Boat piece, boat structure and coating equipment

Abstract

The utility model provides a boat piece, a boat structure and coating equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that the side edge coating effect of a flaky material is poor. The boat piece comprises a piece body; wherein the upper surface of the sheet body is provided with at least one containing groove, and the containing groove is used for containing sheet materials. Due to the fact that the gap is formed between the side wall of the containing groove and the sheet-shaped material, the sheet-shaped material is prevented from generating sticking point marks. Moreover, the gap between the side wall of the accommodating groove and the sheet material is smaller than or equal to 0.5 mm, so that heat on the boat sheet is more easily conducted to the side edge of the sheet material, and the coating effect of the side edge of the sheet material is improved; besides, the depth of the accommodating groove is smaller than or equal to the thickness of the sheet material, so that the process gas can be in full contact with the side edge of the sheet material, the side edge of the sheet material can be fully coated, and the coating uniformity of the sheet material is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and specifically to a boat sheet, a boat structure and a coating device. Background Art

[0002] When coating a sheet material (such as a semiconductor material or a photovoltaic material), a boat structure is usually used to carry the sheet material. The boat structure is usually composed of a plurality of boat sheets, and a sheet material can be placed on each boat sheet.

[0003] In the related art, in order to prevent the sheet material from floating, a card point (such as a cylindrical structure) is usually set on the boat, and the card point can limit the sheet material. However, during the coating process, the card point contacts the sheet material, which will cause the sheet material to produce card point marks, making the sheet material unevenly coated and reducing the process quality. Utility Model Content

[0004] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a boat sheet, a boat structure and a coating device.

[0005] In a first aspect, an embodiment of the present application provides a boat sheet for use in a coating device, the coating device having a vacuum chamber, wherein the boat sheet comprises: a sheet body; wherein the upper surface of the sheet body has at least one receiving groove, the receiving groove is used to hold sheet material, the depth of the receiving groove is less than or equal to the thickness of the sheet material, and the gap between the side wall of the receiving groove and the sheet material is less than or equal to 0.5 mm.

[0006] In some embodiments, the depth of the receiving groove differs from the thickness of the sheet material by 0.01 mm to 0.14 mm.

[0007] In some embodiments, the sheet body has at least one air hole, the bottom of the receiving groove has a ventilation groove, the ventilation groove is connected to the air hole, and the unionized process gas can enter the ventilation groove from the air hole.

[0008] In some embodiments, the side of the sheet has air holes; and / or, when the boat sheet is a top boat sheet, the upper surface of the sheet has air holes; and / or, when the boat sheet is a bottom boat sheet, the lower surface of the sheet has air holes.

[0009] In some embodiments, a connecting groove is provided on the side of the sheet body, and the connecting groove is connected to the ventilation groove; wherein the sheet body further comprises: a ventilation block, and the ventilation block is arranged in the connecting groove, wherein the ventilation block has air holes.

[0010] In some embodiments, the ventilation groove includes: a main branch, which is connected to the air hole; and at least one branch, which is interconnected with the main branch, and the branch extends from the main branch to the edge of the containing groove.

[0011] In some embodiments, the receiving groove is in the shape of an elongated strip, the main branch is arranged along the extension direction of the receiving groove, and there are multiple branch roads, which are arranged radially.

[0012] In some embodiments, there are multiple branch roads; wherein the ventilation groove further includes: a connecting branch road, connecting at least two branch roads.

[0013] In a second aspect, an embodiment of the present application provides a boat structure, comprising: a plurality of boat sheets as described in any one of the first aspect above; a connecting rod, connecting the plurality of boat sheets, and the plurality of boat sheets are arranged at intervals along the extension direction of the connecting rod.

[0014] In a third aspect, an embodiment of the present application provides a coating device configured to process sheet materials, including: a cavity having a vacuum chamber; a boat structure such as the second aspect described above, which is disposed in the vacuum chamber and configured to carry the sheet material.

[0015] Since there is a gap between the side wall of the receiving groove and the sheet material, the sheet material is prevented from producing stuck point marks; and, since the gap between the side wall of the receiving groove and the sheet material is less than or equal to 0.5 mm, the heat on the boat is more easily transferred to the side of the sheet material, thereby improving the coating effect on the side of the sheet material; in addition, since the depth of the receiving groove is less than or equal to the thickness of the sheet material, the process gas can fully contact the side of the sheet material, so that the side of the sheet material can be fully coated, thereby improving the uniformity of the coating of the sheet material. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic structural diagram of a boat piece provided by an exemplary embodiment of the present application.

