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Storing cabinet of storage box for chip frames

A storage box and storage cabinet technology, applied in the field of storage cabinets, can solve the problems of product management problems and unsatisfactory operation methods.

Inactive Publication Date: 2006-07-05
POWER GEODE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But because there is no device for storing a large number of wafer frame storage boxes 10 at present, it causes great troubles in product management, and when a certain wafer frame storage box 10 is to be taken out again, it is necessary to check each one one by one. The wafer frame storage box is also a very troublesome thing, so this kind of operation method is really not ideal

Method used

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  • Storing cabinet of storage box for chip frames
  • Storing cabinet of storage box for chip frames
  • Storing cabinet of storage box for chip frames

Examples

Experimental program
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Embodiment Construction

[0037] see figure 2 , showing a storage cabinet 20 of a wafer frame storage box, which is used to store a wafer frame storage box 21, which includes a storage cabinet body 22, a first module 23, which is installed in the storage cabinet body 22, It is used to store the wafer frame storage box 20 , and a control cabinet 24 is installed in the storage cabinet body 22 for controlling the first module 23 to display the usage information of the wafer frame storage box 21 .

[0038] The control cabinet 24 of the storage cabinet 20 is equipped with a contrast sensor 25 to sense the wafer frame storage box 21 approaching a long and narrow support frame 26 . Contrast sensor 25 is used to start image 3 A scanner 30 is shown to scan the barcode 27 on the wafer frame storage box 21 and read a basic data of the wafer frame storage box 21 . The control cabinet 24 can be equipped with a keyboard 28, and the keyboard 28 has an inclination angle θ (see image 3 ) to facilitate a user's in...

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PUM

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Abstract

The present invention relates to a storage cabinet for wafer frame storage box. Said storage cabinet is used for storing wafer frame storage box. It includes a storage cabinet self-body, a first module which is mounted in said storage cabinet self-body interior and is used for storing said wafer frame storage box and a control cabinet which is mounted in said storage cabinet self-body interior and is used for operating and controlling said first module, and used for displaying application information of said wafer frame storage box.

Description

technical field [0001] The present invention relates to a storage cabinet for a frame storage box (Frame Storage Box), in particular to a storage cabinet for a frame storage box for storing a frame storage box for easy removal and reuse at any time. Background technique [0002] The wafers commonly used by current semiconductor manufacturers generally have multiple types such as 4 inches, 8 inches or 12 inches. When the wafer is not fully used and needs to be stored temporarily, it can be placed in a wafer frame storage box for future Take it out and use it when it is useful. see figure 1 , it can be seen that a wafer frame storage box 10 is provided with an electrostatic bag 11, and a wafer 12 is placed in the electrostatic bag 11. After an upper cover plate 13 of the wafer frame storage box 10 is closed, the wafer frame storage box 10 Promptly need to do a safe keeping procedure, when needing to use wafer 12 again in the future, can transfer out at any time to do further...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G1/137H01L21/68B65D85/86
Inventor 刘育钏
Owner POWER GEODE TECH
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