Section passivation material box and section passivation equipment

Abstract

The utility model relates to the field of photovoltaic technology, in particular to a section passivation material box and section passivation equipment, and solves the problem that when an existing process material box is applied to passivation process treatment of a silicon wafer section, a treated surface is easily passivated again. The section passivation material box comprises a box body assembly, a box cover assembly and a baffle. When the passivation process is carried out, after passivation gas enters from the gap between the baffle and the box body assembly, the passivation gas can be in contact with the to-be-passivated side edge of the flaky material for passivation, the box cover assembly covers the upper surface of the flaky material at the top, and the box body assembly shields the lower surface of the flaky material at the bottom; the passivation gas is difficult to contact with the non-to-be-passivated upper and lower surfaces of the sheet material, so that the non-to-be-passivated upper and lower surfaces of the sheet material are prevented from being passivated. In addition, the box body assembly can also shield the non-to-be-passivated side edges of the sheet-shaped material, and the probability that the non-to-be-passivated side edges of the sheet-shaped material make contact with the passivation gas is reduced.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic technology, and in particular to a cross-section passivation material box and a cross-section passivation device. Background Art

[0002] In the photovoltaic industry, atomic layer deposition (ALD) equipment is a key equipment for manufacturing solar cells. Traditional ALD equipment is mainly used to process the surface of the entire silicon wafer. After the silicon wafer is laser split, the unprocessed cross-sections of the two halves will be exposed. These unprocessed cross-sections may cause the surface quality of the silicon wafer to deteriorate, increase the reflectivity of the silicon wafer surface, reduce the light absorption efficiency, and the cross-sections may form local charge capture centers, affecting the electron transmission and energy conversion efficiency of the photovoltaic cell, thereby affecting the performance and efficiency of the photovoltaic cell. Therefore, there is an urgent need for a material box that is suitable for the silicon wafer cross-section passivation process to passivate the cross-section of the silicon wafer. Utility Model Content

[0003] In view of this, the embodiments of the present disclosure provide a cross-section passivation material box and a cross-section passivation device, which solve the problem that when the existing process material box is used for the passivation process of the silicon wafer cross section, it is easy to cause the treated surface to be passivated again.

[0004] In the first aspect, an embodiment of the present disclosure provides a cross-section passivation material box, which is applied to the passivation process of sheet materials. The cross-section passivation material box includes: a box body assembly, having a accommodating cavity, a first opening arranged at the top and a second opening arranged at the side, the accommodating cavity is configured to carry the sheet material, and the first opening and the second opening are respectively connected to the accommodating cavity; a box cover assembly, the box cover assembly includes a box cover, an elastic component, and a pressing plate, the box cover is configured to cover the first opening, the first end of the elastic component is connected to the box cover, and the upper surface of the pressing plate is connected to the second end of the elastic component, and when the accommodating cavity carries the sheet material, the lower surface of the pressing plate is configured to abut and cover the upper surface of the sheet material at the top; a baffle, which is connected to the box body assembly, arranged at the second opening, and forms a gap with the box body assembly, the gap is connected to the accommodating cavity, and the gap is for the passivation gas used in the passivation process to pass through; wherein, when the accommodating cavity carries the sheet material, the box body assembly is configured to shield the lower surface of the sheet material at the bottom and the side of the sheet material that is not to be passivated, and the baffle is located on one side of the side of the sheet material to be passivated.

[0005] In some embodiments, the box body assembly has a threaded hole and the baffle has a first through hole; wherein the cross-section passivation material box also includes: a screw, passing through the first through hole and screwed to the threaded hole; at least one gasket, sleeved on the screw, and arranged between the box body assembly and the baffle to form a gap.

[0006] In some embodiments, the width of the gap ranges from 0.2 mm to 1 mm.

[0007] In some embodiments, the box body assembly includes: a bottom plate; a first side plate connected to the bottom plate; a second side plate arranged opposite to the first side plate and connected to the bottom plate; a third side plate connected to the first side plate and the second side plate, and connected to the bottom plate; wherein the first side plate, the second side plate and the third side plate form a first opening, and the bottom plate, the first side plate and the second side plate form a second opening.