[0018] Figure 2 Shown is a schematic structural diagram of a boat structure provided by an exemplary embodiment of the present application.

[0019] Figure 3 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area B in the middle.

[0020] Figure 4 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle.

[0021] Figure 5 Shown is a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.

[0022] Reference numerals:

[0023] 100, boat sheet; 110, sheet body; 111, receiving groove; 1111, ventilation groove; 11111, main branch; 11112, branch road; 11113, connecting branch; 112, air hole; 113, ventilation block; 200, sheet material; 300, boat structure; 310, connecting rod; 320, nut; 330, gasket; 340, ceramic sleeve; 350, boat foot; 360, beam; 400, coating equipment; 410, cavity. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] Application Overview

[0026] In semiconductor and solar cell manufacturing equipment (such as diffusion equipment, oxidation equipment, coating equipment, etc.), a boat structure is usually used to carry silicon wafers. The boat structure is usually composed of multiple boats, and multiple silicon wafers can be placed on each boat. However, if the silicon wafer is placed directly on the surface of the boat, the silicon wafer is prone to floating (i.e. displacement). If the silicon wafer contacts the ceramic ring on the boat structure, serious uneven coating will occur and burn marks will be produced.

[0027] In the related art, in order to prevent the silicon wafer from floating, a card point (such as a cylindrical structure) is usually set on the boat, and the card point can limit the silicon wafer. However, during the coating process, the card point contacts the silicon wafer, which will cause the silicon wafer to have a card point mark, making the silicon wafer coating uneven and reducing the photoelectric conversion efficiency of the silicon wafer.

[0028] In view of this, the present application proposes a boat, a boat structure and a coating device, wherein the boat is applied to the coating device, the coating device has a vacuum chamber, and the boat comprises: a sheet body; wherein the upper surface of the sheet body has at least one receiving groove, the receiving groove is used to hold the sheet material, the depth of the receiving groove is less than or equal to the thickness of the sheet material, and the gap between the side wall of the receiving groove and the sheet material is less than or equal to 0.5 mm.

[0029] Since there is a gap between the side wall of the receiving groove and the sheet material, the sheet material is prevented from producing stuck point marks; and, since the gap between the side wall of the receiving groove and the sheet material is less than or equal to 0.5 mm, the heat on the boat is more easily transferred to the side of the sheet material, thereby improving the coating effect on the side of the sheet material; in addition, since the depth of the receiving groove is less than or equal to the thickness of the sheet material, the process gas can fully contact the side of the sheet material, so that the side of the sheet material can be fully coated, thereby improving the uniformity of the coating of the sheet material.

[0030] Exemplary Devices

[0031] Figure 1 FIG. 1 is a schematic diagram of the structure of a boat piece provided by an exemplary embodiment of the present application. Figure 1 As shown, an embodiment of the present application provides a boat sheet 100, which is applied to a coating device, and the coating device has a vacuum chamber, wherein the boat sheet 100 includes: a sheet body 110; wherein the upper surface of the sheet body 110 has at least one receiving groove 111, and the receiving groove 111 is used to hold the sheet material 200, and the depth of the receiving groove 111 is less than or equal to the thickness of the sheet material 200, and the gap between the side wall of the receiving groove 111 and the sheet material 200 is less than or equal to 0.5 mm.

[0032] The sheet material 200 may be, for example, a silicon wafer, a battery cell, a glass substrate, etc. The sheet material 200 may be in the shape of a rectangle, a circle, a polygon, or other irregular shapes, which is not specifically limited in this application. The shape of the horizontal cross section of the receiving groove 111 may be the same as the shape of the sheet material 200, such as the shape of the receiving groove 111 may be in the shape of a rectangle, a circle, a polygon, or other irregular shapes.

[0033] The smaller the gap between the side wall of the receiving groove 111 and the sheet material 200, the better the coating effect on the side edge of the sheet material 200. For any side wall of the receiving groove 111, the gap between the side wall and the sheet material 200 is: the gap between the side wall and the side edge of the sheet material 200 closest to the side wall.

