Film thickness gauge with jitter compensation

Abstract

The utility model discloses a film thickness gauge with jitter compensation, which comprises two supporting seats and a film body, fixed plates are arranged on the outer walls of the tops of the supporting seats, two connecting seats are arranged on the outer walls of the opposite sides of the two fixed plates, and the film thickness gauge further comprises a driving mechanism, a vibration compensation mechanism and a vibration compensation mechanism, the vibration compensation mechanism is located on one side of the driving mechanism and comprises a capacitance sensor, a first polar plate and a second polar plate, two capacitance probes are arranged in the capacitance sensor, the directions of the two capacitance probes are opposite, and a first mounting plate and a second mounting plate are arranged between the two connecting bases respectively. The film thickness gauge with jitter compensation has the advantages of improving detection accuracy, and being simple in structure and easy and convenient to operate.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness gauges, in particular to a film thickness gauge with jitter compensation. Background Art

[0002] Thickness gauge is an instrument used to measure the thickness of materials and objects. In industrial production, it is often used to continuously or sample the thickness of products (such as steel plates, steel strips, films, paper, metal foils, etc.).

[0003] The patent document with application number 202220060378.0 discloses a thickness gauge with alloy compensation function, including a base, a pair of vertical plates fixedly connected to the upper wall of the base, a light bar fixedly connected between the pair of vertical plates, a mounting plate slidably connected to the light bar, a lead screw screwed to the bottom end of the mounting plate, a motor fixedly connected to the side wall surface of one of the pair of vertical plates, and one end of the lead screw passes through one of the pair of vertical plates and is connected to the motor drive end.

[0004] However, when using a traditional film thickness gauge, the film is usually placed between a capacitance probe and a plate of corresponding size of the capacitance probe and the thickness is measured. However, when the capacitance probe moves left and right, it will be affected by the guide rail and vibrate. When the capacitance probe vibrates upward by one unit, the measured film thickness will increase by one unit, which directly affects the accuracy of the film thickness measurement. Utility Model Content

[0005] The utility model discloses a film thickness gauge with jitter compensation, which aims to solve the technical problem that a traditional film thickness gauge usually places a film between a capacitance probe and a plate of a corresponding size of the capacitance probe and measures the thickness of the film when in use, but the capacitance probe is affected by a guide rail when moving left and right, so that vibration occurs. When the capacitance probe vibrates upward by one unit, the measured film thickness increases by one unit, which directly affects the accuracy of the film thickness measurement.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A film thickness gauge with jitter compensation, comprising two support seats and a film body, wherein the top outer wall of the support seat is provided with a fixing plate, and the outer walls on opposite sides of the two fixing plates are provided with two connecting seats, and further comprising:

[0008] Driving mechanism: located between the two connecting seats;

[0009] Jitter compensation mechanism: located at one side of the driving mechanism; the jitter compensation mechanism comprises a capacitive sensor, a first electrode plate and a second electrode plate, two capacitive probes are arranged inside the capacitive sensor, the two capacitive probes are in opposite directions, a first mounting plate and a second mounting plate are respectively arranged between the two connecting seats, and the first electrode plate and the second electrode plate are respectively located at the bottom outer wall of the first mounting plate and the top outer wall of the second mounting plate;

[0010] Limiting mechanism: located at one side of the jitter compensation mechanism.

[0011] The adoption of the above technical scheme can reduce the error in detecting the thickness of the film body. Specifically, the film body is first passed through the surface of the second electrode plate, and the capacitive sensor is controlled to move left and right by the driving mechanism, so that the thickness of the surface of the film body is measured at multiple positions using the capacitive probe. When the capacitive sensor moves in coordination with the driving mechanism and the limit mechanism, there may be jitter in the up and down directions, which will directly affect the accuracy of the thickness measurement of the film body. At this time, two capacitive probes are added to measure the film body on the first electrode plate and the second electrode plate at the same time. The thickness of the film body can be obtained by subtracting the distance from the capacitive probe to the first electrode plate from the distance from the other capacitive probe to the film body on the second electrode plate. The device is easy to operate and has a simple structure, and is convenient for realizing rapid measurement of the thickness of the film body.

