MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof

A technology of pixel unit and light modulator, applied in the directions of optical components, optics, instruments, etc., can solve the problem of reducing the cost of light modulator pixel unit, etc., and achieve the effect of cost reduction

Active Publication Date: 2012-01-18
XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The problem solved by the embodiments of the present invention is to provide a MEMS light modulator pixel unit and its manufacturing method, which solves the problem that the existing light modulator pixel unit generally needs to use monochromatic light emitted by a monochromatic light source as the incident light. Reduced cost of light modulator pixel unit

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  • MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof
  • MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof
  • MEMS (Micro Electro Mechanical System) optical modulator pixel unit and making method thereof

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Embodiment Construction

[0052]The inventors found that because the light modulators in the prior art usually modulate the monochromatic light emitted by the monochromatic light source, this makes the existing light modulators unable to be applied to the white light source. For example, when the existing light modulator is applied to a micro-display system (such as a mobile phone or an e-book), there may be a problem that the display of the display screen is poor or cannot be displayed under sunlight during the day. In order to solve the above problems, the inventor proposes a light modulation pixel unit, which uses the light diffraction principle to modulate white light. The light modulator pixel unit is mainly used in flat panel display systems and micro display systems.

[0053] Specifically, combine figure 1 , figure 1 It is a schematic diagram of a device structure of a pixel unit of a light modulator according to an embodiment of the present invention. The light modulator pixel unit 200 includ...

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Abstract

The embodiment of the invention provides an MEMS (Micro Electro Mechanical System) optical modulator pixel unit and a making method thereof. The optical modulator pixel unit comprises a cavity positioned in an interpoly dielectric layer, a movable electrode positioned in the cavity, a top electrode positioned on the cavity, a bottom electrode positioned below the cavity, and a filter arranged on the top electrode, wherein the optical modulator pixel unit is used for modulating white light by using a light diffraction principle. The embodiment of the invention solves the problem that the traditional optical modulator pixel unit commonly utilizes a single-color light source to send single-color light rays to be used as incident light rays, thus the cost of the optical modulator pixel unit is reduced.

Description

technical field [0001] The invention relates to a light modulator, in particular to a MEMS light modulator pixel unit applied to a flat panel display system and a manufacturing method thereof. Background technique [0002] In a projection system, the key component is the light modulator. Existing light modulators include micro-electromechanical components (Micro-Electro-Mechanical Systems, MEMS). The movement modulates the light incident on the light modulator and outputs light with a certain grayscale. [0003] Generally, a light modulator includes a plurality of pixel units arranged in a matrix. There are two types of pixel units in the existing light modulator: a digital mirror device (DMD) using the principle of light reflection and a digital mirror device (DMD) using the principle of light diffraction. Grating light valve (GLV). Among them, the energy consumption of a single pixel of the digital mirror is large, especially when applied to a high-resolution microdispl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
Inventor 毛剑宏唐德明
Owner XIAN YISHEN OPTOELECTRONICS TECH CO LTD
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