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Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation

A technology of linear motion and reference device, which is applied in the field of linear motion reference device of anti-combination monitoring compensation type cylindricity instrument, ultra-precision cylindricity measurement device, and laser transmission field, which can solve the problem that the linear motion reference error does not have periodic reproducibility and reduce Linear motion error, difficulty, etc.

Inactive Publication Date: 2005-02-23
HARBIN INST OF TECH
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Problems solved by technology

There are two reasons for this: First, the absolute accuracy level of the linear motion benchmark is an order of magnitude lower than that of the rotary motion benchmark. If the contribution of the error separation technology to the rotary motion accuracy is considered, the linear motion benchmark accuracy level is about two orders of magnitude lower ; Second, the error of the linear motion benchmark is not periodically reproducible, and it is difficult to reduce the linear motion error by a large margin with the help of error separation technology

Method used

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  • Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation
  • Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation
  • Linear movement reference device of cylindricity instrument with laser penetrance and reflection monitoring compensation

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Embodiment Construction

[0020] The structure and working principle of the linear motion reference device of the compensation type cylindricity meter based on the combination of laser transmission and reflection monitoring of the present invention will be described in detail below in conjunction with the accompanying drawings:

[0021] The device of the present invention includes a main and auxiliary double guide rail straight-track system, a laser transflective monitoring system for guide rail movement errors, an isolated anti-interference drive and height measuring system.

[0022] Such as figure 2 As shown, the main and auxiliary double guide rail straight system includes the main guide rail column 16 and the auxiliary guide rail column 17 perpendicular to the device seat 23, the main guide rail cover 19 is arranged on the main guide rail column 16, the auxiliary guide rail cover 18 is arranged on the auxiliary guide rail column 17, and the flexible connection Belt 15 makes main guide rail column ...

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Abstract

A superprecise linear cylindricity standard apparatus of major-minor dual track structure in monitoring and compensating type based on laser transparent and reflecting combination is disclosed by the present invention according to action rule of reference motion error of track linear motion to measured result of cylindricity measuring device with utilizing laser beam as physical reference.

Description

technical field [0001] The invention relates to a linear motion reference device of a laser transmission and reflection combined monitoring compensation type cylindricity instrument, which belongs to the technical field of surface shape measurement and is especially suitable for an ultra-precision cylindricity measurement device. Background technique [0002] The continuous development of modern industry, especially the cutting-edge industrial technology of national defense, puts forward higher and higher requirements for the measurement of the surface profile of the rotary workpiece. For example, in the process of ultra-precision machining and measurement, the roundness tolerance of the aerostatic spindle, which is usually used as ultra-precision equipment such as ultra-precision machine tools, lithography machine turntables, laser direct writing equipment and ultra-precision test turntables, has reached 0.05 after grinding. μm, the tolerance of cylindricity and coaxiality ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 谭久彬赵维谦邹丽敏崔继文赵熙萍
Owner HARBIN INST OF TECH
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