Negative pressure detection gas transmission device, negative pressure detection device and waste gas treatment equipment

Abstract

The utility model relates to a negative pressure detection gas transmission device, a negative pressure detection device and waste gas treatment equipment. The negative pressure detection gas transmission device comprises a gas transmission pipe provided with a gas inlet, a detection port and a hot gas inlet, the detection port and the hot gas inlet are located in the side wall of the gas transmission pipe, and the hot gas inlet is close to the gas inlet relative to the detection port; the detection tube is communicated with the detection port; the gas heater comprises a hot gas pipe which is communicated with the hot gas inlet, and the gas heater is used for conveying hot gas into the gas conveying pipe. Hot gas is introduced into the gas conveying pipe through the gas heater, and a dust active area is formed in the gas conveying pipe, so that the possibility that dust is accumulated at the detection opening is reduced.

Description

Technical Field

[0001] The present application relates to the field of waste gas treatment, and in particular to a negative pressure detection gas transmission device, a negative pressure detection device and waste gas treatment equipment. Background Art

[0002] Waste gas needs to be treated during semiconductor production. A pressure detector is installed at the air inlet of the waste gas treatment equipment to monitor the blockage degree of the waste gas delivery pipeline. Since the waste gas generated by the etching process contains a large amount of dust, the detection port of the pressure detector will be blocked, while the waste gas delivery pipeline is not blocked, causing unexpected alarm downtime. Utility Model Content

[0003] Based on the above problems, the present application provides a negative pressure detection gas transmission device, a negative pressure detection device and an exhaust gas treatment device to reduce the possibility of blockage of the detection port and improve the efficiency of equipment use.

[0004] In a first aspect, an embodiment of the present application provides a negative pressure detection gas delivery device, comprising:

[0005] An air delivery pipe having a side wall and provided with an air inlet, a detection port and a hot air inlet, wherein the detection port and the hot air inlet are located on the side wall of the air delivery pipe, and the hot air inlet is closer to the air inlet than to the detection port;

[0006] A detection tube connected to the detection port;

[0007] The gas heater comprises a hot gas pipe, wherein the hot gas pipe is connected to the hot gas inlet, and the gas heater is used for conveying hot gas into the gas pipe.

[0008] According to some embodiments of the present application, the negative pressure detection gas delivery device further includes:

[0009] A first connector, disposed at the detection port, and the detection tube is connected to the first connector;

[0010] The second joint is arranged at the hot air inlet, and the hot air pipe is connected to the second joint.

[0011] According to some embodiments of the present application, the detection tube is threadedly connected to the first joint, and the hot air pipe is threadedly connected to the second joint.

[0012] According to some embodiments of the present application, the distance between the axis of the detection port and the axis of the hot air inlet is 50 to 200 mm.

[0013] According to some embodiments of the present application, the temperature of the gas delivered by the gas heater is 150°C to 200°C.

[0014] According to some embodiments of the present application, the negative pressure detection gas delivery device further includes a filter, which is connected to the detection tube.

[0015] According to some embodiments of the present application, the negative pressure detection gas delivery device further includes a filter and a temperature detector, wherein the temperature detector is used to detect the gas temperature at the hot gas inlet.

[0016] According to some embodiments of the present application, the side walls of the detection tube and the hot air tube are both provided with hexagonal flanges.

[0017] In a second aspect, an embodiment of the present application provides a negative pressure detection device, comprising:

[0018] The negative pressure detection gas delivery device as described above;

[0019] A pressure detector is connected to the detection tube.

[0020] In a third aspect, an embodiment of the present application provides an exhaust gas treatment device, comprising the negative pressure detection device as described above.

[0021] The present application introduces hot gas into the gas pipe through a gas heater to form a dust active zone in the gas pipe. The dust active zone covers the detection port to reduce the possibility of dust accumulation at the detection port and improve the efficiency of equipment use. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without exceeding the scope of protection required by the present application.