[0008] In some embodiments, it also includes: a snap assembly, which is connected to the box body assembly and snapped with the box cover assembly.

[0009] In some embodiments, the box cover assembly is located above the box body assembly, and the snap assembly includes: a fixing member connected to the box body assembly and having a second through hole extending in a vertical direction; a locking member passing through the second through hole, a first end of the locking member contacting the box cover assembly and applying pressure to the box cover assembly toward the box body assembly, and the locking member also having a third through hole extending in a horizontal direction; a rotating shaft passing through the third through hole, both ends of the rotating shaft connected to the fixing member; a first elastic member, a first end of the first elastic member connected to the locking member, and a second end of the first elastic member connected to the fixing member.

[0010] In some embodiments, the locking member includes: a vertical rod passing through the second through hole; a snap-in block cross-arranged with the vertical rod and facing one side of the box cover assembly, the first end of the snap-in block is connected to the vertical rod, and the second end of the snap-in block can be snap-in with the upper surface of the box cover assembly.

[0011] In some embodiments, the bottom plate has at least one first clamping hole, the cover assembly has at least one second clamping hole, and the first clamping hole and the second clamping hole are configured to be clamped by the transport device.

[0012] In some embodiments, the bottom plate is configured to carry the sheet material, and the bottom plate has a fourth through hole; wherein, when taking the sheet material, the lifting device lifts the sheet material through the fourth through hole.

[0013] In the second aspect, an embodiment of the present disclosure provides a cross-section passivation device, which is applied to the passivation process of sheet materials. The cross-section passivation device includes: a reaction furnace having a process chamber; a cross-section passivation material box according to any one of the above-mentioned first aspects, which is arranged in the process chamber and is configured to carry sheet materials.

[0014] The embodiment of the present disclosure provides a cross-section passivation material box and a cross-section passivation device. When the passivation process is performed, since the baffle is located on one side of the side of the sheet material to be passivated, after the passivation gas enters from the gap between the baffle and the box body assembly, it can contact with the side of the sheet material to be passivated for passivation. Since the box cover assembly covers the upper surface of the sheet material at the top, the box body assembly blocks the lower surface of the sheet material at the bottom, and the force applied by the elastic assembly to the pressing plate can cause the pressing plate to press the sheet material. After the passivation gas enters the accommodating cavity from the gap, it is difficult to contact the upper and lower surfaces of the sheet material that are not to be passivated, thereby avoiding the upper and lower surfaces of the sheet material that are not to be passivated from being passivated, which is beneficial to improving the performance and stability of the photovoltaic cell. In addition, the box body assembly can also block the side of the sheet material that is not to be passivated, which can effectively reduce the probability of the side of the sheet material that is not to be passivated contacting the passivation gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above and other purposes, features and advantages of the present disclosure will become more apparent by describing the embodiments of the present disclosure in more detail in conjunction with the accompanying drawings. The accompanying drawings are used to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and do not constitute a limitation of the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 Shown is a schematic structural diagram of a cross-section passivation material box provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown is an exploded view of a cross-section passivation material box and a sheet material provided in one embodiment of the present disclosure.

[0018] Figure 3 The figure shows an embodiment of the present disclosure. Figure 1 Section view taken along the AA direction.

[0019] Figure 4 The present invention provides an embodiment of the present invention. Figure 3 A partial enlarged view of area B in the middle.

[0020] Figure 5 The figure shows an embodiment of the present disclosure. Figure 1 Sectional view taken along CC direction.

[0021] Figure 6 The present invention provides an embodiment of the present invention. Figure 5 A partial enlarged view of area D in the middle.

[0022] Figure 7 Shown is a schematic structural diagram of a cross-section passivation material box provided in another embodiment of the present disclosure.