[0012] In a preferred embodiment, the driving mechanism includes two mounting frames and a motor, the outer walls of the opposite sides of the mounting frames are provided with the same mounting cylinder, the outer walls of the two mounting cylinders are sleeved with the same belt, and the output shaft of the motor passes through the outer wall of one side of the mounting frames and is fixedly connected to the outer wall of one side of the mounting cylinder.

[0013] When in use, the motor is started, and the output shaft of the motor drives the installation cylinder to rotate, thereby driving the belt to move, and then facilitating the capacitive sensor to move left and right.

[0014] In a preferred solution, the limiting mechanism includes a support plate, the support plate is located on one side outer wall of the capacitive sensor, two clamps are fixedly connected to one side outer wall of the support plate, a limiting block is provided on the top outer wall of the support plate, a slide rail is provided on the bottom outer wall of the first mounting plate, the limiting block is slidably connected to the inner wall of the slide rail, and the clamp is clamped to the outer wall of the belt.

[0015] When the belt moves, it will drive the clamping plate and the support plate to move, thereby driving the limit block to move synchronously on the slide rail. The set limit block and the slide rail are used together to support and limit the movement of the capacitive sensor.

[0016] As can be seen from the above, a film thickness gauge with jitter compensation includes two support seats and a film body, the top outer wall of the support seat is provided with a fixing plate, and the outer walls on the opposite sides of the two fixing plates are provided with two connecting seats, and also includes:

[0017] Driving mechanism: located between the two connecting seats;

[0018] Jitter compensation mechanism: located at one side of the driving mechanism; the jitter compensation mechanism comprises a capacitive sensor, a first electrode plate and a second electrode plate, two capacitive probes are arranged inside the capacitive sensor, the two capacitive probes are in opposite directions, a first mounting plate and a second mounting plate are respectively arranged between the two connecting seats, and the first electrode plate and the second electrode plate are respectively located at the bottom outer wall of the first mounting plate and the top outer wall of the second mounting plate;

[0019] Limiting mechanism: located at one side of the jitter compensation mechanism. The thin film thickness gauge with jitter compensation provided by the utility model has the technical effects of improving the detection accuracy, simple structure and easy operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the driving mechanism structure of a film thickness gauge with jitter compensation proposed by the utility model.

[0021] Figure 2 This is a schematic structural diagram of a first electrode plate and a second electrode plate of a thin film thickness gauge with jitter compensation proposed by the utility model.

[0022] Figure 3 The utility model provides a schematic diagram of the structure of a jitter compensation mechanism of a thin film thickness gauge with jitter compensation.

[0023] Figure 4 The utility model provides a schematic diagram of the limit mechanism structure of a film thickness gauge with jitter compensation.

[0024] In the accompanying drawings: 1. support seat; 2. fixing plate; 3. mounting frame; 4. motor; 5. belt; 6. connecting plate; 7. mounting block; 8. capacitive sensor; 9. connecting seat; 10. support plate; 11. clamping plate; 12. first mounting plate; 13. first electrode plate; 14. second electrode plate; 15. limit block. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application usually described and marked in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0026] The utility model discloses a film thickness gauge with jitter compensation, which is mainly used in traditional film thickness gauges. When in use, a film is usually placed between a capacitance probe and a plate of a corresponding size of the capacitance probe and its thickness is measured. However, when the capacitance probe moves left and right, it is affected by the guide rail and vibrates. When the capacitance probe vibrates upward by one unit, the measured film thickness will increase by one unit, which directly affects the accuracy of the film thickness measurement.

[0027] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 A film thickness gauge with jitter compensation includes two support seats 1 and a film body, a fixing plate 2 is provided on the top outer wall of the support seat 1, two connecting seats 9 are provided on the outer walls on opposite sides of the two fixing plates 2, and further includes:

[0028] Driving mechanism: located between the two connecting seats 9;

[0029] Jitter compensation mechanism: located on one side of the driving mechanism; the jitter compensation mechanism includes a capacitive sensor 8, a first electrode plate 13 and a second electrode plate 14, two capacitive probes are arranged inside the capacitive sensor 8, and the two capacitive probes are arranged in opposite directions, a first mounting plate 12 and a second mounting plate are arranged between the two connecting seats 9, and the first electrode plate 13 and the second electrode plate 14 are respectively located on the bottom outer wall of the first mounting plate 12 and the top outer wall of the second mounting plate;

[0030] Limiting mechanism: located on one side of the jitter compensation mechanism.

