Tubular structure and thermal field equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to a tubular structure and thermal field equipment. The tubular structure comprises a furnace tube and a heating furnace door, and the furnace tube is provided with a furnace chamber; the heating furnace door is arranged at a pipe opening of the furnace pipe, the heating furnace door is connected with the furnace pipe to seal the furnace cavity, and the heating furnace door is suitable for heating the furnace cavity. The heating furnace door is suitable for heating the furnace chamber so as to increase the temperature in the furnace chamber and the range of a constant-temperature area in the furnace chamber and improve the uniformity of a temperature field in the furnace chamber, so that the quality of a workpiece to be machined is improved; and moreover, the furnace tube can be provided with a larger tube diameter, so that more workpieces to be machined can be placed, and the productivity of the tubular structure is effectively improved. According to the heating furnace door, when the range of the constant-temperature area in the furnace cavity is increased, more areas suitable for machining the to-be-machined workpieces exist in the furnace cavity, and therefore more to-be-machined workpieces can be further placed in the furnace cavity, and the productivity of the tubular structure is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a tubular structure and thermal field equipment. Background Art

[0002] During the production process of silicon wafers, silicon wafers need to go through thermal field processes such as diffusion process or chemical vapor deposition process.

[0003] In the thermal field process, the silicon wafer is placed in a tubular structure, and source gas is introduced into the tubular structure. The elements in the source gas are doped or deposited on the silicon wafer. The temperature field is uneven in the conventional tubular structure, resulting in poor quality of the silicon wafer. Utility Model Content

[0004] In view of this, the utility model proposes a tubular structure and a thermal field device, aiming to partially or completely solve the technical problem that the temperature field in the existing tubular structure is uneven, resulting in poor quality of silicon wafers.

[0005] In order to achieve the above object, the technical solution of the utility model is implemented as follows:

[0006] In the first aspect, an embodiment of the utility model provides a tubular structure, which includes a furnace tube, a heating furnace door and a second air inlet pipe, wherein the furnace tube is provided with a furnace cavity; the heating furnace door is arranged at the pipe mouth of the furnace tube, the heating furnace door is connected to the furnace tube to close the furnace cavity, and the heating furnace door is suitable for heating the furnace cavity; one end of the second air inlet pipe is arranged in the furnace cavity, and a second air inlet hole is arranged on the side wall of the second air inlet pipe; from the top of the furnace tube to the tail direction of the furnace tube, the density of the second air inlet holes on the second air inlet pipe gradually decreases.

[0007] Optionally, the heating furnace door comprises:

[0008] A furnace door plate connected to the furnace tube to cover the furnace cavity;

[0009] A heating component is arranged on a side of the furnace door panel facing the furnace cavity, and the heating component is suitable for heating the furnace cavity.

[0010] Optionally, the heating assembly includes a tray and a heating element, and the tray and the heating element are arranged in sequence along a first direction; the tray faces the furnace cavity relative to the heating element, the tray is used to support the boat in the furnace, and the heating element is used to heat the furnace cavity.

[0011] Optionally, the heating furnace door further comprises a supporting column, one end of which is connected to the tray, and the other end of which is connected to the furnace door panel.

[0012] Optionally, the heating furnace door further includes a heat insulation component, which is disposed between the heating component and the furnace door plate, and is used to prevent heat in the furnace cavity from being transferred out.

[0013] Optionally, the tubular structure further includes a cooling component, and the cooling component is disposed around the outer circumference of the heating furnace door, or the cooling component is disposed around one end of the furnace tube close to the heating furnace door.

[0014] Optionally, the cooling assembly includes a flange, which is arranged around the axis of the furnace tube, and the flange connects the heating furnace door and the furnace tube; a cooling channel is arranged in the flange, and the cooling channel is used to pass a cooling medium.

[0015] Optionally, the furnace tube includes an outer tube and an inner tube, an interlayer cavity is formed between the outer tube and the inner tube, and the furnace cavity is set in the inner tube.

[0016] Optionally, a flow-uniforming hole is provided at the end of the inner tube away from the heating furnace door, and the flow-uniforming hole connects the interlayer cavity and the furnace cavity;

[0017] The heating furnace door is also provided with an exhaust hole, one end of which is communicated with the interlayer cavity, and the other end of which is communicated with the outside of the tubular structure;

[0018] The source-carrying gas in the furnace cavity is discharged sequentially through the uniform flow hole, the interlayer cavity and the exhaust hole.

[0019] Optionally, the tubular structure includes a flange, which is arranged around the axis of the furnace tube, and the flange connects the heating furnace door and the furnace tube; the exhaust hole is arranged on the flange.

[0020] Optionally, the inner tube includes an inner tube body and a flow equalizer plate, the inner tube body is a cylindrical structure, one end of the inner tube body is connected to the outer tube, and the other end of the inner tube body is connected to the flow equalizer plate, the inner tube body and the flow equalizer plate are connected to form the furnace cavity, and the flow equalizer hole is arranged on the flow equalizer plate.

