Sending platform deck of KLA scanning equipment
By integrating the robotic arms, drying devices and drying devices on the sending stage of the KLA scanning equipment, the complexity of manual operation and pollution caused by air contact after wafer cleaning is solved, and efficient and accurate detection results are achieved.
Patent Information
- Application Number
- CN202411806257.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-10
- Publication Date
- 2025-03-14
AI Technical Summary
The prior art increases the complexity and labor intensity of manual operation after cleaning the wafer, and the wafer may come into contact with external air, resulting in dust or pollutants attached, affecting the subsequent scanning and detection results. At the same time, water stains may exist on the surface after the wafer is cleaned, affecting the detection results.
A KLA scanning device transmission stage is provided, including an operating table, a fixing seat, a robot arm, a scanner, a drying device and a drying device. Through the cooperation of the robotic arm and the fixed seat, the cyclic detection of the box as a batch is achieved, avoiding the wafer from contacting external air before detection. The drying device drys the wafer through hot air to eliminate water stains, and the drying device absorbs moisture through the desiccant to keep the environment dry.
The operation steps are simplified, and the pollution caused by the wafer being exposed to external air before detection is avoided, the detection efficiency and accuracy are improved, and the stability of the detection results are ensured.
Smart Images
Figure CN119618782A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of wafer surface defect detection, and in particular to a KLA scanning device sending stage. Background Art
[0002] In the semiconductor manufacturing industry, wafer surface defect inspection is a crucial link. With the continuous development of science and technology, the quality requirements for semiconductor chips are getting higher and higher. Therefore, efficient and accurate scanning and inspection of wafers is particularly important. As the industry's leading defect detection equipment, KLA scanning equipment is widely used in various links of the semiconductor manufacturing process, such as defect detection, measurement and review.
[0003] However, there are still some urgent problems to be solved in the existing wafer inspection process. First, after the wafer is cleaned, it is usually necessary to take the wafer out of the cleaning machine and transfer it to a special packaging box, and then transport these packaging boxes to the scanning equipment. This process not only increases the complexity and labor intensity of manual operation, but also the wafer is easily exposed to the outside air during transportation, resulting in dust or contaminants adhering to the surface, which in turn affects the subsequent scanning and inspection results.
[0004] Secondly, after the wafers are cleaned, since multiple wafers are usually stacked together, some areas of some wafers may not be completely dried, leaving water stains or moisture. These water stains or moisture may interfere with the scanning test, resulting in inaccurate test results, and may even cause misjudgment. Especially in the high-precision and high-demand semiconductor manufacturing process, this error is absolutely intolerable.
[0005] In addition, with the expansion of production scale and the increase in testing needs, the traditional wafer testing process has been unable to meet the requirements of efficient and automated production. Therefore, there is an urgent need for a new technology or equipment that can simplify the operation process, improve testing efficiency, and ensure the accuracy and stability of the test results. Summary of the invention
[0006] In view of the shortcomings of the prior art, the present application provides a KLA scanning device sending stage to solve the technical problems that the prior art increases the complexity and labor intensity of manual operation when cleaning wafers, and the wafers may come into contact with the outside air, thereby adhering to dust or pollutants, which may affect subsequent scanning and detection results and reduce the accuracy and reliability of the detection. In addition, there may be water stains on the surface of the wafer after cleaning, which will also affect the detection results.
[0007] To achieve the above objectives, this application provides the following technical solutions:
[0008] A KLA scanning device sending stage provided in the present application includes an operating table, on which three fixing seats, a mechanical arm and a scanner are installed, the scanner is located on the left side of the mechanical arm, and the three fixing seats are respectively located on the front, rear and right sides of the mechanical arm, a film box is arranged on the fixing seat, three card slots and two guide pillars are arranged on the fixing seat, three convex strips and two guide holes are arranged on the bottom of the film box, the three convex strips on the film box correspond to the three card slots on the fixing seat and fit each other, and the two guide pillars on the film box are slidably connected with the two guide holes on the fixing seat; a drying device is also included for drying wafers, the drying device is arranged on the operating table, and the drying device is located on the right side of the mechanical arm; a drying device is used to maintain the dryness inside the drying device, and the drying device is arranged inside the drying device.