[0023] Figure 1 A schematic diagram of a negative pressure detection and gas delivery device according to an embodiment of the present application;

[0024] Figure 2 This is a cross-sectional view of a negative pressure detection and gas delivery device according to an embodiment of the present application;

[0025] Figure 3 This is a cross-sectional view of the gas delivery pipe according to an embodiment of the present application;

[0026] Figure 4 This is a schematic diagram of the first joint and the second joint of an embodiment of the present application;

[0027] Figure 5 A schematic diagram of a filter according to an embodiment of the present application;

[0028] Figure 6 Schematic diagram of a negative pressure detection device according to an embodiment of the present application. DETAILED DESCRIPTION

[0029] The following is a clear and complete description of the technical solution of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0030] like Figure 1 and Figure 2 As shown, the embodiment of the present application provides a negative pressure detection gas delivery device 100, which includes a gas delivery pipe 1, a detection pipe 2 and a gas heater 3. The gas heater 3 can pass hot air into the gas delivery pipe 1 to reduce the possibility of dust blocking the detection port.

[0031] like Figure 3 As shown, the two ends of the gas pipe 1 are respectively an air inlet 11 and an air outlet 12, and the gas pipe 1 has a side wall, and the side wall of the gas pipe 1 is provided with a detection port 13 and a hot gas inlet 14, and the detection port 13 and the hot gas inlet 14 are both connected to the inner cavity of the gas pipe 1. The hot gas inlet 14 is closer to the air inlet 11 relative to the detection port 13. The exhaust gas enters the gas pipe 1 from the air inlet 11 and is discharged from the gas pipe 1 from the air outlet 12.

[0032] One end of the detection tube 2 is connected to the detection port 13 of the gas pipeline 1, and the other end of the detection tube 2 is connected to the pressure detector. The pressure detector is connected to the inner cavity of the gas pipeline 1 through the detection tube 2 to detect the pressure of the gas pipeline 1, which is used to determine whether the gas pipeline 1 is blocked. The temperature of the exhaust gas transported in the gas pipeline 1 is relatively high, while the detection tube 2 is at room temperature, so the temperature at the detection port 13 is relatively low, and the molecular thermal motion of dust at the detection port 13 is relatively slow, so it is easy to accumulate at the detection port 13.

[0033] The gas heater 3 includes a hot gas pipe 31, which is connected to the hot gas inlet 14. The gas heater 3 is used to transport hot gas into the gas pipeline 1 to heat the gas in the gas pipeline 1, forming a dust active area in the gas pipeline 1, and the dust active area covers the detection port 13. Figure 2 The area between the two dotted lines in FIG. 3 represents a dust active area. Optionally, the hot gas delivered by the gas heater 3 is nitrogen.

[0034] The hot gas input by the gas heater 3 forms a dust active zone in the gas pipeline 1. The dust active zone covers the detection port 13, increases the molecular thermal motion of the dust at the detection port 13, promotes Brownian motion, can reduce the accumulation of dust at the detection port 13, reduces the possibility of blockage of the detection port 13, reduces unexpected alarms, and improves the efficiency of equipment use.

[0035] like Figure 4As shown, in some embodiments, the negative pressure detection gas delivery device 100 further includes: a first joint 4 and a second joint 5. The first joint 4 is provided at the detection port 13, and the end of the detection pipe 2 is connected to the first joint 4. The second joint 5 is provided at the hot air inlet 14, and the hot air pipe 31 is connected to the second joint 5. The first joint 4 and the second joint 5 are provided on the gas delivery pipe 1 to facilitate the connection of the detection pipe 2 and the hot air pipe 31 to the gas delivery pipe 1.

[0036] In some embodiments, the detection tube 2 is threadedly connected to the first joint 4 so that the detection tube 2 is detachably connected to the first joint 4, so as to disassemble and clean the detection tube 2. The hot air pipe 31 is threadedly connected to the second joint 5 so that the hot air pipe 31 is detachably connected to the second joint 5.

[0037] like Figure 3 As shown, in some embodiments, the distance between the axis of the detection port 13 and the axis of the hot air inlet 14 is 50-200 mm. Too large or too small a distance between the axis of the detection port 13 and the axis of the hot air inlet 14 is not conducive to the dust active area covering the detection port 13.