[0021] Optionally, the cross-sectional area of ​​the flow equalizing hole decreases sequentially from the middle of the flow equalizing plate to the edge of the flow equalizing plate, perpendicular to the first direction.

[0022] In a second aspect, an embodiment of the utility model further provides a thermal field device, which includes a thermal field cavity and the tubular structure as described above, wherein the tubular structure is arranged in the thermal field cavity.

[0023] The utility model discloses a tubular structure including a heating furnace door, which is suitable for heating a furnace cavity to increase the temperature in the furnace cavity and the range of the constant temperature zone in the furnace cavity, improve the uniformity of the temperature field in the furnace cavity, and thus improve the quality of the workpiece to be processed; moreover, the furnace tube can be set with a larger diameter to place more workpieces to be processed, effectively improving the production capacity of the tubular structure. When the heating furnace door increases the range of the constant temperature zone in the furnace cavity, the furnace cavity has more areas suitable for processing the workpieces to be processed, so more workpieces to be processed can be further placed in the furnace cavity, further improving the production capacity of the tubular structure.

[0024] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for describing the embodiments are briefly introduced below.

[0026] Figure 1 It is a structural schematic diagram of a perspective view of a tubular structure according to an embodiment of the utility model;

[0027] Figure 2 for Figure 1 A structural diagram of the enlarged view of part A;

[0028] Figure 3 This is a schematic structural diagram of a heating furnace door according to an embodiment of the utility model;

[0029] Figure 4 It is a structural schematic diagram of a perspective view of the furnace tube and the second air inlet pipe after being assembled according to an embodiment of the utility model;

[0030] Figure 5 This is a schematic diagram of a structure in which the outer tube is transparent and the inner tube is not transparent according to an embodiment of the utility model;

[0031] Figure 6 A perspective view of a furnace tube in use according to another embodiment of the present invention Figure 2 ;

[0032] Figure 7 It is a schematic diagram of the layout of the furnace pipe, the first air inlet pipe, and the second air inlet pipe according to an embodiment of the utility model;

[0033] Figure 8 It is a schematic structural diagram of the second air intake pipe according to an embodiment of the utility model.

[0034] Description of reference numerals:

[0035] 10. furnace tube; 11. furnace chamber; 13. outer tube; 14. inner tube; 15. interlayer chamber;

[0036] 21. tray; 22. heating element; 23. mounting cover; 24. furnace door panel; 25. flange; 251. exhaust hole; 26. sealing ring; 27. heat insulation board; 28. support column; 29. ​​support plate;

[0037] 40. first air inlet pipe; 50. flow equalizer plate; 51. flow equalizer hole; 60. second air inlet pipe; 61. second air inlet hole; 70. furnace boat;

[0038] 81. connecting plate; 82. motor module;

[0039] Z, first direction. DETAILED DESCRIPTION

[0040] Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can also be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to be able to fully convey the scope of the present invention to those skilled in the art. Unless there are technical obstacles or contradictions, the various technical features disclosed in this application can be freely combined to form additional embodiments, and these additional embodiments are all within the scope of protection of this application.

[0041] Reference Figure 1 , which shows a structural schematic diagram of a perspective view of a tubular structure provided in an embodiment of the present application. The tubular structure can be applied to the fields of semiconductors, photovoltaics, etc. to process and produce battery cells, silicon wafers and other workpieces.

[0042] Reference Figures 1 to 8 As shown, the tubular structure of the embodiment of the present application includes a furnace tube 10 and a heating furnace door. The furnace tube 10 is provided with a furnace cavity 11; the heating furnace door is arranged at the tube mouth of the furnace tube 10, and the heating furnace door is connected to the furnace tube 10 to close the furnace cavity 11, and the heating furnace door is suitable for heating the furnace cavity 11.

[0043] When the tubular structure is in use, the furnace chamber 11 of the furnace tube 10 is used to place the workpiece to be processed.

[0044] The tubular structure of the embodiment of the present application includes a heating furnace door, which is suitable for heating the furnace chamber 11 to increase the temperature in the furnace chamber 11 and the range of the constant temperature zone in the furnace chamber 11, improve the uniformity of the temperature field in the furnace chamber 11, and thus improve the quality of the workpiece to be processed; moreover, the furnace tube 10 can be set with a larger tube diameter to place more workpieces to be processed, effectively improving the production capacity of the tubular structure. When the heating furnace door increases the range of the constant temperature zone in the furnace chamber 11, the furnace chamber 11 has more areas suitable for processing the workpieces to be processed, so more workpieces to be processed can be further placed in the furnace chamber 11, further improving the production capacity of the tubular structure.

