Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation

Abstract

The invention relates to a linear motion reference device of a laser transmission and reflection combined monitoring compensation type cylindricity instrument, which belongs to the technical field of surface shape measurement and is especially suitable for an ultra-precision cylindricity measurement device. The present invention integrates laser transmission and reflection combined monitoring and compensation technology, main and auxiliary double guide rail straight travel technology and isolated anti-interference drive technology, takes laser beam as physical reference, and calculates the measurement results of cylindricity measuring device according to the motion error of guide rail linear motion reference motion error The law of action provides an ultra-precision cylindricity linear motion reference device based on laser transmission and reverse combined monitoring and compensation main and auxiliary double guide rail structure, which overcomes the shortcomings of the linear motion reference technology of existing cylindricity measurement devices.

Description

technical field [0001] The invention relates to a linear motion reference device of a laser transmission and reflection combined monitoring compensation type cylindricity instrument, which belongs to the technical field of surface shape measurement and is especially suitable for an ultra-precision cylindricity measurement device. Background technique [0002] The continuous development of modern industry, especially the cutting-edge industrial technology of national defense, puts forward higher and higher requirements for the measurement of the surface profile of the rotary workpiece. For example, in the process of ultra-precision machining and measurement, the roundness tolerance of the aerostatic spindle, which is usually used as ultra-precision equipment such as ultra-precision machine tools, lithography machine turntables, laser direct writing equipment and ultra-precision test turntables, has reached 0.05 after grinding. μm, the tolerance of cylindricity and coaxiality ...

AI Technical Summary

Problems solved by technology

There are two reasons for this: First, the absolute accuracy level of the linear motion benchmark is an order of magnitude lower than that of the rotary motion benchmark. If the contribution of the error separation technology to the rotary motion accuracy is considered, the linear motion benchmark accuracy level is about two orders of magnitude lower ; Second, the error of the linear motion benchmark is not periodically reproducible, and it is difficult to reduce the linear motion error by a large margin with the help of error separation technology

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