Protective cover cooling structure and heating plate temperature detection device

Abstract

The present invention relates to the field of heating plate detection technology, and discloses a protective cover cooling structure and a heating plate temperature rise detection device. The protective cover cooling structure includes a protective cover and a connecting mechanism, wherein the protective cover is suitable for covering a cavity on which a heating plate is installed, and the connecting mechanism is arranged at the bottom of the protective cover, and the connecting mechanism includes a first shell having a first circulation channel and an opening provided on the first shell and connected to the first circulation channel, the opening is attached to the side wall of the protective cover and sealed with the side wall of the protective cover, and the first shell is also provided with a water inlet and a water outlet connected to the first circulation channel. The present invention directly contacts the side wall of the protective cover through the opening on the first circulation channel, so that the cooling water in the first circulation channel can directly absorb the heat at the bottom of the protective cover, and at the same time prevent the heat at the bottom of the protective cover from diffusing upward, and discharge the cooling water through the water outlet, thereby effectively reducing the temperature increase of the protective cover caused by thermal radiation, and protecting the safety of the detection device and the operator.

Description

Technical Field

[0001] The invention relates to the technical field of heating disk detection, and in particular to a protection cover cooling structure and a heating disk temperature rise detection device. Background Art

[0002] In the thin film deposition process, the heating plate is a key component. The heating plate is usually used to provide a constant heating temperature to facilitate the deposition and film formation process of the thin film material on the wafer surface.

[0003] In the prior art, a series of performance tests are required before the heating plate leaves the factory, such as power-on temperature rise test and temperature uniformity test. However, when the test temperature of the heating plate reaches 400 degrees Celsius or above, the protective cover of the detection device itself will be affected by the high temperature due to heat radiation, which may cause burns to the operator and may affect the stability of the detection device. Summary of the invention

[0004] In view of this, the present invention provides a protective cover cooling structure and a heating plate temperature rise detection device to solve the problem that when the test temperature of the heating plate reaches 400 degrees Celsius or above, the protective cover itself will be affected by the high temperature due to heat radiation, which may cause burns to the operator.

[0005] In a first aspect, the present invention provides a protective cover cooling structure, comprising:

[0006] A protective cover, suitable for covering the cavity on which the heating plate is installed;

[0007] A connecting mechanism is arranged at the bottom of the protective cover, and the connecting mechanism includes a first shell having a first circulation channel and an opening opened on the first shell and connected to the first circulation channel. The opening is adapted to the outer contour of the side wall of the protective cover, and the opening is attached to the side wall of the protective cover and sealed with the side wall of the protective cover. The first shell is also provided with a water inlet and a water outlet connected to the first circulation channel.

[0008] Beneficial effects: This protective cover cooling structure sets the connecting mechanism at the bottom of the protective cover, and has a first circulation channel in the first shell. The first circulation channel is connected to the water inlet and the water outlet, and the opening on the first shell is attached to the side wall of the protective cover to form a closed water cooling circulation system. The cooling water flows in from the water inlet and flows through the first circulation channel. Since the opening on the first circulation channel is in direct contact with the side wall of the protective cover, the cooling water in the first circulation channel can directly absorb the heat at the bottom of the protective cover, while preventing the heat at the bottom of the protective cover from diffusing upward, and discharge the cooling water through the water outlet, effectively reducing the temperature increase of the protective cover caused by thermal radiation, and protecting the safety of the detection device and the operator. The connecting mechanism is integrated at the bottom of the protective cover, and the structure is simple, making the entire protective cover cooling structure more compact, which is conducive to achieving efficient cooling in a limited space.

[0009] In an optional embodiment, the connecting mechanism is detachably provided on the cavity.

[0010] Beneficial effect: The connecting mechanism is detachably arranged on the cavity, so that the protective cover can be quickly installed on different cavities, and the heating plate that needs to be tested can be tested. After the test is completed, the protective cover can be quickly removed from the cavity to facilitate subsequent testing of other heating plates.