[0045] In some embodiments, the heating furnace door includes a furnace door plate 24 and a heating assembly. The furnace door plate 24 is connected to the furnace tube 10 to cover the furnace cavity 11. The heating assembly is arranged on the side of the furnace door plate 24 facing the furnace cavity 11, and the heating assembly is suitable for heating the furnace cavity 11. In the above structure of the embodiment of the present application, the furnace cavity 11 is covered by the furnace door plate 24 to prevent the temperature in the furnace cavity 11 from leaking out. The heating assembly heats the furnace cavity 11, increasing the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0046] In some embodiments, the heating assembly includes a tray 21 and a heating element 22, which are arranged in sequence along a first direction Z; the tray 21 faces the furnace cavity 11 relative to the heating element 22 and is used to support the boat 70 in the furnace, and the heating element 22 is used to heat the furnace cavity 11.

[0047] The surface of the tray 21 facing the furnace chamber 11 is used to connect with the furnace boat 70. When the tubular structure is used vertically, the lower end of the furnace boat 70 is connected to the tray 21. The specific connection structure between the tray 21 and the furnace boat 70 can be set according to the use requirements. For example, a mounting groove is set on the tray 21, and the furnace boat 70 is inserted into the mounting groove. This embodiment of the application will not be described in detail.

[0048] The heating element 22 is disposed below the tray 21 , and the heating element 22 generates heat to heat the oven cavity 11 .

[0049] In some embodiments, a plurality of installation areas are arranged on the surface of the tray 21 facing the furnace cavity 11 , each installation area is arranged spaced apart from other installation areas, a tray through hole is arranged between two adjacent installation areas, and the installation areas are used to arrange the in-furnace boat 70 .

[0050] In the embodiment of the present application, each installation area is used to set a furnace boat 70. Each installation area can be provided with a structure such as an installation groove for installing the furnace boat 70, so as to conveniently and stably connect the furnace boat 70 and the tray 21. It can be understood that the furnace boat 70 can be set in each installation area, and one or several installation areas can be selected to set the furnace boat 70 according to the use requirements. The number of furnace boats 70 is relatively flexible, and multiple furnace boats 70 can be set, thereby increasing the production capacity of the tubular structure.

[0051] The heating assembly of the embodiment of the present application includes a tray 21 and a heating element 22, which can support the boat 70 in the furnace and heat the furnace cavity 11 to increase the temperature in the furnace tube 10 and the range of the constant temperature zone in the furnace tube 10, thereby improving the uniformity of the temperature field in the furnace tube 10.

[0052] Furthermore, the furnace boat 70 is a component for placing silicon wafers waiting for processing. It is understandable that an appropriate furnace boat 70 can be selected according to the use requirements, for example, the furnace boat 70 is a quartz boat, a silicon carbide boat, etc.

[0053] In some embodiments, the heating element 22 is a heating wire wound into a plate-like structure.

[0054] In some embodiments, the heating furnace door further includes a support column 28 , one end of the support column 28 is connected to the tray 21 , and the other end of the support column 28 is connected to the furnace door panel 24 .

[0055] In the embodiment of the present application, the support column 28 can realize the connection between the tray 21 and the oven door panel 24, and is used to support the tray 21 and the heating element 22. It is understandable that the connection between the support column 28 and the tray 21 can be direct or indirect, which can be set according to the use requirements.

[0056] It is understandable that the number of the support columns 28 is set according to usage requirements. For example, four support columns 28 are provided, and the four support columns 28 are respectively close to the four corners of the tray 21.

[0057] In some embodiments, the support column 28 is connected to the tray 21 and the oven door panel 24 , the heating element 22 is disposed on a side of the tray 21 facing the oven door panel 24 , and the heating element 22 is in contact with or not in contact with the support column 28 .

[0058] In some embodiments, the support column 28 is connected to the heating element 22 and the oven door panel 24 , and the support column 28 is connected to the tray 21 through the heating element 22 .

[0059] In some embodiments, reference Figure 3As shown, in order to increase the structural strength of the tray 21, a support plate 29 is further provided between the tray 21 and the heating element 22. The support column 28 is connected to the support plate 29 and the oven door plate 24, and the support column 28 is connected to the tray 21 through the support plate 29; the heating element 22 is provided on the side of the support plate 29 facing the oven door plate 24, and the heating element 22 is in contact with the support column 28 or not.

[0060] Furthermore, along the length direction of the tubular structure, the tray 21, the support plate 29, and the heating element 22 are sequentially arranged, and the tray 21 faces the furnace cavity 11. The length direction of the tubular structure is the first direction Z.