[0009] Preferably, the robotic arm comprises a rotating seat, which is rotatably mounted on an operating table, a telescopic table is slidably mounted on the rotating seat, a sliding arm is slidably mounted on the telescopic table, and both ends of the sliding arm are respectively connected to support plates.
[0010] Preferably, the drying device includes a drying hood, which is mounted on an operating table, and a first gear and a second gear are rotatably mounted on the left outer wall of the drying hood. A gear rod is rotatably mounted on the operating table through a bracket, a bevel gear is connected to the rotating seat, a first pulley is connected to the right side of the second gear, two exhaust hoods are installed through the left outer wall of the drying hood, an impeller is rotatably mounted on the inner wall of the exhaust hood through a bracket, a second pulley is connected to the right end of the impeller, the right end of the exhaust hood is located inside the drying hood, the right end of the exhaust hood is rotatably connected to a rotating pipe connection, a hose is connected to the rotating pipe connection, and a blowing hood is connected between the two hoses.
[0011] Preferably, the fixing seat located on the right is located in a drying hood, a movable cover is provided on the top of the drying hood, and an air outlet is provided on the right side of the drying hood.
[0012] Preferably, the bevel gear is meshed with a gear rod, an end of the gear rod away from the bevel gear is connected to gear No. 1, the gear No. 1 is located below gear No. 2, the gear No. 1 is meshed with gear No. 2, the two exhaust hoods are respectively located on the front and rear sides of gear No. 2, and the two No. 2 pulleys are connected to the No. 1 pulley by a belt.
[0013] Preferably, the right end of the No. 2 gear is connected to a rotating rod, the rotating rod is located inside the drying hood, a slide frame is slidably installed on the inner wall of the drying hood, a slide frame is provided with a slide, the end of the rotating rod away from the No. 2 gear is connected to a sliding shaft, the sliding shaft is slidably connected to the slide slot of the slide frame, and the slide frame is connected to the blow hood.
[0014] Preferably, the left end of the exhaust hood is connected to an air filter, and the inner wall of the blowing hood is installed with a heating wire.
[0015] Preferably, the drying device comprises two drying boxes, both of which are mounted on the operating table, both of which are located in the drying cover, and both of which are located at the front and rear sides of the right fixing seat respectively.
[0016] Preferably, a sliding rod is slidably installed through the inner wall of the drying box, a plurality of levers are installed on the sliding rod, the plurality of levers are all located in the drying box, one end of the sliding rod is located outside the drying box, a connecting frame is connected to the bottom of the blowing hood, two connecting rods are hinged at the bottom of the connecting frame, and the two connecting rods are respectively hinged to one end of the two sliding rods located outside the drying box.
[0017] This application has the following beneficial effects:
[0018] 1. The KLA scanning equipment sends a carrier, which achieves the effect of batch cycle detection with film boxes through the cooperation of three fixed seats, three film boxes, a robotic arm and a scanner. During the detection process, the cleaned wafers do not need to be transferred from the film box to the PP packaging box, which simplifies the operation steps and avoids the cleaned wafers from contacting the outside air and adhering dust before detection, thereby improving the overall work efficiency.
[0019] 2. The KLA scanning equipment sends a carrier. Through the setting of the drying device, when the detection operation starts, the blow hood can blow hot air to multiple wafers in the right film box to dry multiple wafers, thereby avoiding water stains on some wafers and affecting the detection results; through the cooperation of the rotating rod and the slide frame, the blow hood can also move up and down during drying, so that multiple wafers can be dried evenly, improving the drying efficiency and drying effect.
