Conjoined two-dimensional rotating sample driver
A drive and one-piece technology, applied in the direction of instruments, analytical materials, etc., can solve the problem of single drive function, etc., achieve the effect of compact components, improved control accuracy, and precise function relationship
Pending Publication Date: 2018-09-21
大连齐维科技发展有限公司
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Problems solved by technology
[0005] The purpose of the present invention is to solve the technical problem of single drive
Method used
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[0024] Such as Figure 1-Figure 2 The one-piece two-dimensional rotating sample driver shown includes a circumferential rotation mechanism and an axial movement mechanism, and the above two mechanisms are connected to each other;
[0025] In the circumferential rotation mechanism, the rotating dial 11 is connected with the rotating housing 6, the rotating dial 11 is connected with the fixed ring 4, the fixed ring 4 is connected with the locking jackscrew 5, and the tightening and locking jackscrew 5 can prevent the driver from rotating, The fixed ring 4 is connected to the housing bearing seat 10, the housing bearing seat 10 is connected to the locking ring 9, the housing bearing seat 10 is connected to the support cylinder 18, the support cylinder 18 is connected to the collimation cylinder 2, and the support cylinder 18 is connected to the vacuum flange 3, The rotating housing 6 is connected with the rear cover 13, the rear cover 13 is connected with the rear guide seat 12, ...
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A conjoined two-dimensional rotating sample driver belongs to the multi-dimensional driving field of an ultra-high vacuum device. The conjoined two-dimensional rotating sample driver comprises a circumferential rotating mechanism and an axial moving mechanism connected to each other; a rotating dial plate is connected with a rotating shell and a fixed ring, the fixed ring is connected with a bearing seat of a shell, the bearing seat of the shell is connected with a support barrel, the support barrel is connected with a collimating barrel and a vacuum flange, and a back end guide seat is rotated to drive a middle mandrel to rotate; a linear handle is connected with a linear screw rod, the linear screw rod is connected with a linear shell and a driving shaft, the driving shaft is connected with a steel ball, the steel ball is rolled in a rotating core shaft, the core shaft is connected with an extension shaft, the extension shaft is connected with a guide positioning shaft, and the steelball is connected with a linear push rod. The conjoined two-dimensional rotating sample driver adopts a flexible connection such as a steel ball, a corrugated pipe, and uses a spring to eliminate thereverse gap, thereby achieving axial driving and rotational driving of a driven member, high driving precision, and no magnet inside,and can be used for a strong magnetic environment or a non-magnetic environment, and the controllability is good.
Description
technical field [0001] The invention belongs to the field of multi-dimensional driving of ultra-high vacuum equipment, in particular to a one-piece two-dimensional rotating sample driver. Background technique [0002] Ultra-high vacuum technology is already an indispensable technology in the fields of surface science, semiconductor applications, high-energy particle accelerators, nuclear fusion research devices and space development. The application of ultra-high vacuum technology needs to be carried out in an ultra-high vacuum system. [0003] The ultra-high vacuum system is mainly composed of a vacuum chamber, a vacuum pump, a vacuum gauge, a vacuum valve, various motion introducers, connecting conduits and an electrical control system. The use of various ultra-high vacuum motion drivers realizes the manipulation of the samples in the vacuum environment, and at the same time makes the samples and the mirrors or photosensitive diodes installed in the front of the sample ho...
Claims
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Login to View More IPC IPC(8): G01N35/10
CPCG01N35/109
Inventor 郭方准
Owner 大连齐维科技发展有限公司