Cleaning device and coating device for slit nozzle
A slit nozzle and cleaning device technology, which is applied to spray devices, spray devices, and devices for coating liquid on surfaces, etc., can solve the problems of low cleaning operation efficiency, time-consuming, troublesome and troublesome, etc., and achieve particle suppression. produced effect
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[0041] Next, preferred embodiments of the present invention will be described with reference to the drawings.
[0042] figure 1 A structural example of a resist coating device to which the slit nozzle cleaning device of the present invention can be applied is shown.
[0043] This non-spin coating coating device has: utilize the pressure of gas to make the substrate to be processed, such as the glass substrate G for FPD floating in the air, the floating workbench 10, for floating on the workbench 10 along the length direction of the floating workbench ( X direction) the substrate conveying mechanism 20 for conveying the substrate G floating in the air, the slit nozzle 32 for supplying the resist liquid to the upper surface of the substrate G conveyed on the floating table 10, and the slit nozzle 32 for supplying the substrate G in the coating process. The nozzle regeneration part 42 regenerates the slit nozzle 32 between intervals.
[0044] The upper surface of the floating tab...
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