[0023] Figure 8 Shown is a schematic structural diagram of a box cover assembly provided in one embodiment of the present disclosure.

[0024] Fig. 9 Shown is a schematic structural diagram of a cross-section passivation device provided in one embodiment of the present disclosure.

[0025] Reference numerals:

[0026] 100, cross-section passivation material box; 110, box body assembly; 111, bottom plate; 1111, first clamping hole; 1112, fourth through hole; 112, first side plate; 113, second side plate; 114, third side plate; 120, box cover assembly; 121, second clamping hole; 122, box cover; 123, elastic assembly; 124, pressing plate; 130, baffle; 140, screw; 150, gasket; 160, buckle assembly; 161, fixing piece; 162, locking piece; 1621, vertical rod; 1622, clamping block; 163, rotating shaft; 164, first elastic member; 200, sheet material; 300, cross-section passivation equipment; 310, reactor. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0028] Figure 1 Shown is a schematic structural diagram of a cross-section passivation material box provided in one embodiment of the present disclosure. Figure 2 Shown is an exploded view of a cross-section passivation material box and a sheet material provided in one embodiment of the present disclosure. Figure 8 FIG. 1 is a schematic diagram of the structure of a box cover assembly provided by an embodiment of the present disclosure. Figure 1 , Figure 2 and Figure 8As shown, the embodiment of the present disclosure provides a cross-section passivation material box 100, which is applied to the passivation process of a sheet material 200. The cross-section passivation material box 100 includes: a box body assembly 110, which has a accommodating cavity, a first opening arranged at the top and a second opening arranged at the side, the accommodating cavity is configured to carry the sheet material 200, and the first opening and the second opening are respectively connected to the accommodating cavity; a box cover assembly 120, the box cover assembly 120 includes a box cover 122, an elastic component 123, and a pressing plate 124, the box cover 122 is configured to cover the first opening, the first end of the elastic component 123 is connected to the box cover 122, and the upper surface of the pressing plate 124 is connected to the first end of the elastic component 123 The two ends are connected, and when the accommodating cavity carries the sheet material 200, the lower surface of the pressing plate 124 is configured to abut and cover the upper surface of the top sheet material 200; the baffle 130 is connected to the box body assembly 110, is arranged at the second opening, and forms a gap with the box body assembly 110, the gap is connected to the accommodating cavity, and the gap is for the passivation gas used in the passivation process to pass through; wherein, when the accommodating cavity carries the sheet material 200, the box body assembly 110 is configured to cover the lower surface of the bottom sheet material 200 and the side of the sheet material 200 that is not to be passivated, and the baffle 130 is located on one side of the side of the sheet material 200 to be passivated.

[0029] The sheet material 200 may be a silicon wafer, and the sheet material 200 has an upper surface, a lower surface, and four sides connected to the upper surface and the lower surface, wherein any side (i.e., the cross section after the slicing) is a side to be passivated, and the other three sides are sides not to be passivated, and the upper surface and the lower surface are surfaces not to be passivated. When there are multiple sheet materials 200 in the accommodation cavity, the multiple sheet materials 200 are stacked and placed in the accommodation cavity.

[0030] The first opening is used to place the sheet material 200 . After the sheet material 200 is placed in the box body assembly 110 , the box cover assembly 120 can be closed on the first opening.

[0031] The size of the box assembly 110 may be slightly larger than the size of the sheet material 200, so that the sheet material 110 can be placed in the accommodating cavity, and the inner wall of the box assembly 110 is close to the side of the sheet material 200 that is not to be passivated, so as to shield the side of the sheet material 200 that is not to be passivated. The box assembly 110 may be a rectangular parallelepiped structure, and the first opening and the second opening may be located on any two faces of the rectangular parallelepiped structure.

[0032] There may be a certain distance between the baffle 130 and the plane where the second opening is located, or the baffle 130 may only cover a portion of the second opening so that there is a gap between the baffle 130 and the second opening.

[0033] The elastic component 123 may include a compression spring, and the elastic component 123 may push the pressing plate 124 downward to press the sheet material 200 .

