Automatic source adding control system

Abstract

The embodiment of the utility model provides an automatic source adding control system, and relates to the technical field of semiconductor manufacturing. According to the structure, when the main control unit detects that the liquid level measured by the measuring unit located in the second source bottle is too low, a source adding instruction can be generated to control the gas inlet pipeline to convey nitrogen to the first source bottle, the gas outlet pipeline is opened, and the source liquid in the first source bottle is pressed into the second source bottle under the pressure action of the nitrogen; and when the liquid level in the second source bottle reaches a preset threshold value, the main control unit can generate a source adding stopping instruction according to a measurement result, and the gas inlet pipeline and the gas outlet pipeline are closed, so that source adding is completed. According to the structure, the main control unit generates the source adding instruction or the source adding stopping instruction according to the real-time measurement result of the measurement unit, so that automatic source adding of the second source bottle is achieved, source liquid in the second source bottle is controlled within a certain liquid level range, errors caused by manual source adding can be reduced, the reaction quality of products is guaranteed, and the production efficiency is improved. And labor can be reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an automatic source adding control system. Background Art

[0002] In the semiconductor component manufacturing industry, the TEOS process is a very important product process. TEOS source liquid is generally stored in a source bottle close to the production equipment. If the amount of source liquid is too much or too little, it will affect the quality of the chip, so the source liquid needs to be replenished in time to keep it within a certain amount. If each replenishment is done manually, it will require a lot of manpower, increase labor costs, and manual addition of source is prone to excessive addition of source. A verification procedure is required before formal chip production can be carried out, which reduces productivity and increases production costs. Utility Model Content

[0003] In order to at least overcome the above-mentioned deficiencies in the prior art, the purpose of the present application is to provide an automatic source adding control system.

[0004] In a first aspect, an embodiment of the present application provides an automatic source adding control system, the automatic source adding control system comprising a main control unit, a first source bottle, a second source bottle, and a measuring unit connected to the main control unit;

[0005] The first source bottle comprises an inlet pipe and an outlet pipe connected to the main control unit, the inlet pipe is used to deliver nitrogen to the first source bottle, and the outlet pipe is connected to the second source bottle, and is used to pressurize the source liquid in the first source bottle into the second source bottle under the control of the main control unit and the pressure of the nitrogen;

[0006] The second source bottle is used to store the source liquid required for the reaction, and the source liquid can be transmitted to the reaction furnace body through the gas pipeline;

[0007] The measuring unit is arranged inside the second source bottle, and is used to measure the liquid level and temperature in the second source bottle, and send the measurement result to the main control unit, and the main control unit generates corresponding control instructions.

[0008] In a possible implementation, the automatic power supply control system further includes a heating unit connected to the main control unit;

[0009] The heating unit is disposed outside the second source bottle and is used to heat the second source bottle so that the source liquid inside the second source bottle is in a saturated vapor pressure state.

[0010] In a possible implementation, the measuring unit further includes a first sub-measuring unit and a second sub-measuring unit;

[0011] The first sub-measuring unit is perpendicular to the bottom surface of the second source bottle and is used to detect the real-time liquid level of the source bottle and send the real-time liquid level to the main control unit;

[0012] The second sub-measuring unit is used to measure the real-time temperature of the source bottle and send the real-time temperature to the main control unit, and the main control unit generates an alarm instruction according to the real-time temperature and a preset temperature threshold.

[0013] In a possible implementation manner, the first sub-measurement unit includes a liquid level meter, and the second sub-measurement unit includes a thermometer.

[0014] In a possible implementation, the gas outlet pipeline includes a solenoid valve connected to the main control unit;

[0015] The main control unit is further used to generate a response instruction according to the relationship between the real-time liquid level and the preset liquid level, and when the real-time liquid level is lower than the first preset liquid level, generate a source addition instruction, and when the real-time liquid level is higher than the second preset liquid level, generate a source stop addition instruction, wherein the second preset liquid level is greater than the first preset liquid level;

[0016] The solenoid valve is used to control the on-off of the gas outlet pipeline according to the source adding instruction and the source stopping instruction.

[0017] In a possible implementation, the automatic source addition control system further includes a monitoring unit;

[0018] The monitoring unit is arranged on the gas outlet pipeline and the gas supply pipeline, and is used to monitor the gas outlet conditions of the first source bottle and the second source bottle, and send the monitoring results to the main control unit, and the main control unit generates an alarm instruction according to the monitoring results.

[0019] In a possible implementation, the monitoring unit includes a photoelectric sensor disposed at an outlet of the first source bottle, and the photoelectric sensor is used to detect whether the first source bottle correctly outputs the source liquid.

[0020] In a possible implementation, the monitoring unit further includes a flow sensor disposed in the middle of the gas pipeline, and the flow sensor is used to measure the flow rate of the source liquid delivered by the second source bottle to the reaction furnace body.