[0061] In some embodiments, the heating furnace door also includes an insulation component, which is arranged between the heating component and the furnace door panel 24. The insulation component is used to block the heat transfer out of the furnace cavity 11, avoid temperature loss in the furnace cavity 11, and ensure the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0062] In some embodiments, the heat insulation assembly includes a plurality of heat insulation boards 27, and the plurality of heat insulation boards 27 are arranged at intervals along the length direction of the tubular structure. The arrangement of the plurality of heat insulation boards 27 can achieve the effect of heat insulation, avoid temperature loss in the furnace cavity 11, and ensure the temperature in the furnace cavity 11 and the range of the constant temperature zone in the furnace cavity 11.

[0063] In some embodiments, a plurality of heat insulation boards 27 are respectively connected to support columns 28 to achieve installation of the plurality of heat insulation boards 27 .

[0064] In some embodiments, after multiple insulation boards 27 are connected through support columns 28, the insulation board 27 closest to the furnace cavity 11 is connected to the heating element 22, and the heating element 22 and the tray 21 are supported by multiple insulation boards 27. At this time, the support columns 28 are connected to the tray 21 through the insulation boards 27.

[0065] In some embodiments, the tubular structure further includes a mounting cover 23, which is buckled on the side of the furnace door panel 24 facing the furnace cavity 11, and the mounting cover 23 and the furnace door panel 24 enclose an mounting cavity, in which a plurality of heat insulation panels 27 are disposed. The mounting cover 23 can improve the heat insulation effect.

[0066] In some embodiments, the tubular structure further includes a cooling assembly, which is disposed around the outer periphery of the heating furnace door, or the cooling assembly is disposed around one end of the furnace tube 10 close to the heating furnace door. The provision of the cooling assembly in the embodiment of the present application can prevent the temperature in the furnace cavity 11 from having an adverse effect on the heating furnace door.

[0067] In some embodiments, in order to increase the sealing performance of the furnace cavity 11, a sealing ring 26 is further provided on the furnace door plate 24, and the furnace door plate 24 and the furnace tube 10 are sealed and connected by the sealing ring 26; after the furnace door plate 24 and the furnace tube 10 are connected, the furnace cavity 11 can be sealed, and the temperature and temperature field uniformity in the furnace cavity 11 can be ensured. The provision of the cooling component can prevent the temperature in the furnace cavity 11 from causing the sealing ring 26 to age and fail.

[0068] In some embodiments, the cooling assembly includes a flange 25, which is arranged around the axis of the furnace tube 10, and the flange 25 connects the heating furnace door and the furnace tube 10; a cooling channel is arranged in the flange 25, and the cooling channel is used to pass the cooling medium.

[0069] In the embodiment of the present application, the cooling assembly includes a flange 25, and the flange 25 is used to connect the heating furnace door and the furnace tube 10, which has the advantages of simple and reliable connection. A cooling channel for passing the cooling medium is provided in the flange 25, and not providing a cooling assembly separately can save the number of components in the tubular structure and save the cost of the tubular structure.

[0070] In the embodiment of the present application, when the tubular structure is in use, a cooling medium is introduced into the cooling channel of the flange 25, and the cooling medium absorbs heat and then flows out of the cooling channel to take away the heat and achieve the purpose of cooling.

[0071] In some embodiments, the furnace tube 10 includes an outer tube 13 and an inner tube 14 , an interlayer cavity 15 is formed between the outer tube 13 and the inner tube 14 , and the inner tube 14 is provided with a furnace cavity 11 .

[0072] The furnace tube 10 in the embodiment of the present application is a double-layer tube, which can increase the structural strength and service life of the furnace tube 10 .

[0073] In some embodiments, the outer tube 13 is made of a material tube with greater strength, for example, the outer tube 13 is a metal tube or a quartz tube, etc., to ensure the structural strength of the furnace tube 10. The inner tube 14 is made of a material tube adapted to the processing environment of the furnace chamber 11, for example, it can withstand the temperature of the thermal field and does not react with the source-carrying gas, etc. For example, the inner tube 14 is a silicon carbide tube. The furnace tube 10 is a double-layer tube and cooperates with the performance of the above-mentioned material tube, so that the furnace tube 10 has the advantage of a long service life.

[0074] In some embodiments, a uniform flow hole 51 is provided at the end of the inner tube 14 facing away from the heating furnace door, and the uniform flow hole 51 connects the interlayer cavity 15 and the furnace cavity 11; the heating furnace door is also provided with an exhaust hole 251, one end of the exhaust hole 251 is connected to the interlayer cavity 15, and the other end of the exhaust hole 251 is connected to the outside of the tubular structure; the source-carrying gas in the furnace cavity 11 is discharged in sequence through the uniform flow hole 51, the interlayer cavity 15, and the exhaust hole 251.

[0075] In the embodiment of the present application, when the tubular structure is in use, the flow process of the source-carrying gas is that the gas in the furnace chamber 11 passes through the uniform flow hole 51 and the interlayer chamber 15 in sequence and is discharged from the exhaust hole 251. The gas entering the interlayer chamber 15 from the furnace chamber 11 through the uniform flow hole 51 has a certain temperature, and the gas with a certain temperature can also play a role in temperature uniformity, improve the temperature field uniformity of the furnace chamber 11 in the inner tube 14, and achieve thermal energy stability, reducing the heat exchange loss inside and outside the inner tube 14.

