A bistable mems security device with inertial delay function
A bistable and functional technology, applied in the direction of microstructure devices, optical waveguide coupling, TV system components, etc., can solve the problem of limited inertial force, lack of redundant design, MEMS security devices are difficult to meet design requirements, etc. problem, to achieve the effect of improving the effect and safety
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[0028] The present invention will be further described below in conjunction with the embodiments and accompanying drawings.
[0029] refer to figure 1 , a bistable MEMS security device with inertial delay function, the overall structure is a stacked layer, from top to bottom are the cover layer 100, the isolation layer 200 and the detonation layer 300, and the adjacent layers are bonded by gold-gold The connection is realized; the isolation layer 200 is connected to the Y-shaped optical fiber 400 by bonding, the isolation layer 200 and the Y-shaped optical fiber 400 are located on the same plane, and the Y-shaped optical fiber 400 is used to monitor the internal state of the isolation layer 200 .
[0030] refer to figure 2 , the cover layer 100 includes a cover substrate 101, a detonation hole 102 is provided near the center of the cover substrate 101, a control electrode window 104 and a detonation electrode window 103 are provided on the long side of the cover substrate 10...
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