[0034] In the above embodiment, since there is a gap between the side wall of the receiving groove 111 and the sheet material 200, the sheet material 200 is prevented from generating a stuck point mark; and, since the gap between the side wall of the receiving groove 111 and the sheet material 200 is less than or equal to 0.5 mm, the heat on the boat 100 is more easily transferred to the side of the sheet material 200, thereby improving the coating effect of the side of the sheet material 200; in addition, since the depth of the receiving groove 111 is less than or equal to the thickness of the sheet material 200, the process gas can fully contact the side of the sheet material 200, so that the side of the sheet material 200 can be fully coated, thereby improving the uniformity of the coating of the sheet material 200.

[0035] In some embodiments, the depth of the receiving groove 111 differs from the thickness of the sheet material 200 by 0.01 mm to 0.14 mm. For example, if the thickness of the sheet material 200 is 0.2 mm, the depth of the receiving groove 111 may be 0.16 mm.

[0036] In some embodiments, the gap between the side wall of the receiving groove 111 and the sheet material 200 is 0.1 mm. As described above, the smaller the gap between the side wall of the receiving groove 111 and the sheet material 200, the better the coating effect on the side of the sheet material 200. However, if the gap between the side wall of the receiving groove 111 and the sheet material 200 is too small, it is difficult to automatically take out the sheet (take out the sheet material 200 from the receiving groove 111 by the transport device). Therefore, if the gap between the side wall of the receiving groove 111 and the sheet material 200 is 0.1 mm, it can achieve a better coating effect on the side of the sheet material 200 and facilitate automatic sheet taking.

[0037] Figure 2 Shown is a schematic structural diagram of a boat structure provided by an exemplary embodiment of the present application. Figure 3 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area B in the middle.

[0038] In some embodiments, Figure 2 and Figure 3 As shown, the sheet body 110 has at least one air hole 112 , and the bottom of the receiving groove 111 has a ventilation groove 1111 , which is connected to the air hole 112 , so that the unionized process gas can enter the ventilation groove 1111 from the air hole.

[0039] Specifically, when the sheet is taken out after the process is completed, the sheet material 200 is difficult to be picked up due to the air pressure between the lower surface of the sheet material 200 and the receiving groove 111. By setting the air hole 112 and the ventilation groove 1111, external air can enter the ventilation groove 1111 from the air hole 112, so that the sheet material 200 can be picked up by the transportation device.

[0040] In some embodiments, the side of the sheet 110 has air holes 112; and / or, when the boat sheet 100 is a top boat sheet, the upper surface of the sheet 110 has air holes 112; and / or, when the boat sheet 100 is a bottom boat sheet, the lower surface of the sheet 110 has air holes 112.

[0041] Specifically, in the boat structure, a plurality of boat sheets are usually arranged at intervals in the vertical direction, and an electric field is generated between adjacent boat sheets 100. The electric field can ionize the process gas, and the ionized process gas can coat the sheet material 200 carried by the boat sheet 100. If the air hole 112 is arranged on the side of the sheet body 110, the un-ionized process gas will not pass through the electric field, but will directly enter the ventilation groove 1111, thereby preventing the lower surface of the sheet material 200 from generating a plating-around phenomenon. Similarly, for the top boat sheet, the un-ionized process gas will not pass through the electric field when entering the ventilation groove 1111 from the air hole 112 on the upper surface of the sheet body 110, thereby generating ionization. For the bottom boat sheet, the un-ionized process gas will not pass through the electric field when entering the ventilation groove 1111 from the air hole 112 on the lower surface of the sheet body 110, thereby generating ionization.

[0042] In some embodiments, the side of the sheet 110 has a connecting groove, which is connected to the ventilation groove 1111; wherein the sheet 110 further includes: a ventilation block 113, which is disposed in the connecting groove, wherein the ventilation block 113 has an air hole 112. The air hole 112 may be a through hole disposed on the ventilation block 113, or the air hole 112 may be a through groove disposed on the ventilation block 113, and the air hole 112 may be formed after the through groove is connected to the connecting groove.

[0043] Specifically, if the air hole 112 is formed by directly drilling holes on the sheet 110, if the air hole 112 is blocked, it is necessary to manually remove the blockage, which is difficult to operate. However, in the embodiment of the present application, by providing the ventilation block 113, when the air hole 112 is blocked, it is only necessary to replace a new ventilation block 113 to solve the problem of the blockage of the air hole 112, which is simple and convenient to operate.

