Method for manufacturing mask plate openings for organic light-emitting displays

A technology of a light-emitting display and a manufacturing method, which are applied in the directions of vacuum evaporation plating, metal material coating process, coating, etc. The effect of edge quality, guaranteed edge quality, and excellent deposition effect

CN104294215BInactive Publication Date: 2019-02-12KUN SHAN POWER STENCIL
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2019-02-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a manufacturing method of a mask plate opening for an organic light-emitting display device, which comprises the step of forming the opening by a laser. In the opening forming step, a laser head emits a laser beam of which the direction forms an acute angle with the plane of the mask base plate, and the laser beam emitted by the laser head operates on the mask base plate along the preset trajectory and forms the opening on the mask base plate, thereby forming the mask plate; and the area S1 formed by the edge of the opening on the mask base plate adjacent to the side of the laser head is smaller than the area S2 formed by the edge of the side far from the laser head. The technique can avoid the problem of environmental damage caused by the mask plate opening manufactured by the traditional chemical etching, can ensure the opening (small opening) edge (the area formed by the edge is S1) of the mask plate adjacent to the side of the deposited base plate to have favorable linearity, and can well satisfy the vapor deposition application of the organic light-emitting display device organic material.
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Description

technical field

[0001] The invention relates to a method for manufacturing a mask plate, in particular to a method for manufacturing an opening of a mask plate for an organic light-emitting display. Background technique

[0002] Compared with the current LCD technology, the display made of OLED technology not only has full color, fast response time, high brightness (100~14,000cd / m2), high lumen efficiency (16~ 38lm / W), viewing angle of more than 170 degrees, no general LCD afterimage, can be made into large-sized and flexible panels, and can work in the range of -30 degrees Celsius to 80 degrees Celsius, etc., and the manufacturing process is simple, the overall The thickness can also be reduced to less than 1mm, and the cost is only 30-40% of TFT-LCD. Therefore, the displays made by using the OLED technology are very popular in the society.

[0003] In the manufacturing process of organic light-emitting displays, the deposition of organic layers will use masks, figure 1 ...

Examples

Embodiment Construction

[0025] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0026] The inventive idea of ​​the present invention is as follows: in the prior art, in order to overcome the evaporation effect during the evaporation process of the organic material of the organic light-emitting display, and to overcome the influence of the edge of the mask plate on the evaporation of the organic material, the mask plate is usually prepared by an etching process. "concave" openings, but this process has a relatively large impact on the environment; there is a process to prepare "concave-shaped" structural openings by laser cutting, ...