[0020] 3. The KLA scanning equipment sends a carrier. Through the setting of the drying device, the desiccant in the two drying boxes can absorb the moisture in the drying cover and maintain the dryness in the drying cover to avoid fogging on the wafer surface due to the failure to discharge some moisture in time after long-term use; through the setting of multiple levers, the multiple levers can flip the desiccant in the drying box back and forth, so that the desiccant can enhance the absorption effect and improve the absorption efficiency through movement. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a schematic diagram of the appearance of a KLA scanning device sending stage of the present application;
[0022] Figure 2 It is a schematic diagram of the overall structure of a KLA scanning device sending stage of the present application;
[0023] Figure 3 It is a schematic diagram of the structure of the mechanical arm of the present application;
[0024] Figure 4 It is a schematic diagram of the film box structure of the present application;
[0025] Figure 5 It is a schematic diagram of the convex strip structure of the present application;
[0026] Figure 6 It is a schematic diagram of the fixing seat structure of the present application;
[0027] Figure 7 It is a schematic diagram of the structure of the drying device of the present application;
[0028] Figure 8 It is a schematic diagram of the drying hood structure of the present application;
[0029] Fig. 9 It is a schematic diagram of the slide frame structure of the present application;
[0030] Fig.10 It is a schematic diagram of the wind shield structure of the present application;
[0031] Fig.11 It is a schematic diagram of the drying device structure of the present application.
[0032] Explanation of the reference numerals in the accompanying drawings: 1. operating table; 2. fixed seat; 3. film box; 4. mechanical arm; 41. rotating seat; 42. telescopic table; 43. sliding arm; 44. support plate; 5. scanner; 6. drying device; 61. drying hood; 62. bevel gear; 63. gear rod; 64. gear No. 1; 65. gear No. 2; 66. pulley No. 1; 67. exhaust hood; 68. air filter; 69. impeller; 610. pulley No. 2; 611. rotating pipe connection; 612. hose; 613. blow hood; 614. heating wire; 615. slide rack; 616. slide shaft; 617. rotating rod; 7. drying device; 71. drying box; 72. slide rod; 73. lever; 74. connecting rod; 75. connecting rack; 8. slot; 9. guide column; 10. convex strip; 11. guide hole. DETAILED DESCRIPTION
[0033] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.
[0034] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.
[0035] In the following, in conjunction with the accompanying drawings, a KLA scanning device sending stage provided in an embodiment of the present application is described in detail through specific embodiments and application scenarios.
[0036] Example 1
[0037] See also Figure 1-Figure 6A KLA scanning device transmitting stage includes an operating table 1, on which three fixing seats 2, a mechanical arm 4 and a scanner 5 are installed, the scanner 5 is located on the left side of the mechanical arm 4, the three fixing seats 2 are respectively located on the front and rear sides and the right side of the mechanical arm 4, a film box 3 is arranged on the fixing seat 2, three card slots 8 and two guide pillars 9 are arranged on the fixing seat 2, three convex strips 10 and two guide holes 11 are arranged at the bottom of the film box 3, the three convex strips 10 on the film box 3 correspond to the three card slots 8 on the fixing seat 2 and fit each other, the two guide pillars 9 on the film box 3 and the two guide holes 11 on the fixing seat 2 are arranged on the fixing seat 2, and the fixing seat 2 is provided with a plurality of guide holes 11. The three convex strips 10 at the bottom of the film box 3 are slidably connected, two of which are vertically arranged and one is horizontally arranged, and the three convex strips 10 form a "door" shape. The two guide holes 11 are respectively located at the two corners of the bottom of the film box 3 on the side where the wafer enters and exits. The three card slots 8 and two guide pillars 9 on the fixed seat 2 correspond to the three convex strips 10 and the two guide holes 11 of the film box 3. The staff places the film box 3 on the fixed seat 2, and the three convex strips 10 slide into the three card slots 8. The two guide pillars 9 pass through the two guide holes 11 to fix the film