[0021] In a possible implementation, the automatic power supply control system further includes an alarm unit connected to the main control unit, which is configured to receive the alarm instruction and issue an alarm prompt according to the alarm instruction.

[0022] In a possible implementation, the automatic power supply control system further includes a power supply unit;

[0023] The power supply unit is connected to the main control unit, the measuring unit and the alarm unit respectively, and is used to provide a direct current power supply to each unit.

[0024] Based on any of the above aspects, the automatic source addition control system provided by the embodiment of the present application can generate a source addition instruction to control the air inlet pipe to transport nitrogen to the first source bottle, and open the air outlet pipe when the main control unit detects that the liquid level measured by the measuring unit located in the second source bottle is too low, and the source liquid in the first source bottle is forced into the second source bottle under the pressure of the nitrogen. When the liquid level in the second source bottle reaches a preset threshold, the main control unit can generate a stop source addition instruction according to the measurement result, close the air inlet pipe and the air outlet pipe, and thus complete the source addition. In the above structure, the main control unit generates a source addition instruction or a stop source addition instruction through the real-time measurement result of the measuring unit, thereby realizing automatic source addition to the second source bottle, so as to control the source liquid in the second source bottle within a certain liquid level range, which can not only reduce the error caused by manual source addition and ensure the reaction quality of the product, but also reduce labor. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A functional block diagram of the automatic source control system provided in the embodiment of the present application Figure 1 ;

[0027] Figure 2 A functional block diagram of the automatic source control system provided in the embodiment of the present application Figure 2 ;

[0028] Figure 3 A functional block diagram of the automatic source control system provided in the embodiment of the present application Figure 3 ;

[0029] Figure 4 A functional block diagram of the automatic source control system provided in the embodiment of the present application Figure 4 . DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0032] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0033] In the description of this application, it should be noted that the terms "upper", "lower", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of the application is usually placed when in use, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0034] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "disposed", "connected", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0035] It should be noted that, in the absence of conflict, different features in the embodiments of the present application may be combined with each other.

[0036] Please refer to Figure 1 An embodiment of the present application provides an automatic source adding control system 100 , the system includes a first source bottle 120 , a second source bottle 130 , a main control unit 110 , and a measuring unit 140 connected to the main control unit 110 .

[0037] The first source bottle 120 includes an air inlet pipe T1 and an air outlet pipe T2 connected to the main control unit 110, the air inlet pipe T1 is used to deliver nitrogen (N2) to the first source bottle 120, and the air outlet pipe T2 is connected to the second source bottle 130, and is used to press the source liquid in the first source bottle 120 into the second source bottle 130 under the control of the main control unit 110 and the pressure of the nitrogen. It should be noted that the air inlet pipe T1 can be kept open all the time, and nitrogen is continuously input into the first source bottle 120 until the air pressure of the first source bottle 120 reaches a saturated state, so that the air pressure in the bottle is always at a positive pressure, wherein the first source bottle 120 can be made of steel.

[0038] The second source bottle 130 is used to store the source liquid required for the reaction, and the source liquid can be transmitted to the reaction furnace body 150 through the gas pipeline T3.

[0039] The measuring unit 140 is disposed inside the second source bottle 130 , and is used to measure the liquid level and temperature inside the second source bottle 130 , and send the measurement results to the main control unit 110 , and the main control unit 110 generates corresponding control instructions.

[0040] In the above structure, when the main control unit 110 detects that the measured liquid level is too low, it can generate a source adding instruction to control the air inlet pipe T1 to transport nitrogen to the first source bottle 120, and open the air outlet pipe T2, and the source liquid in the first source bottle 120 is pressed into the second source bottle 130 under the pressure of the nitrogen. When the liquid level in the second source bottle 130 reaches a preset threshold, the main control unit 110 can generate a stop source adding instruction according to the measurement result, close the air inlet pipe T1 and the air outlet pipe T2, and thus complete the source adding. In the above structure, the main control unit 110 generates a source adding instruction or a stop source adding instruction through the real-time measurement result of the measuring unit 140, thereby realizing the automatic source adding to the second source bottle 130, so as to control the source liquid in the second source bottle 130 within a certain liquid level range, which can not only reduce the error caused by manual source adding and ensure the reaction quality of the product, but also reduce labor.

[0041] As a possible implementation method of the present application, please refer to Figure 2 The automatic source adding control system 100 may also include a heating unit 160 connected to the main control unit 110. The heating unit 160 is arranged on the outside of the second source bottle 130 and is used to heat the second source bottle 130 so that the source liquid inside the second source bottle 130 is in a saturated vapor pressure state, thereby ensuring that the second source bottle 130 can stably output source liquid to the reaction furnace body 150 during the chip processing process.