[0076] In some embodiments, the tubular structure further includes a first air inlet pipe 40, one end of which is disposed in the furnace cavity 11, and one end of which extends to the tail of the furnace cavity 11, and the first air inlet pipe 40 is used to introduce source-carrying gas into the tail of the furnace tube 10. In the embodiment of the present application, one end of the first air inlet pipe 40 extends from the tail of the furnace tube 10 to the tail of the furnace cavity 11, and the first air inlet pipe 40 is used to introduce source-carrying gas into the tail of the furnace tube 10. At this time, the tubular structure is tail air intake.

[0077] In the embodiment of the present application, when the tubular structure is in use, the first air inlet pipe 40 is used to introduce the source-carrying gas into the rear end of the furnace tube 10, and then the gas passes through the uniform flow hole 51, the interlayer cavity 15, and is discharged from the exhaust hole 251 in sequence.

[0078] When the tubular structure is used in a vertical position, air is taken in from the bottom of the inner tube 14 and exhausted from the top of the inner tube 14 , and flows out through the interlayer cavity 15 and the exhaust hole 251 .

[0079] In some embodiments, in order to increase the uniformity of the source-carrying gas in the furnace chamber 11, the tubular structure further includes a second air inlet pipe 60. Figure 4 As shown, one end of the second air inlet pipe 60 is arranged in the furnace cavity 11; a second air inlet hole 61 is arranged on the side wall of the second air inlet pipe 60, and the second air inlet pipe 60 is used to introduce source-carrying gas to the side of the furnace cavity 11 through the second air inlet hole 61. In the embodiment of the present application, one end of the second air inlet hole 61 is arranged in the furnace cavity 11, and one end of the second air inlet hole 61 extends from the tail of the furnace tube 10 along the length direction of the furnace tube 10 to the top of the furnace cavity 11, and the second air inlet hole 61 is used to introduce source-carrying gas to the side of the furnace cavity 11 through the second air inlet hole 61. The second air inlet hole 61 can increase the uniformity of the source-carrying gas in the furnace cavity 11, and the source-carrying gas can contact the workpiece to be processed more evenly, thereby effectively improving the quality of the workpiece to be processed.

[0080] It can be understood that in order to increase the uniformity of the source-carrying gas in the furnace chamber 11 , a plurality of second air inlet holes 61 are provided on the side wall of each second air inlet pipe 60 .

[0081] In the embodiment of the present application, the first air inlet pipe 40 is used to introduce the source-carrying gas into the rear end of the furnace tube 10. The second air inlet hole 61 is set, and the tubular structure can realize the structural form of bottom air intake and side air supply.

[0082] In some embodiments, reference Figure 8 As shown, when the first air inlet pipe 40 introduces the source-carrying gas to the tail of the furnace chamber 11, the density of the second air inlet hole 61 on the second air inlet pipe 60 gradually decreases from the top of the furnace tube 10 to the tail of the furnace tube 10. In the embodiment of the present application, when the first air inlet pipe 40 introduces the source-carrying gas to the tail of the furnace chamber 11, the concentration of elements in the source-carrying gas at the top of the furnace chamber 11 is relatively small, and the concentration of elements in the source-carrying gas at the tail of the furnace chamber 11 is relatively large. Therefore, from the top of the furnace tube 10 to the tail of the furnace tube 10, the density of the second air inlet hole 61 on the second air inlet pipe 60 gradually decreases, and the source-carrying gas introduced into the furnace chamber 11 by the second air inlet pipe 60 through the second air inlet hole 61 is reduced, thereby increasing the uniformity of the source-carrying gas in the furnace chamber 11, and the source-carrying gas can be in more uniform contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0083] In some embodiments, when the first air inlet pipe 40 introduces source-carrying gas to the tail of the furnace chamber 11, the cross-sectional area of ​​the second air inlet hole 61 on the second air inlet pipe 60 decreases from the top of the furnace tube 10 to the tail of the furnace tube 10. In the embodiment of the present application, when the first air inlet pipe 40 introduces source-carrying gas to the tail of the furnace chamber 11, the concentration of elements in the source-carrying gas at the top of the furnace chamber 11 is relatively small, and the concentration of elements in the source-carrying gas at the tail of the furnace chamber 11 is relatively large. Therefore, from the top of the furnace tube 10 to the tail of the furnace tube 10, the cross-sectional area of ​​the second air inlet hole 61 on the second air inlet pipe 60 decreases, and the source-carrying gas introduced into the furnace chamber 11 by the second air inlet pipe 60 through the second air inlet hole 61 decreases, thereby increasing the uniformity of the source-carrying gas in the furnace chamber 11, and the source-carrying gas can be in more uniform contact with the workpiece to be processed, thereby effectively improving the quality of the workpiece to be processed.