[0044] On the other hand, by setting the pores 112 on the ventilation blocks 113 , pores 112 of different specifications can be set on different ventilation blocks 113 . During the coating process, ventilation blocks 113 with pores 112 of different specifications can be selected according to the specifications of the sheet material 200 .

[0045] Figure 4 An exemplary embodiment of the present application is shown. Figure 1 A partial enlarged view of area A in the middle.

[0046] In some embodiments, Figure 4 As shown, the ventilation groove 1111 includes: a main branch 11111, which is connected to the air hole 112; at least one branch 11112, which is interconnected with the main branch 11111, and the branch 11112 extends from the main branch 11111 to the edge of the accommodating groove 111.

[0047] Specifically, when the un-ionized process gas enters the containing tank 111, it will flow along the main branch 11111 and the branch 11112. The main branch 11111 and the branch 11112 can be evenly arranged at the bottom of the containing tank 111. By setting the main branch 11111 and the branch 11112, the external gas can enter more between the lower surface of the sheet material 200 and the sheet body 110 after taking the sheet, making it easier to take the sheet.

[0048] In some embodiments, Figure 4 As shown, the receiving groove 111 is in the shape of a long strip, the main branch 11111 is arranged along the extending direction of the receiving groove 111, and the number of branch paths 11112 is multiple, and the multiple branch paths 11112 are arranged radially. With this structure, when taking out the sheet, the external air can enter the ventilation groove 1111 and evenly flow between the lower surface of the sheet material 200 and the sheet body 110, making it easier to take out the sheet.

[0049] In some embodiments, Figure 4 As shown, there are multiple branch roads 11112 ; wherein the ventilation groove 1111 also includes: a connecting branch road 11113 connecting at least two branch roads 11112 .

[0050] By providing the connecting branch 11113, the flow speed of the external gas in the ventilation groove 1111 can be further accelerated when taking the film, so that the external gas can be quickly diffused to each branch 11112, thereby realizing fast film taking.

[0051] Based on the same concept, Figure 2 and Figure 3 As shown, the embodiment of the present application further provides a boat structure 300, which includes: a plurality of boat sheets 100 described in the above embodiment; a connecting rod 310, connecting the plurality of boat sheets 100, and the plurality of boat sheets 100 are arranged at intervals along the extension direction of the connecting rod 310. The material of the connecting rod 310 is an insulating material, such as ceramic, and the material of the boat sheets 100 is exemplarily graphite.

[0052] In some embodiments, a plurality of connecting rods 310 may be provided, for example, Figure 2 As shown, the plurality of connecting rods 310 may be evenly distributed in the form of m rows and n columns, so as to stably connect the plurality of boats 100 , wherein m and n are positive integers.

[0053] In some embodiments, Figure 3As shown, the boat structure 300 further includes: a ceramic sleeve 340, which is sleeved on the connecting rod 310 and located between adjacent boat pieces 100. The ceramic sleeve 340 can support the multiple boat pieces 100 in the boat structure 300, so that the multiple boat pieces 100 are spaced apart from each other. The ceramic sleeve 340 can also be sleeved on the connecting rod 310 and located on the upper surface of the top boat piece 100.

[0054] In some embodiments, Figure 3 As shown, the connecting rod 310 has a threaded portion, and the boat structure 300 further includes: a nut 320, which is threadedly connected to the threaded portion of the connecting rod 310; a washer 330, which is sleeved on the connecting rod 310 and located between the nut 320 and the connecting rod 310, so that the nut 320 can lock the multiple boat pieces 100 and the ceramic sleeve 340. Among them, the nut 320 and the washer 330 are exemplarily made of graphite.

[0055] In some embodiments, adjacent boats 100 in the boat structure 300 have opposite electrical properties, so that an electric field is formed between the adjacent boats 100 , thereby ionizing the process gas in the vacuum chamber so that the ionized process gas can coat the sheet material 200 .

