Self-cleaning evaporation crucible

Abstract

The utility model discloses a self-cleaning evaporation crucible, which relates to the technical field of evaporation crucibles and comprises a crucible body, a crucible cover covering the crucible body and a nozzle mounted on the top surface of the crucible cover, and a cleaning component used for cleaning the inner wall of the nozzle is arranged in the crucible body. The cleaning assembly comprises an inner sleeve fixedly mounted on the inner bottom wall of the crucible body, a sliding rod is slidably connected into the inner sleeve, a cleaning cylinder is rotatably mounted at the top end of the sliding rod, a surrounding plate is connected to the bottom end of the crucible body, an air inlet and outlet pipe is mounted on the surrounding plate, one end of the air inlet and outlet pipe extends to the outside of the surrounding plate, and the other end of the air inlet and outlet pipe extends to the bottom of the crucible body. The other end of the air inlet-outlet pipe is fixedly connected with the bottom end of the inner sleeve. According to the nozzle cleaning device, the inner wall of the nozzle can be cleaned and dredged through the cleaning cylinder, the time consumed in the process of dredging the blocked nozzle is short, and the production efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation crucibles, in particular to a self-cleaning evaporation crucible. Background Art

[0002] Evaporation refers to a process in which a coating material (or film material) is vaporized and deposited onto the surface of a substrate by a certain heating method under vacuum conditions. It is widely used in the production process of display panels. The evaporation crucible is one of the most important equipment in the evaporation process. The evaporation crucible provided by the prior art usually includes a crucible body with a accommodating cavity and a nozzle arranged at the opening of the crucible body.

[0003] In the prior art, as the evaporation process continues, the coating material in the crucible body gradually decreases until it is completely consumed and eventually approaches the weight of the crucible. Currently, the following method is usually used to determine the remaining amount of coating material in the crucible body, that is, directly taking out the crucible body and checking the consumption of the coating material in the crucible body by visual inspection. This has the following disadvantages: 1. It is necessary to stop the machine and open the cover, resulting in production waiting, which is time-consuming and labor-intensive; 2. It destroys the already debugged production environment inside the sealed equipment, and the production process needs to be re-debugged after the equipment is restarted, wasting debugging materials.

[0004] The existing Chinese patent (publication number: CN214572198U) proposes a evaporation crucible structure, including a crucible body, a pressure sensor, a PLC and a feeding component, the crucible body includes a accommodating cavity for holding a coating material, a heating wire is wound along the outer circumference of the crucible body, a pressure sensor for detecting the weight of the accommodating cavity is arranged at the bottom of the crucible body, and a feeding component connected to the accommodating cavity is connected to the upper part of the crucible body, and the pressure sensor is connected to the feeding component through the PLC. The beneficial effect of the utility model is that the utility model has a simple overall structure, and can monitor the remaining amount of the coating material in the crucible body in real time. Before the coating material is consumed, the crucible body can be automatically and efficiently added with material, thereby avoiding the loss caused by dry burning of the crucible body, reducing the monitoring cost of workers, ensuring the continuous production of coating, and improving the efficiency and stability of coating production.

[0005] The above-mentioned evaporation crucible structure has the following disadvantages when used: during the evaporation process, since the evaporated organic material has a fluffy structure, it is easy to gather at the nozzle part of the crucible cover and cause the nozzle to be blocked. Therefore, once the nozzle is blocked, it will affect the discharge of the evaporation material, affecting the production progress and product quality. When the nozzle is blocked, the evaporation material is cooled to room temperature, the crucible cover is opened, and after the blocked nozzle is dealt with, the evaporation crucible is sealed, and then the evaporation material is heated again to continue the evaporation process. This process is usually time-consuming and seriously affects production efficiency. For this reason, we propose a self-cleaning evaporation crucible to solve the above problem. Utility Model Content

[0006] The utility model provides a self-cleaning evaporation crucible, which solves the problem that in the evaporation process, the organic material evaporated has a fluffy structure and is easily gathered at the nozzle part of the crucible cover, causing the nozzle to be blocked. Therefore, once the nozzle is blocked, the discharge of the evaporation material will be affected, and the production progress and product quality will be affected. When the nozzle is blocked, the material to be evaporated is cooled to room temperature, the crucible cover is opened, the blocked nozzle is processed, and then the evaporation crucible is sealed, and then the material to be evaporated is heated again to continue the evaporation process. However, this process is usually time-consuming and seriously affects the production efficiency. Technical problem.

