Micro-mechanical silicon resonance beam accelerometer

An accelerometer, resonant beam technology, applied in the measurement of acceleration, velocity/acceleration/shock measurement, measurement device, etc., can solve the problems of low sensitivity, poor symmetry, low inertial force-axial stress conversion efficiency, etc. Sensitivity, easy to create effects

Inactive Publication Date: 2008-12-31
INST OF ELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Cantilever beam type, easy to manufacture, using the principle of bending stress amplification, high inertial force-axial stress conversion efficiency, but poor symmetry, cross interference, and it is not easy to implement a differential output structure to suppress external factors such as common mode signals and temperature error
Double tuning fork type, borrowed from the quartz vibrating beam accelerometer, adopts a differential output structure, but the axial stress is amplified by the principle of leverage, the inertial force-axial stress conversion efficiency is low, and the sensitivity is not high

Method used

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  • Micro-mechanical silicon resonance beam accelerometer

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Embodiment Construction

[0018] Such as figure 1 As shown, the micromachined silicon resonant beam accelerometer of the present invention is composed of a silicon mass 1, a support beam 2, an anchor point 3, a Pyrex7740# glass substrate 4, electrode leads 6 and a resonant beam 7. Among them, on the Pyrex7740# glass substrate 4, the four support beam anchor points 3, 3a, 3b, 3c are divided into two groups: one group of support beam anchor points 3, 3a, another group of support beam anchor points 3b, 3c, Take the horizontal X line 8 and the vertical Y line 9 as the standard, and set them symmetrically up, down, left, and right. The four electrode anchors 5, 5a, 5b, 5c and the six electrode leads 6, 6a, 6b, 6c, 6d, 6e are also divided into two groups: one set of electrode anchors 5, 5a, and the other set of electrode anchors 5b , 5c, a group of electrode leads 6, 6a, 6b, and another group of electrode leads 6c, 6d, 6e, each taking the horizontal X line 8 and the vertical Y line 9 as the criterion, arran...

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Abstract

The invention relates to a micro-mechanics silicon resonant vibration accelerometer that is made up of Pyrex7740# glass basal piece, silicon mass block, double resonance girder, four supporting beam, anchor point and electrode leading wire. The invention adopts unique force-stress converting structure and twin beams symmetric structure that could effectively improve the testing sensitivity and interference killing feature of accelerometer.

Description

technical field [0001] The invention relates to a micromachined silicon resonant beam accelerometer, which relates to a resonant accelerometer for measuring acceleration by detecting the change of the mechanical resonant frequency of the beam. Background technique [0002] Silicon microresonant sensor is developed on the basis of micro-electromechanical technology (MEMS) technology. It has the advantages of small size, light weight, low power consumption, high measurement accuracy, good stability, easy mass production, and direct output quasi-digital quantity , easy to communicate with computers and other advantages, has become an important development direction of micro-sensors. The core of a resonant sensor is a resonator (including mechanical structures such as beams, membranes, and rings), which vibrates at its own natural resonant frequency under the control of a positive feedback closed-loop system composed of excitation and vibration pickup units. The physical quanti...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): G01P15/097
Inventor陈德勇陈健王军波
OwnerINST OF ELECTRONICS CHINESE ACAD OF SCI