[0031] It should be noted that, since the capacitive sensor 8 is kept parallel to the film body, the left and right shaking of the capacitive sensor 8 has no effect on the measurement of the film body, and the first electrode plate 13 and the second electrode plate 14 are both in the 0V state when in use.

[0032] The first electrode plate 13 and the second electrode plate 14 are of the same size, and the length of the second mounting plate is equal to half the length of the first mounting plate 12 .

[0033] Specifically, when in use, the film body is passed through the surface of the second electrode plate 14, and the capacitive sensor 8 is controlled to move left and right by the driving mechanism, so that the capacitance probe is used to measure the thickness of the surface of the film body at multiple positions. When the capacitance sensor 8 moves in coordination with the driving mechanism and the limit mechanism, there may be jitter in the up and down directions, which will directly affect the accuracy of the thickness measurement of the film body. At this time, two capacitance probes are added to measure the film bodies on the first electrode plate 13 and the second electrode plate 14 at the same time. Since the positions of the first electrode plate 13 and the second electrode plate 14 are fixed, when the thickness measured by one of the capacitance probes to the film body on the second electrode plate 14 increases by 1 unit, the measurement of the other capacitance probe to the first electrode plate 13 decreases by 1 unit. Therefore, the thickness of the film body can be obtained by subtracting the distance from the capacitance probe to the first electrode plate 13 from the distance from the other capacitance probe to the film body on the second electrode plate 14, thereby improving the accuracy of the thickness measurement of the film body.

[0034] Reference Figure 1 In a preferred embodiment, the driving mechanism includes two mounting frames 3 and a motor 4. The outer wall of the opposite side of the mounting frame 3 is provided with the same mounting cylinder. The outer walls of the two mounting cylinders are sleeved with the same belt 5. The output shaft of the motor 4 passes through the outer wall of one side of the mounting frame 3 and is fixedly connected to the outer wall of one side of the mounting cylinder. When in use, the motor 4 is started, and the output shaft of the motor 4 drives the mounting cylinder to rotate, thereby driving the belt 5 to move, and then facilitating the capacitive sensor 8 to move left and right.

[0035] Among them, the outer walls on the opposite sides of the two fixed plates 2 are each provided with an installation opening, and the belt 5 passes through the inner wall of the installation opening, and one end of the belt 5 is located above the first installation plate 12, and the end of the belt 5 away from the first installation plate 12 is located below the limiting mechanism. This arrangement prevents the belt 5 from affecting the thickness measurement of the film body by the capacitive sensor 8 when it moves.

[0036] Reference Figure 1 , Figure 3 and Figure 4 In a preferred embodiment, the limiting mechanism includes a support plate 10, which is located on one side outer wall of the capacitive sensor 8, and two clamping plates 11 are fixedly connected to one side outer wall of the support plate 10. A limiting block 15 is provided on the top outer wall of the support plate 10, and a slide rail is provided on the bottom outer wall of the first mounting plate 12. The limiting block 15 is slidably connected to the inner wall of the slide rail, and the clamping plate 11 is clamped to the outer wall of the belt 5.

[0037] Among them, the support plate 10 is an "L"-shaped structure, which provides support for the limit block 15 and connects the clamping plate 11 with the capacitive sensor 8 to facilitate the movement of the capacitive sensor 8 through the driving mechanism.

[0038] Specifically, when the belt 5 moves, it will drive the clamping plate 11 and the support plate 10 to move, thereby driving the limit block 15 to move synchronously on the slide rail. The set limit block 15 and the slide rail are used together to support and limit the movement of the capacitive sensor 8.

[0039] Reference Figure 1 In a preferred embodiment, a connecting plate 6 is provided on one outer wall of each of the two fixing plates 2, a mounting roller is provided between the outer walls on the opposite sides of the two connecting plates 6, and the film body is sleeved on the circumferential outer wall of the mounting roller. A mounting block 7 is provided on one outer wall of one of the connecting plates 6, and one end of the mounting roller is connected to one outer wall of the mounting block 7 through a bearing. This arrangement facilitates the limiting and fixing of the film body and the thickness measurement of the film body.