[0034] In the related art, silicon wafers are usually placed in a traditional process material box, and a passivating gas is introduced into the traditional process material box to passivate the cross-section. However, when using a traditional process material box, the passivating gas will come into contact with various surfaces of the silicon wafer, which can easily cause the treated surface (i.e., other surfaces other than the cross-section) to be passivated, thereby affecting the performance and stability of the photovoltaic cell.

[0035] In the embodiment of the present disclosure, during the passivation process, since the baffle 130 is located on one side of the side to be passivated of the sheet material 200, the passivation gas can enter from the gap between the baffle 130 and the box body assembly 110 and contact the side to be passivated of the sheet material 200 for passivation. Since the box cover assembly 120 covers the upper surface of the top sheet material 200, the box body assembly 110 blocks the lower surface of the bottom sheet material 200 (when multiple sheet materials 200 are stacked in the accommodating chamber, the upper surface of the non-top sheet material 200 is blocked). The surface of the sheet material 200 is covered by the sheet material 200 above the sheet material 200; the lower surface of the sheet material 200 other than the bottom is shielded by the sheet material 200 below the sheet material 200), and the force applied by the elastic component 123 to the pressing plate 124 can make the pressing plate 124 press the sheet material 200 tightly. After the passivating gas enters the accommodating cavity from the gap, it is difficult to contact the upper and lower surfaces of the sheet material 200 that are not to be passivated, thereby avoiding the upper and lower surfaces of the sheet material 200 that are not to be passivated from being passivated, which is beneficial to improving the performance and stability of the photovoltaic cell. In addition, the box body component 110 can also shield the side of the sheet material 200 that is not to be passivated, which can effectively reduce the probability that the side of the sheet material 200 that is not to be passivated contacts the passivating gas. Furthermore, compared with the method of setting a large opening on the surface of the box body and introducing passivation gas into the large opening, by inputting the passivation gas through the gap, less passivation gas enters the cross-section passivation box 100 per unit time, so it is more controllable, thereby improving the passivation quality.

[0036] In some embodiments, the elastic component 123 may include a plurality of second elastic members (such as springs), and the plurality of second elastic members are disposed around the edge of the pressing plate 124 , so that the pressing plate 124 can smoothly press the sheet material 200 .

[0037] Figure 3 The figure shows an embodiment of the present disclosure. Figure 1 Section view taken along the AA direction. Figure 4 The present invention provides an embodiment of the present invention. Figure 3 A partial enlarged view of area B in the middle.

[0038] In some embodiments, the box body assembly 110 has a threaded hole, and the baffle 130 has a first through hole; wherein the cross-section passivation material box 100 further includes: a screw 140, which passes through the first through hole and is screwed to the threaded hole; at least one gasket 150, which is sleeved on the screw 140 and is arranged between the box body assembly 110 and the baffle 130 to form a gap. The baffle 130 and the box body assembly 110 can be firmly connected by the screw 140, and by arranging the gasket 150 between the baffle 130 and the box body assembly 110, a gap of the thickness of the gasket 150 can be maintained between the baffle 130 and the box body assembly 110. The thickness of the gasket 150 can be 0.5 mm or 0.7 mm, and the size of the gap can also be adjusted by replacing gaskets 150 of different thicknesses and adjusting the screwing depth of the screw 140.

[0039] In some embodiments, the width of the gap ranges from 0.2 mm to 1 mm. By setting the gap from 0.2 mm to 1 mm, the speed at which the passivation gas enters the accommodating cavity will not be too fast, and the passivation gas introduced can be more controllable, thereby achieving precise processing of the cross section of the sheet material 200.

[0040] In some embodiments, the box body assembly 110 and the baffle 130 can be connected by a plurality of screws 140. The plurality of screws 140 can be evenly arranged at the connection between the box body assembly 110 and the baffle 130. Gaskets 150 are mounted on the plurality of screws 140. The baffle 130 and the box body assembly 110 can be more firmly connected by the plurality of screws 140 and the gaskets 150, and a gap of a fixed width can be formed.