[0011] In an optional embodiment, the first shell is protruding toward the outside of the protective cover.

[0012] Beneficial effect: The first shell is protruded toward the outside of the protective cover, which can increase the space of the first circulation channel inside the first shell, so that the first circulation channel can accommodate more cooling water, thereby improving the heat exchange efficiency of the cooling water in the first circulation channel, and can effectively improve the cooling efficiency of the connecting mechanism on the protective cover. At the same time, the protruding part of the first shell is convenient for setting fasteners or clamps and other connecting parts to be detachably connected to the external cavity.

[0013] In an optional embodiment, the connection mechanism further includes a second shell, which is disposed at the bottom of the first shell and located between the protective cover and the cavity, and a second circulation channel connected to the first circulation channel is reserved in the second shell.

[0014] Beneficial effects: The second shell is located between the protective cover and the cavity, forming a second circulation channel, which is connected to the first circulation channel, expanding the flow path of the cooling water, increasing the contact area between the cooling water and the bottom of the protective cover and the surrounding environment of the cavity, improving the heat exchange efficiency, and helping to take away heat more quickly and cool the protective cover quickly. Since the second shell is located between the protective cover and the cavity, the second shell and the second circulation channel can serve as an additional isolation layer to avoid direct contact between the cavity and the bottom of the protective cover, and to cut off the heat transfer between the cavity and the protective cover.

[0015] In an optional embodiment, the second shell is respectively protruded toward the inner side and the outer side of the protective cover.

[0016] Beneficial effect: When the protective cover is installed on the cavity, since the second shell protrudes toward the inside and outside of the protective cover, the protruding part of the second shell toward the inside of the protective cover can isolate the heat transfer between the inside of the protective cover and the cavity, and the protruding part of the second shell toward the outside of the protective cover can isolate the heat transfer between the outside of the protective cover and the cavity, further isolating the heat transfer between the cavity and the protective cover, thereby reducing the temperature of the protective cover.

[0017] In an optional embodiment, the abutment surface between the second shell and the cavity is a horizontal plane.

[0018] Beneficial effect: The horizontal abutment surface ensures stable horizontal support between the second shell and the cavity, reduces instability during assembly, makes the entire structure more stable, and is conducive to uniform contact between the second shell and the sealing ring on the cavity, thereby improving the sealing of the connection between the second shell and the cavity, thereby ensuring the accuracy of the detection data.

[0019] In an optional embodiment, the water inlet and the water outlet are arranged relatively far apart on the top of the first shell.

[0020] Beneficial effect: The water inlet and the water outlet are arranged at relatively far positions, which can maximize the length of the cooling water flowing in the first circulation channel and the second circulation channel, so that the cooling water can fully cool the protective cover, thereby improving the cooling capacity of the entire connection mechanism. The water inlet and the water outlet are arranged at the top of the first shell, and when the protective cover is installed on the cavity, the positions of the water inlet and the water outlet are effectively avoided from being restricted by space, ensuring that the water inlet and the water outlet can be normally connected to the pipeline.

[0021] In an optional implementation, the connecting mechanism and the protective cover are welded.

[0022] Beneficial effect: By welding the connecting mechanism and the protective cover, a strong bond between the connecting mechanism and the protective cover can be ensured, and the stability and integrity of the structure can be maintained even under high temperature, vibration or external force, which is beneficial to reliability and safety in long-term use, and at the same time can ensure the sealing of the connecting mechanism and the protective cover.

[0023] In an optional embodiment, a driving member is further included, wherein the driving member is connected to the water inlet and is used to transport cooling water to the water inlet.

[0024] Beneficial effect: cooling water is delivered to the water inlet through the driving member, ensuring the stability and flow speed of the cooling water in the first flow channel and the second flow channel, which can take away the heat of the protective cover more quickly and significantly improve the cooling efficiency.

