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A kind of measurement device and measurement method based on spectral confocal fast focusing

A measurement device and spectral confocal technology, which is applied in installation, optics, optical components, etc., can solve the problems of high price and unfavorable market promotion of active focusing systems, and achieve the effect of simple structure and low cost

Active Publication Date: 2022-07-15
TZTEK TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current active focus system is expensive, which is not conducive to market promotion

Method used

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  • A kind of measurement device and measurement method based on spectral confocal fast focusing
  • A kind of measurement device and measurement method based on spectral confocal fast focusing
  • A kind of measurement device and measurement method based on spectral confocal fast focusing

Examples

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no. 1 example

[0044] In one embodiment, see figure 1 and figure 2 , the lens 12 adopts a zoom lens, the details are as follows.

[0045] The image measurement optical system 1 adopts a variable magnification image measurement system, and its lens 12 includes a variable magnification lens front fixed group 121, a variable magnification lens variable power group 122, a variable magnification lens compensation group 123 and a variable magnification rear fixed group 124. The confocal displacement sensing module 2 also includes an optical switch 24 and a front fixing group 121 of the variable magnification lens coaxially shared with the image measuring optical system 1; The invisible light total reflection-visible light transflective mirror 3 is arranged obliquely at 45°, and the horizontal exit optical path of the rear mirror group 23 of the dispersive lens is facing the invisible light total reflection-visible light transflective half mirror The mirror 3 is arranged, so that the image measu...

no. 2 example

[0051] Different from the first embodiment, the image measuring optical system 1 adopts a fixed magnification image measuring system, see image 3 , the lens 12 includes a fixed magnification lens front fixed group 125 .

[0052] The invisible light total reflection-visible light half mirror 3 includes a first invisible light total reflection-visible light half mirror 31 located at a 45° oblique position above the fixed magnification lens front fixed group 125, and a first invisible light total reflection-visible light half mirror 31 located in the The confocal displacement sensing module 2 is a second invisible light total reflection-visible light semi-transparent mirror 32 arranged parallel to the first invisible light total reflection-visible light half-transmission mirror 31 on the same plane.

[0053] The dispersive lens rear mirror group 23 of the dispersive confocal displacement sensing module 2 is arranged vertically downward and facing the second invisible light total...

no. 3 example

[0057] The measuring device also includes a coaxial illumination module 4, see image 3 and Figure 4 , the horizontal outgoing light path of the coaxial lighting module 4 is set up against the second invisible light total reflection-visible light transflective mirror 32, and the visible illumination light path passes through the second invisible light total reflection-visible light transflective mirror The mirror 32 is semi-transparent and the first invisible light total reflection-visible light semi-transparent mirror 31 is reflected and then incident on the measured object 100 downward to provide visible light illumination for the image measuring optical system 1 with a fixed magnification.

[0058] The light emitted by the coaxial lighting module 4 passes through the second half of the invisible light total reflection-visible light half mirror 32, and then enters the first invisible light total reflection-visible light half mirror 31. The light is reflected and deflected ...

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Abstract

The invention provides a measurement device and a measurement method based on spectral confocal fast focusing, belonging to the technical field of optical image measurement. The measurement device comprises an image measurement optical system, a dispersion confocal displacement sensing module and a controller. The optical path of the system and the optical path of the dispersive confocal displacement sensing module are fused and coaxial at the exit end, and the focal plane of the image measurement optical system is coplanar with the range center of the dispersive confocal displacement sensing module; wherein, the dispersive confocal The displacement sensing module emits polychromatic light including visible light and invisible light, which are respectively used for focusing point indication and measuring the distance between the upper surface of the measured object and the image measuring optical system. This solution has the function of focusing point indication. In the camera image of the image measurement system, the visible indicator light spot can be quickly focused and positioned to the clear surface of the image. The dispersive confocal works in the invisible light band, which does not affect the imaging quality and accuracy of image measurement. The overall structure is simple , low cost, easy to popularize and apply.

Description

technical field [0001] The invention belongs to the technical field of optical image measurement, in particular to high-precision and rapid measurement of image equipment, and particularly relates to a measurement device and measurement method based on spectral confocal rapid focusing. Background technique [0002] Image measuring instrument is a device that uses machine vision technology to measure the size and geometric tolerance of the measured object. It is widely used in precision manufacturing such as machinery, electronics, sensors, molds, threads, and mobile phones. [0003] With the development of science and technology, the measurement accuracy and speed of imagers have become the core competitiveness, and focusing speed is one of the key factors. The depth of field of the image measurement system is usually small. When the height of the measured object changes or the surface of the measured object is uneven and there is a height difference, in order to obtain a cl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B7/36
CPCG02B7/36
Inventor 王志伟李祥朱小琴袁春辉曹葵康周明
Owner TZTEK TECH