Optical element X, Y and theta Z three-freedom-degree jogging regulation device

An optical element and adjustment device technology, which is applied to optical elements, photo-engraving process exposure devices, optics, etc., to achieve the effect of simplifying the transfer and adjustment links and ensuring the requirements of high-precision surface shape indicators

Inactive Publication Date: 2012-10-03
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
View PDF4 Cites 25 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention is to solve lithography projection objective lens optical element X, Y, θ Z Three-degree-of-freedom high-precision adjustment problem, proposed optica

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Optical element X, Y and theta Z three-freedom-degree jogging regulation device
  • Optical element X, Y and theta Z three-freedom-degree jogging regulation device
  • Optical element X, Y and theta Z three-freedom-degree jogging regulation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] Embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0015] Such as figure 1 Shown, optical elements X, Y, θ Z The three-degree-of-freedom micro-adjustment device includes a mirror frame 2 , three drivers 3 and two capacitive sensors 4 . The optical element 1 and the mirror frame 2 are connected by glue, and the three drivers 3 and the two capacitive sensors 4 are respectively fixed on the mirror frame 2 .

[0016] Such as figure 2 As shown, the picture frame 2 is an integrated structure composed of a picture frame inner ring 2-1, a picture frame outer ring 2-2 and three moving branch chains 2-3, which can be processed by slow wire cutting or electrochemical corrosion.

[0017] Such as image 3 As shown, each of the kinematic branch chains 2-3 is composed of three flexible hinges 2-3-1, the first connecting rod 2-3-2 and the second connecting rod 2-3-3. The outer side of the chain 2-3 is connected with the o...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses an optical element X, Y and theta Z three-freedom-degree jogging regulation device belonging to the field of structural design and aberration compensation of a photoetching object lens. In order to solve the problem of X, Y and theta Z three-freedom-degree high precision regulation of an optical element, the invention provides an optical element flexible jogging regulation device based on a 3-RRR plane mechanism. The optical element X, Y and theta Z three-freedom-degree jogging regulation device comprises an optical frame, three drivers and two capacitor sensors, wherein the three drivers and the two capacitor sensors are respectively fixed on the optical frame, the optical frame is of an integrated structure and comprises an optical frame inner ring, an optical frame outer ring and three movement branch chains, each movement branch chair comprises three flexible hinges, a connecting rod and a second connecting rod, the outer side of each movement branch chain is connected with the optical frame outer ring, the inner side of each movement branch chain is connected with the optical frame inner ring, and the three movement branch chains are respectively uniformly arranged at intervals of 120 DEG along the circumferential direction. The optical element X, Y and theta Z three-freedom-degree jogging regulation device is suitable for the jogging regulation of the optical lens in a deep ultraviolet projection objective.

Description

technical field [0001] Optical elements X, Y, θ Z A three-degree-of-freedom micro-adjustment device belongs to the field of structure design and aberration compensation of photolithography objective lenses, and is especially suitable for micro-adjustment of optical lenses in deep ultraviolet projection objectives. Background technique [0002] Projection lithography equipment is the key equipment in the manufacturing process of large-scale integrated circuits. In recent years, with the continuous improvement of the fineness of the line width of integrated circuits, the resolution of projection optical equipment has gradually improved. At present, the ArF excimer laser with a wavelength of 193.368nm Lithography equipment has become the mainstream equipment for integrated circuit manufacturing at 90nm, 65nm and 45nm nodes. [0003] During the installation, adjustment and use of the projection lithography objective lens, in order to meet the good optical performance of the obj...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G02B7/00G03F7/20
Inventor 赵磊巩岩彭海峰于新峰
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap