Symmetrical piezoelectric-driven two-dimensional directional adjusting mechanism and rotating platform angle adjusting method

Abstract

A symmetrical piezoelectric-driven two-dimensional directional adjusting mechanism and a rotating platform angle adjusting method are provided. The invention relates to a piezoelectric driving deviceand an adjusting method. The symmetrical piezoelectric-driven two-dimensional directional adjusting mechanism comprises a rotating platform, a base, universal flexure hinges and four displacement amplifying units. Each displacement amplifying unit is mainly composed of a triangular amplifying structure and a piezoelectric ceramic actuator. The universal flexure hinges and the triangular amplifyingstructures are arranged between the rotating platform and the base. The rotating platform angle adjusting method comprises the following steps: gasless connection is carried out on the symmetrical piezoelectric-driven two-dimensional directional adjusting mechanism, and after installation, the initial height displacement deviation of the two symmetrical universal flexure hinges of the rotating platform is measured by using a laser displacement sensor; and then, the angle of the rotating platform is adjusted, and when the work is finished, the piezoelectric ceramic actuators are powered off and restored to the initial state. The symmetrical piezoelectric-driven two-dimensional directional adjusting mechanism and the rotating platform angle adjusting method are applied to the field of precision directional positioning and laser communication in a space environment.

Description

technical field [0001] The invention relates to a piezoelectric drive device and an adjustment method, in particular to a symmetrical structure piezoelectric drive two-dimensional pointing adjustment mechanism and a rotation platform angle adjustment method. It belongs to the field of piezoelectric precision drive. Background technique [0002] With the continuous development of science and technology, there is an urgent need for ultra-precise pointing and positioning mechanisms in the fields of optics, semiconductors, and machining industries, especially for high-precision pointing and positioning mechanisms used in space environments. distance etc. play an important role. [0003] After years of development, pointing adjustment mechanisms mainly include pointing adjustment mechanisms driven by traditional motors and pointing adjustment mechanisms driven by piezoelectric effects. The pointing adjustment mechanism driven by the traditional motor is large in size, complex i...

AI Technical Summary

Problems solved by technology

Limited by the small displacement output of piezoelectric ceramic materials, its adjustment range is limited, and the control is complicated and integration is difficult

[0005] The Chinese invention patent with patent number 201710583870.X proposes a large deflection angle piezoelectric two-dimensional pointing mechanism with decoupling function and its driving method. The invention patent relates to a piezoelectric two-dimensional pointing mechanism with lever amplification. The structure size is small and the control is simple, but it adopts one-stage lever amplification, and the size is small, and the displacement magnification is limited, so that the range of rotation angle is limited; there is friction between the piezoelectric ceramic and the arc cap, and it is reliable in harsh environments. Low sex

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