[0042] For further information, please refer to Figure 3The measuring unit 140 may include a first sub-measuring unit 141 and a second sub-measuring unit 142. The first sub-measuring unit 141 is perpendicular to the bottom surface of the second source bottle 130, and is used to measure the real-time liquid level inside the second source bottle 130, and send the real-time liquid level to the main control unit 110. The main control unit 110 can generate a corresponding electrical signal according to the real-time liquid level to control the on-off of the air inlet pipe T1 and the air outlet pipe T2, so as to realize the automatic source addition to the second source bottle 130, wherein the first sub-measuring unit 141 may be a liquid level meter. By way of example, in order to ensure the accuracy of the detection result, the first sub-measuring unit 141 may be a digital liquid level meter.

[0043] In addition, please refer to Figure 4 , the gas outlet pipeline T2 may include a solenoid valve Y connected to the main control unit 110, and the solenoid valve Y controls the on-off of the gas outlet pipeline T2 according to the electrical signal of the main control unit 110. Specifically, the first preset liquid level and the second preset liquid level may be configured in advance in the main control unit 110, and when the main control unit 110 detects that the real-time liquid level is lower than the first preset liquid level, a source adding instruction is generated, and the solenoid valve Y is opened based on the source adding instruction, and the source liquid in the first source bottle 120 is passed into the second source bottle 130 through the gas outlet pipeline T2, and when the main control unit 110 detects that the real-time liquid level is greater than or equal to the first preset liquid level, a source stopping instruction is generated, and the solenoid valve Y is controlled to close the gas outlet pipeline T2 based on the source stopping instruction.

[0044] It is not difficult to understand that the automatic source adding control system 100 may include an automatic mode and a manual mode. In the automatic mode, the solenoid valve Y can be controlled according to the electrical signal of the main control unit 110, and the on and off of the outlet pipe T2 can be intelligently controlled to realize automatic source adding. When the solenoid valve Y is locked and cannot be operated, the manual mode can be selected to manually unlock the solenoid valve Y.

[0045] Furthermore, the second sub-measuring unit 142 may be disposed inside the second source bottle 130, and since a heating unit 160 is disposed outside to continuously heat the second source bottle 130, in order to reduce the measurement error caused by local high temperature, the second sub-measuring unit 142 does not contact the side wall of the second source bottle 130. The second sub-measuring unit 142 may be used to measure the real-time temperature inside the second source bottle 130, and send the real-time temperature to the main control unit 110, and the main control unit 110 may regulate the power of the heating unit 160 according to the real-time temperature. When the real-time temperature inside the second source bottle 130 is too high, the main control unit 110 may cut off the power supply of the heating unit 160 and stop heating the second source bottle 130. Exemplarily, the second sub-measuring unit 142 may be a thermometer.

[0046] As a possible implementation of an embodiment of the present application, the automatic source control system 100 may also include a monitoring unit, which may be arranged on the gas outlet pipeline T2 and the gas supply pipeline T3, and may be used to monitor the gas outlet conditions of the first source bottle 120 and the second source bottle 130, and send the monitoring results to the main control unit 110, and the main control unit 110 generates an alarm instruction according to the monitoring results. Specifically, the monitoring unit includes a photoelectric sensor, which may be arranged between the outlet of the first source bottle 120 and the solenoid valve Y, and is used to detect whether the first source bottle 120 correctly outputs the source liquid. In addition, the monitoring unit also includes a flow sensor arranged in the middle of the gas supply pipeline T3, and the flow sensor is used to measure the flow rate of the source liquid transported from the second source bottle 130 to the reactor body 150.

[0047] Furthermore, the automatic source control system 100 may also include an alarm unit connected to the main control unit 110, which is used to receive an alarm instruction and give an alarm prompt according to the alarm instruction. Specifically, when the second sub-measurement unit 142 detects that the real-time temperature inside the second source bottle 130 is higher than the preset temperature, the main control unit 110 can generate an alarm instruction according to the detection result of the second sub-measurement unit 142, and the alarm unit gives an alarm prompt according to the alarm instruction; or, when the photoelectric sensor detects that there is no liquid output on the outlet pipe T2 of the first source bottle 120, it means that the first source bottle 120 cannot normally transport the source liquid to the second source bottle 130, or when the source liquid flow detected by the flow sensor does not meet the transportation requirements, the main control unit 110 will generate an alarm instruction according to the monitoring result, and the alarm unit will give an alarm prompt to remind the technician to detect the presence of active liquid leakage or abnormal transportation. Exemplarily, the alarm unit may include a buzzer, a signal light, etc., and the alarm unit may give different alarm prompts according to the alarm instructions in different situations to distinguish different abnormal situations.

[0048] In addition, the automatic power control system 100 also includes a power supply unit, which is respectively connected to the main control unit 110, the measuring unit 140 and the alarm unit, and is used to provide DC power for each unit, wherein the power supply unit may include a 24V switching power converter to provide 24V DC power for each unit.