[0041] In some embodiments, Figure 2 As shown, the box body assembly 110 includes: a bottom plate 111; a first side plate 112, connected to the bottom plate 111; a second side plate 113, arranged opposite to the first side plate 112 and connected to the bottom plate 111; a third side plate 114, connected to the first side plate 112 and the second side plate 113, and connected to the bottom plate 111; wherein the first side plate 112, the second side plate 113 and the third side plate 114 form a first opening, and the bottom plate 111, the first side plate 112 and the second side plate 113 form a second opening.

[0042] The sizes of the first side plate 112, the second side plate 113, and the third side plate 114 can be set according to the size of the sheet material 200, so that when the sheet material 200 is placed in the accommodating chamber, the first side plate 112, the second side plate 113, and the third side plate 114 can be close to the sheet material 200, reducing the passivation gas from entering between each side plate and the sheet material 200, and effectively reducing the probability of the side of the sheet material 200 that is not to be passivated contacting the passivation gas. The box cover 122 can be in contact with the first side plate 112, the second side plate 113, and the third side plate 114.

[0043] Through this structure, the upper and lower surfaces and side edges of multiple sheet materials 200 that are not to be passivated can be shielded by the pressing plate 124, the bottom plate 111, the first side plate 112, the second side plate 113 and the third side plate 114 respectively, and this structure is relatively simple and easy to produce.

[0044] Figure 5 The figure shows an embodiment of the present disclosure. Figure 1 Sectional view taken along CC direction.

[0045] In some embodiments, Figure 2 and Figure 5 As shown, the cross-section passivation material box 100 also includes: a snap assembly 160, which is connected to the box body assembly 110 and snap-fitted to the box cover assembly 120.

[0046] By setting up the snap assembly 160, when the box cover assembly 120 is covered on the box body assembly 110, the box cover assembly 120 and the box body assembly 110 can be fastened to prevent the box cover assembly 120 from moving relative to the box body assembly 110 during the process. In addition, by setting up the snap assembly 160, the sealing performance at the first opening can be improved when the box cover 122 closes the first opening.

[0047] In some embodiments, the snap assembly 160 can be disposed on at least one of the first side panel 112 , the second side panel 113 , and the third side panel 114 . If a plurality of snap assemblies 160 are disposed around the box cover assembly 120 , the box cover assembly 120 can be clamped more securely.

[0048] Figure 6 The present invention provides an embodiment of the present invention. Figure 5 A partial enlarged view of area D in the middle.

[0049] In some embodiments, Figure 1 , Figure 5 and Figure 6 As shown, the box cover assembly 120 is located above the box body assembly 110, and the buckle assembly 160 includes: a fixing member 161, which is connected to the box body assembly 110 and has a second through hole extending in the vertical direction; a locking member 162, which passes through the second through hole, and the first end of the locking member 162 contacts the box cover assembly 120 and applies pressure to the box cover assembly 120 in the direction of the box body assembly 110, and the locking member 162 also has a third through hole extending in the horizontal direction; a rotating shaft 163, which passes through the third through hole, and the two ends of the rotating shaft 163 are connected to the fixing member 161; a first elastic member 164, the first end of the first elastic member 164 is connected to the locking member 162, and the second end of the first elastic member 164 is connected to the fixing member 161.

[0050] Specifically, the locking member 162 can rotate around the rotation axis 163, and the extension direction of the first elastic member 164 can be perpendicular to the locking member 162. When the locking member 162 is locked, the first elastic member 164 applies a thrust to the locking member 162, so that the locking member 162 clamps the box cover assembly 120.

[0051] In actual applications, pushing the locking member 162 can cause the locking member 162 to rotate around the rotating shaft 163, so that the locking member 162 is away from the box cover assembly 120, so that the box cover assembly 120 can be taken or placed. When the locking member 162 stops being pushed, the first elastic member 164 can push the locking member 162 to contact with the box cover assembly 120 and clamp the box cover assembly 120 to the box body assembly 110.

