Paddle rod and coating equipment

Abstract

The utility model discloses a paddle rod and coating equipment. The paddle rod is used for bearing or transferring the slide glass boat and comprises an outer rod and an inner rod. The outer rod is hollow and sleeved with the inner rod. Wherein the outer rod is made of an insulating material, and the elastic modulus of the inner rod is greater than that of the outer rod. In this way, the structural strength of the paddle rod is improved.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating technology, and in particular to a paddle and coating equipment. Background Art

[0002] In the coating equipment, the paddle rod is used to carry or transfer the platform of the wafer boat, which plays a vital role in the coating process. In the related technology, the structural strength of the paddle rod is insufficient, and the fatigue resistance of the paddle rod will gradually decrease during use, and fatigue fracture may occur. The insufficient structural strength of the paddle rod will also cause the paddle rod to be slightly bent under pressure when the length is long, and the boat support block installed on the paddle rod will also produce a certain displacement, resulting in poor contact between the wafer boat and the boat support block, resulting in powder discharge. Utility Model Content

[0003] The embodiments of the present application provide a paddle rod and a coating device, which can improve the structural strength of the paddle rod.

[0004] In a first aspect, an embodiment of the present application provides a paddle. The paddle is used to carry or transfer a wafer boat, and the paddle includes an outer rod and an inner rod. The outer rod is hollow, and the inner rod is sleeved on the outer rod. The outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than the elastic modulus of the outer rod.

[0005] Optionally, the inner diameter of the outer rod is greater than or equal to the outer diameter of the inner rod.

[0006] Optionally, the thickness of the outer rod in the radial direction ranges from 7 to 8 mm.

[0007] Optionally, the material of the inner rod is silicon carbide, and the material of the outer rod is insulating ceramic.

[0008] Optionally, the elastic modulus of the inner rod is greater than 450 GPa.

[0009] In a second aspect, an embodiment of the present application provides a coating device. The coating device includes a paddle, a boat support block, and a film boat. The paddle includes an outer rod and an inner rod, the outer rod is hollow, the outer rod is sleeved on the inner rod, the outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than the elastic modulus of the outer rod. The boat support block is spaced apart from the paddle. The film boat is arranged on the boat support block.

[0010] Optionally, the inner diameter of the outer rod is greater than or equal to the outer diameter of the inner rod, and the thickness of the outer rod in the radial direction ranges from 7 to 8 mm. Optionally, the material of the inner rod is silicon carbide, and the material of the outer rod is insulating ceramic.

[0011] Optionally, the elastic modulus of the inner rod is greater than 450 GPa.

[0012] Optionally, the coating device comprises two paddle rods arranged at an interval, and each paddle rod is provided with a boat support block.

[0013] The beneficial effect of the present application is that, different from the prior art, a paddle rod for carrying a wafer carrier boat can be formed by sleeve-arranging an inner rod on an outer rod. In some coating processes, it is necessary to load current to the wafer carrier boat, and the paddle rod is required to be insulated. To avoid affecting the coating process, the outer rod needs to be insulating ceramic. The elastic modulus of the inner rod is greater than that of the outer rod, so that the inner rod can make up for the problem of insufficient strength of the outer rod, thereby enhancing the overall fatigue resistance and bending resistance of the paddle rod and improving the structural strength of the paddle rod. At the same time, the outer rod can also isolate the inner rod from the outside world, thereby preventing the inner rod from corrosion. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of a cross section of a paddle shaft of the present application;

[0015] Figure 2 It is a structural schematic diagram of the coating equipment of the present application;

[0016] Figure 3 yes Figure 2 Schematic diagram of a cross section of a coating apparatus is shown.

[0017] Reference numerals:

[0018] Coating equipment, 1; paddle rod, 10; outer rod, 11; inner rod, 12; boat support block, 20; film boat, 30. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0020] In the field of vacuum coating technology, the paddle rod, as an important boat support platform, plays an important role in the quality of the wafer boat process. The durability and sustainability of the paddle rod are directly related to the output of the coating equipment. During the use of the current paddle rod, after a long period of use, the fatigue resistance is weakened, and there are local or intermediate fractures. When taking and placing the wafer boat, due to the uninterrupted pressure, the paddle rod with a longer length is prone to slight bending, and the boat support block locked on the paddle rod will also produce a certain displacement, resulting in poor contact between the graphite boat and the boat support block to produce powder and cause particle pollution. In some coating equipment, the wafer boat needs to be loaded with current, which requires the paddle rod to be non-conductive, otherwise it will affect the coating process. In summary, in order to improve the above technical problems, the paddle rod needs to be comprehensively considered in terms of elastic modulus, flexural strength and material selection. The present application can provide the following embodiments.