[0025] In a second aspect, the present invention further provides a heating plate temperature rise detection device, comprising:

[0026] Testing agencies;

[0027] The protective cover cooling structure, the detection mechanism is arranged on the protective cover.

[0028] Beneficial effect: This heating plate temperature rise detection device directly contacts the opening of the first circulation channel with the side wall of the protective cover, so that the cooling water in the first circulation channel can directly absorb the heat at the bottom of the protective cover, while preventing the heat at the bottom of the protective cover from diffusing upward, and discharge the cooling water through the water outlet, effectively reducing the temperature rise of the protective cover caused by heat radiation, and protecting the safety of the detection device and the operator. The uniformity of the temperature of the heating plate is detected by the detection mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 This is a structural schematic diagram of a protective cover cooling structure installed on a cavity according to an embodiment of the present invention;

[0031] Figure 2 for Figure 1 A cross-sectional view showing a protective cover cooling structure mounted on a cavity;

[0032] Figure 3 for Figure 2 A is a partial enlarged schematic diagram;

[0033] Figure 4 A cross-sectional view of another protective cover cooling structure installed on a cavity according to an embodiment of the present invention;

[0034] Figure 5 for Figure 4 A partial enlarged schematic diagram of B in the figure.

[0035] Description of reference numerals:

[0036] 1. Protective cover; 2. Cavity; 3. Connecting mechanism; 301. First shell; 3011. First circulation channel; 3012. Opening; 302. Water inlet; 303. Water outlet; 304. Second shell; 3041. Second circulation channel; 4. Detection mechanism; 5. Heating plate. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0038] In the related art, a series of performance tests are required before the heating plate leaves the factory, such as power-on temperature rise test and temperature uniformity test. However, when the test temperature of the heating plate reaches 400 degrees Celsius or above, the protective cover of the detection device itself will be affected by the high temperature due to heat radiation, which may cause burns to the operator and may affect the stability of the detection device.

[0039] In order to solve the above technical problems, the following Figures 1 to 5 , describing an embodiment of the present invention.

[0040] According to an embodiment of the present invention, on the one hand, Figures 1 to 3 As shown, a protective cover cooling structure is provided, comprising a protective cover 1 and a connecting mechanism 3.

[0041] Specifically, Figure 1 and Figure 2 As shown, the protective cover 1 is suitable for covering the cavity 2, and a heating plate 5 is installed in the cavity 2.

[0042] Specifically, Figures 1 to 3 As shown, the connection mechanism 3 is arranged at the bottom of the protective cover 1. The connection mechanism 3 includes a first shell 301 having a first circulation channel 3011, and an opening 3012 is provided on the first shell 301, and the opening 3012 is communicated with the first circulation channel 3011. The opening 3012 is adapted to the outer contour of the side wall of the protective cover 1, and the opening 3012 is attached to the side wall of the protective cover 1 and sealed with the side wall of the protective cover 1. The first shell 301 is also provided with a water inlet 302 and a water outlet 303, and the water inlet 302 and the water outlet 303 are both communicated with the first circulation channel 3011.

[0043] In this protective cover cooling structure, the connection mechanism 3 is arranged at the bottom of the protective cover 1, and the first shell 301 has a first circulation channel 3011, which is connected with the water inlet 302 and the water outlet 303. The opening 3012 on the first shell 301 is attached to the side wall of the protective cover 1 to form a closed water cooling circulation system. The cooling water flows in from the water inlet 302 and flows through the first circulation channel 3011. Since the opening 3012 on the first circulation channel 3011 is directly in contact with the side wall of the protective cover 1, the cooling water in the first circulation channel 3011 can directly absorb the heat at the bottom of the protective cover 1, and at the same time prevent the heat at the bottom of the protective cover 1 from diffusing upward, and discharge the cooling water through the water outlet 303, which effectively reduces the temperature rise of the protective cover 1 caused by thermal radiation, and protects the safety of the detection device and the operator. The connection mechanism 3 is integrated at the bottom of the protective cover 1, and the structure is simple, so that the entire protective cover cooling structure is more compact, which is conducive to achieving efficient cooling in a limited space.

