A kind of measurement device and measurement method based on spectral confocal fast focusing
A measurement device and spectral confocal technology, which is applied in installation, optics, optical components, etc., can solve the problems of high price and unfavorable market promotion of active focusing systems, and achieve the effect of simple structure and low cost
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no. 1 example
[0044] In one embodiment, see figure 1 and figure 2 , the lens 12 adopts a zoom lens, the details are as follows.
[0045] The image measurement optical system 1 adopts a variable magnification image measurement system, and its lens 12 includes a variable magnification lens front fixed group 121, a variable magnification lens variable power group 122, a variable magnification lens compensation group 123 and a variable magnification rear fixed group 124. The confocal displacement sensing module 2 also includes an optical switch 24 and a front fixing group 121 of the variable magnification lens coaxially shared with the image measuring optical system 1; The invisible light total reflection-visible light transflective mirror 3 is arranged obliquely at 45°, and the horizontal exit optical path of the rear mirror group 23 of the dispersive lens is facing the invisible light total reflection-visible light transflective half mirror The mirror 3 is arranged, so that the image measu...
no. 2 example
[0051] Different from the first embodiment, the image measuring optical system 1 adopts a fixed magnification image measuring system, see image 3 , the lens 12 includes a fixed magnification lens front fixed group 125 .
[0052] The invisible light total reflection-visible light half mirror 3 includes a first invisible light total reflection-visible light half mirror 31 located at a 45° oblique position above the fixed magnification lens front fixed group 125, and a first invisible light total reflection-visible light half mirror 31 located in the The confocal displacement sensing module 2 is a second invisible light total reflection-visible light semi-transparent mirror 32 arranged parallel to the first invisible light total reflection-visible light half-transmission mirror 31 on the same plane.
[0053] The dispersive lens rear mirror group 23 of the dispersive confocal displacement sensing module 2 is arranged vertically downward and facing the second invisible light total...
no. 3 example
[0057] The measuring device also includes a coaxial illumination module 4, see image 3 and Figure 4 , the horizontal outgoing light path of the coaxial lighting module 4 is set up against the second invisible light total reflection-visible light transflective mirror 32, and the visible illumination light path passes through the second invisible light total reflection-visible light transflective mirror The mirror 32 is semi-transparent and the first invisible light total reflection-visible light semi-transparent mirror 31 is reflected and then incident on the measured object 100 downward to provide visible light illumination for the image measuring optical system 1 with a fixed magnification.
[0058] The light emitted by the coaxial lighting module 4 passes through the second half of the invisible light total reflection-visible light half mirror 32, and then enters the first invisible light total reflection-visible light half mirror 31. The light is reflected and deflected ...
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