[0084] In some embodiments, reference Figure 7 As shown, a plurality of first air inlet pipes 40 and a plurality of second air inlet pipes 60 are respectively provided, and the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are arranged at intervals around the axis of the furnace tube 10, and each first air inlet pipe 40 is located between two adjacent second air inlet pipes 60. In the above structure of the embodiment of the present application, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are staggered around the axis of the furnace tube 10, and the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 can more evenly introduce the source-carrying gas into the furnace chamber 11.

[0085] It can be understood that around the axis of the furnace tube 10, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are staggered, and the distance between each first air inlet pipe 40 and an adjacent second air inlet pipe 60 is equal, that is, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 are evenly spaced around the axis of the furnace tube 10. Of course, the plurality of first air inlet pipes 40 and the plurality of second air inlet pipes 60 can also be arranged at non-even intervals around the axis of the furnace tube 10. It can also be that each first air inlet pipe 40 is connected to an adjacent second air inlet pipe 60.

[0086] In some embodiments, a plurality of first air inlet pipes 40 are provided; each first air inlet pipe 40 has another first air inlet pipe 40 symmetrically arranged relative to the axis of the furnace tube 10. In the above structure of the embodiment of the present application, every two first air inlet pipes 40 are symmetrically arranged relative to the axis of the furnace tube 10, so that the plurality of first air inlet pipes 40 can more evenly introduce the source-carrying gas into the furnace chamber 11.

[0087] In some embodiments, a plurality of second air inlet pipes 60 are provided, and each second air inlet pipe 60 has another second air inlet pipe 60 symmetrically arranged relative to the axis of the furnace tube 10. In the above structure of the embodiment of the present application, every two second air inlet pipes 60 are symmetrically arranged relative to the axis of the furnace tube 10, so that the plurality of second air inlet pipes 60 can more evenly introduce the source-carrying gas into the furnace chamber 11.

[0088] In some embodiments, reference Figure 6 As shown, the furnace chamber 11 is used to set a plurality of furnace boats 70, two adjacent furnace boats 70 are arranged at intervals, and a first air inlet pipe 40 is correspondingly arranged at the interval position between the two adjacent furnace boats 70. In the above structure of the embodiment of the present application, the source-carrying gas introduced into the furnace chamber 11 by the first air inlet pipe 40 can flow more evenly to the two furnace boats 70 adjacent to the first air inlet pipe 40, so that the silicon wafers on the furnace boats 70 are in uniform contact with the source-carrying gas.

[0089] In some embodiments, the furnace chamber 11 is used to set a plurality of furnace boats 70, two adjacent furnace boats 70 are arranged at intervals, and a second air inlet pipe 60 is correspondingly arranged at the interval position between the two adjacent furnace boats 70. In the above structure of the embodiment of the present application, the source-carrying gas introduced into the furnace chamber 11 by the second air inlet pipe 60 can flow more evenly to the two furnace boats 70 adjacent to the second air inlet pipe 60, so that the silicon wafers on the furnace boats 70 are in uniform contact with the source-carrying gas.

[0090] In some embodiments, each furnace boat 70 has a variety of positional relationships with a first air inlet pipe 40 and a second air inlet pipe 60, which are set according to usage requirements. For example, a corresponding first air inlet pipe 40 is set; and / or, a corresponding second air inlet pipe 60 is set for each furnace boat 70; and / or, a corresponding first air inlet pipe 40 and a second air inlet pipe 60 are set for each furnace boat 70.

[0091] In some embodiments, the tubular structure includes a flange 25 , which is disposed around the axis of the furnace tube 10 , and the flange 25 connects the furnace door plate 24 and the furnace tube 10 ; an exhaust hole 251 is disposed on the flange 25 .

[0092] In the embodiment of the present application, the heating furnace door and the furnace tube 10 are connected by the flange 25, which has the advantages of simple and reliable connection. The flange 25 is an annular structural member, which is convenient for setting the exhaust hole 251, making the setting of the exhaust hole 251 in the tubular structure relatively simple.

[0093] In some embodiments, the inner tube 14 includes an inner tube body and a flow equalizer plate 50. The inner tube body is a cylindrical structure. One end of the inner tube body is connected to the outer tube 13, and the other end of the inner tube body is connected to the flow equalizer plate 50. The inner tube body and the flow equalizer plate 50 are connected to form a furnace chamber 11, and a flow equalizer hole 51 is set on the flow equalizer plate 50.