[0044] Specifically, the protective cover 1 can be provided in any existing shape such as a cylindrical shape, a rectangular shape, etc. In the embodiment of the present application, the shape of the protective cover 1 is not specifically limited.

[0045] Exemplarily, the protective cover 1 is configured to be cylindrical, and the opening 3012 can be correspondingly configured to be circular and attached to the side wall of the protective cover 1 .

[0046] Specifically, the first circulation channel 3011 can be provided in a circular ring shape, an arc shape, etc. In the embodiment of the present application, the shape of the first circulation channel 3011 is not specifically limited.

[0047] Specifically, the water inlet 302 and the water outlet 303 can be set on the top of the first shell 301, or on the side wall of the first shell 301, and can be selectively set according to the use environment. In the embodiment of the present application, there is no specific restriction on the positions of the water inlet 302 and the water outlet 303.

[0048] In one embodiment, Figure 1 and Figure 2 As shown, the connecting mechanism 3 is detachably arranged on the cavity 2 .

[0049] The connecting mechanism 3 is detachably arranged on the cavity 2, so that the protective cover 1 can be quickly installed on different cavities 2 to detect the heating plate 5 that needs to be detected. After the detection is completed, the protective cover 1 can be quickly removed from the cavity 2 to facilitate subsequent detection of other heating plates 5.

[0050] Specifically, the connecting mechanism 3 can be detachably provided on the cavity 2 by means of fastener connection, or can be detachably provided on the cavity 2 by means of snap connection, etc. In the embodiment of the present application, no specific restriction is imposed on the detachable manner of the connecting mechanism 3 and the cavity 2.

[0051] In one embodiment, in combination Figure 2 and Figure 3 As shown, the first shell 301 is protruded toward the outside of the protective cover 1.

[0052] The first shell 301 is arranged to protrude toward the outside of the protective cover 1, which can increase the space of the first circulation channel 3011 inside the first shell 301, so that the first circulation channel 3011 can accommodate more cooling water, thereby improving the heat exchange efficiency of the cooling water in the first circulation channel 3011, and can effectively improve the cooling efficiency of the connecting mechanism 3 on the protective cover 1. At the same time, the protruding part of the first shell 301 is convenient for setting fasteners or clamps and other connecting parts to be detachably connected to the external cavity 2.

[0053] In one embodiment, Figure 4 and Figure 5 As shown, the connecting mechanism 3 also includes a second shell 304, which is arranged at the bottom of the first shell 301, and the second shell 304 is located between the protective cover 1 and the cavity 2. A second circulation channel 3041 is left in the second shell 304, and the second circulation channel 3041 is connected to the first circulation channel 3011.

[0054] The second shell 304 is located between the protective cover 1 and the cavity 2, forming a second circulation channel 3041. The second circulation channel 3041 is connected to the first circulation channel 3011, which expands the flow path of the cooling water, increases the contact area between the cooling water and the bottom of the protective cover 1 and the surrounding environment of the cavity 2, improves the heat exchange efficiency, helps to take away the heat more quickly, and quickly cools the protective cover 1. Since the second shell 304 is located between the protective cover 1 and the cavity 2, the second shell 304 and the second circulation channel 3041 can serve as an additional isolation layer to prevent the cavity 2 from directly contacting the bottom of the protective cover 1, and cut off the heat transfer between the cavity 2 and the protective cover 1.

[0055] In one embodiment, in combination Figure 4 and Figure 5 As shown, the second shell 304 is respectively protruded toward the inner side and the outer side of the protective cover 1.