[0038] In some embodiments, the temperature of the gas delivered by the gas heater 3 is 150° C. to 200° C., and the temperature of the gas delivered by the gas heater 3 is similar to that of the exhaust gas in the gas delivery pipe 1 .

[0039] like Figure 5 As shown, in some embodiments, the negative pressure detection gas delivery device 100 further includes a filter 6. One end of the filter 6 is connected to the detection tube 2, and the other end of the filter 6 is connected to the pressure detector. The filter 6 is arranged at the front end of the pressure detector to prevent dust from entering the pressure detector and improve the safety of the pressure detector.

[0040] In some embodiments, the negative pressure detection gas delivery device 100 further includes a temperature detector (not shown in the figure), which is used to detect the gas temperature at the hot gas inlet 14. According to the detection information of the temperature detector, the gas heater 3 is controlled so that the gas temperature input into the gas delivery pipe 1 by the gas heater 3 is within a preset range.

[0041] like Figure 1 As shown, in some embodiments, the side walls of the detection tube 2 and the hot air tube 31 are both provided with hexagonal flanges to facilitate the installation and removal of the detection tube 2 and the hot air tube 31.

[0042] like Figure 6 As shown, an embodiment of the present application provides a negative pressure detection device 200, which includes the negative pressure detection gas delivery device 100 and a pressure detector 210 as described above, and the pressure detector 210 is connected to the detection tube 2. The pressure detector 210 can detect the pressure in the gas delivery tube 1 to determine whether the gas delivery tube 1 is blocked.

[0043] The embodiment of the present application provides an exhaust gas treatment device, and the exhaust gas treatment device includes the negative pressure detection device as described above. For example, the gas delivery pipe 1 is used to deliver exhaust gas to the main body of the exhaust gas treatment device.

[0044] The embodiments of the present application are described in detail above. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and core ideas of the present application. Therefore, changes or deformations made by those skilled in the art based on the ideas of the present application, the specific implementation methods and the scope of application of the present application, all belong to the scope of protection of the present application. In summary, the contents of this specification should not be construed as limiting the present application.

Claims

1. A negative pressure detection gas delivery device, characterized in that: include: A gas delivery pipe having a side wall and provided with an air inlet, a detection port and a hot gas inlet, wherein the detection port and the hot gas inlet are located on the side wall, and the hot gas inlet is closer to the air inlet than the detection port; A detection tube connected to the detection port; The gas heater comprises a hot gas pipe, wherein the hot gas pipe is connected to the hot gas inlet, and the gas heater is used for conveying hot gas into the gas pipe.

2. The negative pressure detection gas delivery device according to claim 1, characterized in that: Also includes: A first connector, disposed at the detection port, and the detection tube is connected to the first connector; The second joint is arranged at the hot air inlet, and the hot air pipe is connected to the second joint.

3. The negative pressure detection gas delivery device according to claim 2, characterized in that: The detection tube is threadedly connected to the first joint, and the hot air pipe is threadedly connected to the second joint.

4. The negative pressure detection gas delivery device according to claim 1, characterized in that: The distance between the axis of the detection port and the axis of the hot air inlet is 50 to 200 mm.

5. The negative pressure detection gas delivery device according to claim 1, characterized in that: The temperature of the gas delivered by the gas heater is 150°C to 200°C.

6. The negative pressure detection gas delivery device according to claim 1, characterized in that: It also includes a filter, and the filter is connected to the detection tube.

7. The negative pressure detection gas delivery device according to claim 1, characterized in that: A temperature detector is also included, and the temperature detector is used to detect the gas temperature at the hot gas inlet.

8. The negative pressure detection gas delivery device according to claim 1, characterized in that: The side walls of the detection tube and the hot air tube are both provided with hexagonal flanges.

9. A negative pressure detection device, characterized in that: include: The negative pressure detection gas delivery device according to any one of claims 1 to 8; A pressure detector is connected to the detection tube.

10. A waste gas treatment device, characterized in that: Including the negative pressure detection device as described in claim 9.

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