Work management system and method for manufacturing semiconductor

Abstract

A dispatch management method of semiconductor manufacturing comprises that: according to the basic information of equipment and goods in process, the expanded information of equipment and goods in process is calculated by a dispatch processing unit; the expanded information is stored in an information management unit; with the dispatch processing unit, the basic information and the expanded information of the equipment and the goods in process are read by the information management unit; with the dispatch processing unit, the dispatch standard and the dispatch benchmark corresponding to the basic information and the expanded information are read by a rule management unit; according to the basic information and the expanded information provided by the information management unit and the dispatch standard and the dispatch benchmark corresponding to the basic information and the expanded information provided by the rule management unit, the dispatch processing unit is used to have the dispatch operation on the equipment and the goods in process and provides a dispatch listing. The method of the invention is applied to flexibly achieve the dispatch control according to the random combination of the factors of the limits of goods delivery time, equipment load and processing time and the operating conditions of the goods in process and the equipment.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a dispatch management system and method for semiconductor manufacturing. Background technique [0002] For the current manufacturing execution system (MES) widely used in semiconductor factories, such as SIVIEW of International Business Machines (1BM), the dispatch management mechanism provided cannot guarantee the on-time delivery rate, that is, the dispatch of labor implemented by this dispatch management mechanism Management cannot reflect factors such as product delivery, equipment load, process time constraints, and the operating status of products and equipment. Due to the lack of an effective dispatch management mechanism in the manufacturing execution system, process engineers must use paper records and other manual methods to specify the process program number on the equipment machine when processing batches that need to consider the above factors, an...

AI Technical Summary

Problems solved by technology

[0005] Obviously, when this method is used for labor dispatch control, the on-time delivery rate can only be guaranteed by the process waiting time limit, and it cannot be based on any combination of factors such as product delivery, equipment load, process time limit, and product and equipment operating conditions. Flexible realization of dispatch control

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