Trichlorosilane vaporization system
a technology of trichlorosilane and vaporization system, which is applied in the direction of steam generation using steam absorption, lighting and heating apparatus, applications, etc., can solve the problems of unsatisfactory boilers, unsatisfactory boilers, and overly reactive trichlorosilan
Inactive Publication Date: 2013-08-01
SUNEDISON INC
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Benefits of technology
The patent text discusses various aspects and refinements related to a certain technology. These refinements and additional features can be used, either individually or in combination, to improve the technology. The "technical effect" of the patent is to provide a more advanced and improved technology through various refinements and additional features.
Problems solved by technology
Moreover, when converting liquid trichlorosilane to its gaseous state it may not be heated above a specific temperature because doing so results in the trichlorosilane becoming overly corrosive and / or reactive.
Such open boilers however have yielded unsatisfactory results, as the boilers require a comparatively large surface area in order to vaporize the trichlorosilane without exceeding the specified temperature at which the trichlorosilane becomes overly corrosive and / or reactive.
However, these boilers have also yielded unsatisfactory results because of their inability to completely vaporize trichlorosilane without exceeding the temperature at which the trichlorosilane becomes overly corrosive and / or reactive.
Method used
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[0015]With reference now to the Figures, and in particular to FIG. 1, a heat exchanger is generally indicated at 100. The heat exchanger 100 described herein is used in the vaporization of liquid trichlorosilane (SiCl3) for subsequent use in the manufacture of silicon-containing devices (e.g., wafers or solar cells). However, the heat exchanger 100 is equally well-suited for use in heating or vaporizing any liquid, and, the heat exchanger may be used for any such purpose without departing from the scope of the disclosure. Reference is also made herein to “vaporizing” trichlorosilane and such reference should be understood to mean converting liquid trichlorosilane to its gaseous state. Partially vaporized trichlorosilane refers to trichlorosilane that has been partially converted to a gas (i.e., some quantity of the trichlorosilane remains in a liquid state).
[0016]As shown in FIG. 1, the heat exchanger 100 includes a housing 110 forming an enclosure and an inlet opening 112 and an ou...
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Abstract
A heat exchanger for vaporizing a liquid and a method of using the same are disclosed. The heat exchanger includes a housing, a tube, a heater, and a plurality of non-reactive members. The tube is disposed in the interior of the housing and has an inlet and an outlet. The heater is configured to heat the tube. The plurality of non-reactive members are disposed in an interior cavity of the tube in an arrangement such that a plurality of voids are defined between the members and the tube. The arrangement also permits liquid to pass through the voids and travel from the inlet of the tube to the outlet of tube. The plurality of non-reactive members and the tube transfer heat to the liquid as the liquid passes through the plurality of voids in order to vaporize the liquid.
Description
CROSS REFERENCE[0001]This application is a divisional of U.S. patent application Ser. No. 12 / 796,360 filed on Jun. 8, 2010, the disclosure of which is hereby incorporated by reference in its entirety.BACKGROUND[0002]Trichlorosilane in its gaseous state is often used in the manufacture of silicon-containing devices, such as semiconductor wafers or solar cells. Under normal atmospheric conditions, trichlorosilane is in a liquid state. It is converted to its gaseous state prior to use in the manufacture of silicon-containing devices. Moreover, when converting liquid trichlorosilane to its gaseous state it may not be heated above a specific temperature because doing so results in the trichlorosilane becoming overly corrosive and / or reactive.[0003]Various types of boilers or vaporizers have been used to convert liquid trichlorosilane to its gaseous state. For example, open boilers typically heat a large pool of liquid trichlorosilane and collect the gas that evaporates from the pool. Suc...
Claims
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IPC IPC(8): F22B1/28
CPCC01B33/1071F22B1/288F28F13/003F28D15/00C01B33/03F28D1/04F28F1/40
Inventor HARI, ABARAJITHGU, ZHIHUIBHUSARAPU, SATISHTRUONG, TIMOTHYGUPTA, PUNEET
Owner SUNEDISON INC