[0007] To solve the above technical problems, the utility model provides a self-cleaning evaporation crucible, comprising a crucible body, a crucible cover arranged on the crucible body and a nozzle installed on the top surface of the crucible cover, the interior of the crucible body is provided with a cleaning assembly for cleaning the inner wall of the nozzle, the cleaning assembly comprises an inner sleeve fixedly installed on the inner bottom wall of the crucible body, the interior of the inner sleeve is slidably connected with a sliding rod, the top end of the sliding rod is rotatably installed with a cleaning cylinder, the bottom end of the crucible body is connected with a surrounding plate, the surrounding plate is provided with inlet and outlet pipes, one end of the inlet and outlet pipes extends to the outside of the surrounding plate, and the other end of the inlet and outlet pipes is fixedly connected to the bottom end of the inner sleeve.

[0008] Preferably, an outer sleeve is fixedly mounted on the inner bottom wall of the crucible body, the outer sleeve is sleeved on the outside of the cleaning cylinder, and the outer wall of the cleaning cylinder is in contact with the inner wall of the outer sleeve.

[0009] Preferably, a spiral protrusion is integrally formed on the upper portion of the inner wall of the inner sleeve, and a spiral groove is integrally formed on the outer wall of the slide rod, and the spiral groove fits with the spiral protrusion.

[0010] Preferably, a sealing ring is fixedly mounted on the bottom of the crucible body, and the inner ring of the sealing ring abuts against the inner wall of the air inlet and outlet pipes.

[0011] Preferably, the crucible cover is threadedly connected to the top end port of the crucible body, the outer wall of the top end of the crucible body is integrally formed with an external thread, and the inner wall of the crucible cover is integrally formed with an internal thread matching the external thread.

[0012] Preferably, the outer diameter of the cleaning cylinder is the same as the inner diameter of the nozzle, and the cleaning cylinder and the nozzle are located on the same axis.

[0013] Preferably, the outer wall of the cleaning cylinder is integrally formed with a frosted surface, and the cleaning cylinder is made of titanium alloy.

[0014] Compared with the related art, the self-cleaning evaporation crucible provided by the utility model has the following beneficial effects:

[0015] In the utility model, high-pressure gas can be delivered to the interior of the slide bar through the air inlet and outlet pipes, and the slide bar can be pushed upward under the action of the high-pressure gas. During the upward movement of the slide bar, the cleaning cylinder is driven to move upward as a whole. When the cleaning cylinder moves to the interior of the nozzle, the outer wall of the cleaning cylinder and the inner wall of the nozzle are in a state of being in contact, and the inner wall of the nozzle can be cleaned and unblocked by the cleaning cylinder. The process of unblocking the blocked nozzle is time-consuming and the production efficiency is high.

[0016] In the utility model, when the slide rod pushes the cleaning tube to move upward, the spiral groove provided on the outer wall of the slide rod cooperates with the spiral protrusion provided on the inner wall of the inner sleeve to make the cleaning tube rotate during the rising process. The rotation of the cleaning tube can improve the cleaning efficiency of the nozzle. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic diagram of the three-dimensional structure of a self-cleaning evaporation crucible;

[0018] Figure 2 A schematic diagram of the three-dimensional structure of a self-cleaning evaporation crucible;

[0019] Figure 3 A schematic diagram of the cross-sectional structure of a self-cleaning evaporation crucible;

[0020] Figure 4 for Figure 3 A magnified view of the structure at center.