[0056] When the protective cover 1 is installed on the cavity 2, since the second shell 304 protrudes toward the inside and outside of the protective cover 1, the protruding part of the second shell 304 toward the inside of the protective cover 1 can isolate the heat transfer between the inside of the protective cover 1 and the cavity 2, and the protruding part of the second shell 304 toward the outside of the protective cover 1 can isolate the heat transfer between the outside of the protective cover 1 and the cavity 2, further isolating the heat transfer between the cavity 2 and the protective cover 1, thereby reducing the temperature of the protective cover 1.

[0057] In one embodiment, in combination Figure 4 and Figure 5 As shown, the contact surface between the second shell 304 and the cavity 2 is a horizontal plane.

[0058] The horizontal abutment surface ensures stable horizontal support between the second shell 304 and the cavity 2, reduces instability during assembly, makes the entire structure more stable, and facilitates uniform contact between the second shell 304 and the sealing ring on the cavity 2, thereby improving the sealing of the connection between the second shell 304 and the cavity 2, thereby ensuring the accuracy of the detection data.

[0059] In one embodiment, Figure 2 As shown, the water inlet 302 and the water outlet 303 are arranged relatively far apart at the top of the first shell 301 .

[0060] The water inlet 302 and the water outlet 303 are arranged at relatively far positions, so that the flow length of the cooling water in the first flow channel 3011 and the second flow channel 3041 can be extended to the maximum extent, so that the cooling water can fully cool the protective cover 1, thereby improving the cooling capacity of the entire connecting mechanism 3. The water inlet 302 and the water outlet 303 are arranged at the top of the first shell 301, and when the protective cover 1 is installed on the cavity 2, the positions of the water inlet 302 and the water outlet 303 are effectively avoided from being restricted by space, ensuring that the water inlet 302 and the water outlet 303 can be normally connected to the pipeline.

[0061] In one embodiment, the connection mechanism 3 and the protection cover 1 are welded.

[0062] By welding the connecting mechanism 3 and the protective cover 1, a strong bond can be formed between the connecting mechanism 3 and the protective cover 1. Even under high temperature, vibration or external force, the stability and integrity of the structure can be maintained, which is beneficial to reliability and safety in long-term use. At the same time, the sealing of the connecting mechanism 3 and the protective cover 1 can be ensured.

[0063] In one embodiment, a driving member (not shown in the figure) is further included, which is connected to the water inlet 302 and is used to transport cooling water to the water inlet 302 .

[0064] The cooling water is delivered to the water inlet 302 through the driving member to ensure the stability and flow speed of the cooling water in the first flow channel 3011 and the second flow channel 3041, which can take away the heat of the protective cover 1 more quickly and significantly improve the cooling efficiency.

[0065] Specifically, the driving member may be an existing driving member such as an electric pump, a pneumatic pump, a hydraulic pump, etc. In the embodiment of the present application, there is no specific restriction on the type of the driving member.

[0066] Specifically, pipelines may be connected to the water inlet 302 and the water outlet 303 respectively, and the driving component may be arranged on the pipeline of the water inlet 302 .

[0067] According to an embodiment of the present invention, on the other hand, Figures 1 to 5 As shown, a heating plate 5 temperature rise detection device is also provided, including a detection mechanism 4 and a protective cover cooling structure.

[0068] Specifically, Figure 1 and Figure 2 As shown, the detection mechanism 4 is arranged on the protective cover 1 .

[0069] The heating plate 5 temperature rise detection device directly contacts the opening 3012 on the first circulation channel 3011 with the side wall of the protective cover 1, so that the cooling water in the first circulation channel 3011 can directly absorb the heat at the bottom of the protective cover 1, and prevent the heat at the bottom of the protective cover 1 from diffusing upward, and discharge the cooling water through the water outlet 303, effectively reducing the temperature rise of the protective cover 1 caused by heat radiation, and protecting the safety of the detection device and the operator. The uniformity of the temperature of the heating plate 5 is detected by the detection mechanism 4.