[0040] Working principle: When in use, the film body is passed through the surface of the second electrode plate 14, and the capacitive sensor 8 is controlled to move left and right by the driving mechanism, so that the capacitance probe is used to measure the thickness of the surface of the film body at multiple positions. When the capacitance sensor 8 moves in coordination with the driving mechanism and the limit mechanism, there may be jitter in the up and down directions, which will directly affect the accuracy of the thickness measurement of the film body. At this time, two capacitance probes are added to measure the film bodies on the first electrode plate 13 and the second electrode plate 14 at the same time. Since the positions of the first electrode plate 13 and the second electrode plate 14 are fixed, when the thickness measured by one of the capacitance probes to the film body on the second electrode plate 14 increases by 1 unit, the measurement of the other capacitance probe to the first electrode plate 13 is reduced by 1 unit. Therefore, the thickness of the film body can be obtained by subtracting the distance from the capacitance probe to the first electrode plate 13 from the distance from the other capacitance probe to the film body on the second electrode plate 14, thereby improving the accuracy of the thickness measurement of the film body.

[0041] The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited to this. The replacement can be a replacement of part of the structure, device, method step, or a complete technical solution. Equivalent replacement or change based on the technical solution of the utility model and its utility model concept should be included in the protection scope of the utility model.

Claims

1. A film thickness gauge with jitter compensation, comprising two support seats (1) and a film body, wherein the top outer wall of the support seat (1) is provided with a fixing plate (2), and the outer walls of the two fixing plates (2) on opposite sides are provided with two connecting seats (9). It is characterized in that Also includes: A driving mechanism: located between the two connecting seats (9); A jitter compensation mechanism: located on one side of the driving mechanism, the jitter compensation mechanism comprises a capacitive sensor (8), a first electrode plate (13) and a second electrode plate (14), two capacitive probes are arranged inside the capacitive sensor (8), the two capacitive probes are arranged in opposite directions, a first mounting plate (12) and a second mounting plate are arranged between the two connecting seats (9), the first electrode plate (13) and the second electrode plate (14) are respectively located on the bottom outer wall of the first mounting plate (12) and the top outer wall of the second mounting plate; Limiting mechanism: located at one side of the jitter compensation mechanism.

2. A film thickness gauge with jitter compensation according to claim 1, It is characterized in that The first pole plate (13) and the second pole plate (14) are of the same size, and the length of the second mounting plate is equal to half the length of the first mounting plate (12).

3. A film thickness gauge with jitter compensation according to claim 2, It is characterized in that The driving mechanism comprises two mounting frames (3) and a motor (4); the outer walls of opposite sides of the mounting frames (3) are provided with a same mounting cylinder; the outer walls of the two mounting cylinders are sleeved with a same belt (5); the output shaft of the motor (4) passes through an outer wall of one side of the mounting frames (3) and is fixedly connected to an outer wall of one side of the mounting cylinder.

4. A film thickness gauge with jitter compensation according to claim 3, It is characterized in that The outer walls of the two fixing plates (2) on opposite sides are each provided with a mounting opening, the belt (5) passes through the inner wall of the mounting opening, one end of the belt (5) is located above the first mounting plate (12), and the end of the belt (5) away from the first mounting plate (12) is located below the limiting mechanism.

5. A film thickness gauge with jitter compensation according to claim 4, It is characterized in that The limiting mechanism comprises a support plate (10), the support plate (10) being located on one side outer wall of the capacitive sensor (8), two clamping plates (11) being fixedly connected to one side outer wall of the support plate (10), a limiting block (15) being provided on the top outer wall of the support plate (10), a slide rail being provided on the bottom outer wall of the first mounting plate (12), the limiting block (15) being slidably connected to the inner wall of the slide rail, and the clamping plate (11) being clamped to the outer wall of the belt (5).

6. A film thickness gauge with jitter compensation according to claim 5, It is characterized in that The support plate (10) is an "L"-shaped structure.

7. The thin film thickness gauge with jitter compensation according to claim 1, It is characterized in that A connecting plate (6) is provided on one outer wall of each of the two fixing plates (2), a mounting roller is provided between the outer walls of the two connecting plates (6) on the opposite side, the film body is sleeved on the circumferential outer wall of the mounting roller, a mounting block (7) is provided on one outer wall of one of the connecting plates (6), and one end of the mounting roller is connected to the outer wall of one side of the mounting block (7) via a bearing.

Images