Two-step phase extraction method and system based on inclined phase shift error correction and medium

A phase shifting error and phase extraction technology, which is applied in the direction of instruments, using optical devices to transmit sensing components, measuring devices, etc., can solve the problems of inapplicable modulation amplitude disturbance and random tilt phase shifting errors, and achieve fast phase extraction speed, high precision effect

Active Publication Date: 2018-06-22
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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Problems solved by technology

However, the optical flow method and the nonlinear error minimization method cannot be applied to the interferogram with modulation amplitude disturbance and random tilt phase shift error

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  • Two-step phase extraction method and system based on inclined phase shift error correction and medium
  • Two-step phase extraction method and system based on inclined phase shift error correction and medium
  • Two-step phase extraction method and system based on inclined phase shift error correction and medium

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Embodiment Construction

[0063] It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0064] Specifically, such as figure 1 As shown, the present invention provides a two-step phase extraction method based on tilt phase shift error correction, including:

[0065] Step S1, collecting two random interferograms;

[0066] Step S2, removing the background light intensity of the two random interferograms by high-pass filtering;

[0067] Step S3, performing normalization processing on the filtered two random interferograms to remove modulation amplitude disturbances of the two random interferograms;

[0068] Step S4, for the two random interferograms after the normalization process, solve the random tilt phase shift error parameter between the two random interferograms by minimizing the nonlinear error;

[0069] Step S5, extracting the phase based on the random tilt phase shift error parameter between the ...

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Abstract

The invention provides a two-step phase extraction method and a system based on inclined phase shift error correction and a storage medium. The method comprises the following steps of collecting two random interference diagrams; through high pass filtering, removing the background light intensity of the two random interference diagrams; carrying out normalization processing on the two filtered random interference diagrams and removing the modulation amplitude disturbances of the two random interference diagrams; for the two random interference diagrams after the normalization processing, through a nonlinear error minimization, solving a random inclination phase shift error parameter between the two random interference diagrams; and based on the random inclination phase shift error parameter between the two random interference diagrams, extracting a phase. In the invention, during a phase shift interference measurement phase extraction process, influences of a random inclination phase shift error caused by external environment vibration, the background light intensity caused by air disturbance and an unstable light source, the modulation amplitude disturbance and the like are overcome. Besides, by using the method of the invention, the two interference diagrams only need to be collected, a phase extraction speed is fast and precision is high.

Description

technical field [0001] The present invention relates to the technical field of phase shifting interferometry, in particular to a two-step phase extraction method, system and medium based on tilt phase shift error correction. Background technique [0002] With the continuous improvement of people's requirements for optical measurement accuracy, phase-shifting interferometry has been developed rapidly. As the first step in phase-shifting interferometry, phase extraction plays a vital role in the measurement accuracy of the system. [0003] In order to improve the accuracy of the phase-shifting interferometry system, scholars at home and abroad have done a lot of research work, which is generally divided into two research parts: one is the research on the principles of different phase-shifting interferometry systems, and the measurement is improved by optimizing the original measurement experimental device. Accuracy and stability, or design a new type of phase shifting interfer...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/26
CPCG01D5/266
Inventor 姚勇雷何兵田一婷王蕊杨彦甫
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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