box 3 on the fixed seat 2. Among the three fixed seats 2, the front The fixed seat 2 at the front is used for loading, the fixed seat 2 at the rear is used for unloading, and the fixed seat 2 at the right is used for drying; the mechanical arm 4 includes a rotating seat 41, which is rotatably mounted on the operating table 1, and a telescopic table 42 is slidably mounted on the rotating seat 41, and a sliding arm 43 is slidably mounted on the telescopic table 42, and the two ends of the sliding arm 43 are respectively connected to a support plate 44, and a driving device is respectively arranged inside the connection between the rotating seat 41 and the operating table 1, the connection between the rotating seat 41 and the telescopic table 42, and the connection between the telescopic table 42 and the sliding arm 43, and the rotating seat 41 can rotate on the operating table 1 The telescopic table 42 can be retracted up and down on the rotating seat 41, the sliding arm 43 can slide on the telescopic table 42 in a direction parallel to the telescopic table 42, and the two support plates 44 are used to support the wafers; through the cooperation of the three fixed seats 2, the three film boxes 3, the mechanical arm 4 and the scanner 5, the effect of cyclic detection with the film boxes 3 as batches is achieved. During the detection process, the cleaned wafers do not need to be transferred from the film boxes 3 to the PP packaging box, which simplifies the operation steps and avoids the cleaned wafers from contacting the outside air and adhering dust before detection, thereby improving the overall work efficiency.
[0038] For further information, see Figure 7-Figure 10, also includes a drying device 6 for drying the wafer, the drying device 6 is arranged on the operating table 1, the drying device 6 is located on the right side of the robot arm 4, the fixed seat 2 located on the right is located in the drying cover 61, the top of the drying cover 61 is provided with a movable cover, the right side of the drying cover 61 is provided with an air outlet, the drying device 6 includes a drying cover 61, the drying cover 61 is installed on the operating table 1, the left outer wall of the drying cover 61 is rotatably installed with a first gear 64 and a second gear 65, the operating table 1 is rotatably installed with a gear rod 63 through a bracket, the rotating seat 41 is connected with a bevel gear 62, the bevel gear 62 is meshed with the gear rod 63, and the gear rod 63 is far One end of the bevel gear 62 is connected to the first gear 64, the first gear 64 is located below the second gear 65, the first gear 64 is meshed with the second gear 65, the right side of the second gear 65 is connected to the first pulley 66, the left outer wall of the drying cover 61 is penetrated with two exhaust hoods 67, the inner wall of the exhaust hood 67 is rotatably installed with an impeller 69 through a bracket, the right end of the impeller 69 is connected to the second pulley 610, the two exhaust hoods 67 are respectively located at the front and rear sides of the second gear 65, the two second pulleys 610 and the first pulley 66 are connected by a belt, and the second gear 65 drives the first pulley 66 to rotate. The first pulley 66 drives the two second pulleys 610 to rotate through the belt, and the two second pulleys 610 drive the two impellers 69 to rotate. The right end of the exhaust hood 67 is located inside the drying hood 61. The right end of the exhaust hood 67 is rotatably connected to a rotating pipe connection 611, and a hose 612 is connected to the rotating pipe connection 611. A blow hood 613 is connected between the two hoses 612. When the two impellers 69 rotate, air is drawn into the exhaust hood 67 respectively. The two exhaust hoods 67 respectively transport the air to the blow hood 613 through the two rotating pipe connections 611 and the two hoses 612. The blow hood 613 is located on the left side of the right film box 3. After the blowing hood 613 blows out the wind, the wind flows to the right from the gaps between the multiple wafers in the wafer box 3, takes away the moisture on the surface of the wafers, and is finally discharged through the air outlet of the drying hood 61. The left end of the exhaust hood 67 is connected to an air filter 68, which can filter the air entering the exhaust hood 67 to prevent dust mixed in the hot air from contaminating the wafers. The inner wall of the