[0049] Furthermore, a 1s delay device is included between the main control unit and each unit, and the delay device can act as a filter to avoid frequent starts and stops caused by liquid level fluctuations.

[0050] In summary, the embodiment of the present application provides an automatic source adding control system. In the above structure, when the main control unit detects that the measured liquid level is too low, it can generate a source adding instruction to control the air inlet pipe to transport nitrogen to the first source bottle, and open the air outlet pipe. Under the pressure of the nitrogen, the source liquid in the first source bottle is pressed into the second source bottle. When the liquid level in the second source bottle reaches a preset threshold, the main control unit can generate a stop source adding instruction according to the measurement result, close the air inlet pipe and the air outlet pipe, and thus complete the source adding. In the above structure, the main control unit generates a source adding instruction or a stop source adding instruction through the real-time measurement result of the measuring unit, thereby realizing the automatic source adding to the second source bottle, so as to control the source liquid in the second source bottle within a certain liquid level range, which can not only reduce the error caused by manual source adding and ensure the reaction quality of the product, but also reduce labor.

[0051] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An automatic source control system, characterized in that: The automatic source adding control system comprises a main control unit, a first source bottle, a second source bottle and a measuring unit connected to the main control unit; The first source bottle comprises an inlet pipe and an outlet pipe connected to the main control unit, the inlet pipe is used to deliver nitrogen to the first source bottle, and the outlet pipe is connected to the second source bottle, and is used to pressurize the source liquid in the first source bottle into the second source bottle under the control of the main control unit and the pressure of the nitrogen; The second source bottle is used to store the source liquid required for the reaction, and the source liquid can be transmitted to the reaction furnace body through the gas pipeline; The measuring unit is arranged inside the second source bottle, and is used to measure the liquid level and temperature in the second source bottle, and send the measurement result to the main control unit, and the main control unit generates corresponding control instructions.

2. The automatic source control system according to claim 1, characterized in that: The automatic power supply control system further comprises a heating unit connected to the main control unit; The heating unit is disposed outside the second source bottle and is used to heat the second source bottle so that the source liquid inside the second source bottle is in a saturated vapor pressure state.

3. The automatic power supply control system according to claim 1, characterized in that: The measuring unit further comprises a first sub-measuring unit and a second sub-measuring unit; The first sub-measuring unit is perpendicular to the bottom surface of the second source bottle and is used to detect the real-time liquid level of the source bottle and send the real-time liquid level to the main control unit; The second sub-measuring unit is used to measure the real-time temperature of the source bottle and send the real-time temperature to the main control unit, and the main control unit generates an alarm instruction according to the real-time temperature and a preset temperature threshold.

4. The automatic source control system according to claim 3, characterized in that: The first sub-measurement unit includes a liquid level meter, and the second sub-measurement unit includes a thermometer.

5. The automatic power supply control system according to claim 3, characterized in that: The gas outlet pipeline includes a solenoid valve connected to the main control unit; The main control unit is further used to generate a response instruction according to the relationship between the real-time liquid level and the preset liquid level, and when the real-time liquid level is lower than the first preset liquid level, generate a source addition instruction, and when the real-time liquid level is higher than the second preset liquid level, generate a source stop addition instruction, wherein the second preset liquid level is greater than the first preset liquid level; The solenoid valve is used to control the on-off of the gas outlet pipeline according to the source adding instruction and the source stopping instruction.

6. The automatic power supply control system according to claim 1, characterized in that: The automatic source addition control system also includes a monitoring unit; The monitoring unit is arranged on the gas outlet pipeline and the gas supply pipeline, and is used to monitor the gas outlet conditions of the first source bottle and the second source bottle, and send the monitoring results to the main control unit, and the main control unit generates an alarm instruction according to the monitoring results.

7. The automatic source adding control system according to claim 6, characterized in that: The monitoring unit includes a photoelectric sensor disposed at an outlet of the first source bottle, and the photoelectric sensor is used to detect whether the first source bottle outputs the source liquid correctly.

8. The automatic source adding control system according to claim 6, characterized in that: The monitoring unit also includes a flow sensor disposed in the middle of the gas pipeline, and the flow sensor is used to measure the flow rate of the source liquid transported by the second source bottle to the reaction furnace body.

9. The automatic power supply control system according to claim 3 or claim 6, characterized in that: The automatic power supply control system further comprises an alarm unit connected to the main control unit, which is used for receiving the alarm instruction and giving an alarm prompt according to the alarm instruction.

10. The automatic power supply control system according to claim 9, characterized in that: The automatic power supply control system also includes a power supply unit; The power supply unit is connected to the main control unit, the measuring unit and the alarm unit respectively, and is used to provide a direct current power supply to each unit.

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