[0052] In some embodiments, Figure 6 As shown, the locking member 162 includes: a vertical rod 1621, which passes through the second through hole; a clamping block 1622, which is cross-arranged with the vertical rod 1621 (such as vertically arranged) and faces one side of the box cover assembly 120, the first end of the clamping block 1622 is connected to the vertical rod 1621, and the second end of the clamping block 1622 can be clamped with the upper surface of the box cover assembly 120.

[0053] Specifically, when the locking member 162 clamps the box cover assembly 120 , the locking member 162 pushes the vertical rod 1621 , and the vertical rod 1621 drives the clamping block 1622 to apply downward pressure to the box cover assembly 120 , so that the box cover assembly 120 is tightly buckled on the box body assembly 110 .

[0054] With this structure, since the clamping block 1622 and the vertical rod 1621 are cross-arranged, the thrust applied by the first elastic member 164 to the vertical rod 1621 can be converted into pressure to press the box cover assembly 120 downward, thereby clamping the box cover assembly 120.

[0055] Figure 7 Shown is a schematic structural diagram of a cross-section passivation material box provided in another embodiment of the present disclosure.

[0056] In some embodiments, Figure 1 and Figure 7 As shown, the bottom plate 111 has at least one first clamping hole 1111 , and the cover assembly 120 has at least one second clamping hole 121 . The first clamping hole 1111 and the second clamping hole 121 are configured to be clamped by a transportation device.

[0057] Exemplarily, the transport device may be a mechanical gripper, which can pick up and place the cross-section passivation cartridge 100 by gripping the first gripping hole 1111 and the second gripping hole 121. The first gripping hole 1111 and the second gripping hole 121 are provided to facilitate the transport of the cross-section passivation cartridge 100.

[0058] In some embodiments, Figure 7 As shown, the bottom plate 111 is configured to carry the sheet material 200, and the bottom plate 111 has a fourth through hole 1112; wherein, in the case of taking the sheet material 200, the lifting device passes through the fourth through hole 1112 to lift the sheet material 200. Specifically, the sheet material 200 is placed on the bottom plate 111, and the lifting structure in the lifting device passes through the fourth through hole 1112 and moves upward, so that the sheet material 200 can be lifted and protruded from the cross-section passivation material box 100, thereby facilitating the taking of the sheet material 200.

[0059] In some embodiments, the second end of the engaging block 1622 is configured to engage with the upper surface of the box cover 122 .

[0060] In some embodiments, the edge area of ​​the box cover 122 has a groove, and the upper surface of at least one of the first side panel 112, the second side panel 113 and the third side panel 114 has a boss. When the box cover 122 closes the first opening, the groove and the boss are connected in a concave-convex manner, so that the box cover 122 can close the first opening more tightly and prevent the box cover 122 from moving relative to the box body assembly 110 during the process.

[0061] Fig. 9 Shown is a schematic structural diagram of a cross-section passivation device provided in one embodiment of the present disclosure.

[0062] Based on the same concept, Fig. 9 As shown, the embodiment of the present disclosure also provides a cross-section passivation device 300, which is applied to the passivation process of the sheet material 200. The cross-section passivation device 300 includes: a reaction furnace 310, which has a process chamber; a cross-section passivation material box 100 as described in the above embodiment, which is arranged in the process chamber and is configured to carry the sheet material 200.

[0063] Specifically, the gas inlet device can introduce the passivation gas into the process chamber, and the passivation gas enters the cross-section passivation material box 100 through the gap formed by the baffle 130 at the second opening position, and reacts with the side of the sheet material 200 to be passivated.

[0064] Since the cross-section passivation device 300 includes the cross-section passivation material box 100, the cross-section passivation device 300 includes all technical features and technical effects of the cross-section passivation material box 100, which will not be repeated here.

