Gas concentration quasi-static regulation device based on mass spectrum feedback and regulation method

A technology of gas concentration and adjustment equipment, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems that the gas concentration cannot be accurately adjusted at the right position, and there is no feedback mechanism, so as to improve stability, sensitivity, The effect of expanding the concentration range

Active Publication Date: 2015-12-23
KUSN HEXIN MASS PECTRUM TECH +2
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[0004] The object of the present invention is to provide a gas concentration quasi-static adjustment device based on mass spectrometry feedback and an adjustment method for the adjustment device, w

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  • Gas concentration quasi-static regulation device based on mass spectrum feedback and regulation method

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[0037] In order to make the object, technical scheme and advantages of the present invention clearer, the following combination Attached picture And embodiment, the present invention is described in further detail. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0038] see figure 1 , the gas concentration quasi-static adjustment device based on mass spectrometry feedback provided by an embodiment of the present invention includes a gas distribution device, a mass spectrometer 15 connected to the gas distribution device, and an embedded control system. The mass spectrometer 15 uses the embedded control system to perform mass spectrometry measurement on the gas in the gas distribution device.

[0039] The gas distribution instrument includes cylinder 18, piston 16, valve 1 7, valve 2 8, valve 3 9, buffer tank 1 4, buffer tank 2 5, buffer tank 3 6, motor 19, fixed fram...

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Abstract

The present invention discloses a gas concentration quasi-static regulation device based on mass spectrum feedback and a regulation method. The device comprises a gas distribution apparatus, a mass spectrometer in communication with the gas distribution apparatus, and an embedded control system. The mass spectrometer uses the embedded control system to conduct mass spectrometry measurements on the gas within the gas distribution apparatus. The gas distribution apparatus includes a cylinder, a piston fitted in the cylinder, and a motor for driving displacement of the piston; and the piston and the bottom of the cylinder form a main cavity communicating with the mass spectrometer; the main cavity inputs test gas through a valve 1, and inputs a test gas through a valve 2. The embedded control system and electrical mechanical are in electrical connection; and according to the measurement results of the mass spectrometer, the motor adjusts the shift amount of the piston. The present invention also discloses a regulation method of the gas concentration quasi-static regulation device based on mass spectrum feedback.

Description

technical field [0001] The invention relates to a quasi-static gas concentration adjustment device and an adjustment method for the quasi-static gas concentration adjustment device, in particular to a gas concentration quasi-static adjustment device based on mass spectrum feedback and an adjustment method for the adjustment device. Background technique [0002] The dynamic range of the concentration measurement of different substances in the gas is one of the important performances of mass spectrometers. Due to the limitation of the dynamic range of mass spectrometry, it is difficult for most mass spectrometers to simultaneously measure ultra-trace substances, trace substances and trace substances. [0003] A common practice is to use a gas distribution instrument for trace and micro substances, one is the sample to be tested, the other is the mixed gas, and then mixed in different proportions to make the concentration of the gas enter the measurable range. However, due to ...

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Application Information

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IPC IPC(8): G01N30/72
Inventor 朱辉程平董俊国周振黄正旭高伟傅忠
Owner KUSN HEXIN MASS PECTRUM TECH
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