 is lifted up. At this time, the loading and unloading robot 7 removes the polished quartz ring, and places the unpolished quartz ring on the top of the outer clamping component to facilitate the outer clamping component to clamp and take it for the next polishing.

[0077] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0078] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A quartz ring surface sandblasting device, characterized in that: It comprises a mounting plate; a placing table assembly is mounted on the top surface of the mounting plate, a quartz ring is placed in the middle of the placing table assembly, an inner clamping assembly is mounted on the top surface of the mounting plate and located on the bottom surface of the placing table assembly, outer clamping assemblies are mounted on the top surface of the mounting plate and located on both sides of the placing table assembly, a sandblasting mechanism is mounted on the top surface of the mounting plate and located on the upper part of the placing table assembly, and a loading and unloading mechanical claw is mounted on the top surface of the mounting plate and located in front of the placing table assembly; The placing table assembly includes a workbench, the top surface of the mounting plate is fixedly connected to the workbench, the middle part of the top surface of the workbench is fixedly connected to a circular disc, the top surface of the circular disc is symmetrically fixedly connected to a half support ring, a quartz ring is placed on the top surface of the support ring, the top surface of the workbench is symmetrically fixedly connected to a first half retaining ring and a second half retaining ring, an outer clamping assembly is installed between the first half retaining ring and the second half retaining ring, the first half retaining ring and the second half retaining ring form a closed retaining ring through the mutual cooperation of the outer clamping assembly, the inner cavity wall of the closed retaining ring and a recovery cavity are arranged between the circumferential surface of the circular disc, the top surface of the workbench and the inner circumference array of the recovery cavity are provided with a first recovery hole, the top surface of the circular disc is symmetrically provided with a second recovery hole, the bottom surface of the workbench and the recovery ring is fixedly connected below the second recovery hole, the inner cavity of the recovery ring is connected to the inner cavity of the second recovery hole, the bottom surface of the circular disc and the L-shaped absorption tube is fixedly connected below the second recovery hole, and the L-shaped absorption tube is respectively connected to the second recovery hole and the inner cavity of the recovery ring; The sandblasting mechanism includes a sandblasting component, a switching component and a sand storage component. The sandblasting component is installed on the top surface of the mounting plate and located on one side of the workbench. The sand storage component is installed on the top surface of the mounting plate and located on one side of the sandblasting component. The output end of the sand storage component is connected to the inner cavity of the sandblasting component, the input end of the sand storage component is connected to the L-shaped absorption pipe, and the switching component is installed on the top surface of the workbench.

2. A quartz ring surface sandblasting device according to claim 1, characterized in that: The sandblasting assembly includes a column, the top surface of the mounting plate is fixedly connected to the column, the top surface of the column is fixedly connected to a sliding sleeve, an extension rod is slidably connected inside the sliding sleeve, the top surface of the sliding sleeve is fixedly connected to a forward pneumatic rod, the output end of the forward pneumatic rod is fixedly connected to the extension rod, the bottom surface of the extension rod is fixedly connected to a lifting pneumatic rod, and the output end of the lifting pneumatic rod is installed with a sandblasting component.

3. A quartz ring surface sandblasting device according to claim 2, characterized in that: The sandblasting component includes a base plate, the output end of the lifting pneumatic rod is fixedly connected to the base plate, the bottom surface of the base plate is fixedly connected to a rotating motor, the bottom surface of the base plate is rotatably connected to a cylindrical sleeve, the output shaft end of the rotating motor is rotatably connected to the cylindrical sleeve through a gear set, a sandblasting part is installed on the outer surface of the cylindrical sleeve, a cylindrical rod is slidably connected inside the cylindrical sleeve, a storage pneumatic rod is fixedly connected to the top surface of the cylindrical rod and located between the top surface of the inner cavity of the cylindrical sleeve, an arc-shaped scraper is fixedly connected to the bottom surface of the cylindrical rod, and a downward pressure structure is installed on the top surface of the base plate.