[0021] Numbers in the figure: 1. crucible body; 2. crucible cover; 3. nozzle; 4. enclosure; 5. cleaning cylinder; 6. inner sleeve; 7. sliding rod; 8. outer sleeve; 9. air inlet and outlet pipes; 10. spiral groove; 11. spiral protrusion; 12. sealing ring. DETAILED DESCRIPTION

[0022] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0023] Embodiment 1, by Figure 1-4A self-cleaning evaporation crucible is provided, comprising a crucible body 1, a crucible cover 2 arranged on the crucible body 1 and a nozzle 3 installed on the top surface of the crucible cover 2, a cleaning assembly for cleaning the inner wall of the nozzle 3 is arranged inside the crucible body 1, the cleaning assembly comprises an inner sleeve 6 fixedly mounted on the inner bottom wall of the crucible body 1, a slide rod 7 is slidably connected inside the inner sleeve 6, a cleaning cylinder 5 is rotatably mounted on the top of the slide rod 7, a surrounding plate 4 is connected to the bottom end of the crucible body 1, an air inlet and outlet pipe 9 is installed on the surrounding plate 4, one end of the air inlet and outlet pipe 9 extends to the outside of the surrounding plate 4, and the other end of the air inlet and outlet pipe 9 is fixedly connected to the bottom end of the inner sleeve 6;

[0024] In a specific implementation, when it is necessary to evaporate the coating material on the substrate, the coating material is transported into the crucible body 1. After the feeding is completed, the coating material in the crucible body 1 is heated to vaporize it. The vaporized coating material is guided by the nozzle 3 and evaporated onto the upper substrate. Finally, the evaporation is completed.

[0025] High-pressure gas can be transported to the interior of the slide bar 7 through the air inlet and outlet pipes 9, and the slide bar 7 can be pushed upward under the action of the high-pressure gas. During the upward movement of the slide bar 7, the cleaning cylinder 5 is driven to move upward as a whole. When the cleaning cylinder 5 moves to the interior of the nozzle 3, the outer wall of the cleaning cylinder 5 is in a fit with the inner wall of the nozzle 3, the inner wall of the nozzle 3 can be cleaned and unblocked by the cleaning cylinder 5, and the process of unblocking the blocked nozzle 3 is time-saving and has high production efficiency.

[0026] An outer sleeve 8 is fixedly mounted on the inner bottom wall of the crucible body 1. The outer sleeve 8 is sleeved on the outside of the cleaning cylinder 5. The outer wall of the cleaning cylinder 5 fits with the inner wall of the outer sleeve 8.

[0027] During specific implementation, the outer sleeve 8 plays a good sealing role, preventing the evaporated coating material inside the crucible body 1 from entering the interior of the cleaning cylinder 5 .

[0028] Example 2, refer to Figure 1-4 On the basis of the first embodiment, a spiral protrusion 11 is integrally formed on the upper portion of the inner wall of the inner sleeve 6, and a spiral groove 10 is integrally formed on the outer wall of the slide rod 7, and the spiral groove 10 fits with the spiral protrusion 11;

[0029] In specific implementation, when the slide rod 7 pushes the cleaning tube 5 to move upward, the spiral groove 10 provided on the outer wall of the slide rod 7 cooperates with the spiral protrusion 11 provided on the inner wall of the inner sleeve 6 to enable the cleaning tube 5 to be in a rotating state during the rising process. The rotation of the cleaning tube 5 can improve the cleaning and unblocking efficiency of the nozzle 3.

[0030] In addition, in order to improve the sealing performance of the connection between the air inlet and outlet pipes 9 and the slide rod 7 , a sealing ring 12 is fixedly installed at the bottom of the crucible body 1 , and the inner ring of the sealing ring 12 abuts against the inner wall of the air inlet and outlet pipes 9 .

[0031] In addition, in order to facilitate the installation and disassembly of the crucible cover 2, the crucible cover 2 is threadedly connected to the top port of the crucible body 1, the outer wall of the top of the crucible body 1 is integrally formed with an external thread, and the inner wall of the crucible cover 2 is integrally formed with an internal thread that matches the external thread.