[0056] In some embodiments, the plurality of boat sheets 100 include a plurality of first boat sheets and a plurality of second boat sheets arranged in an alternating manner; the boat structure 300 further includes: a first pad connected between adjacent first boat sheets; a second pad connected between adjacent second boat sheets; a first electrode graphite block connected to the first pad and configured to provide current to the first boat sheet through the first pad; and a second electrode graphite block connected to the second pad and configured to provide current to the second boat sheet through the second pad. The first pad, the second pad, the first electrode graphite block, and the second electrode graphite block are all made of graphite.

[0057] In some embodiments, Figure 2 As shown, the boat structure 300 further includes: a boat foot 350 and a cross beam 360, which are arranged at the bottom of the plurality of boat pieces 100 to support the plurality of boat pieces 100, wherein the boat foot 350 and the cross beam 360 may be connected to each other. The boat foot 350 may be exemplarily the same structure as the first electrode graphite block or the second electrode graphite block, that is, it plays both a power supply role and a supporting role, or it may be a separate structure and only plays a supporting role.

[0058] Exemplarily, there are two boat feet 350, which are respectively used to support the two ends of the bottom of multiple boat pieces 100, and the crossbeam 360 connected between the two boat feet 350 can be used to support the central area of ​​the bottom of multiple boat pieces 100 (that is, the area between the two ends).

[0059] Since the boat structure 300 includes the boat sheet 100 , the boat structure 300 has all the technical features and technical effects of the boat sheet 100 , which will not be described in detail herein.

[0060] Based on the same concept, the embodiment of the present application further provides a coating device 400, Figure 5 FIG. 1 is a schematic diagram of the structure of a coating device provided by an exemplary embodiment of the present application. Figure 5 As shown, the coating device 400 is configured to process the sheet material 200 , and includes: a cavity 410 having a vacuum chamber; a boat structure 300 as described in the above embodiment, which is disposed in the vacuum chamber and configured to carry the sheet material 200 .

[0061] Since the coating device 400 includes the boat structure 300 , the coating device 400 has all the technical features and technical effects of the boat structure 300 , which will not be described in detail herein.

[0062] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0063] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0064] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0065] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A boat sheet, characterized in that: Applied to a coating device, the coating device has a vacuum chamber, wherein the boat comprises: Sheet body; The upper surface of the sheet body has at least one receiving groove for containing sheet material, the depth of the receiving groove is less than or equal to the thickness of the sheet material, and the gap between the side wall of the receiving groove and the sheet material is less than or equal to 0.5 mm.

2. The boat piece according to claim 1, characterized in that: The depth of the receiving groove differs from the thickness of the sheet material by 0.01 mm to 0.14 mm.

3. The boat piece according to claim 1 or 2, characterized in that: The sheet body has at least one air hole, and the bottom of the containing groove has a ventilation groove, which is communicated with the air hole, and the unionized process gas can enter the ventilation groove from the air hole.

4. The boat piece according to claim 3, characterized in that: The side surface of the sheet body has the air hole; and / or, In the case where the boat sheet is a top boat sheet, the upper surface of the sheet body has the pores; and / or, When the boat piece is a bottom boat piece, the lower surface of the sheet body has the air holes.

5. The boat piece according to claim 3, characterized in that: The side surface of the sheet body is provided with a connecting groove, and the connecting groove is connected with the ventilation groove; Wherein, the sheet body further comprises: A ventilation block is arranged in the communicating groove, wherein the ventilation block has the air hole.

6. The boat piece according to claim 5, characterized in that: The ventilation groove comprises: A main branch, connected to the pore; At least one branch road is interconnected with the main branch road, and the branch road extends from the main branch road to the edge of the containing groove.

7. The boat according to claim 6, characterized in that: The receiving groove is in the shape of an elongated strip, the main branch is arranged along the extending direction of the receiving groove, and there are a plurality of branch roads, which are arranged radially.

8. The boat according to claim 7, characterized in that: The number of the branch roads is multiple; Wherein, the ventilation groove also includes: A connecting branch road connects at least two of the branch roads.

9. A boat structure, characterized in that: include: A plurality of boat pieces as claimed in any one of claims 1 to 8; A connecting rod connects the plurality of boat pieces, and the plurality of boat pieces are arranged at intervals along the extending direction of the connecting rod.

10. A coating device, characterized in that: Configured to process sheet materials including: a chamber having a vacuum chamber; The boat structure of claim 9 is disposed in the vacuum chamber and is configured to carry the sheet material.

Images