blowing hood 613 is installed with a heating wire 614, and the switch of the heating wire 614 is set to turn on after following the rotation of one of the impellers 69. After the heating wire 614 is turned on, it heats the air blown out of the blowing hood 613, so that the hot air dries the multiple wafers, thereby accelerating the drying efficiency.The right end of the No. 2 gear 65 is connected to a rotating rod 617, and the rotating rod 617 is located inside the drying cover 61. A slide frame 615 is slidably installed on the inner wall of the drying cover 61, and a slide frame 615 is provided with a slide. The end of the rotating rod 617 away from the No. 2 gear 65 is connected to a sliding shaft 616, and the sliding shaft 616 is slidably connected to the slide groove of the slide frame 615. The slide frame 615 is connected to the blow hood 613. When the No. 2 gear 65 rotates, the No. 2 gear 65 drives the rotating rod 617 to rotate. When the rotating rod 617 rotates, the slide frame 615 is driven to reciprocate up and down through the cooperation of the sliding shaft 616 and the slide groove of the slide frame 615. The slide frame 615 moves up and down. When the rotating rod 617 and the sliding slot frame 615 are in cooperation, the blowing hood 613 can also move up and down reciprocatingly, so that the blowing hood 613 can make the wafers at different heights be blown with hot air evenly by the reciprocating up and down movement, thereby improving the drying effect; through the setting of the drying device 6, when the detection operation starts, the blowing hood 613 can blow hot air to the multiple wafers in the right wafer box 3 to dry the multiple wafers, thereby avoiding the local presence of water stains on some wafers and affecting the detection results; through the cooperation of the rotating rod 617 and the sliding slot frame 615, the blowing hood 613 can also move up and down reciprocatingly during drying, so that the multiple wafers can be dried evenly, thereby improving the drying efficiency and drying effect. ;
[0039] Further, see Fig.11, the drying device 7 is used to maintain the dryness inside the drying device 6. The drying device 7 is arranged inside the drying device 6. The drying device 7 includes two drying boxes 71. The two drying boxes 71 are both installed on the operating table 1. The two drying boxes 71 are both located in the drying cover 61. The two drying boxes 71 are respectively located on the front and rear sides of the right fixing seat 2. The two drying boxes 71 are filled with desiccants. The desiccants in the two drying boxes 71 can absorb the moisture in the drying cover 61 to avoid the moisture in the drying box 71 after long-term use. Water mist may form on the surface of some wafers, thereby affecting the detection; a sliding rod 72 is slidably installed through the inner wall of the drying box 71, and a plurality of levers 73 are installed on the sliding rod 72. The plurality of levers 73 are all located in the drying box 71. One end of the sliding rod 72 is located outside the drying box 71. The bottom of the blowing cover 613 is connected to a connecting frame 75. The bottom of the connecting frame 75 is hinged with two connecting rods 74. The two The connecting rods 74 are respectively hinged to one end of the two slide bars 72 located outside the drying box 71. When the connecting frame 75 moves up and down reciprocatingly, the two slide bars 72 are driven to slide back and forth left and right through the two connecting rods 74. When the two slide bars 72 move back and forth left and right, the multiple levers 73 on the two slide bars 72 turn over the desiccant in the two drying boxes 71, so that the desiccant can absorb moisture more evenly, and avoid the desiccant being stationary for a long time, resulting in the upper desiccant absorbing more moisture while the lower desiccant absorbing insufficient moisture; through the setting of the drying device 7, the desiccant in the two drying boxes 71 can absorb moisture in the drying cover 61, maintain the dryness in the drying cover 61, and avoid fogging on the wafer surface due to the failure to discharge part of the moisture in time after long-term use; through the setting of the multiple levers 73, the multiple levers 73 can turn over the desiccant in the drying box 71 back and forth, so that the desiccant can enhance the absorption effect through movement and improve the absorption efficiency.
