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Device and method for detecting abnormality of tray cover opening and closing mechanism

A technology of switch mechanism and tray cover, which is applied in the direction of electrical components, circuits, semiconductor/solid-state device manufacturing, etc., and can solve problems such as unqualified, scratched semiconductor devices, damaged products, etc.

Active Publication Date: 2020-03-03
INTEL PROD CHENGDU CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because semiconductor devices are very fragile, minor vibrations and impacts may cause scratches or damage to semiconductor devices and result in unqualified products

Method used

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  • Device and method for detecting abnormality of tray cover opening and closing mechanism
  • Device and method for detecting abnormality of tray cover opening and closing mechanism
  • Device and method for detecting abnormality of tray cover opening and closing mechanism

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0060] figure 2 A structural block diagram of a device 20 for detecting an abnormality of a tray lid opening and closing mechanism (hereinafter simply referred to as a detection device) according to an embodiment of the present disclosure is shown.

[0061] Such as figure 2 As shown, the detection device 20 includes a tray lid dummy 201 . In one embodiment, in order to make the simulated scene closer to the real scene, the pallet cover simulant 201 may be set to have the same length and width as the pallet cover 121 . In one embodiment, tray lid dummy 201 is formed to be heavier than tray lid 121 . In one embodiment, the simulation can be achieved by designing a tray lid dummy 201 of a specific thickness.

[0062] Such as figure 2 As shown, the detection device 20 also includes one or more adsorption performance sensors 203 attached to the tray cover simulant 201, for sensing the adsorption performance of each vacuum adsorption member 101 when the tray cover simulant 20...

no. 2 example

[0081] Figure 5 A structural block diagram of a detection device 20 for detecting an abnormality of a tray cover opening and closing mechanism according to an embodiment of the present disclosure is shown.

[0082] In this embodiment, one or more adsorption performance sensors 203 are movable, and the number and positions of the adsorption performance sensors 203 can be adjusted based on the number and positions of the vacuum adsorption members 101 in the tray lid opening and closing mechanism 10 . In production lines with different configurations and specifications, the number and positions of the vacuum suction components in the tray cover opening and closing mechanism 10 are different. In this case, the number and position of the adsorption performance sensors can be adjusted accordingly based on the number and positions of the vacuum adsorption members 101 in the tray lid opening and closing mechanism 10 by utilizing the movability of one or more adsorption performance se...

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Abstract

The invention provides a device and method for detecting abnormalities of a switching mechanism of a pallet cover, wherein that tray cover switch mechanism includes one or more vacuum suction membersfor sucking up a tray cover, the device comprises a tray cover mimic; One or more adsorption performance sensors attached to the tray cover mimic for sensing adsorption performance of respective vacuum adsorption members when the tray cover mimic is adsorbed so as to determine whether the tray cover switching mechanism is abnormal.

Description

technical field [0001] The present disclosure generally relates to the field of semiconductor device manufacturing, and more particularly, to an apparatus and method for detecting an abnormality of a tray cover opening and closing mechanism. Background technique [0002] In the field of semiconductor device manufacturing, the process of producing, manufacturing and packaging semiconductor devices is carried out on a large-scale assembly line. A JEDEC standard tray is widely used in the semiconductor industry. The standard tray usually consists of a tray base and a tray lid, wherein the tray base has a space for accommodating semiconductor devices. In operation, semiconductor devices are housed in the tray bottom and covered with a tray cover. Usually, during the semiconductor device assembly process, a tray cover switch mechanism is needed to open the tray cover, place the semiconductor device in the accommodation space at the bottom of the tray, and then put the tray cover...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67242
Inventor 陈星宇华雨
Owner INTEL PROD CHENGDU CO LTD
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