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Method and apparatus for measuring cofocal combined ultra-long focal distance

A measuring method and technology of measuring device, which are applied in the direction of testing optical performance, etc., can solve the problems such as fixed focus with ultra-long focal length that have not yet been seen, and achieve the effects of reducing the length of the measuring optical path, enhancing the sensitivity of the fixed focus, and high stability

Inactive Publication Date: 2010-07-07
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

So far, there have been no reports on the direct application of this technology to ultra-long focal length fixed focus

Method used

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  • Method and apparatus for measuring cofocal combined ultra-long focal distance
  • Method and apparatus for measuring cofocal combined ultra-long focal distance
  • Method and apparatus for measuring cofocal combined ultra-long focal distance

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Embodiment

[0037] Such as image 3 As shown, a confocal combined ultra-long focal length measurement method, the measurement steps are:

[0038] First, turn on the light source 12, and emit parallel light through the beam splitting system composed of the polarizing beam splitter 13 and the quarter wave plate 14. The reference lens 5 with a focal length of 3000mm is condensed at the focal point a7, and the light is reflected by the mirror 8. , Reflected by the quarter-wave plate 14 and the polarization beam splitter 13 into the confocal fixed-focus system; the condenser 21 in the confocal fixed-focus system condenses the light, and the condensed light passes through the pinhole 20 to illuminate the CCD detector 19; 8 Scan and move along the translation stage a15 in the direction of the optical axis of the reference lens 5. The confocal fixed focus system determines the corresponding focal position a7 of the reference lens by detecting the maximum point of the response signal of the CCD detect...

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Abstract

The invention belongs to the technical field of optical precision measurement, and relates to a method for measuring super long focal length of a confocal combination lens and a device thereof. The method is as follows: firstly determining the focal position of a reference lens and the focal position of the combination of the measured lens and the reference lens according to the confocal focusingprinciple, measuring the distance delta between the two focal points and the distance d0 between the two lenses, and substituting the delta and the d0 into a formula to calculate the focal length value of the measured lens, a pupil filtering technique can also be used in the measurement to enhance the sensitivity of focal length measurement. The invention proposes that accurate focusing is realized by the characteristics that an object corresponds to the microscope objective focus when the confocal point responds to the maximum curve value, and extends the confocal microscopy principle to thesuper long focal length measurement field, and proposes the confocal focusing principle. The method combines the confocal focusing principle with the combination lens method, has the advantages of high measurement precision and strong anti-environment interference ability, and can be used for high-precision focal length measurement during the detection and assembly of the super-long focal length lens.

Description

Technical field [0001] The invention belongs to the technical field of optical precision measurement, and can be used for high-precision focal length measurement in the detection and assembly process of ultra-long focal length lenses. technical background [0002] In recent years, ultra-long focal length lenses have been widely used in the field of large-scale optical systems such as high-energy lasers and astronomical telescopes. The processing, inspection, and assembly of such large-size lenses are very difficult. As an important parameter of ultra-long focal length lens, its focal length measurement has always been a difficult point in the field of optical measurement. The main factors are: small numerical aperture, long focal depth, difficult to achieve precise focus; long focal length, difficult to accurately measure length; long optical path, measurement Prone to environmental interference. Therefore, traditional fixed-focus methods such as magnification method or pentapri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/02
Inventor 赵维谦邱丽荣孙若端沙定国
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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