[0032] In addition, in order to ensure that the cleaning cylinder 5 can clean the inner wall of the nozzle 3, the outer diameter of the cleaning cylinder 5 is the same as the inner diameter of the nozzle 3, and the cleaning cylinder 5 and the nozzle 3 are located on the same axis.

[0033] In addition, in order to improve the cleaning efficiency of the cleaning tube 5 on the nozzle 3, the outer wall of the cleaning tube 5 is integrally formed with a frosted surface, and the material of the cleaning tube 5 is titanium alloy.

[0034] Working principle: when it is necessary to evaporate the coating material on the substrate, the coating material is transported into the crucible body 1. After the feeding is completed, the coating material in the crucible body 1 is heated to vaporize it. The vaporized coating material is guided by the nozzle 3 and evaporated onto the upper substrate. Finally, the evaporation is completed, and high-pressure gas can be transported to the inside of the slide bar 7 through the air inlet and outlet pipes 9. Under the action of the high-pressure gas, the slide bar 7 can be pushed to move upward. During the upward movement of the slide bar 7, the cleaning tube 5 is driven to move upward as a whole. When the cleaning tube 5 moves to the inside of the nozzle 3, the outer wall of the cleaning tube 5 is in contact with the inner wall of the nozzle 3. The cleaning tube 5 can be used to clean and dredge the inner wall of the nozzle 3. The process of unclogging the blocked nozzle 3 is short and the production efficiency is high.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A self-cleaning evaporation crucible, comprising a crucible body (1), a crucible cover (2) arranged on the crucible body (1), and a nozzle (3) installed on the top surface of the crucible cover (2), characterized in that: A cleaning assembly for cleaning the inner wall of the nozzle (3) is arranged inside the crucible body (1), and the cleaning assembly comprises an inner sleeve (6) fixedly mounted on the inner bottom wall of the crucible body (1), a slide rod (7) is slidably connected to the inside of the inner sleeve (6), a cleaning cylinder (5) is rotatably mounted on the top of the slide rod (7), the bottom end of the crucible body (1) is connected to a surrounding plate (4), an air inlet and outlet pipe (9) is mounted on the surrounding plate (4), one end of the air inlet and outlet pipe (9) extends to the outside of the surrounding plate (4), and the other end of the air inlet and outlet pipe (9) is fixedly connected to the bottom end of the inner sleeve (6).

2. A self-cleaning evaporation crucible according to claim 1, characterized in that: An outer sleeve (8) is fixedly mounted on the inner bottom wall of the crucible body (1); the outer sleeve (8) is sleeved on the outside of the cleaning cylinder (5); and the outer wall of the cleaning cylinder (5) fits the inner wall of the outer sleeve (8).

3. A self-cleaning evaporation crucible according to claim 1, characterized in that: A spiral protrusion (11) is integrally formed on the upper portion of the inner wall of the inner sleeve (6), and a spiral groove (10) is integrally formed on the outer wall of the slide rod (7), wherein the spiral groove (10) fits with the spiral protrusion (11).

4. The self-cleaning evaporation crucible according to claim 1, characterized in that: A sealing ring (12) is fixedly mounted on the bottom of the crucible body (1), and the inner ring of the sealing ring (12) abuts against the inner wall of the air inlet and outlet pipes (9).

5. The self-cleaning evaporation crucible according to claim 1, characterized in that: The crucible cover (2) is threadedly connected to the top end of the crucible body (1); the outer wall of the top end of the crucible body (1) is integrally formed with an external thread; and the inner wall of the crucible cover (2) is integrally formed with an internal thread matching the external thread.

6. The self-cleaning evaporation crucible according to claim 1, characterized in that: The outer diameter of the cleaning cylinder (5) is the same as the inner diameter of the nozzle (3), and the cleaning cylinder (5) and the nozzle (3) are located on the same axis.

7. The self-cleaning evaporation crucible according to claim 1, characterized in that: The outer wall of the cleaning cylinder (5) is integrally formed with a frosted surface, and the cleaning cylinder (5) is made of titanium alloy.

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