[0021] Combination Figures 1 to 3 , an embodiment of the present application provides a paddle 10. The paddle 10 is used to carry or transfer a wafer boat 30, and the paddle 10 includes an outer rod 11 and an inner rod 12. The outer rod 11 is hollow, and the outer rod 11 is sleeved with the inner rod 12. Among them, the outer rod 11 is made of insulating material, and the elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11. The paddle 10 for carrying the wafer boat 30 can be formed by sleeved with the inner rod 12 by the outer rod 11. Among them, in some coating processes, it is necessary to load current to the wafer boat 30, and the paddle 10 is required to be insulated to avoid affecting the coating process, so the outer rod 11 needs to be insulated. The elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11, so that the inner rod 12 can make up for the problem of insufficient strength of the outer rod 11, so as to enhance the overall fatigue resistance and bending resistance of the paddle 10, and improve the structural strength of the paddle 10. At the same time, the outer rod 11 can also isolate the inner rod 12 from the outside, thereby preventing the inner rod 12 from being corroded. In some embodiments, the elastic modulus of the inner rod 12 is greater than 450 GPa, such as 500 GPa or 550 GPa. A sufficient elastic modulus can enable the paddle shaft 10 to have sufficient bending strength, thereby helping to enhance the structural strength of the paddle shaft 10.

[0022] In some embodiments, the inner diameter of the outer rod 11 is greater than or equal to the outer diameter of the inner rod 12. The inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to cooperate to form the paddle rod 10. The paddle rod 10 can be made in a variety of ways. When the paddle rod 10 is mechanically assembled, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to follow mechanical tolerances. For details, please refer to the relevant national standards, which will not be repeated here. In some embodiments, when the outer rod 11 is, for example, ceramic, it can be made by a process of firing the outer layer of the inner rod 12. In this case, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 are naturally consistent.

[0023] In some embodiments, the diameter of the inner rod 12 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The thickness of the outer rod in the radial direction is 7-8 mm, the outer diameter of the outer rod is 14-16 mm larger than the inner diameter, and the inner diameter of the outer rod 11 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The outer diameter of the outer rod 11 is 21-24 mm, such as 21.5 mm, 22.5 mm or 23.5 mm.

[0024] In some embodiments, the material of the inner rod 12 is silicon carbide, and the material of the outer rod 11 is insulating ceramic. The elastic modulus and bending strength of the silicon carbide paddle 10 are superior, and silicon carbide is used as the inner rod 12 of the paddle 10, which is better than materials such as stainless steel. However, since silicon carbide material can conduct electricity, in processes such as plasma enhanced chemical vapor deposition (PECVD), the paddle 10 is required to be insulated, so insulating ceramic is provided outside the silicon carbide inner rod 12 to insulate the outer layer of the paddle 10 and avoid affecting the coating process.

[0025] The embodiment of the present application provides a coating device 1. The coating device 1 includes a paddle rod 10, a boat support block 20 and a film carrier boat 30. The paddle rod 10 includes an outer rod 11 and an inner rod 12, the outer rod 11 is hollow, the outer rod 11 is sleeved on the inner rod 12, the outer rod 11 is made of insulating material, and the elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11.

[0026] The paddle rod 10 is used to carry or transfer the wafer boat 30, and the paddle rod 10 includes an outer rod 11 and an inner rod 12. The outer rod 11 is hollow, and the inner rod 12 is sleeved on the outer rod 11. The outer rod 11 is made of insulating material, and the elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11. The paddle rod 10 for carrying the wafer boat 30 can be formed by sleeved the inner rod 12 on the outer rod 11. In some coating processes, it is necessary to load current to the wafer boat 30, and the paddle rod 10 is required to be insulated to avoid affecting the coating process, so the outer rod 11 needs to be insulated. The elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11, so that the inner rod 12 can make up for the problem of insufficient strength of the outer rod 11, so as to enhance the overall fatigue resistance and bending resistance of the paddle rod 10 and improve the structural strength of the paddle rod 10. At the same time, the outer rod 11 can also isolate the inner rod 12 from the outside world, thereby preventing the inner rod 12 from being corroded. In some embodiments, the elastic modulus of the inner rod 12 is greater than 450 GPa, such as 500 GPa or 550 GPa. A sufficient elastic modulus can enable the paddle shaft 10 to have sufficient bending strength, thereby helping to enhance the structural strength of the paddle shaft 10.