[0070] Specifically, the detection mechanism 4 can select existing detection equipment such as infrared thermal imager. In the embodiment of the present application, the type of the detection mechanism 4 is not specifically limited.

[0071] The working principle of the heating plate 5 temperature rise detection device in this embodiment is described as follows:

[0072] The connecting mechanism 3 is fixed on the cavity 2 by means of a clamp, so that the protective cover 1 is disposed on the cavity 2 .

[0073] The pipeline is connected to the water inlet 302 and the water outlet 303 of the connecting mechanism 3. The first shell 301 has a first circulation channel 3011, and the second shell 304 has a second circulation channel 3041 connected to the first circulation channel 3011. The first circulation channel 3011 is connected to the water inlet 302 and the water outlet 303. The opening 3012 on the first shell 301 is attached to the side wall of the protective cover 1 to form a closed water cooling circulation system. Cooling water is transported to the water inlet 302 through the driving member, and the cooling water flows in from the water inlet 302, flows through the first circulation channel 3011 and the second circulation channel 3041. Since the opening 3012 on the first circulation channel 3011 is in direct contact with the side wall of the protective cover 1, the cooling water in the first circulation channel 3011 can directly absorb the heat at the bottom of the protective cover 1, and at the same time prevent the heat at the bottom of the protective cover 1 from diffusing upward, and the cooling water is discharged through the water outlet 303. Since the second shell 304 is located between the protective cover 1 and the cavity 2, the second shell 304 and the second circulation channel 3041 can serve as an additional isolation layer to prevent the cavity 2 from directly contacting the bottom of the protective cover 1, and cut off the heat transfer between the cavity 2 and the protective cover 1, thereby effectively reducing the temperature increase of the protective cover 1 caused by thermal radiation, and protecting the safety of the detection device and the operator.

[0074] The temperature uniformity of the heating plate 5 is detected by the detection mechanism 4 .

[0075] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A protective cover cooling structure, characterized in that: include: A protective cover (1) adapted to be covered on a cavity (2) on which a heating plate (5) is installed; A connecting mechanism (3) is arranged at the bottom of the protective cover (1), the connecting mechanism (3) comprising a first shell (301) having a first circulation channel (3011) and an opening (3012) provided on the first shell (301) and communicating with the first circulation channel (3011), the opening (3012) being adapted to the outer contour of the side wall of the protective cover (1), the opening (3012) being attached to the side wall of the protective cover (1) and being sealed with the side wall of the protective cover (1), and the first shell (301) also being provided with a water inlet (302) and a water outlet (303) communicating with the first circulation channel (3011); The connecting mechanism (3) is detachably arranged on the cavity (2), and the first shell (301) is arranged to protrude toward the outside of the protective cover (1); The connecting mechanism (3) further comprises a second shell (304), wherein the second shell (304) is arranged at the bottom of the first shell (301) and is located between the protective cover (1) and the cavity (2), and a second circulation channel (3041) communicating with the first circulation channel (3011) is reserved in the second shell (304).

2. The protective cover cooling structure according to claim 1, characterized in that: The second shell (304) is respectively arranged to protrude toward the inner side and the outer side of the protective cover (1).

3. The protective cover cooling structure according to claim 2, characterized in that: The contact surface between the second shell (304) and the cavity (2) is a horizontal surface.

4. The protective cover cooling structure according to any one of claims 1 to 3, characterized in that: The water inlet (302) and the water outlet (303) are arranged relatively far apart at the top of the first shell (301).

5. The protective cover cooling structure according to any one of claims 1 to 3, characterized in that: The connecting mechanism (3) and the protective cover (1) are welded together.

6. The protective cover cooling structure according to any one of claims 1 to 3, characterized in that: It also includes a driving member, which is in communication with the water inlet (302) and is used to transport cooling water to the water inlet (302).

7. A heating plate temperature detection device, characterized in that: include: Testing agency (4); According to any one of claims 1 to 6, the detection mechanism (4) is arranged on the protective cover (1).

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