4. A quartz ring surface sandblasting device according to claim 3, characterized in that: The sandblasting part includes a rotating bracket, the surface of the cylindrical sleeve is fixedly connected to the rotating bracket, a T-shaped switching disk is rotatably connected inside the rotating bracket, a first nozzle is fixedly connected to the bottom surface of the T-shaped switching disk, a height rod is slidably connected inside the T-shaped switching disk, a second nozzle is fixedly connected to the bottom surface of the height rod, a locking gear is fixedly connected to the outer surface of the T-shaped switching disk, a locking rod is fixedly connected to the top surface of the rotating bracket, a locking damping rod is fixedly connected to one side of the locking rod, a latch tooth is fixedly connected to one end of the locking damping rod, and the latch tooth is meshingly connected to the locking gear.

5. A quartz ring surface sandblasting device according to claim 4, characterized in that: The downward pressing structure includes a support rod, the top surface of the base plate is fixedly connected to the support rod, the bottom surface of the support rod is fixedly connected to an electric telescopic rod, the output end of the electric telescopic rod is fixedly connected to a lifting plate, the bottom surface of the lifting plate is provided with a T-shaped rotating groove, and the top surface of the height rod slides in the T-shaped rotating groove.

6. A quartz ring surface sandblasting device according to claim 5, characterized in that: The switching assembly includes a vertical rod, the top surface of the workbench is fixedly connected to the vertical rod, one side of the vertical rod is fixedly connected to a switching pneumatic rod, the output end of the switching pneumatic rod is fixedly connected to a switching rack, and the top surface of the switching rack is fixedly connected to an unlocking rod.

7. A quartz ring surface sandblasting device according to claim 6, characterized in that: The sand storage assembly includes a fan storage box and a sand pump, and the fan storage box and the sand pump are respectively installed on the top surface of the mounting plate. The input end of the fan storage box is connected with the inner cavity of the L-shaped absorption tube through an input pipe, the input end of the sand pump is connected with the inner cavity of the fan storage box through a sand pipe, and the output end of the sand pump is connected with the first nozzle and the second nozzle through a sand discharge pipe.

8. A quartz ring surface sandblasting device according to claim 7, characterized in that: The inner clamping assembly includes a clamping pneumatic rod, an auxiliary clamping plate and a clamping hole. The top surface of the disc is symmetrically provided with the clamping hole, the bottom surface of the disc is fixedly connected with the auxiliary clamping plate, and the two ends of one side of the auxiliary clamping plate are respectively provided with curved grooves, the top surface of the mounting plate is fixedly connected with the clamping pneumatic rod, the output end of the clamping pneumatic rod is fixedly connected with a long plate, the top surface of the long plate is provided with a dovetail groove, an L-shaped clamping jaw is slidably connected in the dovetail groove, one end of the L-shaped clamping jaw slides in the clamping hole, and one side of the L-shaped clamping jaw is fixedly connected with a sliding column, and the sliding column slides in the curved groove.

9. A quartz ring surface sandblasting device according to claim 8, characterized in that: The external clamping assembly includes a lifting telescopic rod, the top surface of the mounting plate is fixedly connected to the lifting telescopic rod, the output end of the lifting telescopic rod is fixedly connected to a lifting block, the lifting block is rotatably connected to a flip shaft, the outer surface of the flip shaft is fixedly connected to a flip gear, the top surface of the lifting block is fixedly connected to the flip telescopic rod, the output end of the flip telescopic rod is fixedly connected to a flip rack, the flip rack is meshed with the flip gear, and a clamping component is installed at one end of the flip shaft.

10. The quartz ring surface sandblasting device according to claim 9, characterized in that: The clamping component includes a rectangular sleeve and a first oblique block, one end of the flip shaft is fixedly connected to the rectangular sleeve, a rectangular rod is slidably connected in the rectangular sleeve, the top surface of the rectangular sleeve is fixedly connected to the clamping telescopic rod, the output end of the clamping telescopic rod is fixedly connected to the rectangular rod, one end of the rectangular rod is fixedly connected to the arc-shaped clamping block, the outer surface of the rectangular rod is slidably connected to a mouth frame, the two ends of one side of the mouth frame are respectively fixedly connected to a limiting rod, one end of the limiting rod passes through the arc-shaped clamping block and slides in the arc-shaped clamping block, a reset damping rod is fixedly connected to one side of the mouth frame and between the arc-shaped clamping blocks, the two sides of the mouth frame are respectively fixedly connected to the second oblique blocks, and the top surface of the workbench is respectively fixedly connected to the first oblique blocks.

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