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Cleaning device

A technology for cleaning devices and cleaning components, which is applied in the directions of removing smoke and dust, cleaning methods and utensils, cleaning methods using tools, etc., to achieve the effects of saving manpower and material resources, ensuring cleanliness, and ensuring cleanliness

Pending Publication Date: 2020-06-30
上海祖强能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The invention provides a cleaning device, which aims to improve the problem that PVD vacuum sputtering coating equipment can only clean the cavity when debris appears in the sputtering chamber

Method used

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  • Cleaning device
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Examples

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Embodiment 1

[0029] Example 1, please refer to Figure 1-Figure 2 As shown, this embodiment provides a cleaning device, which is arranged inside the vacuum sputtering coating equipment, and includes: a carrier 1 and a cleaning assembly 2, the carrier 1 can move in the vacuum sputtering coating device, and the carrier 1 is provided with The first slideway 11, the first slideway 11 is provided with the second slideway 12, the second slideway 12 can reciprocate along the first slideway 11, the cleaning assembly 2 is arranged on the second slideway 12, the cleaning assembly 2 It can reciprocate along the second slideway 12, the first slideway 11 is perpendicular to the second slideway 12, and the cleaning assembly 2 is used to clean the inside of the vacuum sputtering coating equipment.

[0030]The cleaning device provided in this embodiment is arranged inside the vacuum sputtering coating equipment and can move within the vacuum sputtering coating equipment. Specifically, the sputtering cham...

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PUM

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Abstract

The invention provides a cleaning device, and relates to the field of industrial equipment. The cleaning device comprises a bearing frame and a cleaning assembly, wherein the bearing frame can move invacuum sputtering coating equipment, a first slideway is arranged on the bearing frame, a second slideway is arranged on the first slideway, the second slideway can reciprocate along the first slideway, the cleaning assembly is arranged on the second slideway, the cleaning assembly can reciprocate along the second slideway, the first slideway is perpendicular to the second slideway, and the cleaning assembly is used for cleaning the interior of the vacuum sputtering coating equipment. The cleaning device enters and exits a sputtering chamber through an inlet and an outlet of the sputtering chamber, and cleans the sputtering chamber after entering the sputtering chamber, chamber opening cleaning of the sputtering chamber is avoided, the cleanness of the sputtering chamber can be guaranteed, pollution to target materials and the like caused by chamber opening is avoided, and manpower and material resources are greatly saved.

Description

technical field [0001] The invention relates to the field of industrial equipment, in particular to a cleaning device. Background technique [0002] As one of the most advanced and promising thin-film power generation technologies at present, the industrialization of CIGS solar cells has begun to be promoted in China and has received strong support from the government. It is light and thin, and can be made of glass, steel, plastic and other materials, and can be made into rigid or flexible solar modules, which can be widely used in construction, vehicles, outdoor sports, tourism, etc. [0003] PVD vacuum sputtering coating equipment is the basic equipment in industrial production. It has the advantages of fast deposition speed, good uniformity of film thickness, and large-scale continuous operation. PVD technology is widely used in CIGS production process. PVD vacuum sputtering coating equipment has relatively high requirements for the cleanliness of the sputtering chamber...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34B08B1/00B08B15/04
CPCC23C14/34B08B15/04B08B1/12
Inventor 马坤
Owner 上海祖强能源有限公司