[0065] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0066] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0067] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0068] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0069] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A cross-section passivation material box, characterized in that: Applied to the passivation process of sheet materials, the cross-section passivation material box comprises: A box body assembly, comprising a receiving cavity, a first opening arranged at the top and a second opening arranged at the side, wherein the receiving cavity is configured to carry the sheet material, and the first opening and the second opening are respectively communicated with the receiving cavity; A box cover assembly, the box cover assembly comprises a box cover, an elastic assembly, and a pressing plate, the box cover is configured to cover the first opening, a first end of the elastic assembly is connected to the box cover, an upper surface of the pressing plate is connected to a second end of the elastic assembly, and when the accommodating cavity carries the sheet material, a lower surface of the pressing plate is configured to abut against and cover an upper surface of the sheet material at the top; a baffle, connected to the box body assembly, disposed at the second opening, and forming a gap with the box body assembly, the gap communicating with the accommodating cavity, and the gap allowing a passivation gas used in the passivation process to pass through; Wherein, when the accommodating cavity carries the sheet material, the box body assembly is configured to cover the lower surface of the sheet material at the bottom and the side of the sheet material that is not to be passivated, and the baffle is located on one side of the side of the sheet material to be passivated.

2. The cross-section passivation cartridge according to claim 1, characterized in that: The box body assembly has a threaded hole, and the baffle has a first through hole; Wherein, the cross-section passivation material box also includes: A screw, passing through the first through hole and screwed into the threaded hole; At least one gasket is sleeved on the screw and arranged between the box body assembly and the baffle to form the gap.

3. The cross-section passivation cartridge according to claim 1, characterized in that: The width of the gap ranges from 0.2 mm to 1 mm.

4. The cross-section passivation cartridge according to claim 1 or 2, characterized in that: The box assembly comprises: Base plate; A first side plate connected to the bottom plate; A second side plate, arranged opposite to the first side plate and connected to the bottom plate; A third side plate, connected to the first side plate and the second side plate, and connected to the bottom plate; The first side plate, the second side plate and the third side plate form the first opening, and the bottom plate, the first side plate and the second side plate form the second opening.

5. The cross-section passivation cartridge according to claim 1 or 2, characterized in that: Also includes: The buckle assembly is connected to the box body assembly and is snap-fitted to the box cover assembly.

6. The cross-section passivation cartridge according to claim 5, characterized in that: The box cover assembly is located above the box body assembly, and the buckle assembly includes: A fixing member, connected to the box body assembly, having a second through hole extending in the vertical direction; A locking member passes through the second through hole, a first end of the locking member contacts the box cover assembly and applies pressure to the box cover assembly in a direction toward the box body assembly, and the locking member further has a third through hole extending in a horizontal direction; A rotating shaft passes through the third through hole, and both ends of the rotating shaft are connected to the fixing member; A first elastic member, wherein a first end of the first elastic member is connected to the locking member, and a second end of the first elastic member is connected to the fixing member.

7. The cross-section passivation cartridge according to claim 6, characterized in that: The locking member comprises: A vertical rod passing through the second through hole; The clamping block is arranged crosswise with the vertical rod and faces one side of the box cover assembly. The first end of the clamping block is connected to the vertical rod, and the second end of the clamping block can be clamped with the upper surface of the box cover assembly.

8. The cross-section passivation cartridge according to claim 4, characterized in that: The bottom plate has at least one first clamping hole, and the box cover assembly has at least one second clamping hole, and the first clamping hole and the second clamping hole are configured to be clamped by a transportation device.

9. The cross-section passivation cartridge according to claim 4, characterized in that: The bottom plate is configured to carry the sheet material, and the bottom plate has a fourth through hole; Wherein, when taking the sheet material, the lifting device lifts up the sheet material through the fourth through hole.

10. A cross-section passivation device, characterized in that: Applied to the passivation process of sheet materials, the cross-section passivation equipment includes: A reaction furnace having a process chamber; The cross-section passivation material box described in any one of claims 1 to 9 is disposed in the process chamber and is configured to carry the sheet material.

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