[0094] In the embodiment of the present application, the inner tube body is a cylindrical structure that penetrates from top to bottom, the end of the inner tube body close to the heating furnace door is connected to the end of the outer tube 13 close to the heating furnace door, and the end of the inner tube body away from the heating furnace door is connected to the flow equalizer 50. The flow equalizer 50 is provided with a plurality of flow equalizer holes 51, and the flow equalizer 50 can make the gas in the furnace cavity 11 flow out more evenly, avoid disturbance of the gas in the furnace cavity 11, and ensure the uniformity of the airflow in the furnace cavity 11.

[0095] In some embodiments, the cross-sectional area of ​​the flow equalizing hole 51 decreases sequentially from the middle of the flow equalizing plate 50 to the edge of the flow equalizing plate 50 , perpendicular to the first direction Z.

[0096] In the above-mentioned structure of the embodiment of the present application, from the middle of the flow uniformity plate 50 to the edge of the flow uniformity plate 50, perpendicular to the first direction Z, the cross-sectional area of ​​the flow uniformity hole 51 decreases successively. The flow uniformity hole 51 can meet the exhaust demand in the furnace cavity 11, so that the gas in the furnace cavity 11 can flow out more evenly, avoid disturbing the gas in the furnace cavity 11, and ensure the uniformity of the airflow in the furnace cavity 11.

[0097] In some embodiments, the plurality of flow-uniform holes 51 are arranged into a plurality of annular rings, and the plurality of annular rings are arranged around the axis of the tubular structure; from the middle of the flow-uniform plate 50 to the edge of the flow-uniform plate 50, the plurality of annular rings are arranged at intervals and the radius increases successively.

[0098] The annular ring may be a circular ring, or a square, a pentagon, etc., and the specific shape of the annular ring is not limited.

[0099] It is understandable that the plurality of uniform flow holes 51 may be irregularly arranged according to the exhaust requirements in the furnace chamber 11 so as to meet the use requirements.

[0100] In the tubular structure of the embodiment of the present application, the heating furnace door is suitable for heating the furnace tube 10 to increase the temperature in the furnace tube 10 and the range of the constant temperature zone in the furnace tube 10, improve the uniformity of the temperature field in the furnace tube 10, and thus improve the quality of the workpiece to be processed; moreover, the furnace tube 10 can be set with a larger diameter to place more workpieces to be processed, effectively improving the production capacity of the tubular structure. When the heating furnace door increases the range of the constant temperature zone in the furnace tube 10, the furnace tube 10 has more areas suitable for processing the workpieces to be processed, so more workpieces to be processed can be further placed in the furnace tube 10, further improving the production capacity of the tubular structure.

[0101] The tubular structure of the embodiment of the present application is a vertical furnace tube structure, which can be made into a large diameter structure. The conventional vertical furnace tube structure can accommodate one row of furnace boats 70. The vertical furnace tube structure of the embodiment of the present application can be provided with multiple rows of furnace boats 70 due to the heating furnace door, for example, four rows of furnace boats 70 are provided, thereby effectively increasing the production capacity of the furnace tube structure. Moreover, since the heating furnace door can improve the uniformity of the temperature field in the furnace tube 10, the vertical furnace tube structure has a higher yield rate and higher product quality while increasing the production capacity.

[0102] When the tubular structure of the embodiment of the present application is a vertical furnace tube structure, the production capacity is greatly improved compared with the horizontal furnace tube structure, for example, the production capacity is increased by 30%. In addition, the uniformity between multiple silicon wafers is within 3%, and the uniformity within a single silicon wafer is within 4%.

[0103] An embodiment of the present application further provides a thermal field device, which includes a thermal field cavity and a tubular structure as described above, wherein the tubular structure is arranged in the thermal field cavity, and the thermal field cavity provides an annular thermal field for the tubular structure.

[0104] In the thermal field equipment of the embodiment of the present application, the thermal field cavity and the heating furnace door of the tubular structure jointly heat the furnace cavity 11 of the furnace tube 10 to improve the uniformity of the temperature field in the furnace tube 10, thereby improving the quality of the workpiece to be processed, so that the thermal field equipment has the advantage of good production quality. The heating furnace door can increase the temperature in the furnace tube 10 and the range of the constant temperature zone in the furnace tube 10. The furnace tube 10 can be made into a large diameter structure to accommodate more workpieces to be processed, so that the thermal field equipment has the advantage of high production capacity. Moreover, after the heating furnace door increases the range of the constant temperature zone in the furnace tube 10, the furnace tube 10 has more areas suitable for processing the workpieces to be processed. Therefore, the furnace tube 10 can further accommodate more workpieces to be processed, further improving the production capacity of the thermal field equipment. The thermal field equipment also has the advantage of high production efficiency.

[0105] Thermal field equipment can have a variety of application fields. For example, thermal field equipment can be used as low-pressure deposition equipment, as diffusion equipment, etc.