[0040] With the above structure, the working principle of this case is that multiple placement grooves are arranged on the inner walls of both sides of the film box 3, and the multiple placement grooves in the film box 3 can place multiple wafers in layers, and there is a certain gap between adjacent wafers. The staff places the film box 3 with the wafers in the cleaning device for cleaning, and then transfers the film box 3 to the fixed seat 2. Among the three convex strips 10 at the bottom of the film box 3, two are arranged vertically and one is arranged horizontally. The three convex strips 10 form a "door" shape, and the two guide holes 11 are respectively located at the two corners of the bottom of the film box 3 on the side where the wafers enter and exit. The three card slots 8 and the two guide pillars 9 on the fixed seat 2 correspond to the three convex strips 10 and the two guide holes 11 of the film box 3. The staff places the film box 3 on the fixed seat 2 On the top, three convex strips 10 slide into three card slots 8, two guide pillars 9 pass through two guide holes 11, so that the film box 3 is fixed on the fixed seat 2. Among the three fixed seats 2, the front fixed seat 2 is used for loading, the rear fixed seat 2 is used for unloading, and the right fixed seat 2 is used for drying. The rotating seat 41 of the mechanical arm 4 can rotate on the operating table 1, the telescopic table 42 can be retracted up and down on the rotating seat 41, and the sliding arm 43 can slide on the telescopic table 42 in a direction parallel to the telescopic table 42. Two supporting plates 44 are used to support and take wafers. After starting the mechanical arm 4, the rotating seat 41 first drives the telescopic table 42 to rotate, so that one of the supporting plates 44 faces the film box 3 in front, and then the sliding arm 43 slides forward to insert the supporting plate 44 into one of them. The telescopic table 42 extends upward to allow the support plate 44 to lift the wafer, the sliding arm 43 moves backward, and the rotating seat 41 rotates again to allow the wafer to face the scanner 5. The scanner 5 is provided with a detection port, and the sliding arm 43 slides to the left to allow the wafer on the support plate 44 to enter the detection port for scanning and detection. After the detection is completed, the sliding arm 43 slides to the right, and the rotating seat 41 rotates again to allow the wafer to face the film box 3 at the rear. The sliding arm 43 slides backward to place the wafer into the film box 3, and the telescopic table 42 moves downward to place the wafer on one of the placement slots, and the sliding arm 43 slides forward to reset. The above steps are the process of detecting one wafer. The rotating seat 41 rotates a total of 180 degrees, and the subsequent detection is the same In the above steps, after the wafers in the front film box 3 are inspected one by one and placed in the rear film box 3, the staff will take away the rear film box 3, put the front film box 3 to the rear, put the right film box 3 to the front, put the film box 3 that has just been cleaned to the right, and so on, taking one film box 3 as a batch, and performing multiple batches of inspections; through the cooperation of three fixed seats 2, three film boxes 3, robotic arms 4 and scanners 5, the effect of cyclic inspection with film boxes 3 as batches is achieved. During the inspection process, the cleaned wafers do not need to be transferred from the film box 3 to the PP packaging box, which simplifies the operation steps and avoids the cleaned wafers from contacting the outside air and adhering to dust before inspection, thereby improving the overall work efficiency.
