The invention discloses a carrier
wafer system with a high-temperature heat insulation structure, which is characterized by comprising a
wafer main body, a temperature measuring device, a battery, a main
control circuit, a box and a supporting structure, a customized high-temperature heat insulation structure is arranged in the box, the interior of the high-temperature heat insulation structure is divided into a battery independent cavity and a main
control circuit cavity which are mutually independent, the battery is loaded in the battery independent cavity in a sealed mode, and the main
control circuit is loaded in the main control circuit cavity in a sealed mode; the box is fixedly connected to the surface of the
wafer main body through the supporting structure, and the temperature measuring device is arranged on the surface of the wafer main body and is electrically connected with the main control circuit. The device is good in stability, successfully solves the problems of inconvenience in
temperature measurement, influence on a gas flow field, long
cooling time and the like in the prior art, and provides a more efficient and accurate
temperature measurement solution for the field of
semiconductor processing.