[0106] In some embodiments, reference Figure 3 As shown, the thermal field equipment also includes a connecting plate 81 and a motor module 82. The heating furnace door is connected to the connecting plate 81, and the connecting plate 81 is connected to the motor module 82. The motor module 82 drives the heating furnace door to move up and down through the connecting plate 81 to realize the installation and disassembly of the heating furnace door and the furnace tube 10.

[0107] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0108] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. For the embodiments of the device, electronic device, computer-readable storage medium and computer program products containing instructions, since they are basically similar to the method embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiments.

[0109] The above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A tubular structure, characterized in that: include, A furnace tube (10) is provided with a furnace chamber (11); a heating furnace door, arranged at the pipe mouth of the furnace tube (10), the heating furnace door being connected to the furnace tube (10) to seal the furnace cavity (11), the heating furnace door being suitable for heating the furnace cavity (11); A second air inlet pipe (60), one end of the second air inlet pipe (60) being arranged in the furnace cavity (11), and a second air inlet hole (61) being arranged on a side wall of the second air inlet pipe (60); and the density of the second air inlet holes (61) on the second air inlet pipe (60) gradually decreases from the top of the furnace tube (10) to the rear of the furnace tube (10).

2. The tubular structure according to claim 1, characterized in that: The heating furnace door comprises: A furnace door plate (24) connected to the furnace tube (10) to cover the furnace cavity (11); A heating component is arranged on a side of the furnace door plate (24) facing the furnace cavity (11), and the heating component is suitable for heating the furnace cavity (11).

3. The tubular structure according to claim 2, characterized in that: The heating assembly comprises a tray (21) and a heating element (22), wherein the tray (21) and the heating element (22) are arranged in sequence along a first direction (Z); the tray (21) faces the furnace cavity (11) relative to the heating element (22); the tray (21) is used to support a boat (70) in the furnace, and the heating element (22) is used to heat the furnace cavity (11).

4. The tubular structure according to claim 3, characterized in that: The heating furnace door further comprises a support column (28), one end of the support column (28) being connected to the tray (21), and the other end of the support column (28) being connected to the furnace door panel (24).

5. The tubular structure according to claim 2, characterized in that: The heating furnace door further comprises a heat insulation component, which is arranged between the heating component and the furnace door plate (24), and is used to prevent heat in the furnace cavity (11) from being transferred out.

6. The tubular structure according to claim 1, characterized in that: The tubular structure further comprises a cooling component, which is disposed around the outer circumference of the heating furnace door, or the cooling component is disposed around one end of the furnace tube (10) close to the heating furnace door.

7. The tubular structure according to claim 6, characterized in that: The cooling assembly comprises a flange (25), the flange (25) being arranged around the axis of the furnace tube (10), the flange (25) connecting the heating furnace door and the furnace tube (10); a cooling channel is arranged in the flange (25), the cooling channel being used for passing a cooling medium.

8. The tubular structure according to any one of claims 1 to 7, characterized in that: The furnace tube (10) comprises an outer tube (13) and an inner tube (14), an interlayer cavity (15) is formed between the outer tube (13) and the inner tube (14), and the furnace cavity (11) is arranged on the inner tube (14).

9. The tubular structure according to claim 8, characterized in that: A uniform flow hole (51) is provided at the end of the inner tube (14) facing away from the heating furnace door, and the uniform flow hole (51) communicates with the interlayer cavity (15) and the furnace cavity (11); The heating furnace door is also provided with an exhaust hole (251), one end of the exhaust hole (251) is in communication with the interlayer cavity (15), and the other end of the exhaust hole (251) is in communication with the outside of the tubular structure; The source-carrying gas in the furnace chamber (11) is discharged sequentially through the uniform flow hole (51), the interlayer chamber (15), and the exhaust hole (251).

10. The tubular structure according to claim 9, characterized in that: The tubular structure comprises a flange (25), the flange (25) being arranged around the axis of the furnace tube (10), the flange (25) connecting the heating furnace door and the furnace tube (10); the exhaust hole (251) is arranged on the flange (25).

11. The tubular structure according to claim 9, characterized in that: The inner tube (14) comprises an inner tube body and a flow equalizer plate (50); the inner tube body is in a cylindrical structure; one end of the inner tube body is connected to the outer tube (13); the other end of the inner tube body is connected to the flow equalizer plate (50); the inner tube body and the flow equalizer plate (50) are connected to form the furnace chamber (11); and the flow equalizer hole (51) is provided on the flow equalizer plate (50).

12. The tubular structure according to claim 11, characterized in that: From the middle of the flow equalizing plate (50) to the edge of the flow equalizing plate (50), perpendicular to the first direction (Z), the cross-sectional area of ​​the flow equalizing hole (51) decreases sequentially.

13. A thermal field device, characterized in that: It comprises a thermal field cavity and a tubular structure as claimed in any one of claims 1 to 12, wherein the tubular structure is arranged in the thermal field cavity.

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