[0041] The staff opens the movable cover on the drying cover 61, and puts the film box 3 on the fixed seat 2 on the right. When the rotating seat 41 rotates, it drives the bevel gear 62 to rotate. The bevel gear 62 drives the No. 1 gear 64 to rotate through the gear rod 63. The No. 1 gear 64 drives the No. 2 gear 65 to rotate. The No. 2 gear 65 drives the No. 1 pulley 66 to rotate. The No. 1 pulley 66 drives the two No. 2 pulleys 610 to rotate through the belt. The two No. 2 pulleys 610 drive the two impellers 69 to rotate. When the two impellers 69 rotate, they respectively draw air into the exhaust cover 67 In the embodiment, two exhaust hoods 67 respectively transport air to the blowing hood 613 through two rotating pipe joints 611 and two hoses 612. The blowing hood 613 is located on the left side of the right wafer box 3. After the blowing hood 613 blows out the air, the air flows to the right from the gaps between the multiple wafers in the wafer box 3, taking away the moisture on the surface of the wafers, and finally discharged through the air outlet of the drying hood 61. The switch of the heating wire 614 is set to turn on after following the rotation of one of the impellers 69. After the heating wire 614 is turned on, it heats the air blown out of the blowing hood 613, so that The hot air dries multiple wafers to speed up the drying efficiency. The air filter 68 can filter the air entering the exhaust hood 67 to prevent the hot air from being mixed with dust and causing pollution to the wafers. When the second gear 65 rotates, the second gear 65 drives the rotating rod 617 to rotate. When the rotating rod 617 rotates, the sliding slot frame 615 is driven to move up and down through the cooperation of the sliding shaft 616 and the sliding slot of the sliding slot frame 615. When the sliding slot frame 615 moves up and down, it drives the blowing hood 613 to move up and down, so that the blowing hood 613 moves up and down. Wafers at different heights can be evenly blown with hot air, thereby improving the drying effect; through the setting of the drying device 6, when the detection operation starts, the blowing hood 613 can blow hot air to the multiple wafers in the right wafer box 3 to dry the multiple wafers, thereby avoiding water stains on some wafers and affecting the detection results; through the cooperation of the rotating rod 617 and the slide frame 615, the blowing hood 613 can also move up and down during drying, so that multiple wafers can be evenly dried, thereby improving the drying efficiency and drying effect.
[0042] The two drying boxes 71 are filled with desiccant, which can absorb the moisture in the drying cover 61 to prevent the drying box 71 from being humid for a long time and forming water mist on the surface of some wafers, thereby affecting the detection. When the blowing cover 613 moves up and down, it drives the connecting frame 75 to move up and down. When the connecting frame 75 moves up and down, it drives the two sliding bars 72 to slide back and forth left and right through the two connecting rods 74. When the multiple levers 73 on the two sliding bars 72 move back and forth left and right, the desiccant in the two drying boxes 71 is turned over so that the desiccant can It absorbs moisture more evenly and avoids the desiccant being stationary for a long time, which causes the upper desiccant to absorb more moisture while the lower desiccant absorbs insufficient moisture. Through the setting of the drying device 7, the desiccant in the two drying boxes 71 can absorb the moisture in the drying cover 61, maintain the dryness in the drying cover 61, and avoid fogging on the wafer surface due to the failure to discharge part of the moisture in time after long-term use. Through the setting of multiple levers 73, the multiple levers 73 can flip the desiccant in the drying box 71 back and forth, so that the desiccant can enhance the absorption effect through movement and improve the absorption efficiency.
[0043] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.
[0044] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.
Claims
1. A KLA scanning device transmission stage, comprising an operating table (1), characterized in that: The operating table (1) is provided with three fixing seats (2), a mechanical arm (4) and a scanner (5), wherein the scanner (5) is located on the left side of the mechanical arm (4), and the three fixing seats (2) are respectively located on the front and rear sides and the right side of the mechanical arm (4), and a film box (3) is provided on the fixing seat (2), and three card slots (8) and two guide pillars (9) are provided on the fixing seat (2), and three convex strips (10) and two guide holes (11) are provided at the bottom of the film box (3), and the three convex strips (10) on the film box (3) correspond to the three card slots (8) on the fixing seat (2) and fit each other, and the two guide pillars (9) on the film box (3) are slidably connected with the two guide holes (11) on the fixing seat (2); It also includes a drying device (6) for drying the wafers, wherein the drying device (6) is arranged on the operating table (1), and the drying device (6) is located on the right side of the mechanical arm (4); The drying device (7) is used to maintain the dryness inside the drying device (6), and the drying device (7) is arranged inside the drying device (6).