[0027] The boat block 20 is arranged at intervals on the paddle rod 10. The wafer boat 30 is arranged on the boat block 20. The boat block 20 can be used to stably support the wafer boat 30, and the wafer boat 30 is provided with a storage space for accommodating the substrate. In some embodiments, the boat block 20 can feed current into the wafer boat 30. After the current is passed into the wafer boat 30, the process gas can be ionized, thereby coating the substrate. Optionally, the coating device 1 also includes an electrode rod, which is connected to the boat block 20, so as to feed current into the boat block 20.

[0028] In some embodiments, the coating device 1 includes two paddles 10 arranged at intervals, and each paddle 10 is provided with a boat support block 20. By providing two paddles 10 and providing the boat support blocks 20 on each of the paddles 10, the two ends of the bottom of the wafer boat 30 can be supported, thereby improving the stability of the placement of the wafer boat 30. In addition, the boat support blocks 20 respectively provided on the two paddles 10 can be used to connect to power supply terminals of different polarities, so that the two poles of the power supply are fed into the wafer boat 30.

[0029] In some embodiments, the inner diameter of the outer rod 11 is greater than or equal to the outer diameter of the inner rod 12. The inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to cooperate to form the paddle rod 10. The paddle rod 10 can be made in a variety of ways. When the paddle rod 10 is mechanically assembled, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to follow mechanical tolerances. For details, please refer to the relevant national standards, which will not be repeated here. In some embodiments, when the outer rod 11 is, for example, ceramic, it can be made by a process of firing the outer layer of the inner rod 12. In this case, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 are naturally consistent.

[0030] In some embodiments, the diameter of the inner rod 12 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The thickness of the outer rod in the radial direction is 7-8 mm, the outer diameter of the outer rod is 14-16 mm larger than the inner diameter, and the inner diameter of the outer rod 11 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The outer diameter of the outer rod 11 is 21-24 mm, such as 21.5 mm, 22.5 mm or 23.5 mm.

[0031] In some embodiments, the material of the inner rod 12 is silicon carbide, and the material of the outer rod 11 is insulating ceramic. The elastic modulus and bending strength of the silicon carbide paddle 10 are superior, and silicon carbide is used as the inner rod 12 of the paddle 10, which is better than materials such as stainless steel. However, since silicon carbide material can conduct electricity, in processes such as plasma enhanced chemical vapor deposition (PECVD), the paddle 10 is required to be insulated, so insulating ceramic is provided outside the silicon carbide inner rod 12 to insulate the outer layer of the paddle 10 and avoid affecting the coating process.

[0032] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A paddle for carrying or transferring a slide boat, characterized in that: include: An outer rod, wherein the outer rod is hollow; An inner rod, the outer rod being sleeved with the inner rod; Wherein, the outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than the elastic modulus of the outer rod.

2. The paddle shaft according to claim 1, characterized in that: The inner diameter of the outer rod is greater than or equal to the outer diameter of the inner rod.

3. The paddle shaft according to claim 1, characterized in that: The thickness of the outer rod in the radial direction ranges from 7 to 8 mm.

4. The paddle shaft according to claim 1, characterized in that: The material of the inner rod is silicon carbide, and the material of the outer rod is insulating ceramic.

5. The paddle shaft according to claim 1, characterized in that: The elastic modulus of the inner rod is greater than 450 GPa.

6. A coating device, characterized in that: include: A paddle rod, the paddle rod comprising an outer rod and an inner rod, the outer rod is hollow, the outer rod is sleeved on the inner rod, the outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than that of the outer rod; A boat support block is arranged at intervals on the paddle rod; The wafer boat is arranged on the boat supporting block.

7. The coating device according to claim 6, characterized in that: The inner diameter of the outer rod is greater than or equal to the outer diameter of the inner rod, and the thickness of the outer rod in the radial direction ranges from 7 to 8 mm.

8. The coating device according to claim 6, characterized in that: The material of the inner rod is silicon carbide, and the material of the outer rod is insulating ceramic.

9. The coating device according to claim 6, characterized in that: The elastic modulus of the inner rod is greater than 450 GPa.

10. The coating device according to claim 6, characterized in that: The coating equipment comprises two paddle rods arranged at intervals, and each paddle rod is provided with the boat support block.

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