2. A KLA scanning device transmitting stage according to claim 1, characterized in that: The mechanical arm (4) comprises a rotating seat (41), wherein the rotating seat (41) is rotatably mounted on the operating table (1), a telescopic table (42) is slidably mounted on the rotating seat (41), a sliding arm (43) is slidably mounted on the telescopic table (42), and both ends of the sliding arm (43) are respectively connected to supporting plates (44).
3. A KLA scanning device transmitting stage according to claim 2, characterized in that: The drying device (6) comprises a drying cover (61), the drying cover (61) is mounted on the operating table (1), a first gear (64) and a second gear (65) are rotatably mounted on the left outer wall of the drying cover (61), a gear rod (63) is rotatably mounted on the operating table (1) through a bracket, a bevel gear (62) is connected to the rotating seat (41), a first pulley (66) is connected to the right side of the second gear (65), and a gear (64) and a second gear (65) are rotatably mounted on the left outer wall of the drying cover (61). Two exhaust hoods (67) are provided, and an impeller (69) is rotatably mounted on the inner wall of the exhaust hood (67) through a bracket, and the right end of the impeller (69) is connected to a second pulley (610). The right end of the exhaust hood (67) is located inside the drying hood (61), and the right end of the exhaust hood (67) is rotatably connected to a rotating pipe joint (611), and a hose (612) is connected to the rotating pipe joint (611), and a blowing hood (613) is connected between the two hoses (612).
4. The KLA scanning device transmitting stage according to claim 3, characterized in that: The fixing seat (2) located on the right is located in the drying cover (61), a movable cover is provided on the top of the drying cover (61), and an air outlet is provided on the right side of the drying cover (61).
5. The KLA scanning device transmitting stage according to claim 4, characterized in that: The bevel gear (62) is meshed with a gear rod (63), one end of the gear rod (63) away from the bevel gear (62) is connected to a first gear (64), the first gear (64) is located below a second gear (65), the first gear (64) is meshed with the second gear (65), the two exhaust hoods (67) are respectively located at the front and rear sides of the second gear (65), and the two second pulleys (610) and the first pulley (66) are connected by a belt.
6. A KLA scanning device transmitting stage according to claim 5, characterized in that: The right end of the second gear (65) is connected with a rotating rod (617), and the rotating rod (617) is located inside the drying cover (61). A sliding groove frame (615) is slidably installed on the inner wall of the drying cover (61), and a sliding groove is arranged on the sliding groove frame (615). The end of the rotating rod (617) away from the second gear (65) is connected with a sliding shaft (616), and the sliding shaft (616) is slidably connected with the sliding groove of the sliding groove frame (615), and the sliding groove frame (615) is connected to the blowing cover (613).
7. The KLA scanning device transmitting stage according to claim 6, characterized in that: The left end of the exhaust hood (67) is connected to an air filter (68), and the inner wall of the blowing hood (613) is installed with a heating wire (614).
8. The KLA scanning device transmitting stage according to claim 7, characterized in that: The drying device (7) comprises two drying boxes (71), both of which are mounted on the operating table (1), both of which are located in the drying cover (61), and the two drying boxes (71) are located at the front and rear sides of the right fixing seat (2) respectively.
9. The KLA scanning device transmitting stage according to claim 8, characterized in that: A slide rod (72) is slidably installed through the inner wall of the drying box (71), and a plurality of levers (73) are installed on the slide rod (72). The plurality of levers (73) are all located in the drying box (71). One end of the slide rod (72) is located outside the drying box (71). A connecting frame (75) is connected to the bottom of the blowing hood (613). Two connecting rods (74) are hinged at the bottom of the connecting frame (75). The two connecting rods (74) are respectively hinged to one end of the two slide rods (72) located outside the drying box (71).